Wafer boat

- Tokyo Electron Limited
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Description

FIG. 1 is a side sectional view at line 1—1 in FIG. 7 of the wafer boat.

FIG. 2 is a cross sectional view at line 2—2 of FIGS. 8 and 9 of the wafer boat.

FIG. 3 is a side view of the wafer boat.

FIG. 4 is another side view of the wafer boat.

FIG. 5 is perspective view of the wafer boat.

FIG. 6 is a bottom view of the wafer boat.

FIG. 7 is a top view of the wafer boat.

FIG. 8 is another side view of the wafer boat; and,

FIG. 9 is still another side view of the wafer boat.

Claims

The ornamental design for a wafer boat, as shown and described.

Referenced Cited
U.S. Patent Documents
D361752 August 29, 1995 Yamaga
D404371 January 19, 1999 Shimazu
D409158 May 4, 1999 Shimazu
5903711 May 11, 1999 Okase
6056123 May 2, 2000 Niemirowski et al.
6065615 May 23, 2000 Uchiyama et al.
6110285 August 29, 2000 Kitazawa et al.
6444262 September 3, 2002 Kitamura et al.
D551634 September 25, 2007 Sugawara
20020092815 July 18, 2002 Kim et al.
20020113027 August 22, 2002 Minami et al.
20020130061 September 19, 2002 Hengst
Patent History
Patent number: D570308
Type: Grant
Filed: Nov 1, 2006
Date of Patent: Jun 3, 2008
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Izumi Sato (Tokyo)
Primary Examiner: Selina Sikder
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/268,191