Infrared lamp heater transmission window for semiconductor manufacturing apparatus

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Description

FIG. 1 is a front, top and right side perspective view of an infrared lamp heater transmission window for semiconductor manufacturing apparatus according to the design;

FIG. 2 is a rear, bottom and left side perspective view thereof;

FIG. 3 is a front elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a rear elevational view thereof;

FIG. 9 is an end view taken along line 9-9 of FIG. 3; and,

FIG. 10 is an end view taken along line 10-10 of FIG. 8.

Claims

The ornamental design for an infrared lamp heater transmission window for semiconductor manufacturing apparatus, as shown and described.

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Patent History
Patent number: D864885
Type: Grant
Filed: Feb 27, 2018
Date of Patent: Oct 29, 2019
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Michiaki Kobayashi (Tokyo), Kazuyuki Hirozane (Tokyo), Akio Harada (Tokyo), Nobuhide Nunomura (Tokyo), Yutaka Kouzuma (Tokyo)
Primary Examiner: Janice Hallmark
Assistant Examiner: Harold E Blackwell, II
Application Number: 29/638,440