Dielectric window for plasma processing device
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Description
The broken lines are shown for illustrative purposes only and form no part of the claimed design.
Claims
The ornamental design for a dielectric window for plasma processing device, as shown and described.
Referenced Cited
U.S. Patent Documents
Other references
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Patent History
Patent number: D672377
Type: Grant
Filed: Sep 10, 2010
Date of Patent: Dec 11, 2012
Assignee: Tokyo Electron Limited
Inventors: Wataru Yoshikawa (Amagasaki), Naoki Matsumoto (Amagasaki), Jun Yoshikawa (Amagasaki)
Primary Examiner: Patricia Palasik
Attorney: Cantor Colburn LLP
Application Number: 29/369,650
Type: Grant
Filed: Sep 10, 2010
Date of Patent: Dec 11, 2012
Assignee: Tokyo Electron Limited
Inventors: Wataru Yoshikawa (Amagasaki), Naoki Matsumoto (Amagasaki), Jun Yoshikawa (Amagasaki)
Primary Examiner: Patricia Palasik
Attorney: Cantor Colburn LLP
Application Number: 29/369,650
Classifications
Current U.S. Class:
Element Or Attachment (D15/138)