Having Sensor Patents (Class 219/446.1)
  • Patent number: 11837480
    Abstract: Provided is a temperature controlling apparatus in which the accuracy of the temperature control of a processing target substrate is maintained high even when heaters are disconnected. The temperature controlling apparatus includes an electronic chuck, a plurality of heaters, and a controller. The heaters are embedded inside the electrostatic chuck in each divided region and connected to each other in parallel. The controller determines, for each divided region, whether a part of the heaters embedded in the divided region is disconnected, based on a total value of currents flowing through the heaters embedded in the divided region. When it is determined that a part of the heaters embedded in the divided region is disconnected, the controller controls a current flowing through each heater embedded in the divided region where a part of the heaters is disconnected to become larger than a current flowing through each heater when none of the heaters is disconnected.
    Type: Grant
    Filed: January 15, 2021
    Date of Patent: December 5, 2023
    Assignee: TOKYO ELECTRON LIMITED
    Inventors: Katsuyuki Koizumi, Kengo Kaneko
  • Patent number: 11605284
    Abstract: A method and apparatus for a cooking appliance having an alert for energization of one or more burners. The cooking appliance may include an ignition enable control. The cooking appliance may include a locked mode and an unlocked mode. The cooking appliance may include one or more alarms to alert the user.
    Type: Grant
    Filed: June 26, 2020
    Date of Patent: March 14, 2023
    Assignee: MIDEA GROUP CO., LTD.
    Inventor: Richard W. Cowan
  • Patent number: 11083332
    Abstract: An actively heated or cooled food container can have a lid movable between an open and a closed position and an insulated body to which the lid can be attached. The insulated body can have a sidewall that defines a perimeter of the container body and a base, the sidewall and base defining one or more chambers that can be sealed by the lid. The food container can have a temperature control system that can include one or more heating or cooling elements in thermal communication with one or both of the sidewall and the base and operable to heat or cool one or both of the sidewall and the base to thereby heat or cool the one or more chambers in the food container.
    Type: Grant
    Filed: August 13, 2020
    Date of Patent: August 10, 2021
    Assignee: Ember Technologies, Inc.
    Inventors: Clayton Alexander, Daren John Leith, Mikko Juhani Timperi, Christopher Thomas Wakeham
  • Patent number: 10950109
    Abstract: A computing system includes a processor, a memory, and a wireless communication interface. At least one gas sensor is electrically coupled to the computing system and is configured to detect gas in an atmosphere. At least one temperature sensor is electrically coupled to the computing system and is configured to detect a level of temperature within the atmosphere. At least one motion sensor is electrically coupled to the computing system. The processor activates the at least one motion sensor when at least one of the at least one gas sensor detects a gas in the atmosphere and the at least one temperature sensor detects a temperature higher than a threshold temperature. The processor sends a notification to a remote computer via the wireless communication interface if the at least one motion sensor fails to detect a motion within a threshold period of time.
    Type: Grant
    Filed: November 12, 2019
    Date of Patent: March 16, 2021
    Inventor: Anish Kashyap
  • Patent number: 10743708
    Abstract: An actively heated or cooled food container can have a lid movable between an open and a closed position and an insulated body to which the lid can be attached. The insulated body can have a sidewall that defines a perimeter of the container body and a base, the sidewall and base defining one or more chambers that can be sealed by the lid. The food container can have a temperature control system that can include one or more heating or cooling elements in thermal communication with one or both of the sidewall and the base and operable to heat or cool one or both of the sidewall and the base to thereby heat or cool the one or more chambers in the food container.
    Type: Grant
    Filed: June 22, 2018
    Date of Patent: August 18, 2020
    Assignee: Ember Technologies, Inc.
    Inventors: Clayton Alexander, Daren John Leith, Mikko Juhani Timperi, Christopher Thomas Wakeham
  • Patent number: 10718526
    Abstract: An illumination system for a cooking appliance is capable of illuminating generally downwardly onto the cooktop burners of the cooking appliance using multiple illumination schemes. One illumination scheme may be used to indicate which cooktop burner is controlled by a particular burner control that a user is interacting with prior to activation of the cooktop burner, e.g., to indicate to a user that a burner control that the user has touched or is otherwise proximate to controls a particular cooktop burner. Another illumination scheme may be used to indicate which cooktop burner is being adjusted when a user is adjusting a particular burner control, e.g., to indicate to a user that a burner control that the user is currently manipulating is changing the output of a particular cooktop burner.
    Type: Grant
    Filed: March 30, 2018
    Date of Patent: July 21, 2020
    Assignee: MIDEA GROUP CO., LTD.
    Inventors: Vern A. Neal, Mark W. Wilson, Daniel Joseph Trice
  • Patent number: 10595631
    Abstract: An item of equipment includes a worktop formed of at least one substrate made of transparent monolithic glass material with a surface area of greater than 0.7 m2. The substrate exhibits a light transmission TL of greater than 10% and an opacity indicator between 5 and 90. The substrate is predominantly or completely bare or provided with coating(s) such that the substrate, thus coated, exhibits a haze of less than 15% and/or a light transmission TL of greater than 60% and/or an opacity indicator of less than 85. The item of equipment also includes a heating element and a light source to mark one or more zones or one or more elements or displays of the substrate. The item of equipment also includes at least one interface for communication with at least one element of the worktop and/or with at least one external element for wireless communication.
    Type: Grant
    Filed: September 6, 2016
    Date of Patent: March 24, 2020
    Assignee: EUROKERA S.N.C.
    Inventors: Franck Demol, Nicolas Roux, Pablo Vilato
  • Patent number: 10455933
    Abstract: An item of equipment includes at least one worktop formed of at least one substrate made of transparent monolithic glass material with a surface area of greater than 0.7 m2. The substrate exhibits a light transmission TL of greater than 10% and an opacity indicator of between 5 and 90. The substrate is predominantly or completely bare or provided with coating(s) such that the substrate, thus coated, exhibits a haze of less than 15% and/or a light transmission TL of greater than 60% and/or an opacity indicator of less than 85. The item of equipment also includes at least one heating element and at least one interface for communication with at least one element of the worktop and/or with at least one external element for wireless communication. The item of equipment is devoid of light source(s).
    Type: Grant
    Filed: September 6, 2016
    Date of Patent: October 29, 2019
    Assignee: EUROKERA S.N.C.
    Inventors: Gregory Debreyer, Franck Demol, Nicolas Roux, Pablo Vilato
  • Patent number: 9980320
    Abstract: A method of optimizing performance of a cooktop with a plurality of adjacent heating zones includes indicating a point for each heating zone; placing a cooking vessel on the cooktop, the cooking vessel being sufficiently large to cover at least two of the points simultaneously; and adjusting the cooking vessel so that the cooking vessel covers the maximum number of the points possible for the size of the cooking vessel. A cooktop includes at least three induction heating elements; and a persistent indicator for each heating element. The cooktop is adapted to instruct a user to cover a maximum possible number of the at least three persistent indicators with a cooking vessel to optimize use of the cooktop.
    Type: Grant
    Filed: September 6, 2013
    Date of Patent: May 22, 2018
    Assignee: BSH Home Appliances Corporation
    Inventor: Lindsay Eng
  • Patent number: 9685059
    Abstract: A computing system receives blackbody radiation data from a thermal radiation sensor that is located in a room with a heat source and is directed at the heat source. An operating state of the heat source is determined using the blackbody radiation data. Occupancy data is received for a dwelling that includes the room with the heat source; using this data, an occupancy of the dwelling is determined, including an occupancy for the room. It is determined, using the operating state of the heat source and the occupancy of the dwelling, including the occupancy of the room, whether a heat-source alert condition that includes a first threshold time is met. If so, a heat-source alert is provided. A request of a first type is then received to cancel the heat-source alert. In response, the heat-source alert is canceled and the heat-source alert condition is modified.
    Type: Grant
    Filed: February 12, 2015
    Date of Patent: June 20, 2017
    Assignee: GOOGLE INC.
    Inventor: Liang-Yun Wang
  • Patent number: 9536413
    Abstract: A method for an apparatus to monitor an appliance includes receiving information about a translation of a control knob of the appliance along an axis and a rotation of the control knob around the axis, determining if a first event has occurred based on the information, and, when the first event has occurred, starting a timer and determining if a second event has occurred based on the information before the timer reaches a time interval. The method further includes, when the second event does not occur before the timer reaches the time interval, triggering an alert.
    Type: Grant
    Filed: September 3, 2014
    Date of Patent: January 3, 2017
    Assignee: Persia, Inc.
    Inventors: Yucheng Shao, Chien-Hsun Wang
  • Patent number: 9426846
    Abstract: In an induction heating apparatus, an infrared-ray detection portion includes an infrared-ray reception portion adapted to receive infrared rays radiated from an object to be heated, an amplification portion adapted to amplify a detection signal from the infrared-ray reception portion to form an infrared-ray detection signal, and a temperature detection portion adapted to detect the temperature of the infrared-ray detection portion and to output the temperature to the control portion.
    Type: Grant
    Filed: August 29, 2011
    Date of Patent: August 23, 2016
    Assignee: PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
    Inventors: Sunao Okuda, Naoaki Ishimaru
  • Patent number: 9220130
    Abstract: A range has burner elements which are connected in series with a temperature switch. Upon reaching a predetermined temperatures, the switch opens and power to the burner element is secured. The burner elements are preferably open coil units, but radiant burner elements may employ similar technology with a lower upper threshold than prior art units have used. Lowering the temperature in a cooking utensil below common ignition temperatures while still allowing boiling is an objective of many embodiments.
    Type: Grant
    Filed: July 12, 2013
    Date of Patent: December 22, 2015
    Assignee: Brown Stove Works, Inc.
    Inventor: Todd A. Smith
  • Patent number: 9115848
    Abstract: An emergency safety switch for a safety control system used to terminate the operation of one or more automated machines includes a stop circuit that is electrically connected to a connection port. The connection port includes a pair of interface ports for in-line serial connection to a wiring circuit provided by the safety control system to monitor various emergency safety switch and other detection devices. As such, the connection port provides a quick and easy manner for attaching and detaching the emergency safety switch to the wiring circuit, which facilitates efforts to install a sufficient number of emergency stop switches on an automated production line.
    Type: Grant
    Filed: July 3, 2012
    Date of Patent: August 25, 2015
    Assignee: WESCO Distribution, Inc.
    Inventor: Stephen John Gingras
  • Patent number: 9078295
    Abstract: There is provided a heating/cooking equipment capable of accurately determining boiling over. The heating/cooking equipment includes: a top plate (104) connected to a reference potential; a heating unit (105) configured to heat an object to be heated placed on the top plate; an electrode (106) arranged under the top plate; a capacitance detecting unit (107) configured to detect the electrostatic capacitance of the electrode; a boiling over detecting unit (108) configured to detect whether or not a material to be cooked in the object to be heated has boiled over on the top plate, based on a value of the electrostatic capacitance detected by the capacitance detecting unit; and a control unit (109) configured to control the heating operation of the heating unit based on a boiling over detection result from the boiling over detecting unit.
    Type: Grant
    Filed: January 21, 2010
    Date of Patent: July 7, 2015
    Assignee: Panasonic Corporation
    Inventors: Masafumi Sadahira, Tomoya Fujinami, Naoaki Ishimaru, Izuo Hirota, Takahiro Miyauchi, Fumitaka Ogasawara
  • Patent number: 9013322
    Abstract: An apparatus and method for well control and monitoring including an independent web server computer integrated with a pump controller located at each well in an oil field. The well controller locally controls the well pump, processes well and pump data, generates surface and downhole cards, and communicates production reports, recommendations for production improvements, and production statistics to remote sites via the internet. The controller can be queried remotely to provide production reports, etc. Furthermore, the controller can initiate alerts via email, text messaging, or internet messaging, for example, during fault conditions.
    Type: Grant
    Filed: April 9, 2007
    Date of Patent: April 21, 2015
    Assignee: Lufkin Industries, LLC
    Inventors: Alan L. Roberson, Doneil M. Dorado, David L. Pinnell, Eric S. Oestreich
  • Patent number: 8981944
    Abstract: The invention relates to an interaction device (1), comprising a) a first input unit (20) with a first sensitive surface, especially a touch display, and a first sensor unit, b) a second input unit (2-12) with a second sensitive surface and a second sensor unit, c) wherein the second input unit (2-12) is used for protection of the first input unit (20), especially against overheating and/or mechanical damaging. Furthermore, the invention relates to a glass ceramic hob (22), especially induction cooking hob, with an interaction device (1) according to the invention a) wherein preferably the interaction device (1) is arranged in a side and/or edge area of the glass ceramic hob and/or arranged at the lower surface of the glass ceramic hob (22) and/or b) wherein preferably the glass ceramic hob comprises a fan for ventilation.
    Type: Grant
    Filed: May 20, 2009
    Date of Patent: March 17, 2015
    Assignee: Electrolux Home Products Corporation N.V.
    Inventors: Laurent Jeanneteau, Thibaut Rigolle, Massimo Nostro, Arturo Negretti, Andrea Rossi, Andrea Zangoli
  • Publication number: 20150041453
    Abstract: Embodiments of the present disclosure generally relate to methods and apparatus for visual lamp failure detection in a processing chamber, such as an RTP chamber. Visual feedback is facilitated through the use of a wide-angle lens positioned to view lamps within the process chamber. The wide-angle lens is positioned within a probe and secured using a spring in order to withstand high temperature processing. A camera coupled to the lens is adapted to capture an image of the lamps within the process chamber. The captured image of the lamps is then compared to a reference image to determine if the lamps are functioning as desired.
    Type: Application
    Filed: August 11, 2014
    Publication date: February 12, 2015
    Inventors: Kim VELLORE, Dinesh KANAWADE, Stephen MOFFATT, Aaron MILLER, Leonid M. TERTITSKI, Norman L. TAM, Michael LIU, Colin FOX
  • Patent number: 8933377
    Abstract: A control device for an electrical heating device for a cooking field with a cooking field plate comprises an electro-mechanical switching device for adjusting a power of said heating device with different power levels and comprises two different heating element. The switching device is configured so that starting from a zero-position and rotating in a first rotation direction, a power level for a first heating element is adjusted in a cooking-mode. Rotation in the other direction activates a second heating element in a warm-keeping mode with significantly lower power. A relay is closed by a thermomechanical temperature sensing device below a defined switching temperature of 60° C. to 100° C. and opened above the switching temperature. When closed, the relay connects the two heating elements to an operating voltage for common operation. When opened, the first heating element is switched off for exclusive operation of the second heating element.
    Type: Grant
    Filed: December 9, 2011
    Date of Patent: January 13, 2015
    Assignee: E.G.O. Elektro-Gerätebau GmbH
    Inventor: Eugen Wilde
  • Patent number: 8895903
    Abstract: Methods and apparatus for controlling the supply of power to a radiant heater of a cooking hob. According to one implementation a method is provided that includes the use of a control circuit that is configured to deliver power to the radiant heater via first and second electrical paths. One control method includes supplying a first level of power to the radiant heater through a closed disconnection switch situated in the first electrical path while sensing a temperature of the cooking hob. Upon detecting that the temperature has reached or exceeded a predetermined temperature, the control circuit terminates the supply of power to the radiant heater through the first electrical path by opening the disconnection switch and for at least a period of time initiating the supply of a second level of power to the radiant heater through the second electrical path, the second level of power being less than the first level of power and sufficiently low to cause the radiant heater to cool.
    Type: Grant
    Filed: June 10, 2011
    Date of Patent: November 25, 2014
    Assignee: Eika, S. Coop
    Inventors: Daniel de los Toyos López, Jon Endika Azpiritxaga Zalbide, Agustin Etxebarrieta Alonso
  • Patent number: 8890034
    Abstract: ‘Firevoider’ is a set of apparatus that combine and analyze electronic signals from Hall Effect sensors, current transformer, Pyroelectric infrared sensor, ionization chamber smoke sensor, to determine the imminence of fire hazard. On determination of the imminence of fire ‘Firevoider’ turns OFF the power to the range after pausing and sounding an alarm long enough to allow the cook to intervene. The various electronic circuitries are provided with stored charge powers back up to retain memory during power failures. In addition to the above features ‘Firevoider’ has a ‘Timer Mode Cooking’ feature that can automate cooking and save up to 40% power. ‘Firevoider’ does not interfere with cooking if the situation is safe or the cooking is attended.
    Type: Grant
    Filed: April 17, 2010
    Date of Patent: November 18, 2014
    Inventor: Birendra Kumar Mishra
  • Patent number: 8878108
    Abstract: An induction heating cooker in which a size of heating coils can be freely set without being restricted by a size of an opening of a cabinet of a kitchen unit. The induction heating cooker has an outer casing including a flange extending in an outward direction from a top portion of a container receptacle, with a heating coil container space being provided between the flange and a plate, such that one portion of each of the heating coils is disposed in the heating coil container space.
    Type: Grant
    Filed: March 5, 2010
    Date of Patent: November 4, 2014
    Assignee: Panasonic Corporation
    Inventors: Takeshi Kitaizumi, Naoaki Ishimaru, Yoichi Kurose, Masafumi Sadahira, Yuichi Shimizu, Masayo Haji
  • Publication number: 20140263275
    Abstract: Embodiments of the present disclosure provide apparatus and methods for improving process uniformity. Particularly, embodiments of the present disclosure provide a rotatable temperature controlled substrate support for a semiconductor processing chamber. The rotatable temperature controlled substrate support includes one or more heating elements, one or more temperature sensors and cooling channels for circulating a cooling/heating fluid in the rotatable temperature controlled substrate support. One embodiment of the present disclosure includes a thermocouple extension assembly for extending cold junctions of the thermocouple in the substrate support away from the substrate support. The thermocouple extension assembly includes extension cords formed from materials matching with the materials of thermocouple.
    Type: Application
    Filed: February 14, 2014
    Publication date: September 18, 2014
    Applicant: Applied Materials, Inc.
    Inventors: Tuan Anh NGUYEN, Sanjeev BALUJA, Amit Kumar BANSAL, Juan Carlos ROCHA-ALVAREZ
  • Patent number: 8836522
    Abstract: A safety shut-off system and method for eliminating power to a load in the event of smoke detection. The system may comprise a device located at the appliance for detecting a signal from a smoke detector, and cutting power to the appliance only when the appliance is in use. The device may be synchronized with any standard smoke alarm signal to reduce the number of false positive shut-offs. The system may also comprise a smoke alarm hard-wired to a circuit breaker, for shutting off power to all appliances on a particular breaker upon receipt of a signal from the smoke alarm, and only when the appliances on the breaker are in use. The system may also have the ability to shut off one breaker, multiple breakers, or all breakers at different time increments to actively prevent and reduce the damages caused by fires.
    Type: Grant
    Filed: September 4, 2012
    Date of Patent: September 16, 2014
    Assignee: Fire Avert, LLC
    Inventors: Peter Thorpe, Michael Sanders, Chase Roberts, Kevin Sanders, Zack Bomsta
  • Publication number: 20140251987
    Abstract: A method and system for monitoring the proximity of a user to an appliance is provided. A motion detector is activated. The motion detector detects when a user is within a predetermined proximity of an appliance. A timer is initiated when the motion detector does not detect that the user is within the predetermined proximity to the appliance. It is determined from the timer whether a first predetermined period of time has elapsed since the motion detector determined that the user was not within the predetermined proximity of said appliance. A warning alert is sent to the user indicating that the first predetermined period of time has been exceeded since the motion detector determined that the user was not within the predetermined proximity of the appliance.
    Type: Application
    Filed: March 6, 2014
    Publication date: September 11, 2014
    Applicant: HAIER AMERICA TRADING, LLC
    Inventor: Malcolm REAY
  • Patent number: 8810424
    Abstract: An appliance warning system comprises a floor pad for location on or adjacent a device such that a user must stand on the floor pad in order to normally use the device. The floor pad has at least one switch movable between an open position when no weight pressure is detected on the floor pad and a closed position when the switch is activated by weight pressure detected on the floor pad. A transmitter is provided for transmitting a signal depending upon whether the switch is in the open or closed position. A warning device is activated when the switch has been in the open position for a preselected period of time after having been in the closed position.
    Type: Grant
    Filed: January 14, 2013
    Date of Patent: August 19, 2014
    Inventor: Rodolfo Garcia
  • Patent number: 8791392
    Abstract: Described herein is a method of detecting fault conditions in a multiplexed multi-heater-zone heating plate for a substrate support assembly used to support a semiconductor substrate in a semiconductor processing apparatus.
    Type: Grant
    Filed: October 22, 2010
    Date of Patent: July 29, 2014
    Assignee: Lam Research Corporation
    Inventor: Harmeet Singh
  • Patent number: 8748782
    Abstract: The ceramic heater 20 includes the ceramic substrate 22 and a hollow shaft 40. The ceramic substrate 22 is disk-shaped, and a resistance heating element 24 is embedded in the ceramic substrate 22. The hollow shaft 40 is attached to the center of a lower surface of the ceramic substrate 22. The ceramic substrate 22 has a rail groove 26 to which a slide lid 28 is attached and a guide groove 30 that serves as a thermocouple conduit. Moreover, a tube 32 is disposed outside the shaft 40. The tube 32 extends in the up-down direction and is connected to the guide groove 30.
    Type: Grant
    Filed: July 26, 2011
    Date of Patent: June 10, 2014
    Assignee: NGK Insulators, Ltd.
    Inventor: Yoshinobu Goto
  • Patent number: 8735779
    Abstract: Methods and devices for securing an item of cookware to the burner of a stove top by use of magnetism. The magnet(s) may be permanent magnets or electromagnets. The cookware may comprise a permanent magnet disposed on or in the base of the cookware. The burner comprises a magnetic material such as steel or iron. The magnetic material may be in the grate of the cook top, in the electric coil of an electric burner, in the surface of a smooth-top stove top, or any other component of the cook top which is in close proximity to the bottom of the cookware when it is placed on the cooking surface. When the cookware is placed on the stove top, the magnetic field of the permanent magnet creates a force on the magnetic material biasing the cookware against the stove top and securing the cookware to the cook top.
    Type: Grant
    Filed: April 20, 2012
    Date of Patent: May 27, 2014
    Inventor: Paul J. Rael
  • Patent number: 8729432
    Abstract: A capacitance sensing switch module is provided. The capacitance sensing switch module for controlling a cooktop includes a plate, at least one key, an insulating pad, a circuit board and at least one foil. The plate is disposed in a side of the cooktop and has at least one hole passing through the plate. The key is disposed in the hole. The insulating pad is disposed between the key and the plate. The key and the plate are separated by the insulating pad. The circuit board is disposed under the plate. The foil is disposed on the circuit board and on the position corresponding to the key. There is an insulation gap between the foil and the key.
    Type: Grant
    Filed: August 24, 2011
    Date of Patent: May 20, 2014
    Assignee: Delta Electronics, Inc.
    Inventors: I-Shen Lin, Ming-Jen Liang, Yu-Tang Liu
  • Patent number: 8723085
    Abstract: A temperature controlled/limiting heating element for an electrically powered cooking appliance, having: a plate with an upper contact heating surface; a pair of heating element terminals adapted for removably engaging electrical power supply terminals of the electrically powered cooking appliance; a plurality of resistive heating wires, in thermal engagement with a lower surface of the top plate, comprising: a non-cycling resistive heating wire connected in series to the heating element terminals; and a cycling resistive heating wire connected in series to the heating element terminals via a thermostat switch in thermal engagement with a lower surface of the top plate, wherein the thermostat switch is normally closed when exposed to a sensed temperature below a set temperature and the thermostat switch opens when the sensed temperature is equal to or exceeds the set temperature.
    Type: Grant
    Filed: November 24, 2010
    Date of Patent: May 13, 2014
    Assignee: Pioneering Technology Corp.
    Inventors: Kevin Callahan, Yibing Hu, Peter M. Callahan
  • Publication number: 20140083993
    Abstract: A printed circuit board for a domestic appliance includes at least one conductive path which is provided on at least one of two sides of the printed board and adapted for supply with a load current. The printed circuit board has at least one magnetic field sensor which is configured and disposed to read a magnetic field that can be generated by the load current. The load current flowing through the at least one conductive path of the printed circuit board can be detected by contactless reading of the magnetic field generated by the load current through the at least one conductive path.
    Type: Application
    Filed: May 8, 2012
    Publication date: March 27, 2014
    Applicant: BSH BOSCH UND SIEMENS HAUSGERATE GMBH
    Inventors: Thomas Maier, Stefan Schmal, Peter Schuhback
  • Patent number: 8680438
    Abstract: The present invention generally concerns a Combination Urn and Hot Plate for supplying heat to both liquids and solids, typically beverages and food, for heating or keeping same warm.
    Type: Grant
    Filed: September 1, 2010
    Date of Patent: March 25, 2014
    Assignee: Fundways Ltd.
    Inventor: Herbert S. Weissman
  • Patent number: 8624168
    Abstract: A heating plate for a substrate support assembly in a semiconductor plasma processing apparatus, comprises multiple independently controllable planar heater zones arranged in a scalable multiplexing layout, and electronics to independently control and power the planar heater zones. Each planar heater zone uses at least one diode as a heater element. A substrate support assembly in which the heating plate is incorporated includes an electrostatic clamping electrode and a temperature controlled base plate. Methods for manufacturing the heating plate include bonding together ceramic or polymer sheets having planar heater zones, power supply lines, power return lines and vias.
    Type: Grant
    Filed: September 20, 2011
    Date of Patent: January 7, 2014
    Assignee: Lam Research Corporation
    Inventors: Keith William Gaff, Keith Comendant
  • Publication number: 20130334199
    Abstract: Embodiments of the present invention provide an apparatus heating and supporting a substrate in a processing chamber. One embodiment of the present invention provides a substrate support assembly. The substrate support assembly includes a heated plate having a substrate supporting surface on a front side and a cantilever arm extending from a backside of the heated plate. The heated plate is configured to support and heat a substrate on the substrate supporting surface. The cantilever arm has a first end attached to the heated plate near a central axis of the heated plate, and a second end extending radially outwards from the central axis.
    Type: Application
    Filed: February 9, 2012
    Publication date: December 19, 2013
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Imad Yousif, Martin Jeffrey Salinas, Paul B. Reuter, Aniruddha Pal, Jared Ahmad Lee
  • Patent number: 8581153
    Abstract: A method of detecting an abnormal placement of a substrate W, which is carried out when a substrate W placed on a substrate table 3, in which a heater 6a, 6b is disposed, is processed by heating. The method of detecting an abnormal placement of the substrate comprises the steps of: during processing of the substrate W, based on information about an electric output to the heater 6a, 6b or information about a measured temperature of the substrate table 3, detecting of a maximum value and a minimum value of the electric output or the measured temperature, or an integrated value of the electric output or the measured temperature; and judging of the abnormal placement of the substrate based on the maximum value and the minimum value detected, or the integrated value detected.
    Type: Grant
    Filed: September 25, 2009
    Date of Patent: November 12, 2013
    Assignee: Tokyo Electron Limited
    Inventors: Takashi Chino, Satoshi Gomi, Koichi Miyashita, Minoru Nagasawa, Yoshie Eda
  • Publication number: 20130228563
    Abstract: An absorption device for rotatable heating is provided with an absorption heating plate (102), a support needle driving device (103), a rotary sliding ring (104) and a turning shaft (107). The absorption heating plate (102) is amounted at the top of the turning shaft (107), and a wafer (101) is arranged at the top of the absorption heating plate (102). The rotary sliding ring (104) is connected to the turning shaft (107) in which a vacuum channel and a connection wire channel are arranged. Support needles (111) are connected to the output end of the support needle driving device (103), run through the absorption heating plate (102) and are arranged at the bottom of the wafer (101) uniformly. The absorption device incorporates the wafer absorption function, the wafer rotating function with controllable speed and the heating function for heating the wafer to reach different temperature according to the different requirement, which solves the problem of absorption and heating rotation at the same time.
    Type: Application
    Filed: December 10, 2010
    Publication date: September 5, 2013
    Applicant: SHENYANG SOLIDTOOL CO., LTD.
    Inventors: Shaoyong Wang, Mingbo Wang
  • Patent number: 8511651
    Abstract: A heater unit is adapted to determine if a humidification chamber thermally coupled to a hot plate of the heater unit is effectively dry based on determining a thermal response of a hot plate of the heater unit. Also, the activation period during which the hot plate is being heated is adjusted toward an optimum period by adjusting the energization or power level to the heater element thereof in relation to the duration of a prior activation period. Further, the air flow rate of gas through the humidification chamber may be estimated based on a temperature of the hot plate determined in predetermined relationship to the beginning of an activation period.
    Type: Grant
    Filed: March 29, 2011
    Date of Patent: August 20, 2013
    Assignee: Smiths Medical ASD, Inc.
    Inventors: Mikhail Fridberg, Boris Dubinsky
  • Patent number: 8466391
    Abstract: An electrical heating device has an integrally manufactured support made from insulating material. Depressed paths for introducing a heating element are provided. A klixon functioning as a thermally actuated switch is inserted from above into an opening in the central area of the support and its electrical terminals project over the bottom side and are bent round for mechanical fixing.
    Type: Grant
    Filed: October 30, 2008
    Date of Patent: June 18, 2013
    Assignee: E.G.O. Elektro-Geraetebau GmbH
    Inventors: Karl-Heinz Horsmann, Eugen Wilde
  • Patent number: 8400315
    Abstract: An apparatus and method for indicating a process temperature anomaly during a power outage comprising employing a power source separate from that powering the process, setting a temperature set point; sensing presence and absence of power powering the process, sensing process temperature; and indicating to users that an absence of power was sensed and that the temperature sensed during the absence of power was below (or above) the temperature set point.
    Type: Grant
    Filed: October 27, 2009
    Date of Patent: March 19, 2013
    Assignee: Lockheed Martin Corporation
    Inventor: William Sherman
  • Patent number: 8367979
    Abstract: A household range includes a first oven having a first electric cooking element, and a second oven includes a second electric cooking element. A power management system is used to distribute power such that when the second electric cooking element is energized the first electric cooking element is de-energized.
    Type: Grant
    Filed: August 27, 2007
    Date of Patent: February 5, 2013
    Assignee: General Electric Company
    Inventors: Max Douglas Oyler, Siva Kiran Chekka
  • Patent number: 8362402
    Abstract: A fluid warmer is disclosed. The fluid warmer includes a support surface, a heating element configured to selectively heat the support surface, and a switch assembly extending through the support surface. The switch assembly includes a switch, a movable switch plate, and a thermocouple. The switch has at least two states, one of which indicates the presence of an item on the support surface. The movable switch plate operably links to the switch to move the switch between the states and further includes a contact surface that contacts an item placed on the support surface. One or more thermocouples are embedded in the movable switch plate below the contact surface. The movable switch plate comprises a material having a thermal conductivity that permits the thermocouple(s) embedded in the switch plate to measure a temperature of an item placed on the support surface within a predetermined period of time.
    Type: Grant
    Filed: July 19, 2010
    Date of Patent: January 29, 2013
    Assignee: Enthermics Medical Systems, Inc
    Inventors: William J. Hansen, Terence T. Smith
  • Patent number: 8354938
    Abstract: An appliance warning system comprises a floor pad which has a switch movable between an open position when no weight pressure is detected and a closed position when activated by weight pressure. A transmitter transmits a signal depending upon whether the switch is in the open or closed position. A remotely located module has a receiver for the signal from the transmitter. A control circuit is operational between a ready state before the switch is activated to the closed position and a monitoring state after the switch is activated. A warning device is activated by the control circuit when in the monitoring state when the switch has been in the open position for a preselected period of time after having been in the closed position. A reset switch resets the control circuit from the monitoring state to the ready state.
    Type: Grant
    Filed: December 7, 2011
    Date of Patent: January 15, 2013
    Inventor: Rodolfo Garcia
  • Patent number: 8314371
    Abstract: Methods and apparatus for rapid thermal processing of a planar substrate including axially aligning the substrate with a substrate support or with an empirically determined position are described. The methods and apparatus include a sensor system that determines the relative orientations of the substrate and the substrate support.
    Type: Grant
    Filed: November 4, 2009
    Date of Patent: November 20, 2012
    Assignee: Applied Materials, Inc.
    Inventors: Khurshed Sorabji, Joseph M. Ranish, Wolfgang Aderhold, Aaron M. Hunter, Blake R. Koelmel, Alexander N. Lerner, Nir Merry
  • Patent number: 8299406
    Abstract: An electronic temperature-sensing probe comprises a shell, a control base plate, a probe and a key group, wherein the control base plate is placed inside the shell; the probe with one end extending outside of the shell and the other end connected to the control base plate electrically is mounted in the shell; the key group with their inner ends connected to control contacts of the control base plate are depressibly mounted on the surface of the shell; the key group comprises a power switch key, temperature-adjusting keys and a high temperature switch key; the control base plate controls the power on/off of the heating element based on the temperature control signals provided by the temperature-adjusting keys and the high temperature switch key and the temperature signal provided by the probe and the switch control signal provided by the power switch key.
    Type: Grant
    Filed: April 28, 2008
    Date of Patent: October 30, 2012
    Assignee: Tsann Kuen (China) Enterprise Co., Ltd.
    Inventors: Shaohui Zhou, I.V. Junxiao
  • Publication number: 20120234822
    Abstract: A capacitance sensing switch module is provided. The capacitance sensing switch module for controlling a cooktop includes a plate, at least one key, an insulating pad, a circuit board and at least one foil. The plate is disposed in a side of the cooktop and has at least one hole passing through the plate. The key is disposed in the hole. The insulating pad is disposed between the key and the plate. The key and the plate are separated by the insulating pad. The circuit board is disposed under the plate. The foil is disposed on the circuit board and on the position corresponding to the key. There is an insulation gap between the foil and the key.
    Type: Application
    Filed: August 24, 2011
    Publication date: September 20, 2012
    Applicant: DELTA ELECTRONICS, INC.
    Inventors: I-Shen LIN, Ming-Jen LIANG, Yu-Tang LIU
  • Publication number: 20120097661
    Abstract: Described herein is a method of detecting fault conditions in a multiplexed multi-heater-zone heating plate for a substrate support assembly used to support a semiconductor substrate in a semiconductor processing apparatus.
    Type: Application
    Filed: October 22, 2010
    Publication date: April 26, 2012
    Applicant: Lam Research Corporation
    Inventor: Harmeet Singh
  • Patent number: 8164029
    Abstract: Methods and devices for securing the bottom of an item of cookware to the burner of a stove top by use of magnetism. The magnet(s) may be permanent magnets or electromagnets. The cookware may comprise a permanent magnet disposed on or in the base of the cookware. The burner comprises a magnetic material such as steel or iron. The magnetic material may be in the grate of the cook top, in the electric coil of an electric burner, in the surface of a vitroceramic or smooth-top stove top, or other component of the cook top in close proximity to the bottom of the cookware when it is on the cooking surface. The magnetic source prevents the cookware from being accidentally knocked off the cook top.
    Type: Grant
    Filed: February 22, 2010
    Date of Patent: April 24, 2012
    Inventor: Paul J. Rael
  • Patent number: 8085161
    Abstract: An appliance warning system comprises a floor pad for location on or adjacent a device such that a user must stand on the floor pad in order to normally use the device. The floor pad has at least one switch movable between an open position when no weight pressure is detected on the floor pad and a closed position when the switch is activated by weight pressure detected on the floor pad. A control circuit is connected operational between a ready state before the switch is activated to the closed position and a monitoring state after the switch is activated to the closed position. A warning device connected to the control circuit is activated when the control circuit determines that the switch has been in the open position for a preselected period of time after having been in the closed position.
    Type: Grant
    Filed: July 12, 2010
    Date of Patent: December 27, 2011
    Inventor: Rodolfo Garcia
  • Patent number: 8017890
    Abstract: A touch responsive capacitive control for a smooth surfaced ceramic cooktop provides a continuously variable control voltage which indicates the last touched position on an elongated control surface. An alternating current potential is applied between a transmitter plate and a pair of receiver plates all of which are positioned below the surface of the cooktop. The relative area of overlap between the touching finger and the two receiver plates varies along the length of the control surface, and the resulting change in the relative currents flowing to the two receiver plates is sensed to provide a position indication used to control the cooktop.
    Type: Grant
    Filed: July 20, 2004
    Date of Patent: September 13, 2011
    Assignee: Massachusetts Institute of Technology
    Inventors: Joseph A. Paradiso, Lance L. Bourque