Air flow controller for heater of substrate processing apparatus
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The broken lines immediately adjacent to the shaded areas represent the bounds of the claimed design while all other broken lines are directed to environment; the broken lines form no part of the claimed design.
Claims
We claim the ornamental design for an air flow controller for heater of substrate processing apparatus, as shown and described.
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Type: Grant
Filed: Mar 13, 2017
Date of Patent: Aug 14, 2018
Assignee: HITACHI KOKUSAI ELECTRIC INC. (Tokyo)
Inventors: Takatomo Yamaguchi (Toyama), Tetsuya Kosugi (Toyama), Shuhei Saido (Toyama)
Primary Examiner: Thomas Johannes
Assistant Examiner: Lauren McVey
Application Number: 29/596,953