Infrared lamp heater transmission window for semiconductor manufacturing apparatus
Latest Hitachi High-Technologies Corporation Patents:
Description
Claims
The ornamental design for an infrared lamp heater transmission window for semiconductor manufacturing apparatus, as shown and described.
Referenced Cited
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Patent History
Patent number: D864885
Type: Grant
Filed: Feb 27, 2018
Date of Patent: Oct 29, 2019
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Michiaki Kobayashi (Tokyo), Kazuyuki Hirozane (Tokyo), Akio Harada (Tokyo), Nobuhide Nunomura (Tokyo), Yutaka Kouzuma (Tokyo)
Primary Examiner: Janice Hallmark
Assistant Examiner: Harold E Blackwell, II
Application Number: 29/638,440
Type: Grant
Filed: Feb 27, 2018
Date of Patent: Oct 29, 2019
Assignee: Hitachi High-Technologies Corporation (Tokyo)
Inventors: Michiaki Kobayashi (Tokyo), Kazuyuki Hirozane (Tokyo), Akio Harada (Tokyo), Nobuhide Nunomura (Tokyo), Yutaka Kouzuma (Tokyo)
Primary Examiner: Janice Hallmark
Assistant Examiner: Harold E Blackwell, II
Application Number: 29/638,440
Classifications
Current U.S. Class:
Casing Or Enclosure Not Elsewhere Specified (D13/184);
Support Or Trim (26) (D26/138)