Wafer support ring
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Claims
The ornamental design for a wafer support ring, as shown and described.
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Type: Grant
Filed: Jul 16, 2019
Date of Patent: Apr 27, 2021
Assignee: ENTEGRIS, INC. (Billerica, MA)
Inventor: Eric Alan Kirkland (Woodland Park, CO)
Primary Examiner: George A Bugg
Assistant Examiner: Tamara L Hahn
Application Number: 29/698,332