Abstract: An apparatus for trimming the width of blinds of the type having a headrail, and a bottom rail and blind slats, and having a support body with a headrail opening, and a bottom rail opening, and a blind slat opening the blind components being insertable into their openings from one side of the support body, a die located adjacent to the support body, a headrail cutting recess in the die, guides on the support body for the die, enabling the die to move relative to the headrail opening between two positions and a bottom rail and blind slat cutter operable to cut the bottom rail and the blind slats. A modified apparatus can be used to trim the width of a vertical blind having a headrail and control rods. Also disclosed is a method of trimming the width of blind, having a head rail, a bottom rail and blind slats.

Abstract: A device and method for selectively perforating sheets of paper that are moving successively through a perforation device, where the perforation along a direction of the movement. A perforation device performs the perforation. The perforation device includes a perforating tool having a perforating position in which the paper is perforated and a neutral position in which the paper is not perforated. The perforation device further includes a control unit to control the perforating tool by optionally setting the perforating tool in either a perforating position or neutral position. The sheets are run successively through the perforating device, and each selected sheet is perforated in its direction of movement. The perforating tool receives a control signal to set the perforating position if a sheet to be perforated enters the perforating device, and the sheet is perforated along the direction of movement in accordance with the signal.

Abstract: A method of cutting a magnetic recording medium comprising the steps of conveying a web by rollers to guide the web to a cutting blade; and cutting the web by the cutting blade in the lengthwise direction of the web so that magnetic recording mediums are formed, wherein a dynamic unbalance of at least a roller immediately before the cutting blade is made to be 20 g or smaller, and the roller guides the web to the cutting blade.

Abstract: A machine for cutting stacked sheets of stock. The machine has a counter for accommodating the stock. The rear of the counter accommodates the stock to be cut and the front of the counter the cut stock. The rear of the counter also accommodates a mechanism for advancing the stack and a baffle for one side of the stack to rest against. A bent is positioned above the counter and accommodates a blade for cutting the stock and a holdfast that can be lowered onto the top of the stack. A control panel and a display panel are positioned on the front side.

Abstract: The present invention concerns a paper sheet cutting apparatus which cuts the front end portion opposite to the fold, where both the leading edge and trailing edge get together by center folding, and an image forming apparatus equipped with the paper sheet cutting apparatus. The sheet cutting apparatus includes a conveying device for conveying a booklet; a stopping device for stopping the booklet at a predetermined position; a cutting device for cutting the front end portion of the booklet; and a controlling section to control each of the conveying device, the stopping device and the cutting device. The controlling section controls the stopping device so as to variably determine a stopping position of the booklet stopped by the stopping device, based on a number of sheets included in the booklet conveyed to the cutting device by the conveying device.

Abstract: The invention falls within the field of labeling machine with the continuous introduction of a reeled label film. In particular, it relates to the cutting roller of the label film and it comprises a cooling line for the two support systems of the shaft of the cutting roller. The cooling line is preferably independent for each of the two systems and it comprises a probe for measuring the temperature of the related support which sends its measured value to a block for its comparison with a pre-set preferential temperature value. The block, according to the compared value, activates a solenoid valve inserted on the compressed air supply circuit.

Abstract: The present invention provides a die holder wherein before inserting a die into a die installation hole, a clearance is obtained for easy insertion, whereas after insertion, the die can be locked in position without a gap, thereby allowing the die to be precisely locked in position using simple operations. A die holder body 13 has an expandable ring-shaped chamber 14 disposed around a die installation hole 13a therein and which comes in contact with a die 5 to tighten and lock it all over its circumference The chamber 14 is enlarged and contracted under the pressure of a working fluid such as oil which is sealed therein. The working fluid can be pressurized by screwing a pressure-applying screw 18 into a fluid passage 17 leading to the inside of the chamber 14.

Abstract: The invention relates to a cutting device for products, in particular for cutting up foodstuffs. A blade driven by a drive shaft so as to rotate is provided which orbits a further drive shaft in a planetary path-like manner on a rotor driven by the further drive shaft. For a compact arrangement it is provided that the one drive shaft is designed as a hollow shaft and that the other drive shaft is guided therein.

Abstract: A keyboard musical instrument is equipped with solenoid-operated key actuators for guiding a player in fingering on the keyboard, and the solenoid-operated key actuators stop the keys at terminative positions on the way to the end positions, wherein key sensors supplies detecting signal representative of the keys reaching the terminative positions to a controller so that the controller removes the driving signals from the solenoid-operated key actuators immediately before the escape of jacks from the hammers.

Abstract: A musical score display apparatus is installed in a grand piano to display multiple images of pages of a musical score of a prescribed musical tune on the screen. Each of the multiple images of the musical score is divided into the prescribed number of sections, each of which corresponds to at least a prescribed length of a staff for arranging notes in musical notation and which are vertically arranged at different positions on the screen. In addition, different background colors are assigned to odd-numbered pages and even-numbered pages of the musical score respectively. The multiple images of the musical score are automatically and sequentially changed over section by section on the screen, so that the background colors are correspondingly changed over section by section on the screen. Herein, the images of the musical score are sequentially changed over section by section without changing the positions of the sections being fixed on the screen.

Abstract: Arithmetic processor executes waveform generation software on the basis of a received tone generation instruction, to thereby generate tone waveform data in a plurality of channels. The tone waveform data generated in the plurality of channels are added together so to be output as tone waveform data for a track. At the same time, waveform data are previously generated for a plurality of channels so as to be output at a time later than the current time point, and the waveform data thus previously generated in the plurality of channels are added together so that they are stored in a buffer storage section as previously-generated tone waveform data for a track. When there has occurred a situation that prevents waveform generation, the previously-generated waveform data currently stored in the buffer storage section are output.

Abstract: Disclosed is a method for automatically creating dance patterns using an audio signal of music. The method comprises: extracting power feature of an audio signal of each processing window by covering the audio signal with the processing window for analyzing the audio signal at regular intervals, and extracting the processing windows indicating a part having strong-beat power feature as beating widow candidates; determining beating windows corresponding to the points where beating should be conducted according to predetermined dance pattern creating option, out of the beating window candidates; and assigning predetermined unique beating codes to the determined beating windows in order of dance patterns based on the dance pattern creating option, and creating beating data of the dance patterns using the beating codes and time information indicating a time interval between beating windows.

Abstract: This is a gas-flow device for semiautomatic or automatic shotguns, which consists of a gas-flow cylinder, closed at the front part by a flange with gas discharge ports (17) around the ammunition magazine, opposite the cylinder, a circular valve (18) that moves axially for controlled opening and closing of the discharge ports. The valve is kept in the closed position by a pre-stressed spring (19) and it moves to the open position when the gas pressure in the expansion chamber increases beyond a set value.

Abstract: Provided is a force-controlled hydro-elastic actuator, including a hydraulic actuator, having a connection to hydraulic fluid and including a mechanical displacement member positioned to be mechanically displaced by fluid flow at the actuator. A valve is connected at the hydraulic actuator connection and has a port for input and output of fluid to and from the valve. At least one elastic element is provided in series with the mechanical displacement member of the hydraulic actuator and is positioned to deliver, to a load, force generated by the hydraulic actuator. A transducer is positioned to measure a physical parameter indicative of the force delivered by the elastic element and to generate a corresponding transducer signal. A force controller is connected between the transducer and the valve to control the valve, based on the transducer signal, for correspondingly actuating the hydraulic actuator and deflecting the elastic element.

Abstract: The sliding characteristics of the sliding portions, where components slide on each other, are improved and the work of coating forming thereof is simplified. DLC coatings (43) and (44) are formed on a front surface (39) and a rear surface (40) of a swash plate (22) by a CVD method or a PVD method. Therefore, the sliding characteristics of the sliding portion (47) between the swash plate (22) and shoes (27) and (28) are improved and abrasion or seizure occurs less frequently on the surface of the swash plate (22) and flat surfaces (35) and (36) of the shoes (27) and (28).

Abstract: A suction chamber and a discharge chamber are defined in a front housing member. A crank chamber is defined between a cylinder block and a rear housing member. A drive shaft passes through the suction chamber and extends from a front end of a housing. The drive shaft is supported by the housing. A shaft sealing assembly for sealing the drive shaft is located in the suction chamber. In the cylinder block and a valve plate, a bleed passage is formed for connecting the crank chamber with the suction chamber. The bleed passage is inclined downward toward the suction chamber. The outlet of the bleed passage is above the shaft sealing assembly. In the suction chamber, a reservoir, which stores lubricating oil supplied through the bleed passage, is surrounds a lower part of the shaft sealing assembly.

Abstract: The subject invention involves an apparatus and method for chilling and scrubbing air to be used in a gas turbine. The apparatus includes at least one spray scrubbing area, where the water is collected, recirculated, and filtered. Cooling is accomplished with at least one evaporative cooling media, such as a packed bed. Optionally the water sprayed into contact with the air may be chilled. At least one drift eliminator is employed prior to the air leaving the apparatus to at least partially dehumidify it prior to use by the gas turbine. The turbine inlet air may be cleaned of solid contaminants, such as sand, dirt, and ash, and of entrained liquid contaminants such as seawater. Under high ambient temperature and relative humidity conditions, this system will also recover fresh water from the air by condensation. The power available from gas turbine refrigeration compressor drivers may be increased by this direct contact cooling of the turbine inlet air.

Abstract: An apparatus and method for separating particulates from a flow of air and particulates in a vacuum cleaner. In one embodiment, the apparatus includes a removable vacuum cleaner filter having a flange portion with a flange aperture. A flexible, porous filter element portion is attached to the flange portion and is elongated along a filter axis. The filter element portion has a generally constant cross-sectional area when intersected by a plane generally perpendicular to the filter axis.

Abstract: The invention provides an apparatus for conditioning a organic fluid for subsequent use in a medical procedure. The apparatus includes a cabinet having a secure environment and a door providing the only access to the environment. An input system is provided for transporting a organic fluid charge from a source to the cabinet and a container is removably contained in the secure environment and coupled to the charge input system to receive the charge. Stressors are coupled to the cabinet and positioned for operation to create a conditioned charge in the container. An output system is coupled to the container and includes a receiver for the conditioned charge. The apparatus includes an automated control system operable upon closing the door to lock the door and to then condition the charge, and to then cause the charge to move from the container to the receiver.

Abstract: A fryer has its overheat protecting means for carrying out an operation test properly, thus improving the utility.

Abstract: A cooking apparatus includes a container, a spigot, a lid, and a food support. The container has a bottom surface and a side wall that extends upwardly from the bottom surface to a top edge of the side wall. The spigot is attached to the container side wall and has a valve member that is selectively positionable between opened and closed positions. The spigot valve member allows liquid contents of the container to drain from the container when in the opened position, and prevents the contents from draining out of the container when in the closed position. The food support is comprised of a perforated horizontal member with a perforated side wall extending upwardly from the horizontal member. A plurality of vertical members spaced around the periphery of the horizontal member extend upwardly from the horizontal member.

Abstract: In the installation and removal of a cylinder of a printing machine, in which the cylinder has a middle drum and two lateral bearing stubs which are capable of being secured releasably to the drum and of being connected to one another by means of a central spindle which passes through the drum and which, at least at one end, can be screwed, by means of a screw connection provided within the outer circumference of the spindle, to the adjacent bearing stub which, with the screw connection released, can be removed, together with its bearing housing, at least to an extent such that the drum is accessible from the side, a high degree of safety and a time saving can be achieved in that, for the change, the drum of a cylinder is released from the bearing stubs and one bearing stub is removed, after which the consequently exposed end of the spindle of the cylinder has connected to it, in the same way as the removable bearing stub, a spindle extension, onto which the drum is pushed and which is then released from the

Abstract: The present invention is intended to automatically adjust cutting and printing registers based on the detection of predetermined marks for different colors in a rotary press using a paper web, thereby eliminating the need for skills and reducing time for adjusting cutting registers.

Abstract: A cylinder apparatus for a rotary printing press includes a pair of inner bearings, an outer bearing, a pair of frames, a pair of cylinders, a motor, and a pair of abutting members. The pair of inner bearings rotatatively support two end shafts of at least one plate cylinder. The inner bearings have engaging projections. The outer bearing pivotally supports one of the inner bearings. The pair of frames are arranged to oppose each other through a predetermined distance, and pivotally support the outer bearing and the other one of the inner bearings. The pair of cylinders pivot the inner bearings supported by one of the frames and the outer bearing. The motor pivots the outer bearing supported by the other one of the frames. The pair of abutting members are supported by the frames. The engaging projections of the inner bearings abut against the pair of abutting members when the plate cylinder abuts against a blanket cylinder upon driving operation of the cylinders.

Abstract: Divided shaft members constitute a cleaning fabric take-up shaft, and are secured at both ends by shaft member fixing means that is attached to a side plate. Shaft member fixing portions include a shaft end supporter, for supporting the end of the shaft member; and a plug that is fitted to a shaft receiving section. A wedge portion is provided, which runs across the center of the shaft end supporter and is projected linearly. When this wedge portion is inserted between the shaft members, the diameter of the shaft is increased. At this time, the winding of the cleansing fabric is performed. To dispose of the wound cleaning fabric, the shaft members are detached from the shaft member fixing portions and the wedge is extracted from the shaft members, so that the diameter is reduced, and the cleaning fabric is disengaged from the shaft members. As a result, the cleaning fabric take-up shaft can be removed from the cleaning fabric roll.

Abstract: A computer-to-cylinder recording type lithographic printing method comprising: mounting a printing plate precursor onto a plate cylinder; forming an image directly onto a surface of said printing plate precursor mounted on the plate cylinder, by an ink jet process which comprises ejecting an ink containing a lipophilic component onto said printing plate precursor surface from a recording head having a plurality of ejection channels according to signals of image data, to thereby prepare a printing plate, said image recording being carried out while rotating the plate cylinder to effect main scanning, and moving said recording head in a direction parallel to an axis of the plate cylinder to effect subsidiary scanning; and performing lithographic printing with said printing plate, wherein the number of the ejection channels of said recording head is (X·(N/K)+1) and wherein the subsidiary scanning movement of said ejection head is carried out continuously at a constant speed of (X·(N/K)+1)

Abstract: In a sheet-like object identification method, a printing quality of each image of a sheet printed with a plurality of images is inspected. A sheet-like object in a printing state wherein all printed images are defective and a sheet-like object in a printing state wherein printed images mixedly include non-defective and defective printed images are identified on the basis of an inspection result. Different identification information are imparted to the sheet-like object in the printing state wherein all the images are defective and the printed sheet-like object in the printing state mixedly including non-defective and defective images on the basis of identification results. A sheet-like object identification apparatus is also disclosed.

Abstract: In a fuse-less shell (10) with a so-called pyrotechnic impact fuse bore safety and safety in front of the bore are achieved by a spring-supported ball (43) in a central bore (72) in a valve body (65). The valve body (65) separates an explosive charge (60) at the shell side from an impact-sensitive firing charge (28). The firing charge (28) is disposed within a shell cap (24) and surrounds a projection (30), which acts as an anvil, of the valve body (65).

Abstract: A method of providing safety for pyrotechnic launch devices of the type having a least one tilt detection device 10 & 20. Having a means of attaching said tilt detection device(s) 10 & 20 to the launch device(s). Having a means of disabling launches from launch device(s) when at least one of said tilt detection device(s) 10 & 20 detects that the launch device it is attached to is tilted beyond tolerances.

Abstract: A control agent delivery system useful for dispersing a pesticide, herbicide, fungicide or other biocide around a target or target area that is not directly accessible or that is hazardous to the user. The system includes a separable, two-part projectile containing a control agent disposed in a powder, liquid or gel dispersal medium, together with a gas-propelled, projectile launching device. A method of use of the subject system that causes the projectile to perform differently, depending upon the manner of launch, is also disclosed.

Abstract: A damping system for a rail car truck utilizes friction wedges supported on side springs to damp relative movement between the rail car truck bolster and the side frames supporting it. Each friction wedge has a generally triangular shape with an angle &thgr; defined between a vertical friction surface which bears against a side frame and a sloping friction surface which moves relative to the bolster. The angle &thgr; and the force P of each side spring are defined by 1 Fw W . E = - P 2 · ( cos ⁢   ⁢ ( θ ) + ⁣ μ 2 ⁢ w · sin ⁡ ( θ ) ) ( μ 1 ⁢ w · cos ⁢   ⁢ ( θ ) + μ 1 ⁢ w · μ 2 ⁢ w · sin ⁡ ( θ ) + μ 2 ⁢ w · cos ⁢   ⁢ ( θ ) - sin ⁡ ( θ ) ) · 2 ⁣ · a · w w [ b · ( a · w w ) ] V c . W .

Abstract: A disposable and reusable spacer rack apparatus, for cooperating with a pallet to support a stack of thin sheets of printable stock thereon. A spacer rack apparatus according to the invention includes a body member, having an upper surface and a substantially flat lower surface. The body member has a series of parallel spaced apart grooves formed in an upper portion thereof, defining a plurality of parallel spaced apart divider slats between the grooves. The body member is of a first height at the divider slats, and is of a second, reduced height in the area of the grooves. The grooves are provided for receiving support rods during a printing stock changeover process. In a preferred embodiment of the invention, the spacer rack apparatus is integrally formed as a single unit, out of relatively inexpensive materials, such as cardboard, fiberboard, recycled plastic, or open-celled plastic foam. The invention also includes a method of using the spacer rack apparatus.

Abstract: The purpose of the invention according to this application is to offer a load displacement preventing device and a method of prevention of load displacement using the said device in such a manner that the attachment and detachment thereof can be accomplished by a single person without requiring tedious work and without the risk of displacement or disturbance of the stacked load or of damage caused to said load during the attachment thereof.

Abstract: The embroidery machine for reducing vibration and noise comprises a table 2; an embroidery frame 4 placed on the table 2; a head 12 located above the embroidery frame 4, the head having a plurality of needles; a hook 14 installed below the table 2, the hook being opposite to the head 12; an X-axis driver unit 17 for providing power to move the embroidery frame 4 forward and backward in X direction; an Y-axis driver unit 39 for providing power to move the embroidery frame 4 forward and backward in Y direction; and a control unit 28 for being connected to the X-axis and Y-axis driver units 17, 139.

Abstract: The invention concerns an autonomous container ship comprising a bottom, a propulsion system, a loading and unloading system for loading and unloading containers, a balancing system, characterized in that the bottom has a hull incorporating a propulsion system and the ship comprises a carrying system for transporting containers from important ports equipped with facilities for loading and unloading containers to small ports not provided with such equipment and less than 4 meters deep. The ship includes a propulsion system ensuring the ship's cruising speed on the high seas and its speed in estuaries and ports, a loading and unloading system adapted to ports not provided with appropriate equipment, and a balancing system for balancing the ship at sea providing stability and trim during container handling operations.

Abstract: A connection system for connecting external devices to specified locations on a marine seismic streamer. Inner collars are clamped to the cable at specified locations along its length. Each inner collar forms a circular race encircling the cable. A cuff attached to an external device is in the form of a C-shaped cylindrical ring with a circular inner surface. A gap in the ring interrupts the inner surface. A throat is formed in the ring by the gap, which extends the full length of the cuff across the ends of the C. The spacing between the ends of the C across the throat defines the width of the gap. The width of the gap is slightly larger than the diameter of the cable so that the cuff can be slipped over the cable through the throat. The width of the gap is smaller than the diameter of the circular race so that, when the cuff is slid into position on the race, the cuff cannot be removed radially from the race. The inner surface of the cuff rides on the race to allow the cable to rotate inside the cuff.

Abstract: There is provided a plasma sterilization indicator enabling an accurate detection of the end-point of plasma sterilization. This invention relates to a plasma sterilization indicator comprising a support and, as formed thereon, a color-change layer comprised of a variable color ink composition containing an anthraquinone dye having at least one kind of amino groups, primary and/or secondary.

Abstract: An object of the present invention is to provide a method of suppressing convection of a fluid in a cylindrical vessel by means of realizing an environment under micro gravity which can be maintained for such a long time that growth of a large-sized crystal be economically effected.

Abstract: A single crystal pulling apparatus comprising, a laser unit 46 emitting a beam with a wavelength of 550 nm or less to form a spot on the surface of said melt, a spot camera 47 capturing the spot to produce electrical image signals corresponding thereto, an image processor 50 processing the electrical image signals to produce image data, and a control unit 49 receiving the image data and calculating a current melt level so that a crucible shaft lift 8 moves a crucible shaft up and down to adjust the melt level in accordance with the predetermined melt level.

Abstract: A method of growing a thin film onto a substrate placed in a reaction chamber according to the ALD method by subjecting the substrate to alternate and successive surface reactions. The method includes providing a first reactant source and providing an inactive gas source. A first reactant is fed from the first reactant source in the form of repeated alternating pulses to a reaction chamber via a first conduit. The first reactant is allowed to react with the surface of the substrate in the reaction chamber. Inactive gas is fed from the inactive gas source into the first conduit via a second conduit that is connected to the first conduit at a first connection point so as to create a gas phase barrier between the repeated alternating pulses of the first reactant entering the reaction chamber. The inactive gas is withdrawn from said first conduit via a third conduit connected to the first conduit at a second connection point.

Abstract: An apparatus and method for use with powdered resin feeders provides a continuous stream of powder to a plurality of threaded or non-threaded fasteners. In one preferred embodiment, the apparatus generates a gravity induced powder stream at the free end of a discharge conduit which is intersected by a series of fasteners carried on a conveyor. A vacuum nozzle is positioned adjacent to the powder stream and the conveyor. Both the vacuum nozzle and the free end of the discharge conduit are adjustably positionable relative to the path of the fasteners carried on the conveyor.

Abstract: A method of depositing a material onto a substrate, comprising the steps of: feeding a material solution to an outlet to provide a stream of droplets of the material solution; applying a potential difference between the outlet and a substrate to electrostatically attract the droplets from the outlet towards the substrate such that a corona discharge is formed around the outlet; heating the substrate to provide an increase in temperature between the outlet and the substrate; and progressively increasing the temperature of the substrate during material deposition.

Abstract: A system and method for controlling triggering of spray guns in an automatic spray coating system, includes a hand-held pendant having input controls for entering spray gun “on” and spray gun “off” control parameters based upon observation of parts as they are conveyed past the spray guns by a conveyor. Gun triggering controls for optimized spray patterns, including extended and restricted spray patterns and combinations thereof, are entered and saved in a gun triggering controller according to an operator's inputs which include START SPRAY, STOP SPRAY, SAVE and SET PICKOFF controls. Multiple gun control parameters are stored as unique part coating recipes in the controller and are executable in look-ahead sequence based upon part identification as parts are conveyed toward the spray guns. The multiple gun control parameters are calculated by the controller from a fixed Pickoff distance from a part identification sensor to the spray guns.

Abstract: An apparatus for wafer processing, which comprises a chamber body and a heated liner which are thermally isolated from each other by isolating pins. During wafer processing, e.g., deposition of titanium nitride film by thermal reaction between titanium tetrachloride and ammonia, a wafer substrate is heated to a reaction temperature in the range of 600-700° C. by a heated support pedestal. The chamber liner and the interior chamber walls are maintained at a temperature between 150-250° C. to prevent deposition of undesirable by-products inside the chamber. This facilitates the chamber cleaning procedure, which can be performed using an in-situ chlorine-based process. The excellent thermal isolation between the heated liner and the chamber body allows the chamber exterior to be maintained at a safe operating temperature of 60-65° C. A heated exhaust assembly is also used in conjunction with the process chamber to remove exhaust gases and reaction by-products.

Abstract: A CVD system in which a vacuum container is separated into a plasma generating space and a film forming space by a conductive partition wall having plural penetration holes, radicals generated in the plasma generating space are introduced into the film forming space only through the penetration holes of the partition wall, and material gas supplied from outside into the partition wall is introduced into the film forming space through the internal space of the partition wall, which is communicating with the film forming space through plural diffusion holes while separated from the plasma generating space and the penetration holes, and a film is formed on the substrate by the radicals and material gas introduced into the film forming space.

Abstract: Apparatus and method for inductively coupling electrical power to a plasma in a semiconductor process chamber. In a first aspect, an array of wedge-shaped induction coils are distributed around a circle. The sides of adjacent coils are parallel, thereby enhancing the radial uniformity of the magnetic field produced by the array. In a second aspect, electrostatic coupling between the induction coils and the plasma is minimized by connecting each induction coil to the power supply so that the turn of wire of the coil which is nearest to the plasma is near electrical ground potential. In one embodiment, the hot end of one coil is connected to the unbalanced output of an RF power supply, and the hot end of the other coil is connected to electrical ground through a capacitor which resonates with the latter coil at the frequency of the RF power supply.

Abstract: A vaporiser generating feed gas for the arc chamber of an ion source has a crucible which is heated to a temperature at which material in the crucible sublimes to produce a vapor for use as the feed gas. In addition to the heating element for heating the crucible, there is a cooling element in the form of a cooling duct extending along the length of the crucible for receiving the cooling fluid. Forced cooling of the crucible when the heating element is switched off enables the crucible to be cooled more quickly so that the supply of a feed gas can be terminated sooner. This is important if an ion source is being switched from one feed gas to another. Also, the crucible may be forced cooled simultaneously while energising the heating element to enable the crucible to be accurately controlled at a lower operating temperature if desired.

Abstract: A single-substrate-processing apparatus includes an airtight process chamber in which a ceramic worktable is supported by a ceramic pedestal. The bottom of the pedestal is provided with a flange, which is attached to the bottom of the process chamber by a flange holder. The flange holder has upper and lower frames sandwiching the flange therebetween. The flange holder is detachably fixed by fixing bolts to the bottom of the process chamber from outside the process chamber.

Abstract: A thermal processing unit of the invention includes a processing container that can contain an object to be processed therein, the processing container having a lower end provided with an opening. The opening is opened and closed by a lid. A flange is provided at a peripheral portion of the opening, and a gas-supplying unit is provided at the flange for supplying a gas into the processing container. A heating mechanism can heat the object to be processed contained in the processing container.

Abstract: The present invention provides systems, methods and apparatus for high temperature (at least about 500-800° C.) processing of semiconductor wafers. The systems, methods and apparatus of the present invention allow multiple process steps to be performed in situ in the same chamber to reduce total processing time and to ensure high quality processing for high aspect ratio devices. Performing multiple process steps in the same chamber also increases the control of the process parameters and reduces device damage. In particular, the present invention can provide high temperature deposition, heating and efficient cleaning for forming dielectric films having thickness uniformity, good gap fill capability, high density, low moisture, and other desired characteristics.