Liquid-free trap for trace level acidic and basic AMC and components thereof
Latest Entegris, Inc. Patents:
- Electrostatic discharge mitigation device
- Chemical vapor deposition processes using ruthenium precursor and reducing gas
- System and method for removing airborne molecular contaminants from gas streams
- Aqueous and semi-aqueous cleaners for the removal of post-etch residues with tungsten and cobalt compatibility
- Method for nucleation of conductive nitride films
In the drawings, the broken lines are for the purpose of illustrating environment only and form no part of the claimed design.
The liquid-free trap for trace level acidic and basic AMC and components thereof in the present invention relies on a solid material to trap acidic or basic AMC in a gas stream, for example, from a cleanroom or a semiconductor manufacturing facility. The liquid-free trap for trace level acidic and basic AMC and components thereof can be used in any suitable orientation, including horizontal and vertical orientations. The liquid-free trap for trace level acidic and basic AMC and components thereof can comprise a housing comprising a hollow, elongate upstream component with tubular portions; a hollow, elongate downstream component with tubular portions; and a locking nut member to secure the upstream component to the downstream component, the upstream component and the downstream component together creating a chamber space that is sealed from the environment and situated in a flow path between the inlet and the outlet. The space created by the upstream and downstream components together can accommodate a rigid sintered hydrophilic material trap member for trapping trace level acidic or basic AMC.
Claims
The ornamental design for a liquid-free trap for trace level acidic and basic AMC and components thereof, as shown and described.
3985017 | October 12, 1976 | Goldsmith |
D320842 | October 15, 1991 | Roman |
5302191 | April 12, 1994 | Koutrakis |
D473633 | April 22, 2003 | Chun-Lee |
D543948 | June 5, 2007 | Montena |
7247245 | July 24, 2007 | Proulx |
7430893 | October 7, 2008 | Grafer et al. |
D620075 | July 20, 2010 | Yamaguchi |
D636878 | April 26, 2011 | Lee |
D682497 | May 14, 2013 | Wargo |
D693001 | November 5, 2013 | Winter |
D693467 | November 12, 2013 | Doucette |
D694423 | November 26, 2013 | Klein |
D695415 | December 10, 2013 | Hwang |
D717462 | November 11, 2014 | Wainwright |
9134146 | September 15, 2015 | Baum |
D740391 | October 6, 2015 | Mueller |
D743034 | November 10, 2015 | Ebi |
20090324182 | December 31, 2009 | Kachmar |
20150298040 | October 22, 2015 | Nozaki |
- Search Report for Taiwan Application No. 104305936, “Liquid-Free Trap for Trace Level Acidic and Basic AMC and Components Thereof”, date of completion: Jan. 5, 2016.
- Search Report for Taiwan Application No. 103307311, “Liquid-Free Trap for Trace Level Acidic and Basic AMC and Components Thereof”, date of completion: Jul. 9, 2015.
- Moulton, T.M., et al., “An analytical method for the measurement of trace level acidic and basic AMC using liquid-free sample traps”, Proc. of SPIE, vol. 9050 90502B-1-90502B-14 (2014).
- Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration for International Application No. PCT/US2014/054266, “Liquid-Free Sample Traps and Analytical Method for Measuring Trace Level Acidic and Basic AMC”; date of mailing: Apr. 7, 2015.
- 2012 Parts Catalog Ordering Information Terms and Conditions, Dec. 31, 2012, http://www.urgcorp.com/lobrary/catalogs/URG%20cATALOG%202012.pdf.
- Chow, J., et al., “A Sampling System for Reactive Species in the Western United States”, Sampling and Analysis of Airborne Pollutants, pp. 210-228 (1993).
- Metrology, Inspection, and Process Control for Microlithography XXVIII, Proceedings of SPIE 0277-0786X v. 9050, Feb. 24-27, 2014.
- International Preliminary Report on Patentability for International Application No. PCT/US2014/054266, “Liquid-Free Sample Traps and Analytical Method for Measuring Trace Level Acidic and Basic AMC”; Date mailed: Mar. 17, 2016.
Type: Grant
Filed: Dec 10, 2014
Date of Patent: Dec 27, 2016
Assignee: Entegris, Inc. (Billerica, MA)
Inventors: Thomas LeBlanc (Mendon, MA), John C. Gaudreau (Chepachet, RI), Jürgen M. Lobert (Franklin, MA), Tyler Moulton (Grafton, MA)
Primary Examiner: Rhea Shields
Application Number: 29/511,388