Rotary Patents (Class 204/212)
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Patent number: 11799157Abstract: Provided is an anode assembly cap for selective interconnection to a tank, for example. The anode assembly cap generally includes a flange with interconnected wall configured to surround at least a portion of an anode. When installed, the anode assembly facilitates electron transfer from the tank/anode assembly interface. The anode assembly creates a closed system with respect to the tank, wherein information transfer associated with the interconnection between the anode assembly and the storage tank is minimized or prevented.Type: GrantFiled: March 21, 2021Date of Patent: October 24, 2023Inventor: Christopher L. Moore
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Patent number: 11459638Abstract: Provided herein is a system for producing suspensions comprising soluble metal ions. The system comprises a basket to hold a metal load comprising a permeable floor so as to allow a solution to come into contact with the metal load. The system further comprises a vessel within which the solution and the basket may be maintained while metal ions are leached from the metal load into the solution. Some embodiments of the present disclosure pertain to a system used to produce a suspension comprising copper ions. Additionally, provided herein are methods of using the system to produce suspensions comprising soluble metal ions. Some embodiments of the present disclosure pertain to methods of making suspensions comprising copper ions. The resultant suspensions comprising metal ions may be further modified to supply a pharmaceutically acceptable treatment.Type: GrantFiled: August 3, 2021Date of Patent: October 4, 2022Assignee: CDA RESEARCH GROUP, INC.Inventors: Dominic C. Abbott, ChunLim Abbott
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Patent number: 11433468Abstract: Electrode for an electro-erosion process, includes a shaft, a body coupled to the shaft, a plurality of machining-inserts, an insulated layer, and a flushing cover disposed on the body and coupled to the shaft. The shaft includes a channel, a plurality of first and second openings, each opening connected to the channel. The body includes a plurality of main-flushing channels, each channel connected to a corresponding first opening. The plurality of machining-inserts is spaced apart from each other along a circumferential direction and detachably coupled to a peripheral end portion of the body. Each machining-insert includes at least one third opening connected to a corresponding main-flushing channel. The insulated layer is disposed on top and bottom surfaces of the body. The flushing cover includes a plurality of side-flushing channels and a plurality of fourth openings, each channel connected to a corresponding second opening.Type: GrantFiled: May 20, 2019Date of Patent: September 6, 2022Assignee: General Electric CompanyInventors: Yuanfeng Luo, Andrew Lee Trimmer, Bernard Adel Ibrahim, Dale Robert Lombardo, John Anthony Vogel
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Patent number: 11345620Abstract: A disc type electrocatalytic water treatment device, characterized in that: comprising: a housing having a water inlet and a water outlet, a plurality of cathode plates and anode plates sequentially and alternately stacked inside the housing, a central shaft passes through central holes of the cathode plates and anode plates and compress the cathode plates to form a disc-shaped structure while the cathode plate and the anode plate are separated at the central holes. A wastewater to be treated is guided to enter from the water inlet, flow inwardly and outwardly to sequentially pass through the cathode plate and the anode plate such that a passage route is formed, and finally flows out from the water outlet.Type: GrantFiled: November 1, 2019Date of Patent: May 31, 2022Assignee: Shaanxi University of Science & TechnologyInventors: Yunqing Zhu, Hongrui Ma, Junfeng Niu
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Patent number: 11280019Abstract: One embodiment relates to a substrate carrier for use in electroplating a plurality of substrates. The substrate carrier comprises a non-conductive carrier body on which the substrates are to be held. Electrically-conductive lines are embedded within the carrier body, and a plurality of contact clips are coupled to the electrically-conductive lines embedded within the carrier body. The contact clips hold the substrates in place and electrically couple the substrates to the electrically-conductive lines. The non-conductive carrier body is continuous so as to be impermeable to flow of electroplating solution through the non-conductive carrier body. Other embodiments, aspects and features are also disclosed.Type: GrantFiled: June 19, 2019Date of Patent: March 22, 2022Assignee: SunPower CorporationInventors: Emmanuel Chua Abas, Chen-An Chen, Diana Xiaobing Ma, Kalyana Bhargava Ganti, Edmundo Anida Divino, Jake Randal G. Ermita, Jose Francisco S. Capulong, Arnold Villamor Castillo
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Patent number: 11274377Abstract: Electroplating system seals may include an annular busbar characterized by an inner annular radius and an outer annular radius. The annular busbar may include a plurality of contact extensions. The seals may include an external seal member characterized by an inner annular radius and an outer annular radius. The external seal member may be vertically aligned with and extend inward of the contact extensions at the inner annular radius of the external seal member. The external seal member may include an interior surface at least partially facing the contact extensions. The seals may also include an internal seal member extending a first distance along the interior surface of the external seal member from the inner annular radius. The internal seal member may include a deformable material configured to support a substrate between the internal seal member and the plurality of contact extensions.Type: GrantFiled: April 17, 2019Date of Patent: March 15, 2022Assignee: Applied Materials, Inc.Inventors: Kyle M. Hanson, Manjunatha Vishwanatha Adagoor, Karthikeyan Balaraman, Karthick Vasu, Shailesh Chouriya
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Patent number: 11193184Abstract: Provided herein is a system for producing suspensions comprising soluble metal ions. The system comprises a basket to hold a metal load comprising a permeable floor so as to allow a solution to come into contact with the metal load. The system further comprises a vessel within which the solution and the basket may be maintained while metal ions are leached from the metal load into the solution. Some embodiments of the present disclosure pertain to a system used to produce a suspension comprising copper ions. Additionally, provided herein are methods of using the system to produce suspensions comprising soluble metal ions. Some embodiments of the present disclosure pertain to methods of making suspensions comprising copper ions. The resultant suspensions comprising metal ions may be further modified to supply a pharmaceutically acceptable treatment.Type: GrantFiled: February 22, 2019Date of Patent: December 7, 2021Assignee: CDA RESEARCH GROUP, INC.Inventors: Dominic C. Abbott, ChunLim Abbott
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Patent number: 11091847Abstract: A manufacturing process for making aircraft engine parts utilizes reusable reconfigurable smart memory polymer mandrel tooling, low temperature metal deposition, and composite part lay-up with resin coated conformable braided carbon fiber sleeves, to fabricate both metal internal engine parts and non-metal external parts for turbine engines.Type: GrantFiled: October 28, 2016Date of Patent: August 17, 2021Assignee: Unison Industries LLCInventors: Yanzhe Yang, Michael Thomas Kenworthy, Tajiri Gordon
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Patent number: 11066754Abstract: An apparatus for processing a front face of a semiconductor wafer is provided. The apparatus includes a main chamber, at least one loading port connected to the main chamber for introducing the wafer to the main chamber, at least one stack of wafer processing modules, and a transfer mechanism for transferring the wafer between the loading port and the processing modules. The at least one stack of wafer processing modules includes three or more substantially vertically stacked wafer processing modules, wherein adjacent wafer processing modules in the stack have a vertical separation of less than 50 cm, and each processing module is configured to process the wafer when disposed substantially horizontally therein with the front face of the wafer facing upwards, and at least one wafer processing module is an electrochemical wafer processing module.Type: GrantFiled: January 22, 2018Date of Patent: July 20, 2021Assignee: SPTS Technologies LimitedInventors: John Macneil, Martin Ayres, Trevor Thomas
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Patent number: 11040327Abstract: A barrel reactor (100) comprises a rotatable barrel (102); a first roller (110) located outside of the barrel (102) and arranged to facilitate rotation of the barrel, wherein the roller (110) comprises at least part of a first electrode; and a second electrode (120). A plasma is formed between the electrodes (110, 120). The second electrode (120) may also comprise a roller and the barrel (102) may be mounted on the rollers (110, 120). The spacing between, or positions of, the electrodes (110, 120) may be adjusted so as to accommodate different barrels (102) and/or to change the plasma distribution within the barrel (102).Type: GrantFiled: April 20, 2017Date of Patent: June 22, 2021Assignee: University College Dublin, National University of IrelandInventors: Peter Dobbyn, Denis Dowling
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Patent number: 11040897Abstract: Aspects of the disclosure are directed toward systems and methods for performing deionization of a fluid. A capacitive deionization (CapDI) module including a fluid inlet and a fluid outlet can be placed in a fluid flow system. The CapDI module can include a plurality of CapDI cells arranged in series with one another. A power MOSFET polarity circuit can receive power from a switching regular and provide bidirectional electrical power to the CapDI module for performing deionization and module regeneration processes. A controller can control the providing the electrical power from the switching regulator to the power MOSFET polarity circuit based on a signal received from a conductivity sensor positioned in the fluid flow path.Type: GrantFiled: March 3, 2016Date of Patent: June 22, 2021Assignee: Ecolab USA Inc.Inventor: Kyle Wood
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Patent number: 10844507Abstract: The present disclosure relates to an apparatus for electroplating an element. The apparatus may comprise a cathode cage assembly. The cathode cage assembly may include a cage member and at least one electrically conductive wire extending along at least a portion of the cage member. The wire may be arranged to form at least one volume within the cage member for retaining an element within the cage member. The cage member and the wire permit a degree of movement of the element during an electroplating process while retaining the element within the volume.Type: GrantFiled: April 27, 2018Date of Patent: November 24, 2020Assignee: Lawrence Livermore National Security, LLCInventors: Thomas L. Bunn, Corie Horwood
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Patent number: 10794131Abstract: A system, an apparatus and a method for adjusting a weir control the rate and/or speed at which drilling fluid feeds a separator. Multiple separators are typically used in parallel to process fluid returning from the well. A distribution manifold directs fluid to each separator. The weir is positioned within a feeder on an inlet end of the separator and connects to an attachment plate within the feeder. The distribution manifold or other flow control mechanism operates in combination with the weir. Adjustment apparatuses control the height of the weir to determine the rate the fluid flows onto the separator. The adjustment apparatuses provide mechanical and/or automated operation of the weir. Various profiles of the weir and adjustments of the height of the weir within the feeder increase and/or decrease the speed of the fluid as the fluid spills into the separator.Type: GrantFiled: October 10, 2016Date of Patent: October 6, 2020Assignee: M-I L.L.C.Inventors: John H. Fedders, Benjamin Lanning Holton
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Patent number: 10774432Abstract: A hydrogen molecule remixing device includes a base, a first gas and water channelling disc, an anode, a cathode, an ion membrane, a second gas and water channelling disc, a cover, a cationic water outlet connector and a connector. In practice, the source water is electrolyzed in the anode cavities of the anode to form oxygen molecules, ozone and anionic water, and electrolyzed in the cathode cavities of the cathode to form hydrogen molecules and cationic water. The hydrogen molecules are carried by the cationic water into the collecting and guiding chambers of the second gas and water channelling disc, so that the hydrogen molecules and the cationic water produce a blending reaction, and more hydrogen molecules are dissolved into the cationic water.Type: GrantFiled: May 16, 2018Date of Patent: September 15, 2020Inventor: Wen-Shing Shyu
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Patent number: 10711364Abstract: Apparatuses and methods are provided for depositing a metal layer on a wafer. A secondary weir is positioned at a region below the primary weir such that overflowed plating solution over the primary weir during electroplating flows in a substantially azimuthally uniform manner. Methods are provided for electroplating wafers by increasing flow rate between wafer processes while plating solution flows over a primary weir, remains in contact with the overflowing plating solution, and flows onto the secondary weir such that overflow is substantially azimuthally uniform.Type: GrantFiled: March 16, 2018Date of Patent: July 14, 2020Assignee: Lam Research CorporationInventors: Daniel Mark Dinneen, Jingbin Feng
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Patent number: 10704156Abstract: In described examples, a method for electroplating a semiconductor device includes: forming a metal foil; forming an inert anode support; attaching the metal foil to the inert anode support to form an anode; forming a cathode using a semiconductor substrate; immersing the anode and the cathode within an electrolyte solution; forming a circuit with a current source, the anode and the cathode; generating a current through the circuit; and electroplating a metal from the electrolyte solution onto the semiconductor substrate.Type: GrantFiled: December 19, 2016Date of Patent: July 7, 2020Assignee: TEXAS INSTRUMENTS INCORPORATEDInventors: Donald Charles Abbott, Kathryn Ann Schuck
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Patent number: 10428438Abstract: A substrate processing method of performing a predetermined processing by supplying a processing liquid to a processing region of a substrate and using processing target ions in the processing liquid, includes: arranging a template to face the substrate, the template including a passage configured to distribute the processing liquid, a direct electrode, and an indirect electrode, and the substrate including a counter electrode, which matches with the direct electrode, installed in the processing region; supplying the processing liquid to the processing region through the passage; and performing the predetermined processing on the substrate by applying a voltage to the indirect electrode to cause the processing target ions to migrate to the counter electrode side while applying a voltage between the direct electrode and the counter electrode to oxidize or reduce the processing target ions that have migrated to the counter electrode side.Type: GrantFiled: May 12, 2014Date of Patent: October 1, 2019Assignee: TOKYO ELECTRON LIMITEDInventors: Haruo Iwatsu, Tomohisa Hoshino, Toshiyuki Matsumoto
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Patent number: 10399168Abstract: A method for producing cavities in a turbomachine disk, the cavities extending between first and second lateral surfaces of the disk, the method including positioning a ring facing the first surface, the ring including an inner periphery including protrusions complementary in shape to the cavities that are to be produced; circulating an electrolyte close to the protrusions on the ring; activating a first translational movement of the ring towards the second surface; activating a rotation of the disk; generating an electric current pulse in the electrolyte when the ring is substantially at the first surface, the pulse resulting in the ionic dissolution of the disk at the protrusions; reducing the speed of rotation to a first reduced speed, when the ring is substantially at the first surface, for a first period of time; and stopping the first translation of the ring when the ring is beyond the second surface.Type: GrantFiled: June 6, 2014Date of Patent: September 3, 2019Assignee: SAFRAN AIRCRAFT ENGINESInventors: Janvier Lecomte, Jean-Michel Buelyha, Juri Kraft, Andreas Grützmacher
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Patent number: 10396469Abstract: An electronic circuit is made by selectively depositing an electrically conductive material seed layer conformally upon a three-dimensional substrate via the plurality of apertures of a three-dimensional mask. The substrate is then plated with more of the same electrically conductive material, or a different electrically conductive material, on the seed layer. In the case of electroplating, a nonconductive support structure is incorporated into a conductive clamp for making electrical connection to the seed layer. An environmentally protective layer may be deposited upon the electrically conductive material to such an extent that the electronic circuit remains solderable. The three-dimensional mask may be fabricated by an additive manufacturing technique.Type: GrantFiled: June 10, 2016Date of Patent: August 27, 2019Assignee: The Charles Stark Draper Laboratory, Inc.Inventors: Gregory M. Fritz, Kenneth P. Vandevoordt, Rebecca A. DeFronzo
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Patent number: 10369646Abstract: Provided is an electrode capable of increasing a degree of freedom in machining shape with a simple structure, an electrochemical machining apparatus using the electrode, an electrochemical machining method, and a product machined by the method. An electrode 4 has a core tube 41 formed of a material by which a second hole 101b having a direction or a curvature different from that of a first hole 101a having a predetermined curvature can be formed continuously from the first hole 101a and a coating 42 fixed to an outer periphery of the core tube 41.Type: GrantFiled: October 31, 2013Date of Patent: August 6, 2019Assignee: HODEN SEIMITSU KAKO KENKYUSHO CO., LTD.Inventors: Takayuki Mori, Hiroyuki Sunada, Hirotaro Hosoe
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Patent number: 10316420Abstract: Lead is recycled from lead paste of lead acid batteries in a process that employs alkaline desulfurization followed by formation of plumbite that is then electrolytically converted to pure lead. Remaining insoluble lead dioxide is removed from the lead plumbite solution and reduced to produce lead oxide that can be fed back to the recovery system. Sulfate is recovered as sodium sulfate, while the so produced lead oxide can be added to lead paste for recovery.Type: GrantFiled: December 2, 2015Date of Patent: June 11, 2019Assignee: Aqua Metals Inc.Inventors: Robert Lewis Clarke, Samaresh Mohanta
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Patent number: 10240248Abstract: In electroplating apparatus, a paddle or agitator agitates electrolyte in a vessel to provide high velocity fluid flow at the surface of a wafer. The agitator is designed and/or moved to also selectively shield part of the wafer, for example the edge of the wafer, from the electric field in the vessel. Selectively shielding may be achieved by temporally shifting the average position of the agitator towards one side of the wafer, by omitting or shortening slots in the agitator, and/or by synchronizing movement of the agitator with rotation of the wafer.Type: GrantFiled: August 10, 2016Date of Patent: March 26, 2019Assignee: Applied Materials, Inc.Inventors: Paul Van Valkenburg, Robert Mikkola, John L. Klocke, Paul R. McHugh, Gregory J. Wilson, Kyle Moran Hanson, Eric J. Bergman
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Patent number: 10214831Abstract: The invention relates to a one-piece metal component including an electroformed metal body, the external surface of the body including, only over or to a predetermined depth, less trapped hydrogen than the rest of the electroformed metal body causing a hardening relative to the rest of the body in order to improve the wear resistance of the one-piece component while preserving a relative magnetic permeability of less than 10 and the ability to be driven or pressed fit.Type: GrantFiled: October 12, 2015Date of Patent: February 26, 2019Assignee: Nivarox-FAR S.A.Inventors: Philippe Dubois, Christian Charbon
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Patent number: 10201660Abstract: A method and apparatus for plasma modifying a workpiece such as a medical barrel, medical barrel, vial, or blood tube is described. Plasma is provided within the lumen of the workpiece. The plasma is provided under conditions effective for plasma modification of a surface of the workpiece. A magnetic field is provided in at least a portion of the lumen. The magnetic field has an orientation and field strength effective to improve the uniformity of plasma modification of the generally cylindrical interior surface 16 of the generally cylindrical interior surface 16.Type: GrantFiled: November 25, 2013Date of Patent: February 12, 2019Assignee: SiO2 Medical Products, Inc.Inventors: Christopher Weikart, Becky L. Clark, Adam Stevenson, Robert S. Abrams, John Belfance, Joseph A. Jones, Thomas E. Fisk
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Patent number: 10190232Abstract: Disclosed herein are electroplating systems for electroplating nickel onto a semiconductor substrate having an electroplating cell for holding an electrolyte solution during electroplating which includes a cathode chamber and an anode chamber configured to hold a nickel anode, and having an oxygen removal device arranged to reduce oxygen concentration in the electrolyte solution as it is flowed to the anode chamber during electroplating and during idle times when the system is not electroplating. Also disclosed herein are methods of electroplating nickel onto a substrate in an electroplating cell having anode and cathode chambers, which include reducing the oxygen concentration in an electrolyte solution, flowing the electrolyte solution into the anode chamber and contacting a nickel anode therein, and electroplating nickel from the electrolyte solution onto a substrate in the cathode chamber, wherein the electrolyte solution in the cathode chamber is maintained at a pH of between about 3.5 and 4.5.Type: GrantFiled: August 6, 2013Date of Patent: January 29, 2019Assignee: Lam Research CorporationInventors: Bryan L. Buckalew, Thomas A. Ponnuswamy, Ben Foley, Steven T. Mayer
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Patent number: 10174437Abstract: A wafer is placed into a chuck assembly within an electroplating system. The chuck assembly includes a backing plate assembly engageable with a ring. A hub may be provided on one side of the backing plate assembly for attaching the chuck assembly to a rotor of a processor for electroplating a wafer. A wafer plate may be provided on the other side of the backing plate assembly. The ring has contact fingers electrically connected to a ring bus bar, and with the ring bus bar electrically connected to a power source in the processor via the backing plate assembly when the ring is engaged to the backing plate assembly. A wafer seal on the ring overlies the contact fingers. A chuck seal may be provided around a perimeter. Maintenance of the electrical contacts and the seal is performed remotely from the processors.Type: GrantFiled: June 30, 2016Date of Patent: January 8, 2019Assignee: Applied Materials, Inc.Inventors: Randy A. Harris, Michael Windham
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Patent number: 10167565Abstract: A method and device for electrodeposition in cylindrical geometry. A method for electrochemically depositing a thin layer on a flexible substrate, comprising: providing, in an electrolysis bath, a first closed cylinder in a second hollow cylinder, applying the flexible substrate to one of the surfaces chosen from the outer surface of the first cylinder and the inner surface of the second, the flexible substrate forming a first electrode, providing, in the electrolysis bath, a second electrode, and applying a potential difference between the first electrode and the second electrode in order to electrodeposit the thin layer on the flexible substrate.Type: GrantFiled: March 25, 2014Date of Patent: January 1, 2019Assignees: ELECTRICITE DE FRANCE, CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE-CNRS-Inventors: Gregory Savidand, Nicolas Loones, Daniel Lincot, Elisabeth Chassaing
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Patent number: 10145673Abstract: A method for obtaining distance measurements for a plating ring assembly and related device are provided. Embodiments include attaching a measurement device to a plating ring assembly, the plating ring assembly including: an outer ring, wherein the measurement device is attached to the outer ring and configured to rotate along the outer ring, a seal extending from a bottom surface of the outer ring along a circumference of the plating ring assembly, contact fingers located along the circumference of the plating ring assembly, between the outer ring and the seal, rotating the measurement device along the circumference of the outer ring by rotating the measurement device or the plating ring assembly; and obtaining critical dimensions of and between the seal and contact fingers with the measurement device.Type: GrantFiled: December 29, 2017Date of Patent: December 4, 2018Assignee: GLOBALFOUNDRIES INC.Inventor: Sven Heiko Grünzig
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Patent number: 10094034Abstract: The embodiments herein relate to methods and apparatus for electroplating one or more materials onto a substrate. In many cases the material is a metal and the substrate is a semiconductor wafer, though the embodiments are no so limited. Typically, the embodiments herein utilize a channeled plate positioned near the substrate, creating a cross flow manifold defined on the bottom by the channeled plate, on the top by the substrate, and on the sides by a cross flow confinement ring. Also typically present is an edge flow element configured to direct electrolyte into a corner formed between the substrate and substrate holder. During plating, fluid enters the cross flow manifold both upward through the channels in the channeled plate, and laterally through a cross flow side inlet positioned on one side of the cross flow confinement ring. The flow paths combine in the cross flow manifold and exit at the cross flow exit, which is positioned opposite the cross flow inlet.Type: GrantFiled: October 27, 2015Date of Patent: October 9, 2018Assignee: Lam Research CorporationInventors: Gabriel Hay Graham, Bryan L. Buckalew, Steven T. Mayer, Robert Rash, James Isaac Fortner, Lee Peng Chua
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Patent number: 10041185Abstract: Provided are a cylinder plating apparatus and a cylinder plating method, in which the distance between an insoluble electrode and a cylinder to be processed can be kept constant regardless of the diameter of the cylinder to be processed, and the surface area of the insoluble electrode is increased to reduce the current density of the insoluble electrode, thereby being capable of reducing burden on the insoluble electrode. The cylinder plating apparatus is configured to plate an outer peripheral surface of the cylinder to be processed in such a manner that a pair of the insoluble electrodes each having a shape in which at least a lower part thereof is curved inward and being constructed such that at least the lower part has a comb-like portion are brought close to both side surfaces of the cylinder to be processed with predetermined intervals.Type: GrantFiled: February 26, 2015Date of Patent: August 7, 2018Assignee: THINK LABORATORY CO., LTD.Inventor: Kazuhiro Sukenari
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Patent number: 10011917Abstract: Various embodiments herein relate to methods and apparatus for electroplating metal onto substrates. In various cases, a reference electrode may be modified to promote improved electroplating results. The modifications may relate to one or more of the reference electrode's shape, position, relative conductivity compared to the electrolyte, or other design feature. In some particular examples the reference electrode may be dynamically changeable, for example having a changeable shape and/or position. In a particular example the reference electrode may be made of multiple segments. The techniques described herein may be combined as desired for individual applications.Type: GrantFiled: March 20, 2015Date of Patent: July 3, 2018Assignee: Lam Research CorporationInventors: Zhian He, Ashwin Ramesh, Shantinath Ghongadi
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Patent number: 9909226Abstract: A solid electrolyte membrane (13) is arranged on a surface of an anode (11) between the anode (11) and a substrate (B) that serves as a cathode. The solid electrolyte membrane (13) is brought into contact with the substrate (B). At the same time, a metal film (F) is formed on the surface of the substrate (B) by causing metal to precipitate onto the surface of the substrate (B) from metal ions through application of voltage between the anode (11) and the substrate (B) in a first contact state where the solid electrolyte membrane (13) contacts the substrate (B). The metal ions are contained inside the solid electrolyte membrane (13).Type: GrantFiled: August 20, 2014Date of Patent: March 6, 2018Assignee: TOYOTA JIDOSHA KABUSHIKI KAISHAInventors: Motoki Hiraoka, Hiroshi Yanagimoto, Yuki Sato
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Patent number: 9891039Abstract: A method for obtaining distance measurements for a plating ring assembly and related device are provided. Embodiments include attaching a measurement device to a plating ring assembly, the plating ring assembly including: an outer ring, wherein the measurement device is attached to the outer ring and configured to rotate along the outer ring, a seal extending from a bottom surface of the outer ring along a circumference of the plating ring assembly, contact fingers located along the circumference of the plating ring assembly, between the outer ring and the seal, rotating the measurement device along the circumference of the outer ring by rotating the measurement device or the plating ring assembly; and obtaining critical dimensions of and between the seal and contact fingers with the measurement device.Type: GrantFiled: March 14, 2017Date of Patent: February 13, 2018Assignee: GLOBALFOUNDRIES INC.Inventor: Sven Heiko Grünzig
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Patent number: 9822460Abstract: Disclosed herein are methods and apparatuses for electroplating which employ seed layer detection. Such methods and related apparatuses may operate by selecting a wafer for processing, measuring from its surface one or more in-process color signals having one or more color components, calculating one or more metrics, each metric indicative of the difference between one of the in-process color signals and a corresponding set of reference color signals, determining whether an acceptable seed layer is present on the wafer surface based on whether a predetermined number of the one or more metrics are within an associated predetermined range which individually corresponds to that metric, and either electroplating the wafer when an acceptable seed layer is present or otherwise designating the wafer unacceptable for electroplating. The foregoing may then be repeated for one or more additional wafers to electroplate multiple wafers from a set of wafers.Type: GrantFiled: January 21, 2014Date of Patent: November 21, 2017Assignee: Lam Research CorporationInventors: Daniel Mark Dinneen, Steven T. Mayer
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Patent number: 9721800Abstract: Disclosed are pre-wetting apparatus designs and methods. These apparatus designs and methods are used to pre-wet a wafer prior to plating a metal on the surface of the wafer. Disclosed compositions of the pre-wetting fluid prevent corrosion of a seed layer on the wafer and also improve the filling rates of features on the wafer.Type: GrantFiled: July 9, 2014Date of Patent: August 1, 2017Assignee: Novellus Systems, Inc.Inventors: Steven T. Mayer, David W. Porter, Mark J. Willey, Robert Rash
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Patent number: 9689073Abstract: A roll-to-roll electroless plating system, including a plating tank containing plating solution, and a web advance system for advancing a web of media along a web-transport path that passes through the plating tank. One or more fluid guides are positioned within the plating tank to redirect plating fluid containing gas bubbles introduced by a gas bubble source away from the web of media as it is advanced through the plating solution in the plating tank.Type: GrantFiled: July 29, 2015Date of Patent: June 27, 2017Assignee: EASTMAN KODAK COMPANYInventors: Kelvin P. Hill, Robert R. Bettin, James Douglas Shifley, Timothy John Young, Gary P. Wainwright
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Patent number: 9617651Abstract: An anodizing apparatus configured to perform an anodization on a metallic material to be processed provided with a projecting portion on a surface thereof, includes: an electrolysis tank configured to store electrolytic solution for anodization; a first electrode portion formed of a metal and electrically connected to the material in an immersed state immersed in the electrolytic solution in the electrolysis tank; a second electrode portion formed of a metal and opposing the material in the immersed state; an electrode apparatus configured to apply a predetermined voltage between the first and second electrode portions; a retaining device configured to retain and rotate the material in the immersed state; and a first injection device configured to inject the electrolytic solution toward a predetermined area deviated from the material in a storage space in the electrolysis tank so that the material is deviated from a line in the direction of injection.Type: GrantFiled: December 3, 2013Date of Patent: April 11, 2017Assignee: AISIN SEIKI KABUSHIKI KAISHAInventors: Daishi Kobayashi, Megumi Hirose, Masaki Kato
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Patent number: 9589757Abstract: A method for providing a superconducting surface on a laser-driven niobium cathode in order to increase the effective quantum efficiency. The enhanced surface increases the effective quantum efficiency by improving the laser absorption of the surface and enhancing the local electric field. The surface preparation method makes feasible the construction of superconducting radio frequency injectors with niobium as the photocathode. An array of nano-structures are provided on a flat surface of niobium. The nano-structures are dimensionally tailored to interact with a laser of specific wavelength to thereby increase the electron yield of the surface.Type: GrantFiled: September 23, 2015Date of Patent: March 7, 2017Assignee: JEFFERSON SCIENCE ASSOCIATES, LLCInventors: Fay Hannon, Pietro Musumeci
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Patent number: 9481942Abstract: Various embodiments herein relate to methods and apparatus for electroplating metal onto substrates. The apparatus used to practice electroplating may be designed to have a geometric configuration that makes it difficult for air to travel and become trapped under the substrate. By using such apparatus, electroplating can occur at higher rates of substrate rotation than would otherwise be acceptable. The higher rate of substrate rotation allows electroplating to occur at higher limiting currents, which in turn increases throughput. The disclosed embodiments are particularly useful in the context of electrolytes that otherwise exhibit a relatively low limiting current (e.g., electrolytes having a low concentration of metal ions), though the embodiments are not so limited.Type: GrantFiled: February 3, 2015Date of Patent: November 1, 2016Assignee: Lam Research CorporationInventors: Jian Zhou, Cian Sweeney, Zhian He, Jonathan David Reid
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Patent number: 9322109Abstract: A method includes rotating a first motor part around a first structure substantially similar to a second motor part. The method also includes applying a first current to the first structure to electro-chemically machine the first motor part.Type: GrantFiled: August 1, 2013Date of Patent: April 26, 2016Assignee: Seagate Technology LLCInventors: Timothy Edward Langlais, Chris M. Woldemar, Troy M. Herndon
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Patent number: 9283655Abstract: The liquid diffuser adapter is intended to be attached to the arbor wheel of a center fed, wet stone fabrication machine to facilitate dust elimination. The adapter contains a fastener, a plurality of diffusing channels, and a protective coating. The fastener includes a main body, a flange, and a receptive cavity. The flange is concentrically and adjacently connected to the main body. The receptive cavity traverses through the flange and partially into the main body. The receptive cavity contains an opening, a threaded portion, and a hub portion. The threaded portion is used to attach the adapter to the arbor wheel through the opening; the hub portion allows for water to flow into the device and be redirected into the plurality of diffusing channels; the plurality of diffusing channels is radially positioned about the receptive cavity, connecting the hub portion to the exterior environment and thus the cutting disk.Type: GrantFiled: September 25, 2014Date of Patent: March 15, 2016Inventor: Mike Olari
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Patent number: 9272388Abstract: Described herein are polishing apparatus, polishing formulations, and polymeric substrates for use in polishing surfaces, and related methods. The apparatus, formulations, substrates, and methods may each be used in applications involving the polishing of metal and/or metal-containing surfaces such as semiconductor wafers. The apparatus, formulations, polymeric substrates, and related methods described herein may be used without abrasives, and in some instances, without mechanical friction of a pad surface against the surface to be polished. Therefore, defects on a polished surface due to such mechanical polishing processes may be reduced.Type: GrantFiled: February 1, 2013Date of Patent: March 1, 2016Assignee: NexPlanar CorporationInventor: Sudhanshu Misra
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Patent number: 9133561Abstract: Provided are a plating method and a plating apparatus for a cylinder, which are capable of forming a plating layer having a uniform thickness in a technology of plating a cylinder, effectively preventing current concentration in cylinder end portions when being combined with a plating technology using divided insoluble electrodes, and performing plating with a more uniform thickness over the full length of a cylinder without generating defects such as rashes and pits irrespective of the size of the cylinder. The insoluble electrode has a shape in which a lower part thereof is curved inward, and is capable of rotating about an upper end thereof. Further, a thickness of a plating layer on an outer peripheral surface of the cylinder is adjusted by controlling an interval of closeness to the cylinder.Type: GrantFiled: September 27, 2011Date of Patent: September 15, 2015Assignee: THINK LABORATORY CO., LTD.Inventor: Tatsuo Shigeta
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Publication number: 20150014175Abstract: An electroplating apparatus for plating a metal onto a surface of a wafer is disclosed. The apparatus comprises a wafer support configured to support a wafer and a processing base. The processing base has a scroll pump oriented to pump a plating solution in a substantially perpendicular direction with respect to the surface of the wafer. Further, the scroll pump includes a first scroll and a second scroll, at least one of which is configured as an anode. In one embodiment, the processing base includes an anolyte chamber including the scroll pump, a catholyte chamber, and a membrane separating the anolyte chamber from the catholyte chamber.Type: ApplicationFiled: July 9, 2013Publication date: January 15, 2015Inventor: Raymon F. Thompson
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Publication number: 20150001087Abstract: Disclosed herein are electroplating systems for forming a layer of metal on a wafer which include an electroplating module and a wafer edge imaging system. The electroplating module may include a cell for containing an anode and an electroplating solution during electroplating, and a wafer holder for holding the wafer in the electroplating solution and rotating the wafer during electroplating. The wafer edge imaging system may include a wafer holder for holding and rotating the wafer through different azimuthal orientations, a camera oriented for obtaining multiple azimuthally separated images of a process edge of the wafer while it is held and rotated (the process edge corresponding to the outer edge of the layer of metal formed on the wafer), and image analysis logic for determining an edge exclusion distance, wherein the edge exclusion distance is a distance between the wafer's edge and the process edge.Type: ApplicationFiled: June 26, 2013Publication date: January 1, 2015Inventors: Daniel Mark Dinneen, James E. Duncan
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Patent number: 8871065Abstract: The invention relates to an equipment for the surface treatment of parts (4), that comprises a plurality of treatment vats arranged in series and comprising rotating drums (2) provided with means for temporarily attaching the parts to be processed and having their axes (XX?) rotatingly mounted horizontally so that the major portion of each drum (2) is submerged in the processing liquid contained in the corresponding vat, and a conveyor line (14) for supplying each drum (2) with parts to be processed and for removing from said drum the parts already processed, characterized in that the conveying process is carried out along a general axis (ZZ?), and in that the axes (XX?) of the drums are parallel relative to each other and parallel to the general axis (ZZ?) of the conveyor line.Type: GrantFiled: September 24, 2007Date of Patent: October 28, 2014Assignee: Tornos Management Holding SAInventor: Frédéric Vacheron
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Publication number: 20140262803Abstract: An electroplating apparatus includes an anode configured to electrically communicate with an electrical voltage and an electrolyte solution. A cathode module includes a cathode that is configured to electrically communicate with a ground potential and the electrolyte solution. The cathode module further includes a wafer in electrical communication with the cathode. The wafer is configured to receive metal ions from the anode in response to current flowing through the anode via electrodeposition. The electroplating apparatus further includes at least one agitating device interposed between the wafer and the anode. The agitating device is configured to apply a force to gas bubbles adhering to a surface of the wafer facing the agitating device.Type: ApplicationFiled: March 13, 2013Publication date: September 18, 2014Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Shafaat Ahmed, Michael P. Chudzik, Lubomyr T. Romankiw
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Patent number: 8795480Abstract: Described are apparatus and methods for electroplating one or more metals onto a substrate. Embodiments include electroplating apparatus configured for, and methods including, efficient mass transfer during plating so that highly uniform plating layers are obtained. In specific embodiments, the mass transfer is achieved using a combination of impinging flow and shear flow at the wafer surface.Type: GrantFiled: June 29, 2011Date of Patent: August 5, 2014Assignee: Novellus Systems, Inc.Inventors: Steven T. Mayer, David W. Porter
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Publication number: 20140138238Abstract: An apparatus and method for removing contaminant species from water by electrocoagulation are described. Alternating grounded, rotating, planar circular electrodes and stationary planar electrodes function as a Tesla fluid pump when placed in contact with the contaminated water, causing the water to flow between the rotating and stationary electrodes. An insoluble abrasive material introduced into the water removes scale from the electrodes while the water is pumped thereby. A direct electric current is caused to flow between each pair of rotating and stationary electrodes, thereby producing electrocoagulation of the contaminants in the water flowing therebetween. The electrocoagulated materials may be separated from the treated water by filtration or by permitting the treated water to stand for a chosen period.Type: ApplicationFiled: August 6, 2013Publication date: May 22, 2014Applicant: Avivid Water Technology, LLCInventors: Lockett E. Wood, William R. Lowstuter
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Patent number: 8715469Abstract: An improved galvanic processing device includes disk shaped electrodes made from a metal which have circumferential segments aligned at an angle ? relative to the plane of the circumference of the electrode. The circumferential segments may have portions aligned at a different angle ? relative to the plane of the circumference of the electrode.Type: GrantFiled: August 11, 2011Date of Patent: May 6, 2014Inventors: Franti{hacek over (s)}ek Pancurák, Ladislav Jurec