And Dielectric Gasket Or Spacer Patents (Class 204/288.1)
  • Patent number: 8999119
    Abstract: The hydrogen production device of the present invention includes: a first electrode including a conductive substrate and a photocatalytic semiconductor layer; a second electrode that is electrically connected to the first electrode and disposed in a second region opposite to a first region relative to the first electrode; the first region is defined as a region on a side of a surface of the first electrode in which the photocatalytic semiconductor layer is provided; a water-containing electrolyte solution; and a housing containing these. The first electrode is provided with first through-holes and the second electrode is provided with second through-holes; and the first through-holes and second through-holes form a communicating hole for allowing the first region and the second region to communicate with each other. An ion exchange membrane having substantially the same shape as the communicating hole is disposed in the communicating hole to close the communicating hole.
    Type: Grant
    Filed: August 26, 2011
    Date of Patent: April 7, 2015
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Kenichi Tokuhiro, Takaiki Nomura, Kazuhito Hato, Noboru Taniguchi, Takahiro Suzuki, Satoru Tamura
  • Patent number: 8882974
    Abstract: A support mechanism used in an electro plasma polishing process includes a support beam, a first electrically conducting assembly, and a second electrically conducting assembly. The first electrically conducting assembly and the second electrically conducting assembly are mounted on the support beam. The first electrically conducting assembly is electrically insulated from the second electrically conducting assembly.
    Type: Grant
    Filed: February 28, 2013
    Date of Patent: November 11, 2014
    Assignees: Hong Fu Jin Precision Industry (ShenZhen) Co., Ltd., Hon Hai Precision Industry Co., Ltd.
    Inventors: Tian-Feng Huang, Bo Li, Wen-Li Wang, Hao-Chung Lee
  • Publication number: 20130299341
    Abstract: A removable electrode module for engagement with an electrolysis chamber comprises a first electrode, a second electrode, and a suspension structure. The suspension structure comprises a suspension rod coupled to the first electrode. The second electrode is suspended or supported by the suspension structure, which comprises at least one electrically-insulating spacer element for retaining the second electrode in spatial separation from the first electrode.
    Type: Application
    Filed: November 18, 2011
    Publication date: November 14, 2013
    Applicant: METALYSIS LIMITED
    Inventors: Peter G. Dudley, Allen Richard Wright
  • Patent number: 8398830
    Abstract: Disclosed therein are a method and a system for anodizing metals. The anodizing system includes: an electrolytic bath storing electrolyte of a predetermined amount therein; an anode line mounted on an upper portion of the electrolytic bath, the anode line having insulation blocks for dividing the anode line into several sections; a cathode line disposed outside the anode line, the cathode line having insulation blocks mounted correspondingly to the insulation blocks of the anode line for dividing the cathode line into several sections; a chain connected to a driving sprocket and a driven sprocket inside the anode line, the chain having a plurality of transfer blocks; and hangers electrically connected to the anode line and adapted to fixe and support objects to be plated, which are deposited in the electrolyte.
    Type: Grant
    Filed: June 4, 2009
    Date of Patent: March 19, 2013
    Assignee: Samwon Altech Co., Ltd.
    Inventor: Chi Ho Son
  • Patent number: 8361287
    Abstract: A multi-element cover system for controlling acid mist in metal electrowinning or electrorefining cells is made of an electrolyte resistant material and is applied above the surface of the electrolyte and below the electrical connections of the electrodes in order to provide a continuous and substantially airtight seal above the electrolyte.
    Type: Grant
    Filed: August 21, 2008
    Date of Patent: January 29, 2013
    Inventors: Fernando Penna Wittig, Cristian Villaseca Castro
  • Patent number: 8147662
    Abstract: The invention concerns a capping board assembly and its multiple connectable sections. Each pair of sections is connected with an interlocking joint, each of which comprises at least one projection and at least one recess that cooperate and prevent the longitudinal and lateral movement of the sections. Each interlocking joint is reinforced by a rod embedded within the section and extending within the projection. The rod has a tip that anchors the projection. The interlocking joints allow precision assembly of the sections of the capping board which greatly benefits strength, installation, replacement and transportation.
    Type: Grant
    Filed: January 29, 2008
    Date of Patent: April 3, 2012
    Assignee: Pultrusion Technique Inc.
    Inventor: Robert Dufresne
  • Patent number: 8142627
    Abstract: A system to monitor, control and management of a plant where hydrometallurgical processes of electrowinning or electrorefining of non ferrous metals which enables measuring the process variables which comprises: at least one group of electrolytic cells, said cells having means for the collection and transmission of the variables of the process; a plurality of electrodes (5) installed in the interior of each electrolytic cell, making up, alternately, anodes and cathodes of basic cells; a plurality of electrode (5) hanger bars forming, alternately, hanger bars for electrical contact of anodes (20) and hanger bar for electrical contact of cathodes (18); a plurality of support electrical insulators (15) which are positioned in the upper portion of the lateral walls between two adjacent cells; a plurality of electrical bus bars (6) which are fitted on top of each support electrical insulator (15) and underneath the plurality of electrodes (5); a plurality of electrical spacer insulators (16) each spacer insulator
    Type: Grant
    Filed: July 30, 2008
    Date of Patent: March 27, 2012
    Assignee: ANCOR TECMIN, S.A.
    Inventor: Victor Vidaurre Heiremans
  • Patent number: 8137513
    Abstract: In a sulfuric acid electrolytic cell to electrolyze sulfuric acid supplied to an anode compartment and a cathode compartment comprising a diaphragm, said anode compartment and said cathode compartment separated by said diaphragm, a cathode provided in said cathode compartment and a conductive diamond anode provided in said anode compartment, as said conductive diamond anode, a conductive diamond film is formed on the surface of said conductive substrate, the rear face of said conductive substrate is pasted, with conductive paste, on an current collector comprising a rigid body with size equal to, or larger than, said conductive substrate, an anode compartment frame constituting said anode compartment is contacted via gasket with the periphery on the side of the conductive diamond film of said diamond anode, said diaphragm is contacted with the front face of said anode compartment, further, with the front face of said diaphragm, the cathode compartment frame constituting said cathode compartment, a gasket, and
    Type: Grant
    Filed: June 26, 2009
    Date of Patent: March 20, 2012
    Assignees: Chlorine Engineers Corp., Ltd., Toshiba Corp., Ltd., Shibaura Mechatronics Corp., Ltd.
    Inventors: Masaaki Kato, Yoshiyuki Seya, Naoya Hayamizu, Makiko Tange, Yoshiaki Kurokawa, Nobuo Kobayashi
  • Patent number: 8101053
    Abstract: An axial flow electrolytic cell includes an outer layer made of a polyolefin material and formed as a tube. An outer layer liner lines an inside surface of the outer layer. The outer layer liner is formed as a metal tube. A middle layer is mounted inside the outer layer. The middle layer further includes a middle flow inlet and a middle flow outlet. The middle layer is formed as a metal tube. An inside layer is mounted inside the middle layer. The inside layer has an inside flow inlet and an inside flow outlet. The inside layer is formed as a middle tube. The first electrical connector is mounted to the middle layer at a middle layer connection. The first electrical connector passes through the outer layer and outer layer liner at an outer layer opening. A second electrical connector mounts to the outer layer liner and the inside layer.
    Type: Grant
    Filed: August 24, 2009
    Date of Patent: January 24, 2012
    Inventor: Pete Adams
  • Patent number: 8083910
    Abstract: An insulating spacer 30 comprises a plurality of unit spacers 40, and a flexible coupling portion 41 for coupling the unit spacers 40 along the axial direction thereof, wherein the unit spacer 40 comprises a plurality of annular plates 42 and 43 each having an insertion hole 44 for inserting the auxiliary anode 11, and a coupling frame 45 for coupling the annular plates 42 and 43 in the axial direction of the auxiliary anode 11 while opening the outer circumference side thereof. The auxiliary anode unit 10 is constituted by inserting the insulating spacer 30 into the auxiliary anode 11, and since each unit spacer 40 is coupled, the distal end of the auxiliary anode 11 is naturally located in proximity to the insertion hole 44 provided in the next unit spacer 40 when the auxiliary anode 11 penetrates one unit spacer 40. Accordingly, the auxiliary anode 11 can be inserted into the insulating spacer 30 by series of works, and as a result, the auxiliary anode unit 10 can be manufactured with good workability.
    Type: Grant
    Filed: March 26, 2007
    Date of Patent: December 27, 2011
    Assignee: Daiwa Excel Co., Ltd.
    Inventor: Chikanori Mizuno
  • Patent number: 8002956
    Abstract: A stand-off for maintaining the separation between an electrode and an object during a flow-through electroplating process is disclosed. The stand-off comprises a substantially streamlined shape that mitigates the effects of shadowing during deposition.
    Type: Grant
    Filed: February 28, 2008
    Date of Patent: August 23, 2011
    Assignee: The United States of America as represented by the Secretary of the Army
    Inventors: Timothy J O'Connor, Frederick J Nelson
  • Publication number: 20110048932
    Abstract: The invention discloses a unit for the electrolysis of water. The unit includes a plurality of stacked conductive plates which are separated from each other by a non conductive sealing ring. At least one of the stacked conductive plates functions as an anode. A plurality of the conductive plates functions as a cathode, wherein the number of cathodes is double the number of anodes.
    Type: Application
    Filed: August 31, 2009
    Publication date: March 3, 2011
    Applicant: Green On Demand, LLP (G.O.D.)
    Inventors: Joseph Michael Moon, Joseph E. Leiato, Timothy Iinug Mark Yataman Leiato
  • Publication number: 20100224483
    Abstract: Disclosed is a unit for producing sterilized water. The unit comprises an electrode module, a pair of electrode rods and a frame. The electrode module includes a pair of electrode plates and a hollow electrode separator positioned between the electrode plates to separate the electrode plates from each other. Each of the electrode plates has a plurality of elongated slots formed therein. The electrode rods apply different voltages to the respective electrode plates. The frame is positioned at one side of the electrode module and has portions for receiving the respective electrode rods. Each of the electrode plates has a pair of holes formed at the circumference thereof. The electrode rods penetrate through the respective holes. The holes have different sizes. The electrode plates are stacked in such a manner that the holes having different sizes overlap each other. This stack enables the application of different voltages to the electrode plates through the respective electrode rods.
    Type: Application
    Filed: March 1, 2010
    Publication date: September 9, 2010
    Inventor: Keum-il Cho
  • Publication number: 20100157503
    Abstract: Disclosed is a fine electrode body which is good in ion generation efficiency, maintenancability and handleability, and enables to reduce cost and the required installation space. Also disclosed are an ion generator using such a fine electrode body and a neutralization apparatus. Specifically disclosed is a fine electrode body wherein a discharge electrode, which is composed of a linear conductive member having a plurality of fine projections, and an induction electrode, which is composed of a linear conductive member arranged opposite to the discharge electrode, are arranged on a dielectric body. One or more of such fine electrode bodies are arranged on a sheet-like or film-like supporting body. Also specifically disclosed are an ion generator using such a fine electrode body and a neutralization apparatus.
    Type: Application
    Filed: August 24, 2006
    Publication date: June 24, 2010
    Inventors: Susumu Saito, Akira Okuyama
  • Publication number: 20100051475
    Abstract: A machining electrode includes: a base substance including an electrolytic portion faced to a workpiece on one end face in an axial direction and having conductivity; an insulating unit provided on a face in a direction generally orthogonal to the axial direction of the base substance and having insulation; and a shielding unit provided on a face opposite to the base substance of the insulating unit.
    Type: Application
    Filed: September 1, 2009
    Publication date: March 4, 2010
    Applicant: KABUSHIKI KAISHA TOSHIBA
    Inventors: Hideo ETO, Shuichi Saito
  • Patent number: 7507319
    Abstract: An anode holder is used to hold an anode in a plating tank. The anode holder includes a bar having a conductive portion connected to a power source, a conductive anode shaft attached to the bar, and an anode connected to the conductive anode shaft. The conductive anode shaft includes an external thread portion provided at an end of the conductive anode shaft, an O-ring, and a step portion provided between the O-ring and the external thread portion. The step portion has a diameter larger than a diameter of the external thread portion but smaller than a diameter of the O-ring. The anode includes an internal thread hole to which the external thread portion of the conductive anode shaft is screwed. The anode also includes a receiving portion for receiving the step portion of the conductive anode shaft in a state such that the O-ring of the conductive anode shaft is brought into contact with an inner surface of the receiving portion.
    Type: Grant
    Filed: July 21, 2006
    Date of Patent: March 24, 2009
    Assignee: Ebara Corporation
    Inventors: Fumio Kuriyama, Masaaki Kimura
  • Patent number: 7481911
    Abstract: An arrangement for installing and sealing an anode within a fluorine generating electrolytic cell is described, the arrangement comprising: an anode connection member, said anode connection member (32) passing through an aperture (70) in a skirt wall (20) and being in electrical connection with a skirt wall closure member (72) wherein the skirt wall closure member is sealingly engaged with said skirt wall and is electrically insulated therefrom.
    Type: Grant
    Filed: June 27, 2003
    Date of Patent: January 27, 2009
    Assignee: The BOC Group PLC
    Inventors: Graham Hodgson, Robert Dawson
  • Patent number: 7363110
    Abstract: A gasket having the form of a frame is provided with a curved portion at an inner or outer periphery thereof. When used in combination with a similarly configured gasket, the two gaskets may together, upon compression, form a pinch seal. The curved portion may be provided with a chemically resistant material.
    Type: Grant
    Filed: April 3, 2007
    Date of Patent: April 22, 2008
    Assignee: Ineos Chlor Enterprises Limited
    Inventors: Brian K. Revill, Michael F. Dutton, Keith A. Stanley, Alan R. Naylor
  • Patent number: 7297239
    Abstract: An electrochemical apparatus is provided which deposits material onto or removes material from the surface of a workpiece. The apparatus comprises a polishing pad and a platen which is in turn comprised of a first conductive layer in contact with the polishing pad and coupled to a first potential, a second conductive layer coupled to a second potential, and a first insulating layer disposed between the first and second conductive layers. At least one electrical contact is positioned within the polishing pad and is electrically coupled to the second conductive layer. A reservoir is provided which places an electrolyte solution in contact with the polishing pad and the workpiece. A carrier positions and/or presses the workpiece against the polishing pad.
    Type: Grant
    Filed: August 18, 2004
    Date of Patent: November 20, 2007
    Assignee: Novellus Systems, Inc.
    Inventors: Ismail Emesh, Periya Gopalan, Phillip M. Rayer, II, Bentley J. Palmer
  • Patent number: 7232507
    Abstract: An electrochemical cell design is disclosed for the particular application of the electrochemical treatment of contaminants in water. The cell is designed to allow the treatment of low concentrations of contaminants in low conductivity water efficiently, and to be simple to fabricate. The design incorporates tapered inlet and outlet fluid flow manifolds so that the cell pressure drop will be almost entirely due to fluid contacting the electrodes, thus maximising the effective use of the system pump power. A short anode to cathode distance and thin working electrodes are used to minimise resistive electrical power losses. The parallel slacked arrangement of the electrodes and the smooth inlet and outlet designs leads to relatively even distributions of current density and mass transfer resulting in maximal utilisation of the entire active electrode surface area.
    Type: Grant
    Filed: September 3, 2003
    Date of Patent: June 19, 2007
    Assignee: National Research Council of Canada
    Inventors: Michael Gattrell, Thierry Guena, Barry MacDougall
  • Patent number: 7223324
    Abstract: Disclosed in a capping board for use to support hanging legs of anodes and cathodes within adjacent electrolytic cells. This capping board has a main body having a bottom surface shaped to fit onto upper edges of the adjacent cells, and a top surface. A first set of spaced part insulating blocks project from the top surface. This first set of blocks extends in line all over the length of the capping board on one side of the main body. A second set of spaced part insulating blocks also projects from the top surface. This second set of blocks also extends in line all over the length of the capping board at a given lateral distance from the first set of blocks. Thus, the two sets of blocks form two rows that together define a central path on the top surface. Each of the blocks has a recess forming an upwardly and laterally opening compartment to receive and support one of the hanging legs of the anodes and cathodes.
    Type: Grant
    Filed: November 26, 2004
    Date of Patent: May 29, 2007
    Assignee: Pultrusion Technique Inc.
    Inventor: Robert P. Dufresne
  • Patent number: 7204919
    Abstract: Disclosed is a capping board for use to support anodes and cathodes within adjacent electrolytic cells, which has a plurality of individual seats positioned in spaced apart relationship all along its length to receive and support hanging legs projecting from these anodes and cathodes. This capping board is improved in that it has at least one sheet or wire of electrically conductive material embedded therein. This sheet or wire extends over the length of the board and is shaped and positioned so that part of its extends externally within at least some of the seats so as to allow electrical contact of the legs of either the anodes or the cathodes and to allow fast dissipation of heat in the case of a short circuit.
    Type: Grant
    Filed: December 3, 2003
    Date of Patent: April 17, 2007
    Assignee: Pultrusion Technique Inc.
    Inventor: Robert P. Dufresne
  • Patent number: 7048838
    Abstract: The invention provides an ion exchange membrane electrolyzer ensuring a satisfactory circulation of electrolyte, high electrolytic efficiency and great ridigity. An anode chamber partition in a flat sheet form is joined to a cathode chamber partition in a flat sheet form. An electrode retainer member in a sheet form is joined to at least one partition at a belt-like junction. A projecting strip with an electrode joined thereto is located between adjacent junctions. A space on an electrode surface side of the electrode retainer member defines a path through which a fluid goes up in the electrode chamber, and a space that spaces away from the space defines a path through which an electrolyte separated from a gas at a top portion of the electrode goes down.
    Type: Grant
    Filed: February 20, 2003
    Date of Patent: May 23, 2006
    Assignee: Chlorine Engineers Corp., Ltd.
    Inventors: Shinji Katayama, Masaru Mori, Masakazu Kameda
  • Patent number: 7033479
    Abstract: The invention is relative to an electrolytic cell comprising electrodes spaced apart from the back-wall by means of ribs, wherein a portion of the contact surface between the electrodes and the ribs is free from constraints in order to permit the complete removal of the electrodes once they have to be replaced by removing only partially the original contact surface, so that positioning of the substitute electrodes is allowed on the residual portion. A method for substituting the electrodes of the cell which leaves the distance between the electrode surface and the back-wall unvaried is also disclosed.
    Type: Grant
    Filed: October 30, 2001
    Date of Patent: April 25, 2006
    Assignee: De Nora Elettrodi S.p.A.
    Inventors: Dario Oldani, Antonio Pasquinucci
  • Patent number: 7018516
    Abstract: A bipolar multi-purpose electrolytic cell for high current loads has a frame, two electrode edge plates with metal electrode sheet, and power supply and of bipolar plates. Each includes a plastic electrode base body with electrode rear spaces and/or with coolings spaces that are incorporated on one or both sides: incorporated supply and discharge lines for the electrolyte solutions and the cooling medium, metal electrode sheets which are applied to both sides of the base body and are solid and/or perforated in the electrochemically active area: electrolyte sealing frames, which rest on the solid metal electrode sheets and which are made of flexible plastic, and: ion exchanger membranes, which rest on the perforated metal electrode sheets and/or on the electrolyte sheets and/or on the electrolyte sealing frames and which are provided for separating the electrode spaces.
    Type: Grant
    Filed: May 9, 2001
    Date of Patent: March 28, 2006
    Assignee: Peroxid-Chemie GmbH & Co. KG
    Inventors: Michael Gnann, Wolfgang Thiele, Gerd Heinze
  • Patent number: 7001493
    Abstract: The present invention provides an apparatus for preparing sterilizing water, which comprises an electrolyzer wherein an anode chamber (10) and a cathode chamber (20) partitioned by an ion exchange membrane (40) form a unit cell (A), being alternately arranged and successively equipped with close relation; water inlets (61, 62) and water outlets (71, 72) are provided on the end plate (60, 70) at both ends of the electrolyzer; said anode chamber (10) and cathode chamber (20) having circulative openings at the vicinity of each edge at both sides centered from anode plate (11) and cathode plate (21), of which two circulative openings of diagonal direction among them have plural passages of fan-shape, in order for water introduced through the openings to pass through the passages to rapidly go through each electrode; and a gap-control gasket (30) and a gasket for preventing leakage of electrolyte (31) having plural horizontal members are provided at the center to form an anode reaction chamber (13) and a cathode r
    Type: Grant
    Filed: September 3, 1999
    Date of Patent: February 21, 2006
    Assignee: Kyungwon Enterprises Co., Ltd.
    Inventor: Hee Jung Kim
  • Patent number: 6884330
    Abstract: The present invention relates to a method and apparatus for properly and consistently spacing an electrode from a workpiece while electrochemically etching (ECM) grooves to a precise depth in a surface of the workpiece to form a fluid dynamic bearing. The electrode is especially designed for imparting a grooved pattern to a flat surface, the electrode comprising a surface carrying the pattern to be formed on the flat surface, and a central rod extending a short distance above the electrode surface. The central rod precisely sets the gap between the electrode and the flat surface. The electrode is adapted to be electrically connected to a power supply so that the electrode serves as the cathode, and the flat work piece serves as the anode in an ECM system.
    Type: Grant
    Filed: October 24, 2001
    Date of Patent: April 26, 2005
    Assignee: Seagate Technology LLC
    Inventor: Mark G. Steele
  • Patent number: 6805778
    Abstract: Methods used in semiconductor electroplating systems, such as for plating copper, onto a semiconductor wafer or other semiconductor workpiece. The methods apply to patterned metal layers plated onto a seed layer which is partially protected by an overlying photoresist or other coating. The methods employ an electrode assembly which has a boot which seals about a contact face of the electrode. The sealing is performed by engaging the seal against photoresist to prevent corrosion of the seal layer. The area enclosed by the sealing includes a via which is surrounded by the seal. The electrode contact extends through the via to provide electrical contact with the metallic seed layer. Plating of copper or other metal proceeds at exposed seed layer areas.
    Type: Grant
    Filed: September 3, 1999
    Date of Patent: October 19, 2004
    Assignee: Semitool, Inc.
    Inventors: Robert W. Batz, Jr., Kenneth C. Haugan, Harry J. Geyer, Robert W. Berner
  • Publication number: 20040159543
    Abstract: An electrochemical cell component having a plate with opposing faces, seal grooves formed in each of the faces, and a plurality of holes extending through the plate between the first and second grooves with an integral sealing member formed in the grooves and holes. The seal grooves extend continuously around the perimeter of the faces and the grooves may follow any type of contiguous pattern. The component may form a frame surrounding a flow field. Bipolar plates and fluid cooled bipolar plates may comprise this electrochemical cell component. Alternatively, a seal groove may be formed in only the first face and a ridge formed in the second face of the component. The ridge may be used to form a fluid tight seal when pressed into an opposing surface of the membrane in a membrane and electrode assembly. A sealing material is contained within the seal groove.
    Type: Application
    Filed: December 4, 2003
    Publication date: August 19, 2004
    Inventors: Chris Boyer, Brad Fiebig, Craig Andrews, James Layton
  • Patent number: 6761808
    Abstract: An electrode structure for use, for example, in a bipolar electrolyser comprising (i) a pan with a dished recess and a flange around the periphery thereof for supporting gasket means for sealing a separator between the flanges in adjacent electrode structures, which separator is disposed between the surface of the anode of a first electrode structure and the cathode of a second electrode structure such that the anode surface is substantially parallel to and faces but is insulated and spaced apart from the cathode surface by the separator and is hermetically-sealed to the separator, (ii) an electrically conductive plate spaced from the pan, (iii) a plurality of electrically-conductive members to which the electrically conductive plate is electroconductively attached and which provide electrically-conductive pathways between the pan and the electrically conductive plate, (iv) inlet for electrolyte and (v) outlets for liquids and gases wherein where the electrode structure is an anode structure the dished recess
    Type: Grant
    Filed: November 13, 2001
    Date of Patent: July 13, 2004
    Assignee: Ineos Chlor Limited
    Inventors: Brian K Revill, Michael F Dutton, Keith A Stanley, Alan R Naylor
  • Publication number: 20040108204
    Abstract: A gasket having the form of a frame is provided with a curved portion at an inner or outer periphery thereof. When used in combination with a similarly configured gasket, the two gaskets may together, upon compression, form a pinch seal. The curved portion may be provided with a chemically resistant material.
    Type: Application
    Filed: December 1, 2003
    Publication date: June 10, 2004
    Applicant: Ineos Chlor Limited
    Inventors: Brian K. Revill, Michael F. Dutton, Keith A. Stanley, Alan R. Naylor
  • Publication number: 20040011669
    Abstract: An anode assembly for insertion in a gap between a section of reinforced concrete and another solid structure, which may be another section of concrete, comprises an anode attached to a body of deformable material which is preferably resiliently deformable, whereby, when the assembly is inserted into the gap, the anode is pressed into electrical contact with the concrete surface.
    Type: Application
    Filed: June 13, 2003
    Publication date: January 22, 2004
    Inventors: Gareth K. Glass, Adrian C. Roberts, John M. Taylor
  • Patent number: 6663762
    Abstract: A semiconductor workpiece holder used in electroplating systems for plating metal layers onto a semiconductor workpieces, and is of particular advantage in connection with plating copper onto semiconductor materials. The workpiece holder includes electrode assemblies which have a contact part which connects to a distal end of an electrode shaft and bears against the workpiece and conducts current therebetween. The contact part is preferably made from a corrosion resistant material, such as platinum. The electrode assembly also preferably includes a dielectric layer which covers the distal end of the electrode shaft and seals against the contact part to prevent plating liquid from corroding the joint between these parts.
    Type: Grant
    Filed: March 19, 2002
    Date of Patent: December 16, 2003
    Assignee: Semitool, Inc.
    Inventors: Martin C. Bleck, Lyndon W. Graham, Kyle M. Hanson
  • Publication number: 20030183516
    Abstract: The invention relates to a device for the decontamination of water, particularly of heavy metals and/or arsenic and/or their compounds, by means of electrolysis, wherein the water to be purified is fed through a receptacle and passes by electrodes of different polarities. According to the invention, a combination of electrodes made from iron, aluminium, and graphite, or from aluminium and graphite, is used. Facing the direction of the receptacle bottom, the undersides of the electrodes are contained in groove-like, electrically insulated recesses that are spaced apart and separated from one another on their opposite side by single electrically insulating spacers, wherein the spacers are attached to the electrodes, and the electrodes, which can be unfolded, are arranged in the groove-like recesses.
    Type: Application
    Filed: September 12, 2002
    Publication date: October 2, 2003
    Inventor: Giselher Klose
  • Patent number: 6576098
    Abstract: The present invention relates to a metal cathode sheet as component of cathode equipment for an electrolysis tank for the electrolytic recovery of pure metals, especially copper. The cathode sheet is provided, at its side edges which come into contact with the electrolyte and are vertically aligned in the electrolysis tank, with an edge protector, made of a ceramic material. The edge protector is electrically insulating, of dense porosity and resistant to electrolyte. Sharp-edged breakthroughs and the outer cathode cutting edges are completely coated by edge protector. In this manner flux line concentrations at these locations are forestalled.
    Type: Grant
    Filed: August 16, 2001
    Date of Patent: June 10, 2003
    Assignee: KM Europa Metal AG
    Inventor: Gunter Knies
  • Publication number: 20030085119
    Abstract: A cathode assembly for semiconductor wafer plating employs a polymer coating on a metal structural ring to provide a low-profile seal to the perimeter of the wafer surface to be plated. The polymer coating also electrically insulates the metal so that it can be used in contact with the plating solution and still be part of the electrical contact system, eliminating the need for a protective plastic housing. This invention permits the dimensions of the cathode assembly to be minimized. A compact cathode assembly with minimum protrusion above the wafer plated surface enables modifications to the plating cell and agitation system providing more uniform copper deposits across the wafer surface and facilitating automation of the wafer plating process.
    Type: Application
    Filed: November 2, 2001
    Publication date: May 8, 2003
    Applicant: Innovative Technology Licensing, LLC
    Inventors: Greg Davis, Alex Moffatt, D. Morgan Tench, John T. White
  • Patent number: 6478936
    Abstract: A particular anode assembly can be used to supply a solution for any of a plating operation, a planarization operation, and a plating and planarization operation to be performed on a semiconductor wafer. The anode assembly includes a rotatable shaft disposed within a chamber in which the operation is performed, an anode housing connected to the shaft, and a porous pad support plate attached to the anode housing. The support plate has a top surface adapted to support a pad which is to face the wafer, and, together with the anode housing, defines an anode cavity. A consumable anode may be provided in the anode cavity to provide plating material to the solution. A solution delivery structure by which the solution can be delivered to said anode cavity is also provided. The solution delivery structure may be contained within the chamber in which the operation is performed. A shield can also be mounted between the shaft and an associated spindle to prevent leakage of the solution from the chamber.
    Type: Grant
    Filed: May 11, 2000
    Date of Patent: November 12, 2002
    Assignee: NuTool Inc.
    Inventors: Rimma Volodarsky, Konstantin Volodarsky, Cyprian Uzoh, Homayoun Talieh, Douglas W. Young
  • Patent number: 6395155
    Abstract: An electrolysis plate is described which consists of an outer non-conductive frame, particularly a frame having a fiber-reinforced cresol resin, an electrically conductive, bipolar graphite plate which is mounted therein and is preferably slotted on both sides, and, in the region of the electrolyte feed, has plastic skirts for the forced direction of the electrolyte solutions.
    Type: Grant
    Filed: November 16, 2000
    Date of Patent: May 28, 2002
    Assignee: Bayer Aktiengesellschaft
    Inventors: Bernd Bressel, Hans-Joachim Kramann
  • Patent number: 6383352
    Abstract: A metal anode having at least a portion of which formed in a spiral configuration is disclosed. The spacing between the adjacent spirals of the anode is essentially uniform in order to provide uniform fluid flow and electrical characteristics. The anode may be formed of a metal rod or sheet or may be cast from a metal. The anode surfaces of the spiral may be flat or have a configuration such as a corrugated surface to enhance the surface area of the anode. The use of spacers, electrically conductive or insulative, within the spaces between the spirals to maintain their uniform distance is also disclosed. The use of one or more buss bars enables the anode to be supplied with a constant electrical source and may also function as a means for monitoring anode consumption over time. The anode is preferably used in an electroplating bath as the source of the metal used for plating. This is particularly of value in the electroplating of silicon wafer surfaces.
    Type: Grant
    Filed: February 14, 2000
    Date of Patent: May 7, 2002
    Assignee: Mykrolis Corporation
    Inventors: Jieh-Hwa Shyu, Peter V. Kimball
  • Patent number: 6358388
    Abstract: A semiconductor workpiece holder used in electroplating systems for plating metal layers onto a semiconductor workpieces, and is of particular advantage in connection with plating copper onto semiconductor materials. The workpiece holder includes electrode assemblies which have a contact part which connects to a distal end of an electrode shaft and bears against the workpiece and conducts current therebetween. The contact part is preferably made from a corrosion resistant material, such as platinum. The electrode assembly also preferably includes a dielectric layer which covers the distal end of the electrode shaft and seals against the contact part to prevent plating liquid from corroding the joint between these parts.
    Type: Grant
    Filed: November 16, 1999
    Date of Patent: March 19, 2002
    Assignee: Semitool, Inc.
    Inventors: Martin C. Bleck, Lyndon W. Graham, Kyle M. Hanson
  • Patent number: 6325903
    Abstract: A holding clamp device, for releasably holding a thick planar article over ground, comprising: an elongated main arm member, defining first and second opposite end portions; a pair of first and second tubular bar members, each defining an outer end portion and an opposite inner end portion; a rail member, integral to an intermediate section of the main arm member and slidably engaged by the second bar member inner end portion, wherein the second bar member is maintained by the rail member parallel to the first bar and wherein the second bar member is movable relative to the first bar member while continuously remaining parallel thereto; a first biasing member, continuously biasing the first and second bar members toward one another; and a second biasing member, for discretely biasing the second bar member away from the first bar member, against the continuous bias of the first biasing member.
    Type: Grant
    Filed: July 18, 2000
    Date of Patent: December 4, 2001
    Inventor: Howard Brown
  • Patent number: 6312572
    Abstract: The present invention provides an ion exchange membrane type electrolyzer, which comprises electrodes at opposed positions via an ion exchange membrane, spacers are mounted in dot-like arrangement on openings of electrode surface to maintain spacing between the ion exchange membrane and surface of at least one of the electrodes.
    Type: Grant
    Filed: March 14, 2000
    Date of Patent: November 6, 2001
    Assignees: Chlorine Engineers Corp., Ltd., Tosoh Corporation
    Inventor: Shinji Katayama
  • Patent number: 6284109
    Abstract: A spacer mechanism which is used to separate electrodes within an electrowinning process. The spacers have a central body portion which defines the distancing between the electrodes and at least four sloping arms extending from the central body. The arms are used to move the electrodes to the top of the central body of the spacer, as the electrodes are being placed next to each other. Each of the arms is ideally narrow so that the “footprint” of the spacer is minimized. The small “footprint” causes minimal disruption of the electrical flow between the electrodes so that the electro-deposition process proceeds in a uniform manner.
    Type: Grant
    Filed: March 16, 2000
    Date of Patent: September 4, 2001
    Inventor: William Ebert
  • Patent number: 6270647
    Abstract: A system for electroplating a semiconductor wafer is set forth. The system comprises a first electrode in electrical contact with the semiconductor wafer and a second electrode. The first electrode and the semiconductor wafer form a cathode during electroplating of the semiconductor wafer. The second electrode forms an anode during electroplating of the semiconductor wafer. A reaction container defining a reaction chamber is also employed. The reaction chamber comprises an electrically conductive plating solution. At least a portion of each of the first electrode, the second electrode, and the semiconductor wafer contact the plating solution during electroplating of the semiconductor wafer. An auxiliary electrode is disposed exterior to the reaction chamber and positioned for contact with plating solution exiting the reaction chamber during cleaning of the first electrode to thereby provide an electrically conductive path between the auxiliary electrode and the first electrode.
    Type: Grant
    Filed: August 31, 1999
    Date of Patent: August 7, 2001
    Assignee: Semitool, Inc.
    Inventors: Lyndon W. Graham, Kyle Hanson, Thomas L. Ritzdorf, Jeffrey I. Turner
  • Patent number: 6267856
    Abstract: A holding clamp device, for releasably holding a thick planar article over ground, comprising: an elongated main arm member, defining first and second opposite end portions; a pair of first and second tubular bar members, each defining an outer end portion and an opposite inner end portion; a rail member, integral to an intermediate section of the main arm member and slidably engaged by the second bar member inner end portion, wherein the second bar member is maintained by the rail member parallel to the first bar and wherein the second bar member is movable relative to the first bar member while continuously remaining parallel thereto; a first biasing member, continuously biasing the first and second bar members toward one another; and a second biasing member, for discretely biasing the second bar member away from the first bar member, against the continuous bias of the first biasing member.
    Type: Grant
    Filed: February 4, 2000
    Date of Patent: July 31, 2001
    Assignee: M & B Plating Racks Inc.
    Inventor: Howard Brown
  • Patent number: 6264810
    Abstract: A coupling for an inert electrode for refining a metal is provided. The coupling includes an electrode assembly and an electrically conductive support structure assembly. The support structure assembly includes a mechanical connection and an electrical connection which are in spaced relation. The mechanical connection holds the electrical connection in compression.
    Type: Grant
    Filed: December 14, 1999
    Date of Patent: July 24, 2001
    Assignee: Alcoa Inc.
    Inventors: Israel Stol, S. John Pien, Robert W. Woods, Rabindra K. Bhattcharyya
  • Patent number: 6228231
    Abstract: A fixture for supporting a workpiece during electroplating of a metal upon the workpiece in a conductive electroplating bath includes a non-conductive frame member for receiving the workpiece therein. The fixture further includes a current distribution means having a plurality of contacts. The plurality of contacts are disposed inwardly for providing an equally distributed electrical contact with an outer perimeter region of the workpiece. The workpiece is supported between the frame member and the current distribution means. Lastly, a thief electrode is perimetrically disposed about the workpiece and spaced a prescribed distance from the workpiece by a gap region. During plating of a metal upon the workpiece, the gap region between the thief and the workpiece is filled with the conductive electroplating bath. An electroplating apparatus having a fixture for supporting a workpiece during an electroplating process and a method of supporting the workpiece to be electroplated are also disclosed.
    Type: Grant
    Filed: September 27, 1999
    Date of Patent: May 8, 2001
    Assignee: International Business Machines Corporation
    Inventor: Cyprian Emeka Uzoh