Abstract: A liquid-paint painting booth (10) comprises a painting chamber (11) inside which the liquid paint is sprayed and which is provided with a grille-lined floor (15) for sucking from the chamber an air flow which is then conveyed to a filter unit (20, 26) for filtering the air and separating the overspray with the aid of neutralizing powders which are introduced into the air flow up-stream of the filter unit. The air flow is sucked from the chamber through at least one conduit (17), the inlet of which is close to and underneath the grille-lined floor, whereby outlet mouths (23) for a laminar flow of powder transverse to the inlet and substantially parallel to the grille-lined floor of the chamber are provided in the vicinity of the sides of the conduit inlet, so that the laminar flow is passed through by the said air flow leaving the chamber via the conduit.

Abstract: Provided is a coating and developing apparatus composed of an assembly of plural unit blocks. A first unit-block stack and a second unit-block stack are arranged at different positions with respect to front-and-rear direction. Unit blocks for development, each of which comprises plural processing units including a developing unit that performs developing process after exposure and a transfer device that transfers a substrate among the processing units, are arranged at the lowermost level. Unit blocks for application, or coating, each of which comprises plural processing units including a coating unit that performs application process before exposure and a transfer device that transfers a substrate among the processing units, are arranged above the unit blocks for development. Unit blocks for application are arranged in both the first and second unit-block stacks.

Abstract: Distribution of a precoat agent is made uniform in a target gas directing to a filter. To this end, an intake opening of a filter device is formed as a slit-like or rectangular opening extending in a width direction. An accumulation recess is formed in an upper edge portion of the intake opening to have a profile that opens downward as viewed from a longitudinal direction of the intake opening. The accumulation recess is continuously formed in the longitudinal direction of the intake opening. A precoat agent nozzle is provided in a longitudinal predetermined position of the intake opening for ejecting the precoat agent and carrier gas toward an inner depth surface of the accumulation recess.

Abstract: There is provided an apparatus including: a processing cup having an opening opened upward to allow a substrate to be loaded and unloaded, an exhaust port for exhausting an unnecessary atmosphere produced in forming a film applied on the substrate, and an aspiration port for aspirating external air; and an aspiration device aspirating the unnecessary atmosphere through the exhaust port, wherein when the substrate is accommodated in the opening of the processing cup, the substrate has a perimeter spaced from the opening by a predetermined gap, and below the substrate accommodated in the processing cup there is formed an exhaust flow path extending from the aspiration port to the exhaust port.

Abstract: A thermal processing unit of a thermal processor for anti-reflection films includes: a covering nozzle for covering a substrate from above supported by a thermal processing plate and discharging an adhesion enhancing agent to a periphery of a substrate supported by the thermal processing plate; and a vaporization processor for supplying an adhesion enhancing agent in the vapor phase to the covering nozzle. While a substrate placed over the thermal processing plate is being subjected to thermal process, a control part causes the covering nozzle to discharge an adhesion enhancing agent in the vapor phase onto a periphery of a substrate to realize adhesion enhancement process. Thus, the adhesion between a resist coating film and a substrate surface in the periphery of a substrate is enhanced. Further, parallel implementation of thermal process and adhesion enhancement process exerts no influence on throughput.

Abstract: There is provided a coating and processing apparatus including a spin chuck horizontally holding a quadrangular substrate and rotating the substrate in a horizontal plane, a coating solution nozzle for supplying a coating solution to a front surface of the substrate horizontally held by the spin chuck, and a solvent supply mechanism provided in the spin chuck for supplying a solvent to a back surface of the substrate, in which the solvent supplied to the back surface of the substrate is allowed to reach the back surface and side surface of each of corners of the substrate by centrifugal force, thereby removing the coating solution attached.

Abstract: In one embodiment, a method for manufacturing a semiconductor device is disclosed. The method can include, upon attaching a bonding material containing a resin and a solvent to a second surface opposed to a first surface including a circuit pattern of a wafer, heating the bonding material to evaporate the solvent and decreasing vapor pressure of the solvent in an atmosphere faced with the bonding material and heating the attached bonding material to form a bonding layer.

Abstract: The stain preventing cover is formed from a composite sheet 24 having a three layer structure as a raw material which is produced by laminating a first sheet material 21 having a low dielectric constant and having insulation performance, a second sheet material 22 having a dielectric constant higher than that of the first sheet material 21 or having semiconductivity and a third sheet material 23 having a dielectric constant lower than that of the second sheet material 22 and having insulation performance, in which an end of the second sheet material 22 is positioned together with an end of the first and third sheet materials 21 and 23 adjacent to a electrostatic high voltage part 10 of a coating machine and another end thereof is positioned distant from an earth part 11 of the coating machine to be electrically insulated.

Abstract: An antigen supply device 1 according to the present invention is mainly configured by a cylindrical member 3 extending in the vertical direction. An air suction port 5 for sucking the air in the antigen exposure chamber is provided at a lower end of the cylindrical member. An axial fan 6 that generates a flow of the air flowing upward in an axial direction of the cylindrical member is attached above the air suction port of the cylindrical member. Moreover, a supply port 4 through which high-concentration antigens are jetted from a dust feeder on the outside of the antigen exposure chamber is provided above the axial fan of the cylindrical member.

Abstract: In order to provide a device for separating wet paint overspray from a stream of crude gas containing overspray particles which includes at least two filter devices each of which has an inlet opening through which a partial stream of crude gas enters the respective filter device and each of which includes at least one filter element for separating the overspray from the partial stream of crude gas, which allows one to maintain the fluidity of the mixture including of filter aid material and wet paint overspray that has been cleansed from the filter elements in the filter aid material reservoirs in a simple and efficient manner, it is proposed that the device should comprise at least one reservoir for receiving material which has been cleansed from the filter elements of a plurality of filter devices and a mixing device for mechanically blending the cleansed material from a plurality of filter devices.

Abstract: A wet scrubber for scrubbing a fluid. The wet scrubber may include an inlet for receiving the fluid and a vortex chamber, in communication with the inlet, for causing at least a portion of the fluid to circulate. The wet scrubber may also include at least one diffuser for exhausting the fluid from the vortex chamber, the diffuser configured to substantially prevent fluid exhausted from the diffuser from recirculating back into the diffuser. A paint booth and a method of scrubbing a fluid are also provided.

Abstract: A paint line includes a plurality of modular manufacturing stations positioned in series and defining a forward transport direction. Each modular manufacturing station includes an article transportation device for moving at least one carrier through the modular manufacturing station. At least one of the modular manufacturing stations includes a piece of paint application equipment. A control system is in communication with each article transportation device and configured to independently move the carrier of each modular manufacturing station according to a unique operation pattern. The control system is also configured to index the carrier of each modular manufacturing station as the carrier traverses to a contiguous modular manufacturing station.

Abstract: A liquid material application device having high space utilization efficiency and having excellent maintainability. In a liquid material application device for applying a liquid material to a desired position on a surface of a workpiece in a box by relatively moving a nozzle for discharging the liquid material and a table on which the workpiece is placed to face the nozzle, the liquid material application device comprises a carrying in/out opening formed in a side surface of the box and allowing the workpiece to be carried in and carried out therethrough, a beam extending toward the carrying in/out opening, an application head movable in the extending direction of the beam, beam moving means for moving the beam above and in parallel to the table, and a control unit for controlling operations of the aforesaid components.

Abstract: A production assembly and associated process for mass producing such as a thermoplastic pallet and which utilizes a multiple insert supporting and continuously moving carousels inter-faceable with an input line upon which is transported a plurality of rigid and planar shaped inserts, as well as an output line a spaced relationship from the input line for removing, from the carousel, the resin coated articles. The invention further teaches a series of subset variants for spray applying a two part resin and hardener upon the insert according to a selected thickness, following which the inserts are cured and dried prior to transferring to the output line and in order to create a finished product.

Abstract: An arrangement for coating a workpiece with a working surface comprises a movement rail and a lacquering robot. The movement rail is moveable relative to a stationary reference point parallel to the working surface. The lacquering robot is disposed on the movement rail and is moveable on the movement rail. A lacquering cabin for coating a workpiece comprises at least two chassis parallel to one another and a lacquering apparatus with an opening. The lacquering apparatus is supported on the two chassis and is moveable with the chassis. A method for coating a workpiece using a lacquering cabin comprises subdividing the workpiece into adjacent sections, moving the lacquering cabin to a position corresponding to a section, and coating the section.

Abstract: A coating apparatus and method are disclosed that applies a coating to a product in a uniform and controlled manner. The coating apparatus comprises a feeding stage, an optional pre-treatment stage, at least one coating stage and a finishing stage. The coating stage(s) comprise a coating material feeder and a coating device. The coating device includes an aperture conforming to the perimeter of a substrate to be coated in a first and second dimension. As the substrate passes through the aperture, coating material is applied in a uniform and consistent layer ranging from 0.001 inches to 0.250 inches. The coating material also back fills minor surface imperfections and blemishes on the substrate to achieve a consistent finish across the whole area where coating material is applied. The coating device includes first and second shell portions. The first shell portion has a concave surface surrounding the aperture portion.

Abstract: A powder coating apparatus is provided with: a coating booth, wherein a work to be coated is moved by a conveyer in the coating booth; and a coating gun that sprays powder coating material to the moving work. In the powder coating apparatus, the coating booth includes a movable wall on at least one of a side wall and a ceiling wall of the coating booth. The movable wall is configured to move in accordance with the work passing the coating booth.

Abstract: A method of cleaning a spin coater apparatus is provided. In one embodiment, the method comprises providing a spin coater apparatus having a coater cup comprising a basin with sidewalls, a rotatable platform situated inside the cup adapted for holding and rotating a wafer to be coated, and a solvent dispensing means mounted under the rotatable platform; placing the substrate on the rotatable platform; rotating the rotatable platform; continuously dispensing a cleaning solvent from the solvent dispensing means to rinse the backside of the wafer with the cleaning solvent and to pre-wet an interior surface of the sidewalls; and dispensing a coating material upon the wafer, the substrate mounted on the rotatable platform.

Abstract: A booth with a plurality of spray nozzles for the application of sunscreen, insect repellent, aloe lotion, skin care products, or similar lotions or liquids to substantial portions of the human body. One or more spray nozzles are oriented to avoid opposing air or spray flows that may cause inefficient or uneven application of the lotion or liquid. Spray nozzles may be fixed or adjustable. The invention may include means for rinsing the body prior to application of the lotion or liquid to promote even and unobstructed application to the body, as well as means for washing down the booth between or after use is provided. Power may be provided by electrical power sources, a battery, or solar panel(s).

Abstract: A robotic painting system includes a device for generating a vacuum and a dump line disposed upstream from a connection between an isolation line and a canister, wherein the device for generating a vacuum and the dump line are employed for filling and cleaning the robotic painting system.

Abstract: Leakage of an atmosphere of a solvent vapor used by a smoothing process for smoothing the surface of a resist pattern outside from a smoothing unit is prevented to facilitate incorporating the smoothing unit into a coating and developing system. A substrate processing system has a coating and developing block 20, a smoothing block 50, an airflow producing unit 60 for producing down airflow that flows down from above the coating and developing block 20 and the smoothing block 50, and a main controller 100 for controlling the airflow producing unit 60.

Abstract: An object of the present invention is to solve the problems in conventional art antigen exposure chambers, and specifically, to provide an antigen exposure chamber system capable of simultaneously exposing a large number of test objects in a chamber to a uniform antigen (pollen, mite or house dust, etc.) in all seasons.

Abstract: A substrate treatment apparatus of the present invention includes: a holding means for rotatably holding a substrate to be treated; a coating solution supply nozzle for supplying a coating solution onto the front surface of the substrate to be treated held on the holding means; a treatment container with an upper surface open for housing them; an exhaust means for exhausting an atmosphere in the treatment container from the bottom; a multiblade centrifugal fan provided on the inner periphery of the treatment container for flowing airflow on a front surface side of the substrate to the exhaust means; and a controller for controlling the number of rotations of the multiblade centrifugal fan corresponding to the number of rotations of the substrate, wherein the number of rotations of the multiblade centrifugal fan is controlled so that turbulent airflow flowing in a circumferential direction on the front surface of the substrate generated due to the rotation of the substrate is corrected to laminar airflow flowi

Abstract: In order to provide a device for separating wet paint overspray from an exhaust air flow containing overspray particles, passing into the exhaust air flow in an application region of a painting assembly, the device includes at least one separation device for separating the overspray from at least a part of the exhaust air flow. Clogging of a wall surface of the device with wet paint overspray is prevented. It is proposed that the device is divided into a plurality of sections below the application region. At least one separation device is provided in one of the sections. The device includes at least one air curtain producing device for generating an air curtain on a wall surface, which delimits the flow path of the exhaust air flow and is arranged on the at least one flow guide element.

Abstract: A liquid treatment apparatus treating a surface of a substrate held generally horizontally on a stage in a housing by supplying a treating liquid to said surface from a supply nozzle. The liquid treatment apparatus includes a cup body provided so as to surround the substrate held in the substrate holding part laterally, the cup body being mounted detachably to a base inside the housing from an upward direction thereof; a cup body holding part holding the cup body detachably; and an elevating mechanism moving the cup body holding part up and down between a first position at which the cup body is mounted upon the base body and a second position located above the first position.

Abstract: A device for separating wet paint overspray from an exhaust air flow containing overspray particles is disclosed. The overspray particles pass into the exhaust air flow in an application region of a painting assembly and the device includes a separation device for separating the overspray from a part of the exhaust air flow, in which clogging of the separation device with wet paint overspray is substantially prevented during a cleaning operation and/or ingress of precoat material into the application region from the region of the separation device is substantially prevented during a precoating operation, the device includes at least one closing device, by means of which the flow path of the exhaust air flow from the application region to the separation device can be intermittently closed off at least partially, and at least one precoat feeding means discharges a precoat material into the exhaust air flow downstream of the closing device.

Abstract: A method and apparatus of coating a polymer solution on a substrate such as a semiconductor wafer. The apparatus includes a coating chamber having a rotatable chuck to support a substrate to be coated with a polymer solution. A dispenser to dispense the polymer solution over the substrate extends into the coating chamber. A vapor distributor having a solvent vapor generator communicable with the coating chamber is included to cause a solvent to be transformed into a solvent vapor. A carrier gas is mixed with the solvent vapor to form a carrier-solvent vapor mixture. The carrier-solvent vapor mixture is flown into the coating chamber to saturate the coating chamber. A solvent remover communicable with the coating chamber is included to remove excess solvent that does not get transformed into the solvent vapor to prevent the excess solvent from dropping on the substrate.

Abstract: Purge arrangement for powder coating system includes a gun manifold (40) that is selectively assembled for fluid communication with either a purge manifold (36) or a hopper manifold (34). This allows purging of multiple hoses and guns at the same time and simplified color change operations.

Abstract: The present invention provides a substrate carrying and processing apparatus which is intended to reduce the size of the space for storing substrates in each substrate storing section as much as possible so as to downsize the apparatus and increase the number of substrates to be stored therein as well as to enhance the throughput. The substrate carrying and processing apparatus comprises a carrier block S1 which is adapted to position carriers 20 each receiving wafers W therein, a processing block S2 including processing units U1 to U4, 31 used for processing each wafer, a main arms A1 adapted to transfer each wafer to each processing unit, a rack unit U5 which is disposed between the carrier block and the processing block and able to store wafers to be processed, and a transfer arm D adapted to transfer each wafer to the rack unit.

Abstract: Overspray eradicator. A portable spray and overspray capture system including a portable vacuum filtration and spray gun air power supply unit including an air pressurization system, a vacuum creation system, a high efficiency particulate air filter, and an organic vapor filter, the portable vacuum filtration and spray gun air power supply unit in pressurized air communication with, and vacuum communication with, a visibility sparing spray shroud, the shroud including a spray gun or a spray gun fitting, a vacuum fitting and a plurality of extensions each with an aperture allowing fluid communication between the interior of the shroud and the exterior of the shroud the shroud having internal fluid passages to allow fluid communication between each of the extensions and the vacuum fitting.

Abstract: A system and method is shown for coating an article, including a chamber that can be at least partially open to surrounding air to allow free flow of air through the chamber and recovery of vapor produced during a coating operation within the chamber. The chamber can include a support surface that is adapted to support the article during a coating process, and a coating device within the chamber can be adapted to selectively apply a coating of a fluorocarbon in a fluorinated solvent to at least a potion of an article supported on the support surface.

Abstract: There is provided an apparatus including: a processing cup having an opening opened upward to allow a substrate to be loaded and unloaded, an exhaust port for exhausting an unnecessary atmosphere produced in forming a film applied on the substrate, and an aspiration port for aspirating external air; and an aspiration device aspirating the unnecessary atmosphere through the exhaust port, wherein when the substrate is accommodated in the opening of the processing cup, the substrate has a perimeter spaced from the opening by a predetermined gap, and below the substrate accommodated in the processing cup there is formed an exhaust flow path extending from the aspiration port to the exhaust port.

Abstract: The resist coating unit (COT) has a spin chuck (41) which holds the wafer to be supplied with a resist liquid, and a process cup (50) which accommodates the spin chuck (41) and exhaustes an atmosphere around the wafer W from a bottom thereof. The process cup (50) comprises a first cup (51) with an outer circumferential wall (61a), and an airflow control member (52) laid out close to the wafer W in the first cup (51) in such a manner as to surround the wafer W. The airflow control member (52) has a vertical cross section of an approximately rectangular shape defined by the upper ring portion (62a) having a cross section of an approximately triangular shape and protruding upward, and a lower ring portion (62b) having a cross section of an approximately triangular shape and protruding downward. An exhaust passage (55) for substantially exhausting the atmosphere around the wafer W is formed between the outer circumferential wall (61a) and the airflow control member (52).

Abstract: A wet scrubber for scrubbing a fluid. The wet scrubber may include an inlet for receiving the fluid and a vortex chamber, in communication with the inlet, for causing at least a portion of the fluid to circulate. The wet scrubber may also include at least one diffuser for exhausting the fluid from the vortex chamber, the diffuser configured to substantially prevent fluid exhausted from the diffuser from recirculating back into the diffuser. A paint booth and a method of scrubbing a fluid are also provided.

Abstract: The present application is directed to a spray booth comprising a first enclosure for applying spray material and a second enclosure for drying spray material. An exhaust system is in fluid connection with the first and second enclosures. A fire suppression system is in fluid connection with at least one component chosen from the first enclosure, the second enclosure and the exhaust system. A processor is in data communication with at least one component chosen from the spray enclosure, the drying enclosure, the exhaust system and the fire suppression system.

Abstract: A coating device (42) for a coating solution and a light beam radiating device (151) which cures the coating solution are arranged in a clean room (7). Spectacle lenses (2) include a set of two lenses and are stored in a coating container (50). The coating device (42) applies the coating solution to coating target surfaces of the spectacle lenses (2) in the coating container (50). When the set of two spectacle lenses (2) coated with the coating solution are extracted from the coating container (50), they are stored in a lens rack (120) and sealed by a transparent plate of the light beam radiating device (151). After air in the lens rack (120) is purged with nitrogen gas, curing treatment for the coating solution is performed by the light beam radiating device (151).

Abstract: In order to provide a method for supplying fresh auxiliary material, which is added to a stream (120) of crude gas laden with wet paint overspray before the stream of crude gas passes through at least one filter element (172) for separating the overspray from the steam of crude gas, to at least one filter device (132) which comprises at least one receptacle (176) for auxiliary material, which is in its operating position, while the stream of crude gas is passing through the filter element, which method enables better action of the auxiliary material on the stream of crude gas and makes a particularly efficient supply of fresh auxiliary material to the at least one filter device possible, it is suggested that the fresh auxiliary material be supplied directly into the receptacle for auxiliary material while the receptacle for auxiliary material is in the operating position.

Abstract: A localised extraction system (2) which allows a paint finishing process to be carried out without the need for a traditional spraybooth. The system (2) comprising a frame (36) with means to attach it about a portion of a surface which requires spraying and/or curing and/or drying, the frame (36) forming a localised containment wall thereabout, the frame (36) having an extraction means which draws air from the central aperture (38) of the frame and at the same time draws any paint overspray out of the aperture (38) for safe disposal. The frame (36) may comprise deflection means to retain overspray within the confines of the frame (36) and an optional curing unit which fits into the frames opening to cure the painted surface with the extraction operating at the same time to draw paint fumes emitted during drying. The extraction system, may additionally comprise a drying unit having means to supply a stream of forced air into the frame to facilitate drying.

Abstract: An electroless plating chamber is provided. The electroless plating chamber includes a chuck configured to support a substrate and a bowl surrounding a base and a sidewall of the chuck. The base has an annular channel defined along an inner diameter of the base. The chamber includes a drain connected to the annular channel. The drain is capable of removing fluid collected from the chuck. A proximity head capable of cleaning and substantially drying the substrate is included in the chamber. A method for performing an electroless plating operation is also provided.

Abstract: An apparatus for providing a photoresist material onto a substrate includes a lid housing at least one nozzle. A solvent supplying port inputs the solvent into the apparatus. A first solvent trap is provided below the nozzle and coupled to the solvent supplying port to hold a given amount of the solvent being input from the solvent supplying port. The first solvent trap is configured to prevent photoresist residues on the nozzle from being converted to powders. A second solvent trap is provided below the first solvent trap to receive the solvent from the first solvent trap. A solvent path is provided between the solvent trap and the solvent container to guide the solvent from the first solvent trap to the second solvent trap.

Abstract: The invention provides a painting installation comprising a spray booth having an application zone in which parts are to be painted, at least one auxiliary zone being separated from said application zone, an air supply and an air exhaust system having a first air supply and a second air supply, an air-conditioning device, at least one baffle element being arranged between said application zone and said at least one auxiliary zone, wherein said first air supply is provided for said application zone and is conducted via said air-conditioning device, said second air supply is provided for said auxiliary zone and is separated from said air-conditioning device, said at least one baffle element is configured for optimizing the air flow conditions in the transition area between said application zone and said auxiliary zone, wherein said exhaust air from said spray booth is recycled and at least partially fed to said air-conditioning device, and wherein said application zone is supplied only with air-conditioned air

Abstract: A process system includes a plurality of processing modules each processing a substrate with a process liquid. There is disposed a dispensing mechanism that dispenses the process liquid to the vertically arranged modules. The dispensing mechanism is provided with a process liquid supply source, and pumps corresponding to the respective processing modules. Each pump temporarily stores therein the process liquid which has been pressure-fed through a riser piping from the process liquid supply source by a pressing apparatus, and delivers the process liquid from an outlet. There are disposed nozzles each having a discharge port and discharging the process liquid to the corresponding processing module. Delivery pipings connecting the outlets of the pumps with the discharge ports of the corresponding nozzles have identical length to each other.

Abstract: A coating powder filtration system containing a fluidizing unit to fluidize coating powder upstream of a powder outlet.

Abstract: A paint booth that eliminates paint mist from air containing paint mist and volatile organic compounds (VOC) generated within a paint room in a highly-efficient manner is provided. The paint booth includes a collecting chamber that holds booth circulating water and is provided with a forced contact section having curved guide plates. An end section of each of the guide plates is provided with a water surface plate. The water surface plates are made of plate-shaped members and are disposed above the surface of the booth circulating water that serves as collecting water, such that a necessary space between the water surface plates and the water surface is maintained. Preferably, the water surface plates are formed in a flat or corrugated sheet shape.

Abstract: A coating plant having a multi-axis application robot to apply a coating means to an application object, where the application robot is installed hanging at least partially into a paint booth. A method for coating an object in a coating plant is also taught.

Abstract: A powder spray for lengthy parts includes a booth wall structure comprised primarily of doors. A moveable roof may be raised and lowered to clean powder overspray from the interior surfaces of the booth. A cleaning process may be performed with a sideways extraction mode and a downward extraction mode. The mode change occurs when a bulkhead that travels with the moveable roof blocks the inlet duct to the recovery system. The recovery system may be a cyclone system for example. The doors of the booth are hinged so that they can be positioned for spraying operations and cleaning operations. Live hinge designs are provided and hose stress relief designs are also provided. The roof may carry accumulators for pressurized air that feed cleaning nozzles as the roof descends. In addition, exhaust air may be used to assist cleaning the interior surfaces as the roof descends. All of the energy provided for cleaning and color change may be provided by accumulators.

Abstract: A painting robot outer arm includes a non-conductive housing mounting a color changer on the outside and a paint canister on the inside connected by an isolating paint transfer line. The paint canister is releasably attached to a piston ram and drive motor by a quick disconnect coupling. The paint supply is isolated from the applied high voltage by cleaning and drying the transfer line. The rate of filling of the canister can be controlled in response to sensed torque applied by a drive motor moving a piston in the paint canister.

Abstract: A system for painting an article, such as an automotive vehicle body, includes a painting booth, a conveyor for transporting articles through the painting booth, a first rail located beside and extending along the conveyor, a second rail located beside and extending along the conveyor at a lower elevation than an elevation of the first rail, a paint robot including an articulating arm mounted on the first rail for displacement along the first rail, a panel opener robot mounted on the second rail for displacement along the second rail such that the paint robot and the panel opener robot can move past each other on the rails without interference.

Abstract: There is provided a coating and processing apparatus including a spin chuck horizontally holding a quadrangular substrate and rotating the substrate in a horizontal plane, a coating solution nozzle for supplying a coating solution to a front surface of the substrate horizontally held by the spin chuck, and a solvent supply mechanism provided in the spin chuck for supplying a solvent to a back surface of the substrate, in which the solvent supplied to the back surface of the substrate is allowed to reach the back surface and side surface of each of corners of the substrate by centrifugal force, thereby removing the coating solution attached.

Abstract: In a powder spraycoating cabin or substructure for same, a cabin bottom contains bottom flaps configured near outer longitudinal walls and a walk-on bottom part situated between the bottom flaps. The bottom flaps are rotatable about an axis of rotation running in the lengthwise cabin direction, as a result of which the width of lengthwise bottom gaps situated bilaterally about the flaps can be varied. A suction duct is situated underneath. The walk-on bottom part is fitted with compressed-air outlets to blow compressed air toward/into the lengthwise bottom gaps.