Substrate transfer holder

- Tokyo Electron Limited
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Description

FIG. 1 is a top perspective view of a substrate transfer holder showing my new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a rear elevation view thereof;

FIG. 4 is a left side view thereof, the right side being a mirror image;

FIG. 5 is a top plan view thereof;

FIG. 6 is a bottom plan view thereof;

FIG. 7 is an enlarged fragmental view taken along 7-7 of FIG. 5 thereof; and,

FIG. 8 is a cross-sectional view taken along line 8-8 of FIG. 7 thereof.

The broken lines shown represent unclaimed subject matter and form no part of the claimed design. The alternating long and short dashed lines in the drawings define the boundaries between the claimed and unclaimed features. None of the broken lines form any part of the claim.

The article is a substrate transfer holder for holding and transferring a circular substrate, for example, a semiconductor wafer or the like. Parts indicated by solid lines are the part of article for which a design patent is sought.

Claims

The ornamental design for a substrate transfer holder, as shown and described.

Referenced Cited
U.S. Patent Documents
6578891 June 17, 2003 Suzuki et al.
6874515 April 5, 2005 Ishihara et al.
D552138 October 2, 2007 Kondo et al.
D614593 April 27, 2010 Lee et al.
20070076345 April 5, 2007 Bang et al.
Foreign Patent Documents
D1286013 November 2006 JP
Patent History
Patent number: D665759
Type: Grant
Filed: Jun 10, 2011
Date of Patent: Aug 21, 2012
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Norifumi Sato (Kumamoto)
Primary Examiner: Derrick Holland
Attorney: Posz Law Group, PLC
Application Number: 29/393,919
Classifications
Current U.S. Class: Miscellaneous (D13/199)