Calibrator for wafer handling robots

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Description

FIG. 1 is a front, top and right side perspective view of a calibrator for wafer handling robots showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 2; and,

FIG. 9 is a cross-sectional view take along line 9-9 in FIG. 2.

Claims

We claim the ornamental design for a calibrator for wafer handling robots, as shown and described.

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Patent History
Patent number: D944661
Type: Grant
Filed: Dec 10, 2019
Date of Patent: Mar 1, 2022
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Makoto Sambu (Toyama), Norihito Shitaka (Toyama)
Primary Examiner: Katherine Glennon
Application Number: 29/716,452