Substrate transfer holder
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The broken lines shown represent unclaimed subject matter and form no part of the claimed design. The alternating long and short dashed lines in the drawings define the boundaries between the claimed and unclaimed features. None of the broken lines form any part of the claim.
The article is a substrate transfer holder for holding and transferring a circular substrate, for example, a semiconductor wafer or the like. Parts indicated by solid lines are the part of article for which a design patent is sought.
Claims
The ornamental design for a substrate transfer holder, as shown and described.
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Type: Grant
Filed: Jun 10, 2011
Date of Patent: Aug 21, 2012
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Norifumi Sato (Kumamoto)
Primary Examiner: Derrick Holland
Attorney: Posz Law Group, PLC
Application Number: 29/393,919