Substrate transfer device for semiconductor deposition apparatus

- ASM Genitech Korea, Ltd.
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Description

FIG. 1 is a perspective view of a substrate transfer device that may be positioned in a semiconductor deposition apparatus, showing our new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a left side elevation view thereof;

FIG. 5 is a right side elevation view thereof;

FIG. 6 is a top plan view thereof; and,

FIG. 7 is a bottom plan view thereof.

The ornamental design which is claimed is shown in solid lines in the drawings.

Claims

The ornamental design for a substrate transfer device for semiconductor deposition apparatus, as shown and described.

Referenced Cited
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Foreign Patent Documents
WO 03/041141 May 2003 WO
Patent History
Patent number: D614152
Type: Grant
Filed: Jan 16, 2009
Date of Patent: Apr 20, 2010
Assignee: ASM Genitech Korea, Ltd. (Chungcheongnamdo)
Inventors: Jeong Ho Lee (Seoul), Sang Jin Jeong (Daejeon-si), Young Seok Choi (Daejeon-si)
Primary Examiner: Selina Sikder
Attorney: Knobbe, Martens, Olson & Bear LLP
Application Number: 29/331,021