Coater cup
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Description
The article is mounted on an upper end opening portion of a cup base portion surrounding a lower portion side of a spin chuck of a coater which holds a semiconductor wafer.
Claims
The ornamental design for a coater cup, as shown and described.
Referenced Cited
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Patent History
Patent number: D610176
Type: Grant
Filed: Feb 11, 2009
Date of Patent: Feb 16, 2010
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Shuichi Nagamine (Koshi), Naofumi Kishita (Koshi), Koji Takayanagi (Koshi), Yuichiro Miyata (Koshi), Yasushi Takiguchi (Koshi)
Primary Examiner: Sandra Snapp
Assistant Examiner: Patricia Palasik
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Application Number: 29/332,207
Type: Grant
Filed: Feb 11, 2009
Date of Patent: Feb 16, 2010
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Shuichi Nagamine (Koshi), Naofumi Kishita (Koshi), Koji Takayanagi (Koshi), Yuichiro Miyata (Koshi), Yasushi Takiguchi (Koshi)
Primary Examiner: Sandra Snapp
Assistant Examiner: Patricia Palasik
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
Application Number: 29/332,207
Classifications
Current U.S. Class:
Element Or Attachment (D15/138)