Abstract: A device for washing, sterilizing and warming one or more containers comprises a main compartment, a support, a heating plate, and a dispensing mechanism. The main compartment comprises an internal cavity having a bottom surface and a drain. The main compartment is in communication with a fluid source. The support is disposed in the main compartment and is configured to accommodate one or more containers within the internal cavity of the main compartment. The heating plate is disposed on the bottom surface of the internal cavity and configured to operate in accordance with at least a first and second temperature setting. The dispensing mechanism is coupled to the main compartment and configured to discharge the fluid within the main compartment.

Abstract: An embodiment relates to a dish washer. A dish washer according to an embodiment comprises: a tub that defines a space for washing dishes; a water supply unit that has a water chamber where water supplied from the outside collects, to wash the dishes; a sump that is supplied with water from the water chamber and supplies wash water into the tub; and a heat exchange passage through which the wash water in the sump flows and exchanges heat with the water in the water chamber while flowing.

Abstract: Selective recovery of excess process fluid from within a closed process chamber is achieved by providing a magnetically drive ring chuck and at least one process fluid collector within the closed process chamber, with the ring chuck and the fluid collector being vertically movable relative to each other.

Abstract: A method of cleaning at least one of grime and built-up ice off a rotor blade of a wind turbine includes, in an exemplary embodiment, positioning a rotor blade in an immobile position in a downward orientation substantially parallel to the tower, positioning a tank containing a cleaning solution directly below the rotor blade, and positioning a plurality of lifting arms adjacent the tank. The plurality of lifting arms are attached to an elliptical spray head with at least one pipe connected to the elliptical spray head and to a pump operatively coupled to the tank. The method also includes raising the lifting arms to lift the elliptical spray head to a predetermined position along a longitudinal axis of the rotor blade, pumping cleaning solution from the tank to the elliptical spray head, spraying the cleaning solution onto an outer surface of the rotor blade to clean the rotor blade, and collecting the spent cleaning solution in the tank.

Abstract: An extraction device for a filter element containing collected particles of target material and an extraction fluid, wherein the device may have a piston and a vibration apparatus for vibrating the filter element to cause particles to move from the filter element and into the extraction fluid. The piston may first create compressed air to urge a first amount of extraction fluid and particles out of the filter element, and may then compress the filter element to urge a second amount of extraction fluid and particles out of the filter element.

Abstract: A dish washing machine capable of improving spatial utilization of a washing tub through the enlargement of the washing tub. The dish washing machine includes a washing tub, a sump mounted in the washing tub to receive and pump wash water, a sump housing forming an external appearance of the sump, a washing impeller to pump wash water from the sump housing, a drainage channel disposed at an inner edge of the sump housing, a pump motor surrounded by the drainage pump to drive the washing impeller, and a pump motor receiving part to receive the pump motor. The pump motor receiving part protrudes above the drainage channel.

Abstract: A solar photovoltaic module self-cleaning system includes a plurality of solar photovoltaic module self-cleaning devices. Each solar photovoltaic module self-cleaning device includes a photovoltaic module, a supporting holder and a water distributing portion. The supporting holder at least holds a first side of the photovoltaic module. The water distributing portion is disposed on the supporting holder neighboring to the first side thereof, and should be higher than a light incident surface of the solar photovoltaic module for gushing plural spouts of water abreast to the light incident surface from the first side towards a second side thereof.

Abstract: A wash pad that includes a wash floor for supporting a wash item and a catch trough disposed in fluid communication with a longitudinal central portion of the wash floor. The catch trough collects at least one of wash fluid and debris from the wash floor. The wash pad also includes an evacuator disposed in fluid communication with the catch trough and an elevator disposed in fluid communication with the evacuator. The evacuator substantially removes wash fluid received from the catch trough, and the elevator elevates debris from a collection height to a dump height for dumping.

Abstract: Methods and systems for collecting dust produced in paper making involve an air inlet passage including an opening to receive dust laden air. The opening to the inlet passage may have a width approximately equal to a width of a paper web in a paper making machine. The air inlet passage is devoid of water injection. The dust collector may include a central vortex chamber and may be defined by an outer wall and an internal guide vane. There may be a water injector mounted in the outer wall and injecting water into the central vortex chamber, and there may be a discharge outlet of the central vortex chamber connectable to a water and air separator.

Abstract: Apparatuses and methods can reduce washout water use and facilitate removal of waste. A transport vehicle can include a water holding tank, a washout tub, and a means for conveying water. Water can be conveyed from the water holding tank to clean concrete from utensils, chutes, pumps, and other implements through a hose. The water can then be separated from the concrete and conveyed back into the water holding tank using a hose and a strainer.

Abstract: Method and apparatus for removing residues of hazardous materials from vapour in a tank (1), wherein such a vapour is heated, passed outside the tank and subsequently cooled and the remaining dry vapour is recirculated, characterized in that a) said vapour is heated to a temperature of at least 5° C. above the melting point and below the self ignition point of the hazardous material, b) the vapour mixture thus formed is passed by means of a pump (3) from the tank through a discharge unit to a recovery unit, c) is cooled to a temperature of at least 5° C. lower and above the melting point of the hazardous material in a recovery unit, d) the liquid components of the vapour are recovered and the dry gas mixture is recirculated to the tank after reheating to the desired temperature, e) said recirculation being repeated as required.

Abstract: A cleaning tool to clean a surface of a component of a lithographic apparatus is disclosed. The cleaning tool includes a sonic transducer, a liquid supply device configured to provide liquid to a reservoir between the surface to be cleaned and the sonic transducer, and a liquid outlet configured to remove liquid provided by the liquid supply device, the cleaning tool constructed and arranged such that, in use, liquid flows into the outlet under the influence of gravity.

Abstract: The present invention relates to an apparatus (100) for washing a workpiece such as wafers, PC boards, hybrid circuits, precision mechanical or electromechanical components, optical instruments, medical devices or the like. Preferably, the apparatus (100) of the present invention can be used for washing disk drive components that have a substantially flat disc shape. The simple and easy to maintain structure of the present apparatus provides an uni-directional flow of washing liquid within the apparatus to remove contaminants from the surface of a workpiece in a submerged condition under streams of the washing liquid. The uni-directional flow of the washing liquid is achieved via a means which pumping a flow of washing liquid into the inlet and simultaneously extracting a flow of washing liquid out of the outlet of the apparatus (100). The uni-directional flow of the washing liquid is capable of preventing the removed contaminants from re-depositing onto the surface of the workpiece that has been cleaned.

Abstract: A wash fluid containment system may include side walls that allow the systems to be easily positioned on uneven ground. The side walls are designed to reduce or eliminate binding and/or gaps that occur when conventional systems are placed on uneven ground. In one embodiment, the side walls include different portions that are adjustable relative to each other to allow the side walls to accommodate the uneven ground. The side walls may include one or more horizontally oriented panels that are adjustable relative to one or more vertically oriented support members.

Abstract: The present invention discloses an ultrasonic cleaner in which an automated ultrasonic cleaning operation is executed using an aqueous solution. The cleaner includes a tank having a valve means in fluid communication therewith, a bottom tank portion with at least one drainage aperture therethrough and at least one tank wall depending therefrom to provide a solution retention region. At least one ultrasonic transducer is removably secured to one of the tank bottom and tank wall. A partition in the solution retention region has at least one aperture defined therethrough and defines a service section and a support section thereby.

Abstract: A produce washer and method of washing produce or other items in a continuous motion washing machine is provided. The produce washer includes a basket, or other collector, that is positioned within a portion of the fluid flow path and sized and shaped to intercept items from a the fluid flow path while at the same time allowing the fluid to continue to flow through the collector generally in the same circulatory flow path created by the washing machine.

Abstract: A glass sheet washing machine with a broken glass removal system includes a support, a liquid container or reservoir, a pump, a liquid applicator, and a liquid permeable member. The support supports a glass sheet being washed. The liquid reservoir is positioned below the support. The pump is coupled to the liquid reservoir. The liquid applicator is coupled to the pump. The liquid applicator applies the liquid from the liquid reservoir to wash the glass sheet. Excess liquid falls into the reservoir. The liquid permeable member is positioned between the support and the liquid reservoir to catch pieces of glass to inhibit the pieces of broken glass from falling into the liquid reservoir and is moved to remove the pieces from the glass washing machine.

Abstract: In a reactor cleaning apparatus 1 which cleans an inner wall surface 72 of a reactor 70 which generates polycrystalline silicon, a bell jar of the reactor 70 has a dual structure, a through hole 11 is formed along a vertical direction at a central portion of a substantially disc-like tray 10 placed in a horizontal state, a flange portion 13 in which an opening edge of the reactor 70 is placed is formed at an outer peripheral portion of the tray 10, a shaft 20 is provided through the through hole 11 of the tray 10 so as to be rotatable and movable in the vertical direction, a nozzle device 50 which sprays a cleaning water at high pressure in three-dimensional directions is provided at an upper end of the shaft 20, a drive mechanism 30 which rotates the shaft 20 and moves the shaft in the vertical direction is provided at a base end of the shaft 20, and steam piping 62 capable of supplying the steam within the bell jar of the reactor 70 is provided.

Abstract: A proximity head including a head surface. The head surface including a first flat region and a plurality of first conduits. Each one of the plurality of first conduits being defined by corresponding one of a plurality of first discrete holes. The plurality of first discrete holes residing in the head surface and extending through the first flat region. The head surface also including a second flat region and a plurality of second conduits. The plurality of second conduits being defined by a corresponding plurality of second discrete holes that reside in the head surface and extend through the second flat region. The head surface also including a third flat region disposed between and adjacent to the first flat region and the second flat region and a plurality of third conduits. The plurality of third conduits being defined by a corresponding plurality of third discrete holes that reside in the head surface and extend through the third flat region.

Abstract: A dishwasher that includes a treatment chamber in which items to be washed are supplied with washing liquor; a reservoir to exchange heat; feed lines to fill the reservoir with fresh water; outlet lines to direct a pre-heated contents of the reservoir into the treatment chamber; and a recycler to deliver the washing liquor from the treatment chamber into the reservoir.

Abstract: An substrate processing apparatus includes a substrate holding unit, a process liquid supplying unit, a first guide portion provided around the substrate holding unit for guiding the process liquid scattered from the substrate, a second guide portion provided outside the first guide portion for guiding the process liquid scattered from the substrate, a third guide portion provided outside the second guide portion for guiding the process liquid scattered from the substrate, a first recovery channel provided outside the first guide portion integrally with the first guide portion for recovering the process liquid guided by the second guide portion, a second recovery channel provided outside the first recovery channel integrally with the first guide portion for recovering the process liquid guided by the third guide portion, and a driving mechanism for independently moving up and down the first, second, and third guide portions.

Abstract: A method of clearing a pipe of contents with an air system. The method may include providing air by the air system at high pressure and low velocity until the contents begin to move within the pipe, providing air by the air system air at low pressure and high velocity until a majority of the contents are removed from the pipe, and continuing to provide air at low pressure and high velocity until substantially all remaining contents are removed from the pipe.

Abstract: A device and method for cleaning a bell cup after its removal from a rotary paint atomizer. The device preferably includes an enclosure within which the bell cup is retained during the cleaning operation. Pressurized cleaning fluid is introduced into the enclosure where it flows over the bell cup and removes paint therefrom. The enclosure may be connected to the nozzle end of a paint spray gun that can be used to deliver the pressurized cleaning fluid thereto.

Abstract: A dish washing machine capable of smoothly discharging dirt contained in wash water out of a sump so as to prevent the emission of bad smells from the dirt and prevent the propagation of bacteria. The dish washing machine includes a sump to receive and pump wash water, a sump housing forming an external appearance of the sump, a drainage pump coupled with the sump housing to discharge wash water and dirt, and a drainage channel disposed in the sump housing to guide wash water and dirt to the drainage pump.

Abstract: An edge of a material to be washed is held between forked portions of a vibration transmitting portion. An ultrasonic vibrator is attached to an enlarged portion of the vibration transmitting portion, and the ultrasonic waves supplied from the ultrasonic vibrator irradiate the washing liquid flowing to the forked portion, and the edge of the material to washed is washed by the ultrasonic wave and the washing liquid.

Abstract: A substrate processing apparatus of the present invention is to apply processing using a processing liquid to a substrate. The substrate processing apparatus includes a first-side plate disposed oppositely to a first surface of the substrate with a distance and provided with plural discharge ports and suction ports in a surface opposing the first surface, a first-side processing liquid supply mechanism that supplies a processing liquid to the discharge ports in the first-side plate, and a first-side suction mechanism that sucks insides of the suction ports in the first-side plate.

Abstract: A method is described for loosening and removing fouling material from surfaces lying under water with a washing tool in the form of a frame construction with a number of washing apparatus that are brought to the surface and which is made to spray out a watery cleaning fluid to loosen fouling material and clean the surface, at the same time as each washing apparatus rotates and a mixture of fluid and fouling material is transported away for further treatment, and it is characterised in that a washing tool is applied where each washing apparatus is in the form of a cup with integrated channels for supply of fluid to integrated spraying nozzles (60) for the fluid around the rim edge (41) of the cup, and with a central outlet at the top of the cup for removal of fluid and fouling material, and the cleaning is carried out as follows: the construction is brought to the surface with the rim edge of the cup(s) a distance (A) from the surface (10), —a suction (a fluid dynamic under pressure) is established in the out

Abstract: A warewash machine includes a tank for holding liquid to be sprayed on items in a spray chamber and a recirculation line for delivering liquid from the tank to nozzles for spraying. A sensor arrangement is provided for monitoring condition of tank liquid, the sensor arrangement including an light emitter and a light receiver. A control is provided for energizing the light emitter and monitoring output of the light receiver, wherein the control is configured to vary the energization level of the light emitter during sensing to extend a useful range of measurement the sensor arrangement. The sensor arrangement may be located in line with or in parallel with a drain line of the tank.

Abstract: In order to produce a cleaning device which cleans in a particularly effective manner wherein the cleaning device comprises a cleaning chamber for accommodating a workpiece requiring cleaning and a fluid transfer device for transferring at least one fluid into the cleaning chamber and/or out of the cleaning chamber and wherein the fluid transfer device comprises at least one nozzle in the form of a slotted nozzle extending along a slot axis and said fluid is arranged to be fed into the cleaning chamber or fed out of the cleaning chamber by means of said fluid transfer device in a direction transverse to the slot axis, it is proposed that the cleaning device comprise a slotted nozzle moving device for moving at least a part of the slotted nozzle.

Abstract: An on-board optical sensor apparatus includes an optical sensor, an optical sensor cover, and a controller. The optical sensor has a lens. The optical sensor cover includes a holder and a washer nozzle. The holder holds the optical sensor. The washer nozzle performs a washing operation to wash a lens surface of the lens of the optical sensor or a glass surface of a cover glass located facing the lens by spraying a washer fluid, supplied from a washer fluid tank, onto the lens surface or the glass surface. The controller controls the washing operation of the washer nozzle.

Abstract: Embodiments of the present invention generally relate to a method and apparatus for ex-situ cleaning of a chamber component part. In one embodiment, a system for cleaning component parts in a cleaning chemistry is provided. The system comprises a wet bench set-up comprising a cleaning vessel assembly for holding one or more component parts to be cleaned during a cleaning process and a detachable cleaning cart detachably coupled with the cleaning vessel assembly for supplying one or more cleaning chemistries to the cleaning vessel assembly during the cleaning process.

Abstract: A surface treatment method of a metal member according to an embodiment of the invention includes removing an oily substance on the metal member by using gas-liquid two fluids that are obtained by boiling heated and pressured water under ordinary pressure. A surface treatment device of a metal member for removing an oily substance on the metal member includes self-generation two fluids production means for producing gas-liquid two fluids by boiling heated and pressured water under ordinary pressure, and a surface treatment room carrying out a surface treatment by bringing the self-generation two fluids into contact with the metal member.

Abstract: A dishwasher in the form of a programmable machine, in particular a commercial dishwasher, having a pre-cleaning station, which is disposed outside a treatment chamber of the dishwasher, and having a waste water transfer system, by which washing liquid can be fed from a wash tank of the dishwasher as pre-cleaning liquid to the pre-cleaning station.

Abstract: Disclosed are a nozzle cleaning apparatus and a nozzle cleaning method, which are capable of effectively cleaning a nozzle for discharging a process liquid to a substrate, with a simple structure and a low cost. A nozzle 30 is accommodated in a cleaning container 2 having a funnel-shaped portion 2b. A solvent T as a cleaning liquid is supplied along an inner surface of the funnel-shaped portion 2b. The solvent T forms a vortex flow whirling around the nozzle 30. By exposing the nozzle 30 to the vortex flow, the nozzle 30 can be effectively, thoroughly cleaned.

Abstract: A core wash tank has a core wash bath compartment (14) for holding core wash (16) into which sand cores can be immersed for treatment and a single overflow compartment (30) separated from the core wash bath compartment by a divider wall (28) that defines an overflow level for core wash in the core wash bath compartment to overflow into the overflow compartment. A core wash recirculation system has a pump (42) for drawing core wash from the overflow compartment and pumping core wash into the core wash bath compartment.

Abstract: A drawer-type dishwasher includes a frame assembly, a wash tub, a plurality of wash system components and a sump. The sump is either integrally formed with or separately formed and mounted to a bottom wall portion of the tub, while being provided with a plurality of fluid conduits that extend from a central intake ring to a respective plurality of attachment flanges. A wash pump and a drain pump are supported by respective ones of the plurality of attachment flanges so as to direct a flow of wash fluid into and out of the wash tub. The sump also includes structure for mounting a heater and a filter housing, as well as other wash and safety system components.

Abstract: The present invention is a collector for collecting washing fluid issuing from a gas turbine engine during and/or after a washing operation. The collector comprises a collection tray and an inlet collector attached at a first end to the collection tray. The second end of the inlet collector is connected to an inlet of the engine, thereby collecting washing fluid issuing from any one or both the inlet and below the engine.

Abstract: A cleaning tool to clean a surface of a liquid confinement system of an immersion lithographic apparatus is disclosed, the liquid confinement system having an aperture to allow passage of a beam of radiation therethrough of an immersion lithographic apparatus. The cleaning tool includes a sonic transducer, a reservoir configured to hold liquid between the sonic transducer and the surface to be cleaned, and a barrier positioned in the reservoir under the aperture to form, in use, a shield to sonic waves.

Abstract: Apparatus is provided for determining presence of contamination on a lithography mask, including: a fluid trap having a base and at least one wall member extending substantially perpendicularly to the base for trapping fluid on a portion of the base when fluid introduced during a cleaning process of the mask is removed.

Abstract: A mobile machine for removing dry particulate matter from a mop, cloth or duster by agitation. A drum with flexible, resilient fingers rotates and agitates the mop, cloth or duster to loosen the particulate matter. An electric fan sucks ambient air and the particulate matter to a chamber wherein it is wetted by a liquid mist introduced by spray nozzles. The mist combines with the particulate matter to form larger particulates. The particulate matter and larger particulates are passed through a filter to remove the particulate matter and larger particulates, which drop onto a removable tray.

Abstract: A purge drain valve including a spool spliced in a fluid line includes a control valve and an actuator coupled to the control valve for regulating fluid flow. During a washing operation, fluid flows between a supply end and a delivery end of the spool, and during a purging operation, the control valve diverts fluid entering the supply end from the delivery end towards a drain leg. A washing system includes a fluid supply coupled to an input of a wash delivery system and a delivery line coupled to an output of the wash delivery system. The purge drain may be spliced into the delivery line to permit fluid to reach a wash apparatus during a washing operation and to prevent fluid from reaching the wash apparatus during a purging operation. A rinse cycle sensor apparatus may be employed to indicate to an operator if a washing operation is complete based upon a conductivity of fluid exiting from a device being washed.

Abstract: A cleaning device (1) performs a cleaning of an article by blowing a cleaning medium (5) by an air stream onto the article (4). The cleaning device (1) includes a cleaning tank (6) that forms a space for the cleaning medium (5) to be blown, which includes an opening; a holding unit (3) that holds the article (4) at the opening; a pool member (19) that is arranged on an outer edge of the opening with a clearance between the pool member (19) and the article (4); and a cleaning-medium collecting unit (8) that brings the cleaning medium (5) leaked out of the outer edge and accumulated in the clearance back into the cleaning tank (6).

Abstract: A vehicle mountable system for cleaning trash receptacles with wash-water. The system includes an enclosure with an access opening, supported on the vehicle, and a carriage disposed within the enclosure. A spray head is aligned to impinge wash-water against the trash receptacle while it is engaged with the carriage. A basin is aligned to accumulate wash-water drainage from the spraying operation. A spray shield is operated to a closed position that reduces wash-water effluence from the enclosure. The system may include a filter and means for sanitizing wash-water that is accumulated by the basin and recirculated through a holding tank. An automated arm engages a trash receptacle to engage and disengage the trash receptacle with the carriage through the access opening in the enclosure. Plural trash receptacles can be engaged with the carriage and advanced through plural positions within the enclosure.

Abstract: A reusable filter cartridge having a symmetrical structure, the reusable filter cartridge comprising a tubular outer pipe having perforations arranged therein. A tubular inner pipe having perforations is arranged therein, and has a smaller diameter than the diameter of the outer pipe such that an annulus is formed between the outer and inner pipes. A filtering media is disposed in the annulus between the outer and inner pipes. A first and second lid is provided, each being secured at opposite ends of the outer and inner pipes; one of the lids having a central opening therein for water to flow out of or into the inner pipe. The reusable filter cartridge further comprises a coupling arrangement for coupling the filter cartridge with a rotating element of a cleaning device so that the filter media can be cleaned by rotation of the filter cartridge around its axis inside the cleaning device.

Abstract: Embodiments of the invention are directed to cleaning systems for optically transparent surfaces. In one embodiment, the system includes a reservoir integrally connected to (a) a non-recycled fluid transfer line and (b) a recycled fluid transfer line. A combination of non-recycled and recycled fluids housed in the reservoir may be integrally connected to at least one pump and one or more purifying apparatuses via one or more fluid transfer lines. In turn, one or more of the purifying apparatuses may be integrally connected to one or more spraying mechanisms apparatuses adjacent or substantially adjacent to an uppermost edge of one or more angled optically transparent surfaces via one or more fluid transfer lines. One or more troughs may be positioned adjacent to a lowermost edge of the one or more angled surfaces and integrally connected to the reservoir via one or more fluid transfer lines.

Abstract: An apparatus and method for cleaning each bucket of a bucket conveyor in which each successive bucket is brought into a cleaning station on an elevator section of the conveyor where it is tipped sideways and enclosed within an open ended box enclosure and fixed plate engaged by the open end of the box enclosure, the inside of the bucket then cleaned with steam sprays from a steam head carried within the box enclosure, moving side by side during the cleaning. A vacuum collector draws out steam, condensed water and dislodged residue. Additional steam sprays directed from fixed nozzles on the backing plate may optionally be used to clean the bucket exterior bottom and the conveyor chains.

Abstract: A substrate processing system 1 comprises: a processing tank 3 for processing substrates W with a processing liquid; a drying unit 6 disposed above the processing tank 3; and a carrying mechanism 8 for carrying the substrates W between the processing tank 3 and the drying unit 6. A processing gas supply line 21 for supplying a processing gas into the drying unit 6 and inert gas supply lines 24 and 25 for supplying an inert gas into the drying unit 6 are connected to the drying unit 6. A first discharge line for discharging an atmosphere purged from the drying unit 6 and a second discharge line 27 for forcibly exhausting the drying unit 6 are connected to the drying unit 6.

Abstract: A pad washing system is provided. This system includes a filter device that further includes: a filter component having a textured top surface and at least one baffle formed on the underside thereof; a filter support apparatus adapted to receive the filter device, wherein the filter support apparatus further includes: a base, a plurality of vertical support columns formed integrally with the base, a plurality of caps mounted on top of the vertical columns, and a plurality of biasing members disposed between the caps and the tops of the vertical columns; a bucket for receiving both the filter device and the filter support apparatus; a threaded rim attached to or formed integrally with the top edge the bucket; and a splash guard mountable within the threaded rim.

Abstract: A cleaning system which includes an enclosure and having a door with a transparent window. The door is opened and closed to load and unload products to be cleaned. An operator puck on the outside of the enclosure couples magnetically to another actuator puck on the inside of the enclosure. This coupling allows an operator to move and direct the inside puck to actuate spray or air blast functions, without opening the enclosure. The outside operator puck includes one or more switches which turn on the various electronic components such as the liquid pump, light, or air blast valve. The cleaning system enables a user to efficiently direct cleaning action to parts inside to minimize the cleaning time, and to prevent exposure of chemicals. The cleaning fluid is cycled out of the enclosure continuously, and into a “trap” box, through a pump and back into the cleaner box in a closed loop cycle.

Abstract: An upper processing head includes a topside module defined to apply a cleaning material to a top surface of a substrate and then expose the substrate to a topside rinsing meniscus. The topside module is defined to flow a rinsing material through the topside rinsing meniscus in a substantially unidirectional manner towards the cleaning material and opposite a direction of movement of the substrate. A lower processing head includes a bottomside module defined to apply a bottomside rinsing meniscus to the substrate so as to balance a force applied to the substrate by the topside rinsing meniscus. The bottomside module is defined to provide a drain channel for collecting and draining the cleaning material dispensed from the upper processing head when the substrate is not present between the upper and lower processing heads. The upper and lower processing heads can include multiple instantiations of the topside and bottomside modules, respectively.