Including Heating Or Cooling Details (e.g., Shield Configuration) Patents (Class 117/217)
-
Patent number: 8652257Abstract: A melting furnace, mounted adjacent a growth furnace, comprises a receiving container for melting therein raw material in a particle or powder form falling in it from a feeder. The receiving container accommodates a set of slope-wise plates providing a distributed sliding of partially melted raw material particles over the surface of these plates and their complete melting while moving downward; eventually the melted raw material flows into the crucible of the growth furnace through a conveying tube extending slantingly from the bottom of the receiving container to the crucible through coaxial openings in housings of both furnaces. The rate of feeding is given solely by the feeder, and at continuous feeding the raw material flows continuously by gravity from the feeder to the crucible of the growth furnace, first in a solid state (powder, granules, pellets, etc.) and then in a liquid state.Type: GrantFiled: February 22, 2010Date of Patent: February 18, 2014Inventors: Lev George Eidelman, Vladimir Ilya Zheleznyak
-
Publication number: 20140030501Abstract: Apparatus and method for a crucible-less production of silicon ingots, wherein a support with a seed layer and a liquid layer is gradually lowered in a temperature field with a vertical gradient to solidify the liquid layer in a controlled way.Type: ApplicationFiled: July 30, 2012Publication date: January 30, 2014Inventors: Nathan STODDARD, Wilfred Von AMMON
-
Patent number: 8597756Abstract: Provided are a resistance heated sapphire single crystal ingot grower, a method of manufacturing a resistance heated sapphire single crystal ingot, a sapphire single crystal ingot, and a sapphire wafer. The resistance heated sapphire single crystal ingot grower comprises according to an embodiment includes a chamber, a crucible included in the chamber and containing an alumina melt, and a resistance heating heater included inside the chamber and heating the crucible.Type: GrantFiled: January 19, 2012Date of Patent: December 3, 2013Assignee: LG Siltron Inc.Inventors: Do Won Song, Young Hee Mun, Sang Hoon Lee, Seong Oh Jeong, Chang Youn Lee
-
Patent number: 8580036Abstract: The method and apparatus includes a vessel having a bottom and sidewalls arranged to house the material in a molten state. A temperature controlled horizontally oriented, cooling plate is movable into and out of the top of the molten material. When the cooling plate is lowered into the top of the melt, an ingot of solid silicon is solidified downwards.Type: GrantFiled: May 10, 2006Date of Patent: November 12, 2013Assignee: Elkem Solar ASInventor: Kenneth Friestad
-
Publication number: 20130284083Abstract: A manufacturing apparatus for SiC single crystal has a control unit to control induction heating such that frequency f (Hz) of alternating current to be passed to the induction heating unit satisfies Formula (1); D1 (mm) is permeation depth of electromagnetic waves into a side wall of a crucible by the heating unit, D2 (mm) is permeation depth of electromagnetic waves into a SiC solution, T (mm) is thickness of the crucible side wall of the crucible, and R (mm) is crucible inner radius: (D1?T)×D2/R>1??(1) where, D1 is defined by Formula (2), and D2 by Formula (3): D1=503292×(1/(f×?c×?c))1/2??(2) D2=503292×(1/(f×?s×?s))1/2??(3); ?c is electric conductivity (S/m) of the sidewall, ?s is electric conductivity (S/m) of the SiC solution; ?c is relative permeability of the sidewall, and ?s relative permeability of the SiC solution.Type: ApplicationFiled: December 26, 2011Publication date: October 31, 2013Applicants: Toyota Jidosha Kabushiki Kaisha, Nippon Steel & Sumitomo Metal CorporationInventors: Nobuhiro Okada, Kazuhito Kamei, Kazuhiko Kasunoki, Nobuyoshi Yashiro, Kouji Moriguchi, Hironori Daikoku, Hiroshi Suzuki, Tomokazu Ishii, Hidemitsu Sakamoto, Motohisa Kado, Yoichiro Kawai
-
Publication number: 20130269601Abstract: A graphite heater includes a main body, and a plurality of support portions. The main body includes a tubular portion and a plurality of terminal portions. The plurality of terminal portions extend outward along a central axis of the tubular portion. Each of the plurality of terminal portions has a first planar surface facing the central axis or facing an opposite side of the central axis. The plurality of support portions are each joined to each of the plurality of terminal portions. Each of the plurality of support portions has a second planar surface. The first planar surface and the second planar surface are joined through a carbon-based adhesion layer.Type: ApplicationFiled: April 8, 2013Publication date: October 17, 2013Applicant: IBIDEN CO., LTD.Inventors: Kazutaka MAJIMA, Eita IYOSHI
-
Publication number: 20130247815Abstract: A single crystal production apparatus including: a crucible containing raw material melt; a heater heating the raw material melt; a cooling cylinder that is cooled forcedly by a cooling medium; and a cooling chamber that houses the crucible, the heater, and the cooling cylinder, wherein a heat-shielding member having a heat insulating material is disposed, near an interface between the raw material melt and a single crystal being pulled, in such a way as to surround the single crystal being pulled, the cooling cylinder is disposed above the heat-shielding member in such a way as to surround the single crystal being pulled, and a cooling-cylinder-peripheral heat insulator is disposed with a gap provided between the cooling-cylinder-peripheral heat insulator and a periphery of the cooling cylinder in such a way as to surround the cooling cylinder.Type: ApplicationFiled: January 6, 2012Publication date: September 26, 2013Applicant: SHIN-ETSU HANDOTAI CO., LTD.Inventors: Kosei Sugawara, Suguru Matsumoto, Toshiro Shimada, Ryoji Hoshi
-
Patent number: 8535441Abstract: A lid for a crystal growth chamber crucible is constructed by forming arcuate sector-shaped portions and coupling them in abutting relationship, for example by welding, to form an annular profile fabricated lid. The arcuate sector-shaped portions may be formed and removed from a lid fabrication blank with less waste than when unitary annular lids are formed and removed from a similarly sized fabrication blank. For example, the sector-shaped portions may be arrayed in an undulating pattern on the fabrication sheet.Type: GrantFiled: August 3, 2010Date of Patent: September 17, 2013Assignee: Siemens Medical Solutions USA, Inc.Inventors: Mark S. Andreaco, Troy Marlar, Brant Quinton
-
Publication number: 20130233241Abstract: A single crystal pulling apparatus (1) has a quartz crucible (2) for accommodating silicon melt (3), a graphite crucible (4) for retaining the quartz crucible (2), a tray (5) for securing and holding the graphite crucible (4) from below, and a crucible rotating shaft (6) for supporting the tray (5) from below and for elevating and lowering the tray (5) and the crucibles (2), (4) while rotating them. A low heat conductive member (10) is interposed on a joint surface between the tray (5) and the crucible rotating shaft (6). The low heat conductive member (10) is formed in a substantially tubular shape, and is interposed in such a manner that a protruding portion of the crucible rotating shaft (6) is inserted through a center hole of the low heat conductive member (10). Thereby, a gap portion (11) is formed below a bottom portion of the tray (5).Type: ApplicationFiled: November 21, 2011Publication date: September 12, 2013Applicant: TOYO TANSO CO., LTD.Inventors: Osamu Okada, Masaaki Kawakami
-
Publication number: 20130220216Abstract: Silicon single crystals are grown from the melt by providing the melt in a crucible; imposing a horizontal magnetic field on the melt; directing a gas between the single crystal and a heat shield to a melt free surface, and controlling the gas to flow over a region of the melt free surface extending in a direction substantially perpendicular to the magnetic induction. A suitable apparatus has a crucible for holding the melt; a heat shield surrounding the silicon single crystal having a lower end which is connected to a bottom cover facing a melt free surface and a non-axisymmetric shape with respect to a crucible axis, such that gas which is directed between the crystal and the heat shield to the melt free surface is forced to flow over a region of the melt which extends substantially perpendicular to the magnetic induction.Type: ApplicationFiled: April 8, 2013Publication date: August 29, 2013Applicant: Siltronic AGInventor: Siltronic AG
-
Publication number: 20130224100Abstract: A method and apparatus for bulk Group-III nitride crystal growth through inductive stirring in a sodium flux growth technique. A helical electromagnetic coil is closely wound around a non-conducting cylindrical crucible containing a conductive crystal growth solution, including both precursor gallium and sodium, wherein a nitrogen-containing atmosphere can be maintained at any pressure. A seed crystal is introduced with the crystal's growth interface submerged slightly below the solution's surface. Electrical contact is made to the coil and an AC electrical field is applied at a specified frequency, in order to create eddy currents within the conductive crystal growth solution, resulting in a steady-state flux of solution impinging on the submerged crystal's growth interface.Type: ApplicationFiled: February 25, 2013Publication date: August 29, 2013Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIAInventor: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
-
Patent number: 8518180Abstract: A silicon single crystal pull-up apparatus is used to pull up a doped silicon single crystal from a melt by means of the Czochralski process and includes a pull-up furnace, a sample chamber which is externally mounted on the pull-up furnace and houses a sublimable dopant, a shielding means for thermally isolating the interior of the pull-up furnace and the interior of the sample chamber, a sample tube which can be raised and lowered between the interior of the sample chamber and the interior of the pull-up furnace, and a raising and lowering means which is provided with guide rails on which the sample tube can slide and a wire mechanism by which the sample tube is raised and lowered along the guide rails.Type: GrantFiled: July 28, 2009Date of Patent: August 27, 2013Assignee: Sumco Techxiv CorporationInventors: Yasuhito Narushima, Shinichi Kawazoe, Fukuo Ogawa, Toshimichi Kubota, Tomohiro Fukuda
-
Publication number: 20130213295Abstract: An apparatus for growing a crystalline sheet from a melt includes a cold block assembly. The cold block assembly may include a cold block and a shield surrounding the cold block and being at an elevated temperature with respect to that of the cold block, the shield defining an opening disposed along a surface of the cold block proximate a melt surface that defines a cold area comprising a width along a first direction of the cold block, the cold area operable to provide localized cooling of a region of the melt surface proximate the cold block. The apparatus may further include a crystal puller arranged to draw a crystalline seed in a direction perpendicular to the first direction when the cold block assembly is disposed proximate the melt surface.Type: ApplicationFiled: February 17, 2012Publication date: August 22, 2013Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.Inventors: Brian H. Mackintosh, Peter L. Kellerman, Dawei Sun
-
Patent number: 8500905Abstract: Disclosed is a sapphire single crystal growing apparatus using the Kyropoulos method, and more particularly, is a Kyropoulos sapphire single crystal growing apparatus using an elliptic crucible, which can increase the recovery rate by the elliptic crucible and anisotropic heating.Type: GrantFiled: January 5, 2012Date of Patent: August 6, 2013Assignee: DK Aztec Co., Ltd.Inventor: Jong Kwan Park
-
Patent number: 8475590Abstract: An apparatus and method for producing a crystalline ribbon continuously from a melt pool of liquid feed material, e.g. silicon. The silicon is melted and flowed into a growth tray to provide a melt pool of liquid silicon. Heat is passively extracted by allowing heat to flow from the melt pool up through a chimney. Heat is simultaneously applied to the growth tray to keep the silicon in its liquid phase while heat loss is occurring through the chimney. A template is placed in contact with the melt pool as heat is lost through the chimney so that the silicon starts to “freeze” (i.e. solidify) and adheres to the template. The template is then pulled from the melt pool thereby producing a continuous ribbon of crystalline silicon.Type: GrantFiled: May 23, 2012Date of Patent: July 2, 2013Assignee: AMG Idealcast Solar CorporationInventor: Roger F. Clark
-
Patent number: 8460462Abstract: Silicon single crystals are grown from the melt by providing the melt in a crucible; imposing a horizontal magnetic field on the melt; directing a gas between the single crystal and a heat shield to a melt free surface, and controlling the gas to flow over a region of the melt free surface extending in a direction substantially perpendicular to the magnetic induction. A suitable apparatus has a crucible for holding the melt; a heat shield surrounding the silicon single crystal having a lower end which is connected to a bottom cover facing a melt free surface and a non-axisymmetric shape with respect to a crucible axis, such that gas which is directed between the crystal and the heat shield to the melt free surface is forced to flow over a region of the melt which extends substantially perpendicular to the magnetic induction.Type: GrantFiled: April 23, 2010Date of Patent: June 11, 2013Assignee: Siltronic AGInventor: Piotr Filar
-
Publication number: 20130125810Abstract: The present invention is a semiconductor single crystal manufacturing apparatus including, within a growth furnace main body, a crucible, and a heater disposed around the crucible, wherein a heat insulating cylinder is disposed around the heater within the growth furnace main body, the heat insulating cylinder includes a step portion dividing the heat insulating cylinder into the upper part and the lower part at the inside surface thereof, the inner diameter of the lower part is larger than the inner diameter of the upper part, a heat insulating plate is disposed below the heater and on the inside of the lower part of the heat insulating cylinder within the growth furnace main body, and the diameter of the heat insulating plate is larger than the inner diameter of the upper part of the heat insulating cylinder and is smaller than the inner diameter of the lower part.Type: ApplicationFiled: July 6, 2011Publication date: May 23, 2013Applicant: SHIN-ETSU HANDOTAI CO., LTD.Inventors: Shou Takashima, Yuuichi Miyahara, Atsushi Iwasaki, Nobuaki Mitamura, Susumu Sonokawa
-
Patent number: 8414701Abstract: In this method for manufacturing a silicon single crystal, when growing the silicon single crystal, in order to control the V/G value with high accuracy so as to yield a desired defect-free region, it is important to conduct the pulling at a constant pulling rate. In the method for pulling a silicon single crystal in the present invention, in order to control the V/G value with high accuracy, the distance ?t between the melt surface of the silicon melt and the heat shielding member that is disposed so as to oppose to and to partially cover this melt surface is continuously measured while pulling (growing) the silicon single crystal.Type: GrantFiled: January 7, 2010Date of Patent: April 9, 2013Assignee: Sumco CorporationInventor: Keiichi Takanashi
-
Patent number: 8404046Abstract: A velocity of Ar gas flow passing through between a lower end of a cylindrical body and a thermal shielding body is influenced by arrangement of a pulling path of single crystal silicon, a cylindrical body, and a thermal shielding body. Accordingly, the velocity of the Ar gas flow passing through between a lower end of the cylindrical body and the thermal shielding body is controlled by adjusting a relative position of the pulling path of the single crystal silicon, the cylindrical body, and the thermal shielding body. As described above, dust falling off to silicon melt can be reduced, thereby preventing deterioration in quality of the single crystal silicon.Type: GrantFiled: June 27, 2006Date of Patent: March 26, 2013Assignee: Sumco Techxiv CorporationInventors: Makato Kamogawa, Koichi Shimomura, Yoshiyuki Suzuki, Daisuke Ebi
-
Patent number: 8361223Abstract: Provided is a method for reliably and easily measuring a liquid level by selecting an optimal reflection method from among a plurality of reflection methods, depending on growing conditions of a pulled single crystal. The method comprises: setting a plurality of measuring methods having different ways of determining the liquid level; creating, in advance, information that associates with a gap between the outer peripheral face of the single crystal and a predetermined position located between a heat shield and the outer peripheral face of the single crystal; determining the gap in accordance with manufacturing conditions; selecting a measuring method associated to the determined gap, on the basis of the information; and measuring the liquid level of a melt surface in use of the selected measuring method.Type: GrantFiled: July 18, 2008Date of Patent: January 29, 2013Assignee: Sumco Techxiv CorporationInventors: Toshio Hayashida, Ayumi Kihara, Takuaki Takami
-
Publication number: 20130014695Abstract: A ring-shaped resistance heater for supplying heat to a growing single crystal, comprising: an upper and a lower ring, which are electrically conductively connected by means of a loop adjacent to a ring gap of the lower ring, such that the flow direction of electric current which is conducted through the rings is opposite in the rings; connecting elements which hold the upper and lower rings together at a distance; and current leads for conducting electric current through the upper and lower rings.Type: ApplicationFiled: July 10, 2012Publication date: January 17, 2013Applicant: SILTRONIC AGInventors: Dieter Knerer, Werner Schachinger
-
Patent number: 8337616Abstract: A single-crystal manufacturing apparatus comprises a chamber, a crucible in the chamber, a heater arranged around the crucible, a lifting mechanism for lifting a seed crystal, and a guide passage for the seed crystal and a grown single crystal. In the single-crystal manufacturing apparatus, a material polycrystal contained the crucible is melted by a heater, and the seed crystal is made to contact the molten polycrystal and is lifted. The single-crystal manufacturing apparatus comprises a cylindrical quartz tube having a curved bottom portion, and a dome-shaped quartz plate. The curved bottom portion faces the crucible from the upper portion of the chamber through the guide passage. The quartz plate is arranged to enclose the quartz tube. The quartz tube has a reflecting structure for reflecting a heat ray from at least its bottom portion whereas the quartz plate has a reflecting structure for reflecting the heat ray to the crucible.Type: GrantFiled: December 1, 2008Date of Patent: December 25, 2012Assignee: Shin-Etsu Handotai Co., Ltd.Inventor: Takao Abe
-
Patent number: 8328932Abstract: A ribbon crystal pulling furnace has an interior for enclosing at least a portion of one or more ribbon crystals, and an afterheater positioned within the interior. The afterheater has at least one wall with one or more openings that facilitate control of the temperature profile within the furnace.Type: GrantFiled: June 13, 2008Date of Patent: December 11, 2012Assignee: Evergreen Solar, IncInventors: Weidong Huang, David Harvey, Scott Reitsma
-
Patent number: 8328937Abstract: A seed crystal axis used in a solution growth of single crystal production system is provided to prevent formation of polycrystals and grow a single crystal with a high growth rate. The seed crystal axis includes a seed crystal bonded to a seed crystal support member between which is interposed a laminated carbon sheet having a high thermal conductivity in a direction perpendicular to a solution surface of a solvent. The laminated carbon sheet includes a plurality of carbon thin films laminated with an adhesive or a plurality of pieces with differing lamination directions arranged in a lattice. Alternatively, a wound carbon sheet including a carbon strip wound concentrically from the center or a wound carbon sheet including a plurality of carbon strips with differing thicknesses which are wound and laminated from the center may be provided.Type: GrantFiled: July 21, 2009Date of Patent: December 11, 2012Assignee: Toyota Jidosha Kabushiki KaishaInventors: Hidemitsu Sakamoto, Yasuyuki Fujiwara
-
Publication number: 20120288432Abstract: The present disclosure provides an apparatus for manufacturing a single crystal silicon ingot having a dual crucible for silicon melting which can be reused due to a dual crucible structure. The apparatus includes a dual crucible for silicon melting, into which raw silicon is charged, a crucible heater heating the dual crucible to melt the raw silicon into molten silicon, a crucible drive unit controlling rotation and elevation of the dual crucible, and a pull-up drive unit disposed above the dual crucible and pulling up a seed crystal dipped in the molten silicon to produce a silicon ingot. The dual crucible has a container shape open at an upper side thereof, and includes a graphite crucible having an inclined surface connecting an inner bottom and an inner wall, and a quartz crucible inserted into the graphite crucible and receiving the raw silicon charged into the dual crucible.Type: ApplicationFiled: October 6, 2011Publication date: November 15, 2012Applicant: KOREA INSTITUTE OF ENERGY RESEARCHInventors: Jin-Seok LEE, Bo-Yun JANG, Young-Soo AHN
-
Publication number: 20120282426Abstract: Provided are a resistance heated sapphire single crystal ingot grower, a method of manufacturing a resistance heated sapphire single crystal ingot, a sapphire single crystal ingot, and a sapphire wafer. The resistance heated sapphire single crystal ingot grower comprises according to an embodiment includes a chamber, a crucible included in the chamber and containing an alumina melt, and a resistance heating heater included inside the chamber and heating the crucible.Type: ApplicationFiled: January 19, 2012Publication date: November 8, 2012Inventors: Do Won SONG, Young Hee Mun, Sang Hoon Lee, Seong Oh Jeong, Chang Youn Lee
-
Patent number: 8303711Abstract: An electrode anchoring structure in a crystal-growing furnace includes at least one graphite electrode pillar, at least one metal electrode pillar, at least one anchoring base, and at least one locking nut, wherein the graphite electrode pillar is engaged with a nut base of the metal electrode pillar, and the at least one metal electrode pillar is, through the anchoring base, is secured to furnace wall. Therefore, the at least one graphite electrode pillar acts both as weight support and electrical-conducting electrode. Since the flange welded on furnace wall has a greater area exposed to the atmosphere, a desirable cooling effect can be achieved, and temperature drop can be expedited if water spray is performed. The anchoring base is provided with a resilient washer, such that a resilient force can be employed to adjust loading of each graphite electrode pillar in an axial direction.Type: GrantFiled: July 28, 2008Date of Patent: November 6, 2012Assignee: Green Energy Technology Inc.Inventors: Shiow-Jeng Lew, Hur-Lon Lin
-
Publication number: 20120266809Abstract: Provides are an insulation device of a single crystal growth device and a single crystal growth device including the same. The insulation device is installed inside a chamber of the single crystal growth device and the insulation device includes a plurality of insulation blocks that are spaced by a first distance.Type: ApplicationFiled: July 5, 2012Publication date: October 25, 2012Inventors: Sang-Hoon Lee, Hyun-Jung Oh, Il-Soo Choi
-
Patent number: 8280468Abstract: A superconducting magnet device for a single crystal pulling apparatus is arranged outside a pulling furnace containing a crucible for melting a single crystal material therein so as to apply a magnetic field to the melted single crystal material. The superconducting magnet device for a single crystal pulling apparatus includes a cryostat containing a superconducting coil therein, and a refrigerator port arranged on the outer circumferential surface of the cryostat and provided with a cryogenic refrigerator that cools the superconducting coil. The cryogenic refrigerator is provided in a region of the outer surface region of the cryostat at which the intensity of the magnetic field generated by the superconducting coil is weak.Type: GrantFiled: May 25, 2009Date of Patent: October 2, 2012Assignee: Kabushiki Kaisha ToshibaInventors: Shohei Takami, Tsutomu Shimonosono, Tomoko Ota, Yuuji Minemoto, Yoshifumi Nagamoto, Makoto Ushijima
-
Patent number: 8268077Abstract: An upper heater for use in the production of a single crystal, the upper heater having electrodes to which a current is supplied and a heat generating section which generates heat by resistance heating are provided, the upper heater being used when a single crystal is produced by a Czochralski method, the upper heater being placed above a graphite heater which is placed so as to surround a crucible containing silicon melt, wherein the heat generating section is ring-shaped and is placed so as to surround the crucible, and has slits formed from the inside and the outside of the heat generating section in a horizontal direction. As a result, the upper heater controls a crystal defect of the single crystal efficiently and improves the oxygen concentration controllability.Type: GrantFiled: October 8, 2009Date of Patent: September 18, 2012Assignee: Shin-Etsu Handotai Co., Ltd.Inventor: Kiyotaka Takano
-
Patent number: 8262797Abstract: A weir is extended vertically to define an optimal annular gap between the top of the weir and the underside of a super-adjacent heat shield. The annular gap provides a high velocity stream of argon gas to be directed from the growth region to the melt region to substantially eliminate the transport of airborne particles from the melt region to the growth region. The tall weir may be configured as a modular, reusable weir extension supportably engaged with an outer (and/or inner) weir.Type: GrantFiled: March 11, 2008Date of Patent: September 11, 2012Assignee: Solaicx, Inc.Inventors: David L. Bender, David E. A. Smith
-
Publication number: 20120222613Abstract: A velocity of Ar gas flow passing through between a lower end of a cylindrical body and a thermal shielding body is influenced by arrangement of a pulling path of single crystal silicon, a cylindrical body, and a thermal shielding body. Accordingly, the velocity of the Ar gas flow passing through between a lower end of the cylindrical body and the thermal shielding body is controlled by adjusting a relative position of the pulling path of the single crystal silicon, the cylindrical body, and the thermal shielding body. As described above, dust falling off to silicon melt can be reduced, thereby preventing deterioration in quality of the single crystal silicon.Type: ApplicationFiled: May 17, 2012Publication date: September 6, 2012Applicant: SUMCO TECHXIV KABUSHIKI KAISHAInventors: Makato Kamogawa, Koichi Shimomura, Yoshiyuki Suzuki, Daisuke EBI
-
Publication number: 20120204784Abstract: The present invention is a single-crystal manufacturing apparatus for manufacturing a single crystal ingot according to the Czochralski method comprising: a crucible that contains a raw material melt; a heater having a cylindrical heat generating portion that surrounds the crucible; a main chamber that accommodates the heater; a heater electrode that supports the heater and supplies current to the heater; and a heat insulating plate provided below the cylindrical heat generating portion of the heater, wherein the heat insulating plate is fixed to and supported by the heater electrode through an insulating stationary member, and an insulating support member is provided on an upper surface of the heat insulating plate at a position at which the insulating support member faces a lower end of the cylindrical heat generating portion. Its object is to provide a single-crystal manufacturing apparatus that can inhibit heater deformation and prevent deterioration of heat efficiency.Type: ApplicationFiled: December 3, 2010Publication date: August 16, 2012Applicant: SHIN-ETSU HANDOTAI CO., LTD.Inventor: Toshiro Shimada
-
Patent number: 8241424Abstract: An upper side heater 10 is configured so that a current passage width becomes larger at a heater lower part than at a heater upper part. Thus, the upper side heater 10 has a current-carrying cross-sectional area which becomes larger at the heater lower part than at the heater upper part, a resistance value becomes accordingly smaller at the heater lower part than at the heater upper part, and a heat generation amount becomes relatively smaller at the heater lower part than at the heater upper part. Meanwhile, a lower side heater 20 is configured so that the current passage width becomes larger at the heater upper part than at the heater lower part. Thus, the current-carrying cross-sectional area of the lower side heater 20 becomes larger at the heater upper part than at the heater lower part, a resistance value becomes accordingly smaller at the heater upper part than at the heater lower part, and a heat generation amount becomes relatively smaller at the heater upper part than at the heater lower part.Type: GrantFiled: September 25, 2006Date of Patent: August 14, 2012Assignee: Sumco Techxiv Kabushiki KaishaInventors: Tetsuhiro Iida, Yutaka Shiraishi, Junsuke Tomioka
-
Patent number: 8236104Abstract: A single-crystal manufacturing apparatus comprising at least: a main chamber configured to accommodate a crucible; a pulling chamber continuously provided above the main chamber, the pulling chamber into which a grown single crystal is pulled and accommodated; a gas inlet provided in the pulling chamber; a gas flow-guide cylinder downwardly extending from a ceiling of the main chamber; and a heat-insulating ring upwardly extending from a lower end portion of the gas flow-guide cylinder with a diameter of the heat-insulating ring increased so as to surround an outside of the gas flow-guide cylinder, wherein at least one window is provided in a region between 50 and 200 mm from a lower end of the gas flow-guide cylinder, and an opening area of the window accounts for 50% or more of a surface area of the region between 50 and 200 mm from the lower end of the gas flow-guide cylinder.Type: GrantFiled: May 8, 2009Date of Patent: August 7, 2012Assignee: Shin-Etsu Handotai Co., Ltd.Inventors: Satoshi Soeta, Toshifumi Fujii
-
Publication number: 20120192786Abstract: A single-crystal manufacturing apparatus according to the Czochralski method, including: a crucible that contains a raw material; a main chamber configured to accommodate a heater for heating and melting the raw material; and a pulling chamber configured to pull and accommodate a grown single crystal, the pulling chamber being continuously provided above the main chamber; an inner shield provided between the heater and the main chamber and for insulating heat radiated from the heater, and a supporting member for supporting the inner shield from below. The inner shield is supported at three or more supporting points contacting the supporting member, and a lower end of the inner shield except at the supporting points does not contact the supporting member.Type: ApplicationFiled: November 9, 2010Publication date: August 2, 2012Applicant: SHIN-ETSU HANDOTAI CO., LTD.Inventors: Toshiro Shimada, Kosei Sugawara
-
Publication number: 20120186513Abstract: Disclosed is a sapphire single crystal growing apparatus using the Kyropoulos method, and more particularly, is a Kyropoulos sapphire single crystal growing apparatus using an elliptic crucible, which can increase the recovery rate by the elliptic crucible and anisotropic heating.Type: ApplicationFiled: January 5, 2012Publication date: July 26, 2012Applicant: DK AZTEC Co., LtdInventor: Jong Kwan PARK
-
Patent number: 8221550Abstract: A process for producing a single crystal of semiconductor material, in which fractions of a melt, are kept in liquid form by a pulling coil, solidify on a seed crystal to form the growing single crystal, and granules are melted in order to maintain the growth of the single crystal. The melting granules are passed to the melt after a delay. There is also an apparatus which Is suitable for carrying out the process and has a device which delays mixing of the molten granules and of the melt.Type: GrantFiled: December 17, 2009Date of Patent: July 17, 2012Assignee: Siltronic AGInventor: Wilfried von Ammon
-
Patent number: 8216372Abstract: The invention relates to an apparatus and method for growing a high quality Si single crystal ingot and a Si single crystal ingot and wafer produced thereby. The growth apparatus controls the oxygen concentration of the Si single crystal ingot to various values thereby producing the Si single crystal ingot with high productivity and extremely controlled growth defects.Type: GrantFiled: February 13, 2006Date of Patent: July 10, 2012Assignee: Siltron Inc.Inventor: Hyon-Jong Cho
-
Patent number: 8216371Abstract: A Czochralski single crystal manufacturing apparatus uses multiple heaters to improve the controllability of crystal diameter. The power supplied to the multiple heaters is controlled so as to bring the pulling up speed close to a predetermined speed set value, and so as to bring the heater temperatures close to predetermined target temperature values. The ratio of electrical power between the heaters is controlled to agree with a predetermined power ratio set value which varies according to the crystal pulling up length, and the heater temperatures change along with this change, which causes disturbance to the diameter control. To compensate for this, heater temperature changes along with the power ratio set value change are taken into account in advance in the temperature set values. Accordingly, along with change of the power ratio set value, the temperature set values change to values appropriate for the current power ratio set value.Type: GrantFiled: July 20, 2007Date of Patent: July 10, 2012Assignee: Sumco Techxiv CorporationInventors: Tetsuhiro Iida, Shin Matsukuma
-
Patent number: 8216373Abstract: A temperature gradient is established in a crystallization crucible by means of a heat source and a cooling system. The cooling system comprises a heat exchanger and an adjustable additional heat source. The cooling system is preferably formed by an induction coil cooled by a coolant liquid circulating in the induction coil and by an electrically conductive induction susceptor positioned between the crucible and induction coil. The fabrication process comprises heating the crucible via the top and controlling heat extraction from the crucible downwards by means of the heat exchanger and by means of regulation of the adjustable additional heat source.Type: GrantFiled: December 6, 2006Date of Patent: July 10, 2012Assignees: Apollon Solar, Cyberstar, EFD Induction SAInventors: Roland Einhaus, Francois Claude Lissalde, Pascal Rivat
-
Publication number: 20120160153Abstract: To suppress 3D or convex growth and ensure a high flatness, an apparatus for producing an SiC single crystal includes: a container which holds an SiC solution, a portion for maintaining the solution in the container at a suitable temperature, a shaft having a lower end part acting as a portion for holding an SiC seed crystal in planar contact with an overall back surface of a crystal growth face and acting as a portion for cooling the SiC seed crystal, and a portion of the holding shaft for enabling an SiC single crystal to continuously grow at the crystal growth face by maintaining the crystal growth face brought into contact with the solution, a lower end part of the shaft having a portion for obtaining a uniform in-plane temperature distribution of the crystal growth face brought into planar contact, and a method for the same.Type: ApplicationFiled: December 15, 2011Publication date: June 28, 2012Inventors: Tomokazu ISHII, Hidemitsu Sakamoto, Kazuhiko Kusunoki, Kazuhito Kamei
-
Patent number: 8197595Abstract: A method for producing thin silicon rods using a floating zone crystallization process includes supplying high frequency (HF) current to a flat induction coil having a central opening, a plurality of draw openings and a plate with a slot as a current supply of the HF current so as to provide a circumfluent current to the central opening. An upper end of a raw silicon rod is heated by induction using the flat induction coil so as to form a melt pool. A thin silicon rod is drawn upwards through each of the plurality of draw openings in the flat induction coil from the melt pool without drawing a thin silicon rod through the central opening having the circumfluent current.Type: GrantFiled: January 19, 2010Date of Patent: June 12, 2012Assignee: PV Silicon Forschungs und Produktions GmbHInventors: Helge Riemann, Friedrich-Wilhelm Schulze, Joerg Fischer, Matthias Renner
-
Patent number: 8187383Abstract: In order to provide a semiconductor single crystal manufacturing device and a manufacturing method using a CZ method wherein the resistivity and oxygen concentration of a silicon single crystal can be controlled and wherein a single crystal yield can be improved, in the present invention, there is provided a wall 10 which defines a chamber inner wall 1c of a chamber 1, a crucible 2 and a heater 3. The wall 10 is formed by three members, namely, a single crystal side flow-straightening member 11, a melt surface side flow-straightening member 12 and a heater side flow-straightening member 13, which are connected to form a purge gas directing path 100. When the semiconductor single crystal is pulled, a flow speed of a purge gas that passes through the vicinity of the surface of the melt in a quartz crucible 3 is controlled.Type: GrantFiled: October 11, 2006Date of Patent: May 29, 2012Assignee: Sumco Techxiv CorporationInventors: Toshimichi Kubota, Eiichi Kawasaki, Tsuneaki Tomonaga, Shinichi Kawazoe
-
Publication number: 20120118228Abstract: Provided is a sapphire ingot grower. The sapphire ingot grower includes a chamber, a crucible disposed in the chamber to contain alumina melt, a heater disposed outside the crucible to heat the crucible, and a heat supply unit disposed over an ingot growing within the crucible to apply heat to the ingot.Type: ApplicationFiled: November 15, 2011Publication date: May 17, 2012Inventors: Sang Hoon Lee, Jae Hun Lee, Soo Yui Kim, Hyun Jung Oh
-
Patent number: 8152921Abstract: An implementation of a Czochralski-type crystal growth has been shown and embodied. More particularly, a furnace with suitable insulation and flow arrangement is shown to improve the cost-efficiency of production of crystals. That is achieved by the shown new hot-zone structure, gas flows and the growth process which can decrease the power consumption, increase the lifetime of hot-zone parts and improve the productivity, e.g., by giving means for opening the hot-zone and easily adapting the hot-zone to a new crystal diameter.Type: GrantFiled: September 1, 2006Date of Patent: April 10, 2012Assignee: Okmetic OyjInventors: Olli Anttila, Ari Saarnikko, Jari Paloheimo
-
Patent number: 8147613Abstract: A crystal puller for growing monocrystalline ingots includes a side heater adjacent a crucible for heating the crucible and a melt heat exchanger sized and shaped for surrounding the ingot and disposed adjacent a surface of the melt. The heat exchanger includes a heat source having an area for radiating heat to the melt for controlling heat transfer at the upper surface of the melt. The melt heat exchanger is adapted to reduce heat loss at the exposed upper surface portion. Methods for growing single crystal silicon crystals having desired defect characteristics are disclosed.Type: GrantFiled: November 10, 2003Date of Patent: April 3, 2012Assignee: MEMC Electronic Materials, Inc.Inventor: Milind Kulkarni
-
Patent number: 8114218Abstract: A single crystal pull apparatus has a multilayer crucible wherein the crucible has an outer crucible, an insertable layer intimately fitted thereon, and a wire frame positioned between the insertable layer and an inner crucible. The insertable layer, wire frame and inner crucible are preferably composed of platinum. Furthermore the insertable layers have thin walls and the frame has a small diameter such that they can be easily reshaped after any deformation occurring as a result of the single crystal growth process.Type: GrantFiled: September 2, 2008Date of Patent: February 14, 2012Assignee: Siemens Medical Solutions USA, Inc.Inventors: Olexy V. Radkevich, Keith Ritter
-
Patent number: 8101022Abstract: A crystal-growing furnace system with an emergent pressure-release arrangement includes an isolated chamber and a furnace upper body. The top board is provided with an opening and three first guides, and the furnace upper body with a lower opening and three second guides, wherein the lower opening of the furnace upper body covers, correspondingly, on the opening of the top board. In case a crystal-growing furnace, combined oppositely by the furnace upper body and the furnace lower body, has an over-high internal pressure, the pressure will overcome the weight of, and lift up the furnace upper body. At this moment, the furnace upper body will slightly move upward and away from enclosing the furnace lower body, so that the over-high internal pressure in the furnace will be released immediately to prevent the furnace from being exploded and from resulting in public accidents.Type: GrantFiled: July 28, 2008Date of Patent: January 24, 2012Assignee: Green Energy Technology, Inc.Inventors: Shiow-Jeng Lew, Hur-Lon Lin
-
Publication number: 20120000416Abstract: Provided are a single crystal cooling apparatus and a single crystal grower including the same. The single crystal cooling apparatus includes an upper flange having a circular shape and a lower flange extending downward from the upper flange, the lower flange having a diameter less than that of the upper flange.Type: ApplicationFiled: March 2, 2011Publication date: January 5, 2012Inventors: Hak-Eui Wang, Gwang-Ha Na