Substrate transfer device for semiconductor deposition apparatus
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Description
The ornamental design which is claimed is shown in solid lines in the drawings.
Claims
The ornamental design for a substrate transfer device for semiconductor deposition apparatus, as shown and described.
Referenced Cited
U.S. Patent Documents
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Patent History
Patent number: D614152
Type: Grant
Filed: Jan 16, 2009
Date of Patent: Apr 20, 2010
Assignee: ASM Genitech Korea, Ltd. (Chungcheongnamdo)
Inventors: Jeong Ho Lee (Seoul), Sang Jin Jeong (Daejeon-si), Young Seok Choi (Daejeon-si)
Primary Examiner: Selina Sikder
Attorney: Knobbe, Martens, Olson & Bear LLP
Application Number: 29/331,021
Type: Grant
Filed: Jan 16, 2009
Date of Patent: Apr 20, 2010
Assignee: ASM Genitech Korea, Ltd. (Chungcheongnamdo)
Inventors: Jeong Ho Lee (Seoul), Sang Jin Jeong (Daejeon-si), Young Seok Choi (Daejeon-si)
Primary Examiner: Selina Sikder
Attorney: Knobbe, Martens, Olson & Bear LLP
Application Number: 29/331,021
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)