Electrode for a semiconductor processing apparatus
Latest Tokyo Electron Yamanashi Limited Patents:
Description
FIG. 1 is a front elevational view of an electrode for a semiconductor processing apparatus showing my new design;
FIG. 2 is a right side elevational view thereof; a left side elevational view being a mirror image thereof;
FIG. 3 is a top plan view thereof; a bottom plan view being a mirror image thereof;
FIG. 4 is a rear elevational view thereof;
FIG. 5 is an enlarged cross-sectional view taken along line 5--5 of FIG. 1; and,
FIG. 6 is an enlarged cross-sectional view taken along line 6--6 of FIG. 1.
Referenced Cited
Foreign Patent Documents
60-116126 | June 1985 | JPX |
60-169257 | November 1985 | JPX |
60-221578 | November 1985 | JPX |
61-171128 | August 1986 | JPX |
62-60875 | March 1987 | JPX |
62-252942 | November 1987 | JPX |
62-281427 | December 1987 | JPX |
325510 | April 1991 | JPX |
920077 | October 1992 | JPX |
Patent History
Patent number: D363464
Type: Grant
Filed: Feb 26, 1993
Date of Patent: Oct 24, 1995
Assignee: Tokyo Electron Yamanashi Limited (Nirasaki)
Inventor: Kazuo Fukasawa (Nirasaki)
Primary Examiner: Joel Sincavage
Law Firm: Oblon, Spivak, McClelland, Maier & Neustadt
Application Number: 0/5,246
Type: Grant
Filed: Feb 26, 1993
Date of Patent: Oct 24, 1995
Assignee: Tokyo Electron Yamanashi Limited (Nirasaki)
Inventor: Kazuo Fukasawa (Nirasaki)
Primary Examiner: Joel Sincavage
Law Firm: Oblon, Spivak, McClelland, Maier & Neustadt
Application Number: 0/5,246
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)