Abstract: An electrostatic dehydrator or separator having at least two generally horizontal electrodes will function as a separator for water and oil, and also for gas, water and oil. Gas/liquid separation occurs in the front section of the vessel. Oil/water separation takes place in a subsequent section of the vessel which may have two or three independent generally horizontal electrodes or grids spaced at different distances above the generally horizontal oil/water interface. The two or three independent electrodes or grids will each have their own transformer. The higher grid(s) will continue to operate even if the lower grid(s) short out.

Abstract: Methods for surface modification of wood-fiber reinforced thermoplastic composites (WPCs) for improving surface adhesion of a water-based acrylic coating and composites having such surface properties are disclosed herein. In one embodiment, the surface of WPC formulations can be modified using one or more surface treatments including chromic acid treatment, oxygen plasma treatment, Benzophenone/UV treatment, and flame treatment. In another embodiment, WPC material can be sequentially treated with chromic acid and oxygen plasma to roughen the WPC material surface and increase the WPC surface wettability with polar liquids. In some embodiments, an acrylic coating peel load increased approximately 64% to approximately 170% following surface modification.

Abstract: A system for treating a surface to prevent or limit offensive odors and/or microbiological activity and improve indoor air quality includes electrostatically charged particles of anatase titanium dioxide and a substrate or surface on which these particles are received. The electrostatic charging of the particles, in conjunction with the substrate being oppositely charged, provides a self-leveling effect to the particles. The particles may be incorporated into an HVAC system defined by ductwork in which untreated air including organic matter flows, is treated, and is ejected as clean air. Methods of treating surfaces or fluids containing organic matter include providing electrostatically charged particles of anatase titanium dioxide and contacting the organic matter therewith to initiate photocatalytic oxidation processes in which the organic matter is broken down into less offensive constituents such as carbon dioxide and water.

Abstract: The present invention relates to a plasma generating device having a first and a second electrode (3, 4) which are at a spacing from each other for generating a plasma (13) between the two electrodes (3, 4), a dielectric (8) which is disposed between the two electrodes (3, 4), a gas inlet (10) in the space between the two electrodes (3, 4) for supply of a plasma generating gas (12), one of the two electrodes (3, 4) having at least one opening (5) as gas outlet from the space between the two electrodes (3, 4), through which the plasma (13), which can be generated between the two electrodes (3, 4), can be expelled parallel to the direction of the electrical field which can be produced by the two electrodes (3, 4) between the two electrodes (3, 4), a grating, net and/or fabric (1) being disposed across the cross-section of the at least one opening (5).

Abstract: Compounds are provided comprising at least one neutral, positive, or negative hydrogen species having a binding energy greater than its corresponding ordinary hydrogen species, or greater than any hydrogen species for which the corresponding ordinary hydrogen species is unstable or is not observed. Compounds comprise at least one increased binding energy hydrogen species and at least one other atom, molecule, or ion other than an increased binding energy hydrogen species. One group of such compounds contains one or more increased binding energy hydrogen species selected from the group consisting of Hn, Hn?, and Hn+ where n is a positive integer, with the proviso that n is greater than 1 when H has a positive charge.

Abstract: The invention relates to a device for displacing a volume of liquid (1) under the action of an electrical voltage, comprising: iv) a first substrate with a first electrode (4,5); v) a second substrate with a second electrode (4, 5) facing the first substrate; vi) means for applying a first voltage (3) between the first and the second electrode, one of the two electrodes comprising, in essence, a matrix (5) consisting of a number of microelectrodes and having means for applying a second voltage between two microelectrodes. The invention also relates to a method for displacing a volume of liquid (1).

Abstract: A method, apparatus, and electrode for electric discharge surface treatment. The electrode is a green compact made by molding metallic powers or metallic compound powders, the green compact being heat treated and used for electric discharge surface treatment in which a pulsed electric discharge is generated between the electrode and a work in a dielectric fluid to form by the electric discharge energy on the surface of the work a coat of a material of the electrode or of a substance that is generated by a reaction of the electrode due to the electric discharge energy, wherein the electrode contains 40 volume % or more Co, Ni, or Fe. Thereby, a thick coat is formed by the in-liquid pulsed electric discharge treatment.

Abstract: An arcing electron stream apparatus and method for reducing pollutants in a fluid. The device includes first and second electrodes and a chamber there-between. Voltage is impressed between the electrodes at a frequency, thereby causing a plurality of arcing electron streams to occur between the electrodes. The electrodes have stepped surface such that the central first section of the electrodes are in closer proximity to each other than are the outer second sections. This stepped configuration causes arcing electron streams to progressively be formed along the electrodes and, thus, traverse throughout the chamber, thereby effectively treating molecules within the chamber.

Abstract: A ceiling-mounted air-treatment unit is described. The unit includes an inlet air duct arranged to receive an inflowing air stream, a ceiling mounted plasma reactor for filtering and biologically decontaminating the air stream as it passes through the reactor, and an outlet duct for discharging treated air into a room requiring a sterile environment. The plasma reactor includes a plasma generator, an electrostatic filter, and optionally a catalyst to remove reactive species from the treated airflow. Additionally, the plasma reactor is arranged in a ceiling mounted frame that arranges the plasma reactor in an operating position in the ceiling and is movable to a service position where the plasma reactor can be moved downward into the sterile room for maintenance and servicing.

Abstract: Disclosed is an air purification device including a discharge part for discharging electricity in air. Low-profiling of the air purification device is accomplished while maintaining the discharge capability of the discharge part. In an ionization part (30) for electrically charging airborne dust particles, an insulating medium (60) is disposed between an ionization wire (31) serving as a discharge base end and an earth electrode (33). As a result of such arrangement, electrical discharge from the ionization wire (31) to the earth electrode (33) is obstructed while on the other hand corona discharge from the ionization wire (31) to a first electrode plate (32) is maintained, whereby the distance between the ionization wire (31) and the earth electrode (33) can be made narrow.

Abstract: A continuous feed discharge surface treater for treating web materials has a discharge chamber where ionization of a process gas occurs defined and contained by one or more rollers. Enhanced chemical coronas and plasmas are achieved by limiting depletion of the gas chemistry from the discharge chamber and dilution or contamination from mixing with drawn in ambient air. Atmospheric coronas can also be achieved in which minimal or no ozone is exhausted from the treater. Various roller and electrode assemblies, including both fixed and rolling electrodes, can be employed.

Abstract: An apparatus for generating atmospheric-pressure plasma includes: a substrate; an antenna arranged on the substrate; a discharge tube arranged in the vicinity of the antenna; a high-frequency power supply for supplying VHF band high-frequency power to the antenna; and a matching circuit for receiving a high frequency from the high-frequency power supply and adjusting a reflection wave. In this apparatus for generating atmospheric-pressure plasma, a phase circuit is connected between the matching circuit and the antenna, and the phase circuit has a circuit constant setting such that a position of a maximum value of a current amplitude of a standing wave or a position of a minimum value of a voltage amplitude of the standing wave is in the vicinity of the antenna. This configuration can efficiently generate plasma and reduce the size of the apparatus.

Abstract: A method for treating exhaust gas includes: adsorbing target components in the exhaust gas with an adsorbent (5); introducing a nitrogen gas with an oxygen concentration of 10 vol % or less and a purity of 90 vol % or more into the adsorbent (5); and applying (6, 7, 8) nonthermal plasma to the adsorbent (5). After the adsorbent (5) adsorbs the target components in the exhaust gas, the nitrogen gas is introduced into the adsorbent (5), and then an electric discharge is generated so that the nonthermal plasma of the nitrogen gas is applied to the adsorbent (5) and causes desorption of the target components and regeneration of the adsorbent (5). This method can remove the target components effectively from oxygen-containing exhaust gas by using nitrogen gas plasma with high activity as a result of ionization of a nitrogen gas and combining adsorption, desorption by the nitrogen gas plasma, and nitrogen plasma treatment.

Abstract: An apparatus is disclosed for controlling the oxidation state of catalyst for use in a fuel cell. The apparatus includes a holder, a working electrode disposed in the holder, an auxiliary electrode located right above the working electrode, a reference electrode disposed in the holder and a power supply connected to all of the electrodes.

Abstract: This invention relates to heating apparatus and methods with particular applications for growing a nanofibre, and to nanotips fabricated by such methods and apparatus. Embodiments of the invention can be implemented to provide nanotips for electron gun sources and scanning probe microscopy. A nanotip fabrication apparatus includes a heater for heating an object in the presence of an electric field. The heater comprises: a substantially planar electrically conductive heating element configured to define at least one aperture; a support to mount the heated object such that it protrudes through said aperture; and at least one electrical connection to said heating element. In use, the heating element can be biased by said at least one electrical connection such that the electric field in the vicinity of the object is substantially perpendicular to the plane of the element.

Abstract: A plasma generation electrode capable of subjecting predetermined components contained in a fluid to be treated to their respective reaction treatments with plasmas having different intensities optimized on a reaction basis, by passing merely once the fluid to be treated, is provided. In the plasma generation electrode, a unit electrode is composed of a tabular ceramic material serving as a dielectric material and an electrically conductive film disposed in the inside of the ceramic material, a plurality of unit electrodes are layered at a constant spacing, the distance between the electrically conductive films disposed in the unit electrodes adjacent to each other is varied partly or the dielectric constant of the ceramic material constituting the unit electrode is varied partly, and plasmas having different intensities can be generated partly in the spaces.

Abstract: A method of stimulating chemical reactions within a liquid uses a gas plasma ejected from a gas-buffered plasma injection device to create a plasma-liquid interface. The injection device has an electrically-conductive housing with an inlet, an outlet and an electrode embedded in the housing interior so as to create flow paths through the electrode and between the electrode and housing, in the method, the outlet is submersed in a liquid and a gas plasma is supplied at the inlet. A direct-current voltage applied across the electrode and housing accelerates the plasma and ejects it through the outlet into the liquid.

Abstract: A method for producing a nanostructured cermet material, including the steps of preparing an aqueous solution mixture of precursor compounds of the cermet material, introducing the solution mixture into a heated tubular reactor in the form of a fine-particle aerosol, and processing the solution mixture in the heated tubular reactor to form the nanostructured cermet material. The present invention is further directed to a processing apparatus configured for implementing the present method.

Abstract: Systems and methods for production of molecular hydrogen are described herein. Systems may include a plasma reformer and an electrical swing adsorption system. The plasma reformer may produce a gas stream from the liquid feed. The gas stream may include molecular hydrogen and carbon oxides. The electrical swing adsorption system may produce a molecular hydrogen stream from the gas stream generated in the plasma reformer. The gas stream and/or molecular hydrogen may be used as a fuel in a fuel cell.

Abstract: A method and device for sterilizing containers in which a plasma treatment is executed through excitation of an electromagnetic oscillation so that the plasma is excited in a vacuum in the vicinity of the container regions to be sterilized. Between arrival and discharge, the container regions to be sterilized are moved closer to the oscillation-generating device in the chamber, with continuous movement of the container and/or of the oscillation-generating device for one or more predetermined time intervals in such a way that a plasma is excited in these regions inside and/or outside the container. The chamber is provided with a transport apparatus inside it, which produces an essentially rotating motion of the container during the transport from the arrival to the discharge in the chamber.

Abstract: The invention relates to a process for the purification's of silicon tetrachloride or germanium tetrachloride contaminated with at least one hydrogen-containing compound, in which the silicon tetrachloride or germanium tetrachloride to be purified is treated in a targeted manner by means of a cold plasma and purified silicon tetrachloride or germanium tetrachloride is isolated from the phase which has been treated in this way. The present invention further relates to an apparatus for carrying out the process of the invention, which comprises a stock and vaporization unit for silicon or germanium tetrachloride (4.1 or 5.1) which is connected via a connecting line with the inlet of the reactor (4.3 or 5.3) with control unit (4.4 or 5.4) for producing the dielectrically hindered discharges whose outlet leads via a pipe either directly or indirectly via at least one further reactor (5.5) to a condensation unit (4.5 or 5.11) with downstream collection vessel (4.6 or 5.12) which is connected via an offtake line (4.

Abstract: An apparatus and process for recovering metals from aqueous solutions by passing an aqueous solution, which contains dissolved metals, into a space between two elongated electrodes of a treatment chamber. A very high voltage electric field is created in the treatment chamber and is accompanied by a very small trickle current charge to enhance adsorption, polarization, ion exchange or to otherwise agglomerate the dissolved metal, which is then recovered by filtering, adsorbing, exchanging or otherwise separating the metal from the water.

Abstract: The present invention generally includes a remote plasma source and a method of generating a plasma in a remote plasma source. Cleaning gas may be ignited into a plasma in a remote location and then provided to the processing chamber. By flowing the cleaning gas outside of a cooled RF coil, a plasma may be ignited at either high or low pressure while providing a high RF bias to the coil. Cooling the RF coil may reduce sputtering of the coil and thus reduce undesirable contaminants from being fed to the processing chamber with the cleaning gas plasma. Reduced sputtering from the coil may extend the useful life of the remote plasma source.

Abstract: A pulse plasma matching system includes an RF matching box configured to receive an RF power pulse generated by an RF power source, configured to perform a plasma impedance matching, and configured to apply the RF power pulse to a process chamber, and a network analyzer configured to measure an impedance of plasma generated in a process chamber. A controller is configured to generate a capacitance control signal corresponding to a plasma impedance value measured by the network analyzer, configured to supply the capacitance control signal to the RF matching box, and configured to generate an impedance matching compensation pulse, and a phase shifter is configured to receive the impedance matching compensation pulse and to shift a phase of the impedance matching compensation pulse to synchronize the impedance matching compensation pulse to the RF power pulse.

Abstract: Techniques for detecting wafer charging in a plasma processing system are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for detecting wafer charging in a plasma processing system. The apparatus may comprise a plasma chamber to produce a plasma discharge above a wafer in the plasma chamber. The apparatus may also comprise a biasing circuit to bias the wafer to draw ions from the plasma discharge towards the wafer. The apparatus may further comprise a detection mechanism to detect charge buildup on the wafer by measuring an electric field in one or more designated locations near a top surface of the wafer.

Abstract: Systems are disclosed for providing a plasma conduit maintaining ionized particles within a perforation hole in a body, and a power source configured to provide electrical power through the plasma conduit. Methods are disclosed for detonating a plasma generator, the detonation forming a plasma conduit within a body perforation hole, and connecting a power source to the plasma conduit, the power source configured to provide electrical power through the plasma conduit. Systems are also disclosed for generating a plasma conduit. The system includes two or more explosive devices containing ionizable material, and the explosive devices are adapted to, upon detonation, form a plasma conduit in a body by generating intersecting perforation holes including plasma for conducting electrical energy from a power source.

Abstract: Particles are trapped away from a wafer transport zone in a chamber. A first electrode is on one side of the zone. A second electrode is on an opposite side of the zone. A power supply connected across the electrodes establishes an electrostatic field between the electrodes. The field traps particles at the electrodes, away from the zone. For transporting the wafer from the chamber, the second electrode mounts the wafer for processing, and the first electrode is opposite to the second electrode defining a process space. The zone is in the space with a separate part of the space separating the zone from each electrode. Particles are urged away from the wafer by simultaneously terminating plasma processing of the wafer, connecting the second electrode to ground, applying a positive DC potential to the first electrode, and de-chucking the wafer from the second electrode into the zone.

Abstract: A system for producing a fuel gas from a carbon-containing material is provided that includes a non-thermal plasma generator, an electric power source, a process stream inlet, and a product stream outlet. The non-thermal plasma generator includes a high voltage electrode separated from a grounded electrode by a modification passage. Moreover, a dielectric layer exists between the high voltage electrode and the grounded electrode. The electric power source is energizable to create non-thermal electrical microdischarges within the modification passage. As the process gas flows through the system, the carbon-containing material is converted to fuel gas.

Abstract: The present invention provides a highly reliable reaction cuvette in which air bubbles are adhered little and mutual contamination can be prevented among samples and reagents in adjoining reaction cuvettes, a method of surface treatment for a reaction cuvette, and an automatic analyzer with the reaction cuvette mounted therein. The reaction cuvette according to the present invention, in which a sample and a reagent are mixed with each other and its concentration is measured, has an area subjected to hydrophilic treatment by electric discharging on inner and outer surfaces of the reaction cuvette. Further the reaction cuvette has a container-like form with its upper portion opened to provide an opening and its lower portion closed to provide a bottom. The hydrophilic area is present from a bottom of the reaction cuvette up to a midway to the opening.

Abstract: Plasma generating devices, systems and processes are provided in which hybrid capacitively coupled plasma (CCP) and inductively coupled plasma (ICP) sources use a plurality of primary plasma generating cells embedded into large area electrode or elsewhere in communication with a plasma processing chamber. Plasma is generated and maintained by a shaped low-inductance element within each of a plurality of locally enhanced ICP micro-cells coupled to the chamber through a CCP electrode. The source is suitable for processing large diameter (300 mm and larger) semiconductor wafers and large area panels, including plasma screen displays.

Abstract: The present invention relates to a purification method for removing oxygen from materials, especially boron, by hydrogen-based plasma treatment.

Abstract: A recycling system for a waste converting apparatus collects residues from a post-processing means and re-introduces the residues into the apparatus such that the residues are exposed to the high temperature zone thereof.

Abstract: A process for the treatment of a nuclear graphite contaminated with radioelements includes subjecting the graphite, immersed in a medium containing water, to high-voltage pulses. The pulses have sufficient energy for electric arcs to be initiated and to break the constituent bonds of the water molecules and the carbon-carbon bonds of the graphite. The number of high-voltage pulses is determined so as to convert the graphite into gas.

Abstract: An antenna is disclosed to efficiently ionize the atmosphere for the purpose of reducing the aerosol counts, and therefore the number of poluted particles in suspension in the atmosphere, by deposition to ground. The antenna includes peripheral nodes and a central node. Each of the peripheral nodes is connected to adjacent peripheral nodes through peripheral spokes. The peripheral nodes are also connected to the central node through radial spokes. Electric power is applied to the peripheral spokes and the radial spokes causing the antenna to charge the atmosphere through the emission of ions. The antenna minimizes an attenuation factor that reduces ionization efficiency and reduces the land requirements for its installation.

Abstract: A gas injector including in which a gas is passed through high-voltage/low-current electrical discharges before being discharged into the chamber of a thermal treatment furnace. The electrical activation of the gas accelerates desirable reactions between the gas, gases in the furnace chamber, and the chamber workload. Preferably, a hot electrode is electrically charged and the other parts of the gas injector and the furnace are grounded.

Abstract: This invention relates generally to novel methods for affecting, controlling, and/or directing various reactions with and in various liquids (such as water) by creating an energy field within and/or juxtaposed to at least one surface of said liquid. An important aspect of the invention involves the creation of a plasma, which plasma is created between at least one electrode located above the surface of the liquid and at least a portion of the surface of the liquid itself, which functions as at least one second electrode. In order to permit at least a portion of the surface of the liquid to function effectively as a second electrode, at least one additional electrically conducting electrode is typically located within (e.g., at least partially submerged within) said liquid. The plasma results in a restructuring of the liquid and/or the presence of at least one active species within said liquid.

Abstract: A method of and system for recirculating a fluid in a particle production system. A reactor produces a reactive particle-gas mixture. A quench chamber mixes a conditioning fluid with the reactive particle-gas mixture, producing a cooled particle-gas mixture that comprises a plurality of precursor material particles and an output fluid. A filter element filters the output fluid, producing a filtered output. A temperature control module controls the temperature of the filtered output, producing a temperature-controlled, filtered output. A content ratio control module modulates the content of the temperature-controlled, filtered output, thereby producing a content-controlled, temperature-controlled, filtered output. A channeling element supplies the content-controlled, temperature-controlled, filtered output to the quench chamber, wherein the content-controlled, filtered output is provided to the quench chamber as the conditioning fluid to be used in cooling the reactive particle-gas mixture.

Abstract: A method of collecting particles from a gas-particle stream having a first temperature and a plurality of particles, the method comprising: cooling an interior surface of a collection chamber to a second temperature less than the first temperature of the gas-particle stream; flowing the gas-particle stream through the chamber, wherein the gas-particle stream is directed along the cooled interior surface of the collection chamber, and a temperature gradient between the gas-particle stream and the cooled interior surface creates a thermophoretic force; and the thermophoretic force attracting the particles from the gas-particle stream to the interior surface of the collection chamber, wherein the particles are deposited onto the interior surface of the collection chamber.

Abstract: The present invention relates to a method for generating a low-pressure plasma, in which a partial vacuum is generated by means of a vacuum pump in a low-pressure chamber, and a plasma jet is introduced at higher pressure into the low-pressure chamber. The present invention also relates to various applications of the low-pressure plasma for surface pretreatment, for surface coating, or for treating gases. The present invention also relates to a device for generating a low-pressure plasma.

Abstract: A system comprising: a plasma production chamber configured to produce a plasma; a reaction chamber vaporize a precursor material with the plasma to form a reactive mixture; a quench chamber having a frusto-conical surface and a quench region formed within the quench chamber between an ejection port of the reaction chamber and a cooled mixture outlet, wherein the quench region configured to receive the reactive mixture from the ejection port, to cool the reactive mixture to form a cooled mixture, and to supply the cooled mixture to the cooled mixture outlet; and a conditioning fluid injection ring disposed at the ejection port and configured to flow a conditioning fluid directly into the reactive mixture as the reactive mixture flows through the ejection port, thereby disturbing the flow of the reactive mixture, creating turbulence within the quench region and cooling the reactive mixture to form a cooled mixture comprising condensed nanoparticles.

Abstract: A system operating in an environment having an ambient pressure, the system comprising: a reactor configured to combine a plasma stream, powder particles and conditioning fluid to alter the powder particles and form a mixture stream; a supply chamber coupled to the reactor; a suction generator configured to generate a suction force at the outlet of the reactor; a fluid supply module configured to supply the conditioning fluid at an original pressure; and a pressure regulation module configured to: receive the conditioning fluid from the fluid supply module, reduce the pressure of the conditioning fluid from the original pressure to a selected pressure relative to the ambient pressure regardless of any changes in the suction force at the outlet of the reactor, and supply the conditioning fluid at the selected pressure to the supply chamber.

Abstract: A system for preparing nanoparticles using non-thermal pulsed plasma is provided. The system comprises a reaction chamber having two divided regions, i.e. a first region where nanoparticles are to be formed and a second region where the nanoparticles are to be received, to prevent the formation of a thin film of nanoparticles in the second region. The use of the system enables the preparation of nanoparticles with improved uniformity and high collection efficiency. In addition, collection and deposition of nanoparticles can be simultaneously performed in the second region. Therefore, the system can find applications in various fields, including devices, secondary cells and sensors. Further provided is a method for preparing nanoparticles using the system.

Abstract: A problem to be solved is to provide a method of forming domain inverted regions of short period in a ferroelectric single crystal in a controllable time period of application of voltage and an optical wavelength conversion element using the same. A solving means of it solves the problem by forming (i) a control layer having a larger defect density Dcont1 than the defect density Dferro of a ferroelectric single crystal (Dferro<Dcont1) or forming (ii) a control layer having a lower degree of order of lattice points than the degree of order of lattice points of the ferroelectric single crystal on a face perpendicular to the direction of polarization of the ferroelectric single crystal in the ferroelectric single crystal.

Abstract: A container for forming an electrode that can be used in electric reduction furnaces. The container comprises a cylindrical casing. Within the cylindrical casing is a plurality of ribs attached along the inner surface of the casing lengthwise of the cylindrical casing. At least one of the ribs in the container is made of a material comprising copper.

Abstract: A decomposition cell having a first metal plate with a first layer of dielectric and a second metal plate with a second layer of dielectric wherein each layer of dielectric is sprayed onto the metal plates in molten form using a thermal plasma spray process. The plates are placed in parallel spaced relation forming a discharge area therebetween. One of the metal plates is then attached to a high voltage high frequency source that when actuated causes a discharge within the discharge area.

Abstract: The invention relates to apparatus replacing atmospheric oxygen with an inert gas such as N2 from the minimum of one laminar air boundary layer of substrates moving in the direction of advance, for instance fast moving lines of material fitted with a first chamber which is only open toward the said substrate and otherwise is sealed off by the surrounding outer space, said first chamber comprising in the zone of its front sealing edge, transversely to the direction of advance, a front corona electrode fed with high DC voltage and associated with a front mate electrode on the other substrate side, and a further corona electrode on the same substrate side mounted on a further sealing edge transverse to the direction of advance, said further corona electrode being fed with high DC voltage and being associated with a further mate electrode on the other substrate side, and including a device feeding the said inert gas.

Abstract: A surface processing method for a mounting stage, which enables a mounting surface conforming to a substrate to be formed while saving time and effort. The substrate is mounted on a mounting surface of the mounting stage disposed in a housing chamber of a substrate processing apparatus that carries out plasma processing on the substrate. The mounted substrate is thermally expanded.

Abstract: A method and resultant produce of forming barrier layer based on ruthenium tantalum in a via or other vertical interconnect structure through a dielectric layer in a multi-level metallization. The RuTa layer in a RuTa/RuTaN bilayer, which may form discontinuous islands, is actively oxidized, preferably in an oxygen plasma, to thereby bridge the gaps between the islands. Alternatively, ruthenium tantalum oxide is reactive sputtered onto the RuTaN or directly onto the underlying dielectric by plasma sputtering a RuTa target in the presence of oxygen.

Abstract: A plasma processing apparatus includes a radio frequency generator capable of adjusting a target output power level based on the set power level and the offset level to output radio frequency power; a chamber in which a plasma process is performed; and a power detection unit for measuring radio frequency power level fed to the matching unit. The plasma processing apparatus further includes a generator control unit for controlling the radio frequency power such that the radio frequency power level fed to the matching unit reaches the set power level by calculating the offset level based on the difference between the set power level and the power level measured by the power detection unit and transmitting the set power level and the offset level in digital form to the data input terminal of the radio frequency generator.

Abstract: Methods of forming electrostatically charged gelatin are provided. Gelatin is extracted by an acid extraction method (12) thereby producing a gelatin dispersion (14), the pH of which is adjusted to the isoelectric point of the gelatin. The pH of the gelatin dispersion (14) is then further adjusted (22) so as to cause the gelatin to assume an electrostatic charge.