Shape Defined By A Solid Member Other Than Seed Or Product (e.g., Edge-defined Film-fed Growth, Stepanov Method) Patents (Class 117/16)
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Patent number: 11492724Abstract: A die for EFG-based single crystal growth includes a lower surface to be immersed into a raw material melt with an impurity added, a rectangular upper surface facing a seed crystal and having a long side and a short side, and a plurality of slit sections extending from the lower surface to the upper surface and causing the raw material melt to ascend from the lower surface to the upper surface. Respective longitudinal directions of openings of the plurality of slit sections on the upper surface are parallel to one another and non-parallel to the long side of the upper surface.Type: GrantFiled: January 25, 2019Date of Patent: November 8, 2022Assignee: TDK CORPORATIONInventors: Katsumi Kawasaki, Jun Hirabayashi, Minoru Fujita, Daisuke Inokuchi, Jun Arima, Makio Kondo
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Patent number: 9601329Abstract: Certain electronic applications, such as OLED display back panels, require small islands of high-quality semiconductor material distributed over a large area. This area can exceed the areas of crystalline semiconductor wafers that can be fabricated using the traditional boule-based techniques. This specification provides a method of fabricating a crystalline island of an island material, the method comprising depositing particles of the island material abutting a substrate, heating the substrate and the particles of the island material to melt and fuse the particles to form a molten globule, and cooling the substrate and the molten globule to crystallize the molten globule, thereby securing the crystalline island of the island material to the substrate. The method can also be used to fabricate arrays of crystalline islands, distributed over a large area, potentially exceeding the areas of crystalline semiconductor wafers that can be fabricated using boule-based techniques.Type: GrantFiled: June 16, 2016Date of Patent: March 21, 2017Assignee: DIFTEK LASERS, INC.Inventor: Douglas R. Dykaar
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Patent number: 9396932Abstract: Certain electronic applications, such as OLED display back panels, require small islands of high-quality semiconductor material distributed over a large area. This area can exceed the areas of crystalline semiconductor wafers that can be fabricated using the traditional boule-based techniques. This specification provides a method of fabricating a crystalline island of an island material, the method comprising depositing particles of the island material abutting a substrate, heating the substrate and the particles of the island material to melt and fuse the particles to form a molten globule, and cooling the substrate and the molten globule to crystallize the molten globule, thereby securing the crystalline island of the island material to the substrate. The method can also be used to fabricate arrays of crystalline islands, distributed over a large area, potentially exceeding the areas of crystalline semiconductor wafers that can be fabricated using boule-based techniques.Type: GrantFiled: January 30, 2015Date of Patent: July 19, 2016Assignee: DIFTEK LASERS, INC.Inventor: Douglas R. Dykaar
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Patent number: 9352997Abstract: In a melt molding method of germanium, the germanium which is brought into a molten state is sealed in molding dies in an inert gas atmosphere. The molding dies are temperature-controlled from the outside. While gradually cooling the molding dies at a portion or a plurality of portions thereof up to the whole, the germanium is gradually solidified from a side of the portion or sides of the plurality of portions up to the whole. An external ambient temperature of the molding dies is controlled to decrease gradually while ensuring a temperature below a germanium melting point temperature but higher than an inner temperature of the molding die which is cooled. After solidification of the germanium is completed, cooling of the molding dies is continued, and the external ambient temperature is decreased to mold the germanium.Type: GrantFiled: June 27, 2013Date of Patent: May 31, 2016Assignee: Nachi-Fujikoshi Corp.Inventor: Kunihiro Tanaka
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Patent number: 8961686Abstract: For manufacturing a monocrystal, a monocrystal pulling-up device controls pressure within a flow straightening cylinder to be from 33331 Pa to 79993 Pa and a flow velocity of inert gas in the cylinder to be from 0.06 m/sec to 0.31 m/sec (0.005 to 0.056 SL/min·cm2) during a post-addition-pre-growth period. By controlling the flow velocity of the inert gas to be in the above-described range during the post-addition-pre-growth period, the inert gas flows smoothly even when the pressure within the cylinder is relatively high. Evaporation of a volatile dopant because of a reverse flow of the inert gas can be restrained. The volatile dopant can be prevented from adhering to the flow straightening cylinder in an amorphous state, and the volatile dopant can be prevented from dropping into a melt or sticking on the melt while growing a crystal. Foulings can be easily removed.Type: GrantFiled: July 25, 2008Date of Patent: February 24, 2015Assignee: Sumco Techxiv CorporationInventors: Shinichi Kawazoe, Fukuo Ogawa, Yasuhito Narushima, Toshimichi Kubota
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Patent number: 8846505Abstract: A method for growing islands of semiconductor monocrystals from a solution on an amorphous substrate includes the procedures of depositing a semiconductor-metal mixture layer, applying lithography and etching for forming at least one platform, heating the at least one platform, and saturating the semiconductor-metal solution until a monocrystal of the semiconductor component is formed. The procedure of depositing a semiconductor-metal mixture layer, includes a semiconductor component and at least one other metal component, is performed on top of the amorphous substrate. The procedure of applying lithography and etching to the semiconductor-metal mixture layer and a portion of the amorphous substrate is performed for forming at least one platform, the at least one platform having a top view shape corresponding to crystal growth direction and habit respective of the semiconductor component.Type: GrantFiled: March 9, 2010Date of Patent: September 30, 2014Assignee: SKOKIE Swift CorporationInventor: Moshe Einav
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Patent number: 8834627Abstract: Silicon single crystals are grown by a method of remelting silicon granules, by crystallizing a conically extended section of the single crystal with the aid of an induction heating coil arranged below a rotating plate composed of silicon; feeding inductively melted silicon through a conical tube in the plate, the tube enclosing a central opening of the plate and extending below the plate, to a melt situated on the conically extended section of the single crystal in contact with a tube end of the conical tube, wherein by means of the induction heating coil below the plate, sufficient energy is provided to ensure that the external diameter of the tube end is not smaller than 15 mm as long as the conically extended section of the single crystal has a diameter of 15 to 30 mm.Type: GrantFiled: October 28, 2010Date of Patent: September 16, 2014Assignee: Siltronic AGInventors: Wilfried von Ammon, Ludwig Altmannshofer, Martin Wasner
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Publication number: 20140133014Abstract: The present invention relates to a borate birefringent crystal applicable to ultraviolet (UV) or deep ultraviolet (DUV) range, with chemical formula of Ba2Mg(B3O6)2. The borate birefringent crystal belongs to a trigonal system, with space group of R-3 wherein a=0.70528(3) nm, c=1.65520(9) nm and Z=12. The barium magnesium borate birefringent crystal is negative uniaxial (ne<no) with a birefringence of 0.077-0.229 and a transmission range of 177-3000 nm. The crystal is easy to cut, grind, polish, and preserve, and is stable in air and is not easy to deliquesce. The barium magnesium borate birefringent crystal can be grown by the Czochralski method, flux method or the method of spontaneous crystallization from a melt, and has larger birefringence (no?ne=0.077-0.229). The crystal has important applications in the fields of optics and communications, e.g. for fabricating the polarizing beam splitter prism.Type: ApplicationFiled: February 17, 2012Publication date: May 15, 2014Inventors: Rukang Li, Yingying Ma
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Patent number: 8685161Abstract: Various single crystals are disclosed including sapphire. The single crystals have desirable geometric properties, including a width not less than about 15 cm and the thickness is not less than about 0.5 cm. The single crystal may also have other features, such as a maximum thickness variation, and as-formed crystals may have a generally symmetrical neck portion, particularly related to the transition from the neck to the main body of the crystal. Methods and for forming such crystals and an apparatus for carrying out the methods are disclosed as well.Type: GrantFiled: February 14, 2012Date of Patent: April 1, 2014Assignee: Saint-Gobain Ceramics & Plastics, Inc.Inventors: John W. Locher, Steven A. Zanella, Ralph L. MacLean, Jr., Herbert Ellsworth Bates
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Patent number: 8652257Abstract: A melting furnace, mounted adjacent a growth furnace, comprises a receiving container for melting therein raw material in a particle or powder form falling in it from a feeder. The receiving container accommodates a set of slope-wise plates providing a distributed sliding of partially melted raw material particles over the surface of these plates and their complete melting while moving downward; eventually the melted raw material flows into the crucible of the growth furnace through a conveying tube extending slantingly from the bottom of the receiving container to the crucible through coaxial openings in housings of both furnaces. The rate of feeding is given solely by the feeder, and at continuous feeding the raw material flows continuously by gravity from the feeder to the crucible of the growth furnace, first in a solid state (powder, granules, pellets, etc.) and then in a liquid state.Type: GrantFiled: February 22, 2010Date of Patent: February 18, 2014Inventors: Lev George Eidelman, Vladimir Ilya Zheleznyak
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Patent number: 8652254Abstract: The invention is a method for pulling a silicon single crystal, which is a Czochralski method for growing the silicon single crystal by contacting a seed crystal with a melt and by pulling up, including the steps of: contacting the seed crystal with the melt; forming a necking portion under the seed crystal; and forming the silicon single crystal under the necking portion by increasing a diameter, wherein a pulling rate during forming the necking portion is 2 mm/min or less, and the silicon single crystal with the increased diameter is a boron-doped silicon single crystal having a resistivity of 1.5 m?·cm or less at a shoulder portion. Therefore, there can be provided a method of pulling a silicon single crystal without generating defects such as scratches at a wafer surface in the case of processing a boron-doped silicon single crystal ingot with a low resistivity produced by CZ method into a wafer.Type: GrantFiled: April 14, 2008Date of Patent: February 18, 2014Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Satoshi Soeta, Masahiro Mori
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Patent number: 8617311Abstract: In this silicon single crystal wafer for IGBT, COP defects and dislocation clusters are eliminated from the entire region in the radial direction of the crystal, the interstitial oxygen concentration is 8.5×1017 atoms/cm3 or less, and variation in resistivity within the wafer surface is 5% or less. This method for manufacturing a silicon single crystal wafer for IGBT includes introducing a hydrogen atom-containing substance into an atmospheric gas at a hydrogen gas equivalent partial pressure of 40 to 400 Pa, and growing a single crystal having an interstitial oxygen concentration of 8.5×1017 atoms/cm3 or less at a silicon single crystal pulling speed enabling pulling of a silicon single crystal free of grown-in defects. The pulled silicon single crystal is irradiated with neutrons so as to dope with phosphorous; or an n-type dopant is added to the silicon melt; or phosphorous is added to the silicon melt so that the phosphorous concentration in the silicon single crystal is 2.9×1013 to 2.Type: GrantFiled: February 20, 2007Date of Patent: December 31, 2013Assignee: Sumco CorporationInventors: Toshiaki Ono, Shigeru Umeno, Wataru Sugimura, Masataka Hourai
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Patent number: 8580036Abstract: The method and apparatus includes a vessel having a bottom and sidewalls arranged to house the material in a molten state. A temperature controlled horizontally oriented, cooling plate is movable into and out of the top of the molten material. When the cooling plate is lowered into the top of the melt, an ingot of solid silicon is solidified downwards.Type: GrantFiled: May 10, 2006Date of Patent: November 12, 2013Assignee: Elkem Solar ASInventor: Kenneth Friestad
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Patent number: 8562739Abstract: A silica glass crucible used for pulling up a silicon single crystal and made from natural silica a raw material is provided with a region within a certain range from the center of a bottom section of the crucible and up to 0.5 mm deep from an inner surface and which substantially does not include gas bubbles, wherein an average value of a concentration of Al included in a region within the certain range from the center of the bottom section of the crucible and up to 0.5 mm deep from the inner surface is 30 ppm or more and 150 ppm or less. In the case where the inner layer of the crucible bottom section is formed in this way, dents in the inner surface are prevented and the generation of gas bubbles is reduced.Type: GrantFiled: December 28, 2009Date of Patent: October 22, 2013Assignee: Japan Super Quartz CorporationInventors: Kazuhiro Harada, Satoshi Kudo
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Patent number: 8524001Abstract: Silicon wafers having excellent voltage resistance characteristics of an oxide film and high C-mode characteristics are derived from single crystal silicon ingots doped with nitrogen and hydrogen, characterized in that a plurality of voids constituting a bubble-like void aggregates are present ?50% relative to total voids; a V1 region having a void density of over 2×104/cm3 and below 1×105/cm3 is ?20% of the total area of wafer; a V2 region having a void density of 5×102 to 2×104/cm3 occupies ?80% of the total area of the wafer; and bulk microdefect density is ?5×108/cm3.Type: GrantFiled: December 16, 2009Date of Patent: September 3, 2013Assignee: Siltronic AGInventors: Katsuhiko Nakai, Atsushi Ikari, Masamichi Ohkubo
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Patent number: 8506708Abstract: A silica glass crucible for pulling up a silicon single crystal including a wall part and a bottom part is provided with a natural silica glass layer which forms at least one part of a an inner surface of the bottom part, and a synthetic silica glass layer which forms at least an inner surface of the wall part, wherein a concentration of Ca included in the natural silica glass layer is 0.5 ppm or less.Type: GrantFiled: October 28, 2009Date of Patent: August 13, 2013Assignee: Japan Super Quartz CorporationInventors: Masanori Fukui, Satoshi Kudo
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Patent number: 8092594Abstract: The present invention relates to a carbon ribbon for covering in a thin layer of semiconductor material, and to a method of deposited such a layer on a substrate constituted by a carbon ribbon. At least one of the two faces of the carbon ribbon is for covering in a layer of semiconductor material by causing the ribbon to pass substantially vertically upwards through a bath of molten semiconductor material. According to the invention, the two edges of at least one of the two faces of the carbon ribbon project so as to form respective rims.Type: GrantFiled: June 7, 2006Date of Patent: January 10, 2012Assignee: SOLARFORCEInventor: Christian Belouet
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Patent number: 7875790Abstract: A method of preparing a thermoelectric material includes the following steps. A thermoelectric raw material can be filled into a cavity of a first mold so that the thermoelectric raw material filled in the cavity has first and second dimensions. The first dimension can be defined in a first direction. The second dimension can be defined in a second direction. The second direction can be perpendicular to the first direction. The first dimension can be equal to or greater than the second dimension. The thermoelectric raw material filled in the cavity can be cooled in a uniaxial direction that is parallel to the second direction at a cooling rate of at least 600° C./min.Type: GrantFiled: August 23, 2006Date of Patent: January 25, 2011Assignee: Yamaha CorporationInventor: Takahiro Hayashi
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Publication number: 20100242831Abstract: Methods are disclosed for pulling an object while measuring the weight of the object. The object is pulled upward using a cable extending over a first cylinder. The cable further extends over a second cylinder. The cable travels along a cable path between an uppermost portion of each of the outer circumferential portions of the first cylinder and the second cylinder. The first cylinder is restrained from movement parallel to the cable path with an arm having a first end and a second end. The first end is coupled to the first cylinder and the second end is coupled to either the second cylinder or a frame. The weight of the object is measured with a force measurement device. In some embodiments, the position of the cable with respect to the frame may be adjusted by a dampening system or a bushing.Type: ApplicationFiled: March 18, 2010Publication date: September 30, 2010Applicant: MEMC ELECTRONIC MATERIALS, INC.Inventor: Harold Korb
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Patent number: 7740702Abstract: A silicon wafer and a method for manufacturing the same are provided, wherein the silicon wafer has no crystal defects in the vicinity of the surface and provides excellent gettering efficiency in the process of manufacturing devices without IG treatment. The oxygen concentration and the carbon concentration are controlled respectively within a range of 11×1017-17×1017 atoms/cm3 (OLD ASTM) and within a range of 1×1016-15×1016 atoms/cm3 (NEW ASTM). A denuded zone having no crystal defects due to the existence of oxygen is formed on the surface and in the vicinity thereof, and oxygen precipitates are formed at a density of 1×104-5×106 counts/cm2, when a heat treatment is carried out at a temperature of 500-1000° C. for 1 to 24 hours. In the method for manufacturing the silicon wafer, moreover, the silicon wafer having the oxygen and carbon concentrations as controlled above is heat-treated at a temperature of 1100° C.-1380° C. for 1 to 10 hours.Type: GrantFiled: December 22, 2006Date of Patent: June 22, 2010Assignee: Sumitomo Mitsubishi Silicon CorporationInventor: Yasuo Koike
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Patent number: 7736433Abstract: BaTiO3—PbTiO3 series single crystal is single-crystallized by heating BaTiO3—PbTiO3 compact powder member or sintered member having a smaller Pb-containing mol number than Ba-containing mol number, while keeping the powder or substance in non-molten condition. In this way, this single crystal can be manufactured at a crystal growing speed faster still and stabilized more, significantly contributing to improving the dielectric loss and electromechanical coupling coefficient for the provision of excellent BaTiO3—PbTiO3 series single crystal in various properties, as well as for the provision of piezoelectric material having a small ratio of lead content, which is particularly excellent in piezoelectric property and productivity.Type: GrantFiled: May 21, 2008Date of Patent: June 15, 2010Assignee: Canon Kabushiki KaishaInventors: Hiroshi Aoto, Akira Unno, Tetsuro Fukui, Akio Ikesue
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Patent number: 7718003Abstract: A method and apparatus for growing a crystalline or poly-crystalline body from a melt is described, wherein the melt is retained by capillary attachment to edge features of a mesa crucible. The boundary profile of the resulting melt surface results in an effect which induces a ribbon grown from the surface of the melt to grow as a flat body. Further, the size of the melt pool is substantially reduced by bringing these edges close to the ribbon, thereby reducing the materials cost and electric power cost associated with the process.Type: GrantFiled: November 26, 2007Date of Patent: May 18, 2010Assignee: Evergreen Solar, Inc.Inventor: Emanuel Michael Sachs
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Patent number: 7708829Abstract: A method and apparatus for growing a crystalline or poly-crystalline body from a melt is described, wherein the melt is retained by capillary attachment to edge features of a mesa crucible. The boundary profile of the resulting melt surface results in an effect which induces a ribbon grown from the surface of the melt to grow as a flat body. Further, the size of the melt pool is substantially reduced by bringing these edges close to the ribbon, thereby reducing the materials cost and electric power cost associated with the process.Type: GrantFiled: July 10, 2006Date of Patent: May 4, 2010Assignee: Evergreen Solar, Inc.Inventor: Emanuel Michael Sachs
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Patent number: 7682452Abstract: A method and apparatus for eliminating voids and improving crystal quality in shaped ceramic product, e.g. sapphire fiber or silicon sheet, from a melt by using a sloped die tip. The sloped die tip or array thereof comprises an outer sidewall which is sloped outwardly at an angle of 5° to 40° from the vertical.Type: GrantFiled: April 9, 2007Date of Patent: March 23, 2010Assignee: Sapphire Systems Inc.Inventor: John O. Outwater
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Patent number: 7544257Abstract: Devices and methods of making devices having one or more components made of single crystal shape memory alloy capable of large recoverable distortions, defined herein as “hyperelastic” SMA. Recoverable Strains are as large as 9 percent, and in special circumstances as large as 22 percent. Hyperelastic SMAs exhibit no creep or gradual change during repeated cycling because there are no crystal boundaries. Hyperelastic properties are inherent in the single crystal as formed: no cold work or special heat treatment is necessary. Alloy components are Cu—Al—X where X may be Ni, Fe, Co, Mn. Single crystals are pulled from melt as in the Stepanov method and quenched by rapid cooling to prevent selective precipitation of individual elemental components. Conventional methods of finishing are used: milling, turning, electro-discharge machining, abrasion. Fields of application include aerospace, military, automotive, medical devices, microelectronics, and consumer products.Type: GrantFiled: May 4, 2005Date of Patent: June 9, 2009Assignee: TiNi Alloy CompanyInventors: A. David Johnson, Michael Bokaie, Valery Martynov
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Patent number: 7476274Abstract: The method provides a uniform low-stress single crystal in a predetermined crystal orientation. The method of making it includes immersing a single crystal held at a temperature under its melting point in a melt of crystal raw material and drawing it from the melt to grow the crystal. The crystal and/or melt are rotated relative to each other during the crystal growth. A planar phase boundary surface is maintained by detecting at least one characteristic surface temperature in an interior of a crucible containing the melt and controlling temperature fluctuations by increasing or decreasing the rotation speed when they occur. The single crystals obtained by this method have a diameter of at least 50 mm and no visible growth strips in a fishtail pattern when a 2-mm thick sample is observed between crossed polarizers. Optical elements suitable for DUV lithography can be made from these crystals.Type: GrantFiled: September 11, 2006Date of Patent: January 13, 2009Assignee: Schott AGInventors: Gunther Wehrhan, Lutz Parthier, Daniel Rytz, Klaus Dupre, Lothar Ackermann
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Patent number: 7449134Abstract: Noble crystal of 4-dimethylamino-4-stilbazolium tosylate (DAST) useful as an electro-optical element. A DAST crystal having a size effective for use as an electro-optical element is provided by a twin crystal of DAST. The twin crystal of DAST can be obtained according to a seed crystallization method or a slope crystal growing method.Type: GrantFiled: July 21, 2006Date of Patent: November 11, 2008Assignees: Daiichi Pure Chemicals Co., Ltd., Daiichi Pharmaceutical Co., Ltd.Inventors: Atsushi Izumi, Yuta Ochiai, Shinsuke Umegaki, Tomo Iwamura, Makoto Suzuki, Hidetaka Sakurai, Shinji Yamaguchi
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Publication number: 20080053367Abstract: A method as well as an apparatus for manufacturing a tube according to the EFG-method. To manufacture tubes with a desired even wall thickness, it is proposed to draw the tube from a melt whose temperature can be controllably adjusted section by section.Type: ApplicationFiled: August 16, 2007Publication date: March 6, 2008Applicant: SCHOTT SOLAR GMBHInventors: Albrecht SEIDL, Ingo SCHWIRTLICH
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Patent number: 7172656Abstract: In a device and a method for measuring the position of the liquid surface of a melt while a single crystal is being pulled, two measuring-lines are defined in an image of a fusion ring which is captured by means of a two-dimensional CCD camera, the intersections of the respective measuring lines and the fusion ring, on the opposite sides of the fusion ring, are detected, and the central position of the single crystal is calculated based on the intervals between the intersections on the opposite sides of the fusion ring, whereby the position of the liquid surface of the melt is determined.Type: GrantFiled: April 13, 2004Date of Patent: February 6, 2007Assignee: Sumitomo Mitsubishi Silicon CorporationInventors: Keiichi Takanashi, Nobumitsu Takase
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Patent number: 7001455Abstract: Semiconductor materials such as silicon particles are doped by mixing the semiconductor material with a solution having a dopan and a solvent. The solvent is removed from the wetted surface of the particles of the semiconductor material, thereby yielding particles that are substantially free from the solvent and are uniformly coated with the dopant.Type: GrantFiled: August 8, 2002Date of Patent: February 21, 2006Assignee: Evergreen Solar, Inc.Inventors: Mary C. Cretella, Richard L. Wallace, Jr.
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Patent number: 6946029Abstract: An inexpensive sheet with excellent evenness and a desired uniform thickness can be obtained by cooling a base having protrusions, dipping the surfaces of the protrusions of the cooled base into a melt material containing at least one of a metal material and a semiconductor material for crystal growth of the material on the surfaces of the protrusions. In addition, by rotating a roller having on its peripheral surface protrusions and a cooling portion for cooling said protrusions, the surfaces of the cooled protrusions can be dipped into a melt material containing at least one of a metal material and a semiconductor material for crystal growth of the material on the surfaces of the protrusions. Thus, a sheet with a desired uniform thickness can be obtained without slicing process.Type: GrantFiled: February 25, 2004Date of Patent: September 20, 2005Assignee: Sharp Kabushiki KaishaInventors: Yoshihiro Tsukuda, Hiroshi Taniguchi, Kozaburou Yano, Kazuto Igarashi, Hidemi Mitsuyasu, Tohru Nunoi
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Patent number: 6821338Abstract: The invention provides a method of increasing the extent of a desired biaxial orientation of a previously formed non-single-crystal structure by contacting said structure with an oblique particle beam thereby forming in the structure a nucleating surface having increased desired biaxial orientation. The method can further include a step of epitaxially growing the crystalline formation using the nucleating surface to promote the epitaxial growth. The invention also provides a crystalline structure containing a nucleating surface formed by contacting a previously formed non-single-crystal structure with an oblique particle beam, from 0 to 10 adjacent orientation-transmitting layers, and a crystalline active layer. In this structure, the active layer is oriented in registry with the nucleating surface.Type: GrantFiled: December 15, 2000Date of Patent: November 23, 2004Assignee: The Regents of the University of CaliforniaInventors: Ronald P. Reade, Paul H. Berdahl, Richard E. Russo
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Publication number: 20040083946Abstract: Methods and apparatus for concurrent growth of multiple crystalline ribbons from a single crucible employ meniscus shapers to facilitate continuous growth of discrete and substantially flat crystalline ribbons having controlled width.Type: ApplicationFiled: October 30, 2002Publication date: May 6, 2004Applicant: Evergreen Solar Inc.Inventor: Richard Lee Wallace
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Patent number: 6673148Abstract: An apparatus and method is provided for manufacturing a semiconductor substrate such as web crystals. The apparatus includes a chamber and a growth hardware assembly housed within the chamber. A magnetic field system produces a vertical magnetic field within the chamber.Type: GrantFiled: September 5, 2002Date of Patent: January 6, 2004Assignee: Ebara Solar, Inc.Inventors: Hilton F. Glavish, Hideyuki Isozaki, Keiji Maishigi, Kentaro Fujita
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Patent number: 6669776Abstract: An apparatus and method is provided for manufacturing a semiconductor substrate such as web crystals. The apparatus includes a chamber and a growth hardware assembly housed within the chamber. A magnetic field system produces a vertical magnetic field within the chamber.Type: GrantFiled: August 2, 2002Date of Patent: December 30, 2003Assignee: Ebara Solar, Inc.Inventors: Hilton F. Glavish, Hideyuki Isozaki, Keiji Maishigi, Kentaro Fujita
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Patent number: 6663710Abstract: An apparatus and a method that permits a seed crystal to be directed to a precise location of a melt for growing a ribbon-shaped crystal, but after the crystal has commenced growing, the ribbon-shaped crystal is continuously pulled up so as to produce a longitudinally extending crystal using a continuous pulling device. The method for producing a ribbon-shaped crystal includes growing a ribbon-shaped crystal on a seed crystal using a linear pulling device for pulling the seed crystal and a crystal growing at the end of the seed crystal in a vertical direction, and continuing to pull the ribbon-shaped crystal by using a continuous pulling device having a continuous pulling mechanism.Type: GrantFiled: October 29, 2001Date of Patent: December 16, 2003Assignee: Ebara CorporationInventors: Kentaro Fujita, Kenji Terao, Hideyuki Isozaki, Iwao Satoh
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Patent number: 6562132Abstract: An improved mechanical arrangement controls the introduction of silicon particles into an EFG (Edge-defined Film-fed Growth) crucible/die unit for melt replenishment during a crystal growth run. A feeder unit injects silicon particles upwardly through a center hub of the crucible/die unit and the mechanical arrangement intercepts the injected particles and directs them so that they drop into the melt in a selected region of the crucible and at velocity which reduces splashing, whereby to reduce the likelihood of interruption of the growth process due to formation of a solid mass of silicon on the center hub and adjoining components. The invention also comprises use of a Faraday ring to alter the ratio of the electrical currents flowing through primary and secondary induction heating coils that heat the crucible die unit and the mechanical arrangement.Type: GrantFiled: April 4, 2001Date of Patent: May 13, 2003Assignee: ASE Americas, Inc.Inventors: Brian H. Mackintosh, Marc Ouellette
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Publication number: 20030079673Abstract: The present invention provides for a process for preparing a single crystal silicon ingot by the Czochralski method. The process comprises selecting a seed crystal for Czochralski growth wherein the seed crystal comprises vacancy dominated single crystal silicon.Type: ApplicationFiled: October 28, 2002Publication date: May 1, 2003Applicant: MEMC Electronic Materials, Inc.Inventors: Hariprasad Sreedharamurthy, Mohsen Banan
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Patent number: 6527851Abstract: A planar body with a good crystallinity is grown continuously and stably when a planar body of an oxide single crystal is grown by a micro pulling-down method. A raw material of the oxide single crystal is melted in a crucible 7. A fibrous seed crystal 15 is contacted to a melt 18, and then the melt 18 is pulled down from an opening 13c of the crucible 7 by lowering the seed crystal. A shoulder portion 14A is produced following the seed crystal, and a planar body 14B is produced following the shoulder portion. In this case, differences in lattice constants between each crystal axis of the seed crystal and each corresponding crystal axis of the shoulder portion are controlled at 1% or less, respectively.Type: GrantFiled: March 2, 2001Date of Patent: March 4, 2003Assignee: NGK Insulators, Ltd.Inventors: Katsuhiro Imai, Akihiko Honda, Minoru Imaeda
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Patent number: 6521827Abstract: An inexpensive sheet with excellent evenness and a desired uniform thickness can be obtained by cooling a base having protrusions, dipping the surfaces of the protrusions of the cooled base into a melt material containing at least one of a metal material and a semiconductor material for crystal growth of the material on the surfaces of the protrusions. In addition, by rotating a roller having on its peripheral surface protrusions and a cooling portion for cooling said protrusions, the surfaces of the cooled protrusions can be dipped into a melt material containing at least one of a metal material and a semiconductor material for crystal growth of the material on the surfaces of the protrusions. Thus, a sheet with a desired uniform thickness can be obtained without slicing process.Type: GrantFiled: November 29, 2000Date of Patent: February 18, 2003Assignee: Sharp Kabushiki KaishaInventors: Yoshihiro Tsukuda, Hiroshi Taniguchi, Kozaburou Yano, Kazuto Igarashi, Hidemi Mitsuyasu, Tohru Nunoi
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Patent number: 6482261Abstract: An apparatus and method is provided for manufacturing a semiconductor substrate such as web crystals. The apparatus includes a chamber and a growth hardware assembly housed within the chamber. A magnetic field system produces a vertical magnetic field within the chamber.Type: GrantFiled: December 29, 2000Date of Patent: November 19, 2002Assignee: Ebara Solar, Inc.Inventors: Hilton F. Glavish, Hideyuki Isozaki, Keiji Maishigi, Kentaro Fujita
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Patent number: 6471768Abstract: A seed crystal is lowered toward a melt, and a contact between the seed crystal and the melt is detected using an image captured by an imaging device. The temperature of the melt is adjusted to keep a meniscus of the melt in contact with the seed crystal. The temperature of the melt is then lowered to create a wingout extending from the seed crystal. The length and symmetry of the wingout is detected with an image captured by the imaging device, and a ribbon of crystal following the wingout starts to be lifted from the melt.Type: GrantFiled: September 6, 2001Date of Patent: October 29, 2002Assignee: Ebara CorporationInventors: Kenji Terao, Hideyuki Isozaki, Taro Takahashi, Motohiro Niijima
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Patent number: 6200383Abstract: The invention features a method of controlling the depth of a melt for or crystal growth. According to the method, an input signal is applied through a crucible and a material disposed within the crucible. An output signal generated in response to the input signal is measured. The output signal relates to the depth of the melt. An amount of the source material introduced into the melt is adjusted to maintain the depth of the melt at a substantially constant level using the output signal.Type: GrantFiled: May 3, 1999Date of Patent: March 13, 2001Assignee: Evergreen Solar, Inc.Inventors: Richard L. Wallace, Jr., Richard C. Krauchune
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Patent number: 6139811Abstract: A new EFG (Edge-defined Film-fed Growth) crucible/die configuration is provided which (a) overcomes the tendency for silicon feed material to form a solid mass near the center hub region in the hot-zone during the crystal growth and (b) prevent the crucible/die unit from fracturing its supporting susceptor during cool-down.Type: GrantFiled: March 25, 1999Date of Patent: October 31, 2000Assignee: ASE Americas, Inc.Inventors: Jeffrey X. Cao, Robert M. Giancola, Charles G. Caprini, David Garcia
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Patent number: 5968263Abstract: An open loop control method for use with an apparatus for growing a silicon single crystal having a zero dislocation state and an improved diameter and growth rate uniformity in accordance with the Czochralski process. According to the invention, a heat and mass transfer model based on the silicon charged to a crucible is determined as a function of one or more reference parameters. The reference parameter values are determined from the growth of a reference silicon single crystal. A power profile is then determined as a function of the heat and mass transfer model for a given pull rate profile and model diameter profile. The power profile generated is representative of the power supplied to a heater for providing an amount of thermal energy to the crucible for substantially maintaining a thermal equilibrium at the interface between the melt and the crystal.Type: GrantFiled: April 1, 1998Date of Patent: October 19, 1999Assignee: MEMC Electronic Materials, Inc.Inventors: Sunil Grover, Steven L. Kimbel
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Patent number: 5919304Abstract: When producing an oxide-series single crystal by continuously pulling downwardly by .mu. pulling down method, the composition of the single crystal can properly and quickly controlled to continuously produce the single crystal of a constant composition by changing the pulling rate of the single crystal. Preferably, the pulling rate is 20-300 mm/hr, and the pulling rate is decreased with the proceeding of growing of the single crystal.Type: GrantFiled: August 23, 1996Date of Patent: July 6, 1999Assignee: NGK Insulators, Ltd.Inventors: Minoru Imaeda, Katsuhiro Imai, Tsuguo Fukuda
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Patent number: 5885345Abstract: A shaper (2) is arranged within a shaping vessel (1). A raw material for a crystal is inserted into the shaping vessel (1) and a crystal melt (5) is formed by setting it in a predetermined atmosphere and heating it. A mechanical force F1 is applied to the crystal melt (5), which is present on the upper surface of the shaper (2), by a pressuring member (4) from above. The crystal melt (5) has nowhere to escape but a gap (3) formed by the shaper(2), so it is injected into that gap (3) as shown by the arrow. This method of fabricating a shaped crystal is suitable for fabricating a monocrystal or multicrystal semiconductor from a material such as silicon, germanium, or bismuth telluride.Type: GrantFiled: May 21, 1997Date of Patent: March 23, 1999Assignee: Union Material Inc.Inventor: Shiro Sakuragi
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Patent number: 5846318Abstract: Method and system for use with a Czochralski crystal growing apparatus. The crystal growing apparatus has a heated crucible for melting solid silicon to form a melt from which the single crystal is pulled. The melt has an upper surface above which unmelted silicon is exposed until melted. A camera generates images of a portion of the interior of the crucible. Each image includes a plurality of pixels and each pixel has a value representative of an optical characteristic of the image. An image processor processes the images as a function of the pixel values to detect edges in the images and groups the detected edges as a function of their locations in the images to define objects in the images. The defined objects each include one or more pixels and at least one of the defined objects is representative of a portion of solid silicon which is visible on the melt surface.Type: GrantFiled: July 17, 1997Date of Patent: December 8, 1998Assignee: MEMC Electric Materials, Inc.Inventor: Massoud Javidi
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Patent number: 5458083Abstract: A method of growing a rod form of a single oxide crystal is disclosed. The method uses a slit die which is placed in a crucible with a starting melt. The melt is seeded with a seed crystal while being rotated. The resulting crystal will have the same sectional shape as the shape of the upper surface of the die.Type: GrantFiled: March 28, 1994Date of Patent: October 17, 1995Assignee: Chichibu Cement Co., Ltd.Inventors: Tsuguo Fukuda, Keigo Hoshikawa, Hiroshi Machida
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Patent number: 5454879Abstract: The invention provides for methods that include the steps of continuous liquid phase epitaxy followed by evaporation or implantation of dopant, barrier-interconnect, and additional interconnect-dopant layers to grow cylindrical helical multi-layer structures which form long series chains of photocells when sliced, etched, and passivated. The invention also provides for uniquely formed photovoltaic devices fabricated by the method, as well as the use of such devices as infrared photovoltaic generators using radiation from a local thermal source or reservoir.Type: GrantFiled: March 17, 1994Date of Patent: October 3, 1995Inventor: Stephen R. Bolger