Abstract: A structure including a support defining an opening, and a tensilely stressed thin-film membrane disposed to occlude the opening, the membrane contacting at least a portion of the support. The stressed membrane includes a material having a characteristic crack spacing greater than one-half of a minimum dimension of the membrane and less than ten times the minimum dimension. A structure including a support defining a opening having a minimum opening dimension, and a compressively stressed thin-film membrane disposed to occlude the opening, the membrane contacting at least a portion of the support. The stressed membrane includes a membrane material having a critical aspect ratio for buckling that is greater than a ratio of one-half of the minimum opening dimension to a thickness of the membrane, and the critical aspect ratio for buckling is less than a ratio of ten times the minimum opening dimension to the thickness of the membrane.

Abstract: Disclosed herein are an apparatus and a method for separating molecules on the basis of size and or structure, and to a method of making the apparatus. Generally, the separation method includes passing a fluid comprising particles having different effective molecular diameters through a plurality of open, nanoscale channels disposed in surfaces of substrates. The method also includes obtaining a plurality of fractions of the passed fluid such that each of the fractions includes a major portion containing particles having similar size and shape and substantially free of particles having larger size and shape. The apparatus includes first and second substrates each of which has a surface containing a plurality of open, nanoscale channels disposed therein. The surfaces are bonded together such that each of the channels of the first substrate is in fluid communication with at least two of the channels of the second substrate and is misaligned relative to the channels of the second substrate.

Abstract: Separating a multi-phase mixture influent even during excessive flows of specific phases. The dynamic phase separator includes a chamber divided into two regions by an inner wall disposed radially inward relative to an outer wall. A gross separation region is defined between the inner wall and the outer wall, while a fine separation region lies inside an area defined by the inner wall and top of the chamber. Influent to be separated is fed through an inlet into the gross separation region. A plurality of porous disks are mounted to a rotatable shaft and disposed in the fine separation region. The outer and inner walls are separated by a predetermined distance sufficient to allow for adequate rotational velocity of incoming tangential flow of the influent and dwell time sufficient for natural separation of lighter phases from heavier phases within the gross separation region.

Abstract: A membrane bag comprising a volume for permeate collection, wherein the volume is completely enclosed in seamless membrane substance; a filtration unit comprising at least one above-described seamless membrane bag; the use of at least one above-described seamless membrane bag in a membrane bioreactor; the use of at least one above-described seamless membrane bag in water filtration or waste water purification; and the use of at least one above-described seamless membrane bag for the filtration or separation of a mixture of fluids, vapors and particles.

Abstract: A solid-liquid separation system for chemically-precipitated heavy metal wastewater having a membrane module disposed in a filter zone of a chemical reaction tank, a water outlet pipe of the membrane module, a pressure gauge with electric contact, a suction pump, a water inlet pipe of the suction pump, a backwashing pump, and a backwashing pipe. The membrane module, the water outlet pipe of the membrane module, the pressure gauge with electric contact, the water inlet pipe of the suction pump, and the suction pump are directly connected in sequence to form a membrane module water production system. The water outlet pipe of the membrane module, the pressure gauge with electric contact, the backwashing pipe, and the backwashing pump are directly connected in sequence to form a backwashing system. A method for treating chemically-precipitated heavy metal wastewater using the separation system is also provided. The separation effect is very good.

Abstract: The scope of the invention is to apply an electric current or to use a kind of iontophoresis system with the hemodialysis cartridge and system (the proposed method is also applicable to peritoneal dialysis or other similar methods) to remove unwanted molecules from blood, plasma or serum or other body fluids and to increase the effectiveness of the process. This cartridge can be used for patients with uremia and cartridge fixed to the conventional hemodialysis machine and additionally the electric current applied to the electrodes placed in to the cartridge or electrode connectors placed to the conventional cartridge. When the system activated, the molecules in the blood or other body fluid migrates to the hemodialysis solution. Charged ions or uncharged molecules move together with electroosmotic flow. The sterilized electrodes preferably made by Ag/AgCl to prevent pH changing effect. Other apparatus can also be used for providing an electropotential gradient.

Abstract: Provided is a disposable multi-layered filtration device for the separation of blood plasma which can be applied to a biochip and appropriate for disposal uses. The filtration device for the separation of blood plasma includes: an upper substrate including a blood inlet; an intermediate substrate including a filtering unit for extracting blood plasma from blood flowing through the blood inlet; and a lower substrate including an air outlet, wherein the upper substrate, the intermediate substrate, and the lower substrate are stacked and adhered.

Abstract: A filter sleeve is fabricated from a variety of media selected to preferentially remove particulates and specific contaminants from water or other liquids. The layers of the filter sleeve may be configured to remove 1-micron particulates, while another layer or layers may be configured to remove a range of petroleum hydrocarbons, fats, oils, and greases, while yet another layer may be configured to remove metals, and yet another layer could be configured to remove bacteria, algae, mold, and fungus. Filter sleeves that are configured to remove different particulate sizes and contaminants can be used simultaneously by placing the filter sleeves inside one another to accrue the capabilities of several individual filter sleeves as one unit. The filter sleeve can be used to remove particulates and hydrocarbons from waste water accumulated in underground vaults, enabling such waste water to be discharged directly into the ambient environment.

Abstract: In a membrane distillation process in which a liquid to be concentrated is separated from a vapor space (11) by a vapor-permeable liquid- or water-tight membrane or membrane wall (13), to set the absolute pressure of the liquid to be concentrated a reduced pressure is imparted to this which lowers the absolute pressure of the liquid to be concentrated. A corresponding membrane distillation device is also specified.

Abstract: A filtration cassette is described. The filtration cassette can include one or more filtrate channel spacers and one or more feed channel spacers. Each of the feed channel spacers and each of the filtrate channel spacers define an open interior volume bounded by an inner perimeter and include at least one feed port and at least one filtrate port. The filtrate channel spacers and the feed channel spacers are arranged such that the feed ports and the filtrate ports are positioned in respective alignment. The filtration cassette further includes one or more membranes disposed between the filtrate channel spacers and the feed channel spacers, and one or more retaining members at either end of the filtration cassette. A thin film of adhesive binds together the filtrate channel spacers, the feed channel spacers, and the membranes.

Abstract: A device for dialysis of a sample includes a sample chamber formed by a gasket and dialysis membranes affixed to each side of the gasket in facing relationship. A housing supports the dialysis membranes and gasket. An air chamber causes the device to float in a generally upright position when the device is immersed in a dialysate. An access port is provided through the gasket and between the dialysis membranes. The access port is accessible from outside the housing and in communication with the sample chamber such that a dispensing end of a dispensing device can be inserted through the access port to dispense sample into the sample chamber. In one embodiment, the gasket is impermeable or essentially impermeable to the sample being dialyzed.

Abstract: A filter unit for treating water includes at least two ceramic filter membranes; and a mount for the at least two ceramic filter membranes, wherein the ceramic filter membranes are formed in the shape of plates and each have a filter-active outer side and at least one internally lying discharge channel for filtered water, the mount has a collection space, via which water leaving the discharge channels can be drained, and the mount has at least two sockets that liquid-tight fix the at least two ceramic filter membranes in which they are fixed so that the internally lying discharge channels are in communicating connection with the collection space and at least the part of the mount having the sockets for the ceramic filter membranes is a shaped part formed in one piece.

Abstract: Even when a membrane sheet contains an inorganic material, the membrane sheet and a support plate are properly deposited by a laser emission. In a manufacturing method of a flat membrane element lapping a membrane sheet performing solid-liquid separation on a support plate supporting the membrane sheet and emitting a laser to a mutual joint portion to deposit the membrane sheet and the support plate, when the membrane sheet contains an inorganic material, the support plate is formed by a material having laser penetration and the laser is emitted from the support plate side to the joint portion.

Abstract: A channel groove pattern 38 allowing the passage of a permeated liquid having passed through a filtration membrane 37 is provided on one filtration plate surface of a filtration plate 36, and a permeated liquid outlet nozzle 39 is provided on the filtration plate 36. The channel groove pattern 38 includes multiple channel grooves 38a, and a header groove 44 for averaging suction pressures is formed on the filtration plate 36. An area where the channel groove pattern 38 is formed is divided into upper and lower water collection areas 46 and 47 by the header groove 44. The permeated liquid outlet nozzle 39 and the header groove 44 communicate with each other through the channel grooves 38a of the water collection area 46, and the channel cross-sectional area of the header groove 44 is larger than that of the channel groove 38a.

Abstract: The present invention is a system for continuous, single-pass countercurrent tangential chromatography having multiple single-pass modules. A single-pass binding step module is used for binding product from an unpurified product solution with a resin slurry. A single-pass washing step module is used for washing impurities from the resin slurry. A single-pass elution step module for eluting an output of the washing step module is used as purified product solution. A single-pass regeneration step module is used for regenerating the resin slurry. In the current invention, the resin slurry flows in a continuous, single-pass through each of the single-pass modules, and one or more of the single-pass modules comprise two or more stages with permeate flow directed countercurrent to resin slurry flow within that single-pass module. The present invention replaces conventional column chromatography and may be made disposable.

Abstract: Disclosed herein are an apparatus and a method for separating molecules on the basis of size and or structure, and to a method of making the apparatus. Generally, the separation method includes passing a fluid comprising particles having different effective molecular diameters through a plurality of open, nanoscale channels disposed in surfaces of substrates. The method also includes obtaining a plurality of fractions of the passed fluid such that each of the fractions includes a major portion containing particles having similar size and shape and substantially free of particles having larger size and shape. The apparatus includes first and second substrates each of which has a surface containing a plurality of open, nanoscale channels disposed therein. The surfaces are bonded together such that each of the channels of the first substrate is in fluid communication with at least two of the channels of the second substrate and is misaligned relative to the channels of the second substrate.

Abstract: Apparatus for filtering liquids, comprising flat membrane pockets arranged parallel and means for pressure-tight connection of the membrane pockets to one another and for coupling an extraction means. The membrane pocket includes a drainage element, which is joined surface-to-surface to two membranes and is enclosed in a pressure-tight manner at the edge. Adjacent membrane pockets are connected to one another and to the extraction means via one or more outflow bores and associated lines. The outflow bores are arranged in such a way that the transmembrane differential pressure drops only slightly over the surface of the membrane pocket.

Abstract: A filter column module is disclosed, which has an upper column having a top opening, and a protruding bottom shell. The bottom shell has a plurality of apertures, and a diameter smaller than that of the upper column. A lower column has a support at the bottom and an opening that accommodates the protruding bottom shell of the upper column. The support partially contacts the protruding bottom shell of the upper column, and liquid or air can pass through the support. A filter is placed between the protruding bottom shell of the upper column and the support of the lower column.

Abstract: By forming a filtration membrane in a loop shape, it is possible to apply a high internal pressure and perform reverse liquid cleaning at a high internal pressure in chemical cleaning. A membrane element and a membrane module in which breakage and peeling are unlikely to occur on a filtration membrane even if aeration is performed in a state in which a filtration operation is stopped or even if a high internal pressure is applied in chemical cleaning.

Abstract: A device for monitoring a parameter of a fluidic sample by microdialysis, the device comprising a permeable membrane, wherein the permeable membrane has a first surface to be brought in contact with the fluidic sample to traverse the permeable membrane (300), wherein the permeable membrane has a second surface to be brought in contact with a dialysis fluid, and wherein the first surface is smoother than the second surface.

Abstract: The present invention relates to a filtering apparatus (1) for filtering a fluid (3) comprising the filtering apparatus. The filtering apparatus comprises a filter element (2) for filtering the fluid (3) and an adhesive capillary structure (5) for generating capillary forces, wherein the adhesive capillary structure (5) is attached to the filter element (2) by using an adhesive property of the adhesive capillary structure (5). The adhesive capillary structure is preferentially made of a double-sided tape, which is adhesive on two sides. The filtering apparatus comprises further preferentially a filtering location (6), at which the filter element (2) is located, and a detection location (7), at which a property of the fluid (3) is detectable, wherein the capillary structure (5) is formed such that the filtered fluid is guided from the filtering location (6) to the detection location (7).

Abstract: A submerged membrane separator includes: a plurality of membrane cartridges arranged at predetermined spaces; a flow generating device for generating flows in one direction along the membrane surfaces of the membrane cartridges; and wall members on both sides of a channel of the flow in the one direction formed between the membrane cartridges adjacent to each other. The membrane cartridges can be attached and detached from another direction substantially orthogonal to the flows in the one direction and substantially orthogonal to the arrangement direction of the membrane cartridges.

Abstract: The wall member of a water collecting case forms a projecting portion projecting to the outer side and recessed portions recessed to the inner side.

Abstract: When permeate pushed up by aeration presses a filtration membrane, the reversed portion of the filtration membrane flexibly swells to allow the permeate to move and suppresses a load acting on the filtration membrane, thereby preventing the filtration membrane from being broken.

Abstract: A membrane has a permeate channel including a 3D spacer fabric having an upper and a lower fabric surface (2,3) spaced apart by monofilament thread (4) at a predefined distance, the permeate channel being interposed between two membrane layers (12, 13), wherein the membrane layers are linked at a multitude of points with the upper and lower fabric surfaces to form an integral structure with a high bonding strength suitable for backflush operations. A method provides an integrated permeate channel membrane, including the steps of: —Providing a 3D spacer fabric having an upper and lower surface fabric (2,3) spaced apart by monofilament thread (4) at a predefined distance; and—Applying a membrane layer to both the upper and the lower surface fabric.

Abstract: A membrane filtration apparatus is provided in which a hollow fiber membrane element 1 including a water collecting cap 20 having a water collecting port and a groove and being engaged liquid-tightly with a bundle of a hollow fiber membrane is engaged with a frame 60 having supporting beams 65 to be fitted in the grooves. The engagement and the rotation of the hollow fiber membrane element 1 is possible merely by inserting the supporting beams 65 into the grooves formed in the water collecting cap 20.

Abstract: Disclosed is a membrane cartridge used in a submerged membrane separator. A peripheral portion of a filtration membrane is joined to the surface of a filtration plate. A portion higher than the surface of the filtration plate corresponding to the peripheral edge of the filtration membrane is formed on the surface of the filtration plate further on the outer side than the peripheral edge of the filtration membrane.

Abstract: A method for producing a component, and a component, in particular a micromechanical and/or microfluidic and/or microelectronic component, is provided, the component including at least one patterned material region, and in a first step the patterned material region is produced in that microparticles of a first material are embedded in a matrix of a second material, and in a second step the patterned material region is rendered porous by etching using a dry etching method or a gas-phase etching method.

Abstract: A crosslinked polymeric membrane, such as a crosslinked polyvinyl sulfate membrane or a crosslinked copolymer polyvinyl sulfate and polyvinyl alcohol membrane, is provided. The membrane is suitable for use in an acid environment, and is suitable for recovering acid from a feed mixture comprising acid, hydrocarbons and water.

Abstract: Filtration devices that include filtration cassettes that feature a plurality of stacked subassemblies, wherein at least one of the subassemblies includes a porous membrane having a front side and a back side and a perimeter; and an overmolded frame that encapsulates the membrane around the perimeter of the front side and the back side of the membrane; wherein the overmolded frame forms at least one retentate port, at least one feed port, at least one filtrate port, and a flow channel proximate a perimeter of the frame; and an overmolded plastic jacket that penetrates the flow channels of the subassemblies to seal the stacked subassemblies; and methods for making the filtration device and cassettes.

Abstract: An aeration system for a submerged membrane module has a set of aerators connected to an air blower, valves and a controller adapted to alternately provide a higher rate or air flow and a lower rate of air flow in repeated cycles. In an embodiment, the air blower, valves and controller, simultaneously provide the alternating air flow to two or more sets of aerators such that the total air flow is constant, allowing the blower to be operated at a constant speed. In another embodiment, the repeated cycles are of short duration. Transient flow conditions result in the tank water which helps avoid dead spaces and assists in agitating the membranes.

Abstract: An injection molded assembly forming a Membrane Pipette Tip having at least one bottom portion including a apex end for receiving a calibrated first volume of fluid, a cavity for holding said volume of fluid and a opening with shoulder for receiving the filter membrane. The pipette tip includes at least one upper body having a first opening for communication to a pipetter and a second opening for receiving the shoulder of the bottom portion. The bottom portion fused at the shoulder to the second opening of the upper body with the membrane therebetween to permanently attach the membrane filter to the pipette tip. The 2 part Membrane Pipette Tip can be constructed as a single tip or a plurality of upper and bottom portions with optional tubular members that can include overflow wells for containing fluid in excess of the first volume of fluid drawn into the Membrane Pipette Tip cavity.

Abstract: A water transport assembly, is provided including a housing having a first chamber therein, which is accessible through an opening in the housing. The housing additionally includes a sample inlet port and a sample outlet port, both of which are in fluid communication with the first chamber. A flat ion exchange membrane is attached to the housing in a plane over the opening in the housing, to seal the opening in a vapor tight seal. Water will pass through the membrane based upon the vapor pressure on each side of the membrane, to either dry or humidify sample passing through the first chamber. When the flat ion exchange membrane is a flat, thin ion exchange membrane it is preferable that the thin ion exchange membrane have a thickness of between about 0.1 and about 3.0 mils.

Abstract: A flat sheet membrane element for performing solid-liquid separation by immersion in a liquid to be treated which contains a suspended component includes sheet-shaped filtration membranes disposed opposite to each other with a space for a treated liquid flow path, a support portion for securing the space for the treated liquid flow path, and a peripheral sealing portion for sealing the peripheral edges of the filtration membranes arranged opposite to each other so as to form at least one treated liquid outlet, the filtration membranes including at least expanded PTFE (polytetrafluoroethylene) porous membranes.

Abstract: A membrane separation module (10) has a shell (11) having inlet port (20), outlet port (21) and a plurality of membrane units (12) disposed therebetween. Each membrane unit (12) has a plurality of elongated membrane elements (13), with at least a portion of each membrane element (13) having a semipermeable surface to permit selective permeation of one or more components of a multi-component feed fluid. The plurality of elongated membrane elements (13) are attached to collecting manifolds (16) (17), with one of those manifolds (16) (17) being unrestrained, permitting axial movement of each membrane element (13) in response to temperature changes. At least one manifold (16) (17) from each membrane unit (12) is in fluid communication with a manifold (16) (17) from one other membrane unit (12).

Abstract: A filter unit includes membrane plates placed together parallel to one another, which at least in zones around connecting elements for the purpose of draining permeate are connected together liquid-tight. The membrane plates because of their shape and after two membrane plates have been placed one on top of the other are provided for manufacturing a liquid-tight connection or a seal by welding. As a result unfiltered liquid flows through between the membrane plates and contamination of the permeate within a volume situated between the connecting elements is prevented. Over a number of connecting elements and zones located in between it is possible to attach a hollow profile, which is closed-off at its ends. This hollow profile in a liquid-tight manner surrounds discharge openings of the connecting elements and the zones located in between with positive material engagement.

Abstract: A spherical dialysis chamber with a heavier cap (the density of cap material is higher than that of the dialyzer) or the distribution of weight is such that it is higher weight distribution is towards the cap, so that it tilts always towards the bottom of the container containing the dialysis buffer.

Abstract: The present invention relates to a membrane separation method and a relevant equipment, in particular to a method and an equipment for membrane separation utilizing concentration polarization during membrane filtration process, especially, to a concentration process and equipment and a drawer special for drawing a concentration polarization layer. The direct removal of the concentration polarization layer from membrane surface not only decreases the adverse influence of concentration polarization on membrane separation but also obtains concentrated retention components, thereby significantly improving the ability to maintain membrane flux, solving the twinborn problems concerning concentration polarization and membrane fouling during the membrane separation process, and achieving a high-efficiency concentration for retention components.

Abstract: A filtration housing is disclosed.

Abstract: An aeration system for a submerged membrane module has a set of aerators connected to an air blower, valves and a controller adapted to alternately provide a higher rate or air flow and a lower rate of air flow in repeated cycles. In an embodiment, the air blower, valves and controller, simultaneously provide the alternating air flow to two or more sets of aerators such that the total air flow is constant, allowing the blower to be operated at a constant speed. In another embodiment, the repeated cycles are of short duration. Transient flow conditions result in the tank water which helps avoid dead spaces and assists in agitating the membranes.

Abstract: A liquid-gas separator for a direct liquid feed fuel cell includes a tube having an opening portion at a sidewall thereof; liquid extracting members that selectively transmit the liquid in the tube and located at both ends of the tube; a gas extracting membrane that selectively transmits the gas and covers the opening portion; an inlet that guides the liquid and the gas into the tube; chambers that surround an outer side of the liquid extracting member; and outlets that guide the liquid in the chambers to the outside by being connected to the chamber.

Abstract: A liquid-gas separator for a direct liquid feed fuel cell includes: a housing having an open hole; a gas extracting membrane that covers the open hole and transmits only the gas; a liquid extracting member that defines a first chamber that contacts the gas extracting membrane and a second chamber that does not contact the gas extracting membrane, and selectively transmits the liquid in the first chamber to the second chamber; an inlet that guides the liquid and the gas into the housing; and an outlet that is connected to the second chamber and guides the liquid in the second chamber to the outside.

Abstract: To reuse support plate and to fix a membrane sheet by the same method both in a new product manufacturing and in regeneration. In a flat membrane element including a deposit fixed portion formed by lapping a membrane sheet performing solid-liquid separation onto a support plate supporting the membrane sheet and by emitting a laser to a circumferential edge of the membrane sheet to deposit fix the member sheet onto the support plate, and making an inside of the membrane sheet surrounded by the deposit fixed portion be a solid-liquid separating area; an embrocation having laser absorption property is applied on the surface of the membrane sheet of the deposit fixed portion. At the time of regeneration, such a portion of the membrane sheet that corresponds to the solid-liquid separating area is cut off and, after that, a new membrane sheet is lapped on the embrocation and the new membrane sheet and the embrocation are deposit fixed by a laser.

Abstract: Case 10 is characterized by providing a pair of mutually facing surfaces, and a pair of side surfaces which join that pair of surfaces, opening 11 which is the entrance is formed on one of the surfaces 10a of the opposing pair of surfaces, while the opening 12 which is the exit is formed on the other surface 10b, and spaces S1 and S2 are provided between one surface 10a and the hollow fiber membrane stack 20, and between the other surface 10b and the hollow fiber membrane stack 20 in the entire domain in the direction from one side extreme of case 10 to the other side extreme, with the exception of the part where sealing and fixing devices 31 and 32 are provided, moreover, no space is configured between the pair of side surfaces and the hollow fiber membrane stack 20.

Abstract: A membrane microstructure device is disclosed. The membrane microstructure device includes a first glass, ceramic or glass-ceramic plate defining a first recess, a second glass, ceramic or glass-ceramic plate defining a second recess, and a non-metallic porous membrane sandwiched between the first and second plates. The first plate, second plate and porous membrane are joined together and the porous membrane is arranged to cover the first and second recesses to define a first microchannel between the first plate and the porous membrane and a second microchannel in fluid communication with the first microchannel between the second plate and the porous membrane. A method of manufacturing a membrane microstructure device is also disclosed.

Abstract: The invention concerns a composite support comprising a base support for the treatment of a biological fluid, in which: “the base support is essentially-constituted by a first polymer carrying anionic or anionizable groups;” at least a part of the surface of the base support is coated with a second polymer ionically bonded to the first polymer, the second polymer carrying the cationic or cationizable groups which are capable of forming an ionic bond with the anionic or anionizable groups of the first polymer; in which the second polymer is in the colloidal form and in mixture with a polyacid during application to the support, allowing the composite membrane to adsorb at least one entity containing anionic or anionizable groups by bonding with cationic or cationizable groups of the second polymer.

Abstract: A portable water purification device includes a base, a fixed sleeve, a tube, a filtering unit, and a movable sleeve. The base includes a channel for providing filtered liquid. The fixed sleeve is fixed on the base and includes a first peripheral wall and a first axial hole. The tube on where the filtering unit is mounted is secured on the base and held in the first axial hole to define a penetrated hole communicating with the channel. The movable sleeve is mounted on an external surface of the fixed sleeve, and slid between a first position away from the base and a second position adjacent to the base. The movable sleeve includes a second peripheral wall and a second axial hole whereby the first axial hole communicates with the second axial hole to define a containing room when the movable sleeve is located on the first position.

Abstract: The invention relates to a device for the separation of a fluid into at least two fractions, using a plurality of membrane filters, and to the use thereof. The inventive device comprises at least one sub-assembly (2a, 2b, 2c) of membrane support plates (8), with a filter membrane (10) being fixed to each of the opposing faces of the above-mentioned plates. According to the invention, the filter membrane is fixed to a part of the membrane support plate (8) that comprises means for guiding a first fraction of the fluid passing through the membranes (10) towards channels which are used to release said first fluid fraction and which are disposed in a lateral part of the plate (8). Moreover, the first fraction of the fluid is recovered inside a recovery space between the membrane (10) and one face of the membrane support plate (8). The membrane support plates (8) of each of the sub-assemblies (2a, 2b, 2c) are assembled to one another in an adjacent manner.

Abstract: One embodiment of a MEMS flow module (34) includes a first plate (36) and a second plate (48) that are separated by a first link (62). A plurality of concentrically disposed, annular flow-restricting walls (40) extend from the first plate (36), and each is separated from the second plate (48) by a flow-restricting gap (58). When the MEMS flow module (34) is exposed to a differential pressure and in one configuration, a perimeter (46) of the first plate (36) flexes away from the second plate (48) (and at least generally about where the first link (62) interfaces with the first plate (36)) to increase the size of one or more of the flow-restricting gaps (58), to in turn accommodate an increased flow or flow rate through the MEMS flow module (34).

Abstract: An internal filter includes a lower substrate and an upper substrate. Fluid passages are formed by etching grooves into the surface(s) of the upper and/or lower substrates and/or in one or more intermediate layers. The filter pores extending between the fluid passages are formed by etching second grooves that fluidly connect the fluid passages. Two or more sets of the one or two intermediate layers can be implemented to provide additional filter passages and/or pores. Each set can be connected to a separate fluid source and/or a separate microfluidic device. In another internal filter, the inlet and outlet passages and the filter pores are formed on the same upper or lower substrate. The inlet and outlet passages are partially formed in a first step. In a second step, the inlet and outlet passages are completed at the same time that the filter pores are formed.