Substrate support for a semiconductor deposition apparatus
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The ornamental design which is claimed is shown in solid lines in the drawings.
Claims
The ornamental design for a substrate support for a semiconductor deposition apparatus, as shown and described.
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Type: Grant
Filed: Jan 16, 2009
Date of Patent: Apr 27, 2010
Assignee: ASM Genitech Korea Ltd (Chungcheongnam-Do)
Inventors: Jeong Ho Lee (Seoul), Sang Jin Jeong (Daejeon-si), Dong Rak Jung (Cheonan-si)
Primary Examiner: Selina Sikder
Attorney: Knobbe, Martens, Olson & Bear LLP
Application Number: 29/331,023