Abstract: A cartridge for an air-cooled plasma arc torch is provided. The cartridge includes a swirl ring having a molded thermoplastic elongated body with a distal end, a proximal end, and a hollow portion configured to receive an electrode. The swirl ring also has a plurality of gas flow openings defined by the distal end of the elongated body and configured to impart a swirling motion to a plasma gas flow for the plasma arc torch. The swirl ring further includes a nozzle retention feature on a surface of the elongated body at the distal end for retaining a nozzle to the elongated body. The cartridge further includes a cap affixed to the proximal end of the elongated body of the swirl ring for substantially closing the proximal end of the elongated body.

Abstract: A method of treating refractory-lined equipment includes accessing an interior of the refractory-lined equipment with an equipment repair apparatus, wherein the equipment repair apparatus includes a robotic arm and one or more end effectors coupled to an end of the robotic arm, inspecting refractory material that lines an inner wall of the refractory-lined equipment with a first end effector coupled to the end of the robotic arm, removing damaged refractory material from the inner wall with a second end effector coupled to the end of the robotic arm, removing one or more anchors from the inner wall with a third end effector coupled to the end of the robotic arm, and installing new refractory material on the inner wall with a fourth end effector coupled to the end of the robotic arm.

Abstract: Nozzle for thermal spray gun, thermal spray gun and method for forming nozzle. Nozzle includes a nozzle body having a central bore and an exterior surface structured for insertion into a thermal spray gun and a water coolable surface coating applied onto at least a portion of the exterior surface. The water coolable surface coating is structured to protect the exterior surface from a chemical interaction with cooling water guided through the thermal spray gun.

Abstract: An automated oxy-fuel thermal processing system including an oxy-fuel torch, an automated machine tool operatively coupled to the torch for moving the torch relative to a work piece, and a circuit including a voltage source or a current electrically connected to the torch and configured to be electrically connected to the work piece. The automated oxy-fuel thermal processing system may further include a processor that is operatively connected to the torch, the automated machine tool, the circuit, and the voltage source or current source, wherein the processor is configured to control the operation of the torch, the automated machine tool and the voltage source or current source, and to monitor a current or voltage in the circuit in a predefined manner.

Abstract: Combustion burners, burner panels, submerged combustion melters including the panels, and methods of using the same are disclosed. In certain embodiments, the burner includes an annular liquid cooled jacket defining a central longitudinal through passage. An inner conduit is positioned substantially concentrically within an outer conduit, the latter positioned in the through passage, each conduit comprising proximal and distal ends, the conduits configured so that the outer and inner conduits are movable axially. The inner conduit forms a primary passage and the outer conduit forms a secondary passage between the outer conduit and the inner conduit. In one embodiment the outer conduit has an exterior surface configured along at least a portion thereof with threads mating with adjacent threads on an inner surface of the annular liquid cooled jacket. Other embodiments including lock and release dogs or bolt arrangements. The burners promote burner life and melter campaign length.

Abstract: [Problem] To provide a water heating apparatus which has a inverse combustion type burner installed within a case for a heat exchanger so as to cause heat to be transferred from an outer peripheral flange of the burner to the heat exchanger case. [Solution] This water heating apparatus is provided with: a fan for supplying combustion air; a chamber case which is connected to the fan and which has set therein a chamber where an air-fuel mixture is formed; a inverse combustion type burner for combusting the air-fuel mixture supplied from the chamber; a heat exchanger in which combustion gas generated by the burner is introduced into a case where water is heated; and sealing member which is installed between a peripheral flange of the chamber case and a peripheral flange of the case, wherein the burner is set inside the case, and an outer peripheral flange of the burner is anchored to an inner wall surface of the case.

Abstract: Submerged combustion burners having improved fuel and oxidant mixing characteristics. Submerged combustion melters including the burners. Methods of using submerged combustion melters to melt glass-forming materials and produce molten glass.

Abstract: A method of manufacturing a plurality of R—Fe—B sintered magnets using a plasma flame apparatus and a furnace. The method includes a first step of providing a sintered magnet block. Then, the sintered magnet block is machined to form machined magnets. The method continues with a step of cleaning surfaces of the machined magnets to form cleaned magnets. The method then proceeds with depositing a plurality of spherical droplets of a heavy rare earth powder selected from at least one of Dy or Tb on the surfaces of the cleaned magnets, to produce a plurality of magnets including a uniform film of Dy or Tb. Then, the magnets including the uniform film are sintered to diffuse the uniform film into the magnets through grain boundary phases of the magnets to produce the R—Fe—B sintered magnets. A plasma flame apparatus is also disclosed herein.

Abstract: A substrate processing apparatus having an improved film processing uniformity is provided. The substrate processing apparatus includes a partition configured to provide a gas supply channel and a gas supply unit connected to the gas supply channel. A gas flow channel communicating with the gas supply channel is formed in the gas supply unit. A first through-hole is formed to penetrate through at least a part of the partition. A second through-hole is formed to penetrate through at least a part of the gas supply unit. The first through-hole communicates with the gas flow channel via the second through-hole. The second through-hole is arranged between a center and an edge of the gas flow channel, and is arranged spaced apart from the edge.

Abstract: A fluid assisted particle injector for a metallurgical furnace, comprising: an injector tube having an entrance end, an exit end and a removable tip; a cover tube disposed over the injector tube; a fluid and particle injector port in line with the longitudinal center axis of the injector tube and a secondary fluid port for directing pressurized fluid over the outside of the injector tube and within the cover tube; the injector tube defining a tapered internal bore having a particle entrance end and a particle exit end, wherein the diameter of the particle exit end is smaller than the diameter of the particle entrance end.

Abstract: A sorting device includes a transport unit, an identification unit, and a plurality of nozzles. Each of the plurality of nozzles has a valve that adjusts a flow amount of pulse air, a pulse air flow path that is connected to the valve, and a pulse air blowing port that is arranged at a tip end of the pulse air flow path. The pulse air flow path has at least one bent portion. An adjustment flow path is connected to the bent portion of the pulse air flow path. An adjustment member capable of increasing and decreasing a volume of the adjustment flow path is provided in the adjustment flow path.

Abstract: A gasification burner for a multiple-burner arrangement in an entrained-flow gasifier, in which the gasification burner extends along a main axis and in which the media for the gasification reaction in the gasification burner are guided in separate media channels and exit at the burner mouth in a direction having an angle to the main axis that is not zero. A vertical installation with an optimally adaptable flame shape is provided. Depending on the orientation of the burners, the flame shape is adaptable, whether it be a minimized total flame diameter for an initial slag formation of the cooling screen or an increase in the total twist of the total flame for an increased particle deposition on the reactor wall. The gasification burner with angled burner tips can be used as part of a retrofit.

Abstract: A fluid cooled housing system for use in metal making furnaces. In particular, the present invention related to a novel and inventive housing and guard member configured to receive and protect an implement, such as a burner or a lance, used in connection with metal making furnaces. A preferred embodiment of the present invention comprises a housing comprising an outer shell and an inner shell that define a fluid chamber, an end cap, a bushing insert, a face plate, a fluid inlet, and a fluid outlet. Both the fluid inlet and the fluid outlet are preferably in fluid communication with both the fluid chamber defined by the shells and a fluid chamber defined by the bushing insert. In alternative preferred embodiments, the housing system further comprises a guard member that preferably envelopes and further protects the fluid cooled housing.

Abstract: An inlet assembly for a an abatement burner includes: an inlet conduit operable to convey an effluent gas stream to be treated from an inlet aperture via a bore to an outlet aperture for treatment; and a lance conduit operable to convey a fuel gas from a gas inlet aperture via a gas bore to a gas outlet aperture positioned within the bore for mixing with the effluent gas stream, a cross-sectional area of the gas bore increasing towards the gas outlet aperture. In this way, the expansion caused by the increasing cross-sectional area of the gas bore enhances the mixing of the fuel gas with the effluent gas stream which provides for improved destruction and removal efficiencies (DRE), which enables the inlet assembly to be operated with reduced quantities of fuel gas, while still maintaining required levels of DRE.

Abstract: A venturi nozzle (1), disposed upstream from a blower (20), for mixing combustion air and fuel gas by intake pressure of the blower (20), comprising: a nozzle portion (12) with a shape that is narrowed in diameter downstream and into which combustion air is introduced; a mixing portion (13), disposed downstream from the nozzle portion (12), with a shape that is enlarged in diameter downstream and into which combustion air and fuel gas are mixed; and a fuel gas inlet (15), disposed between the nozzle portion (12) and the mixing portion (13), into which fuel gas is introduced; wherein a plurality of ridges (16) extending in a circumferential direction and arranged at predetermined intervals in a flow direction of combustion air are formed on an inner surface of the nozzle portion (12).

Abstract: A portion of a submerged combustion burner is disposed into a pressure vessel. The portion of the submerged combustion burner has a welded area that has a first microstructure defined by a first number of voids. The vessel is filled with an inert gas, pressurized, and heated. Pressurizing and heating operations are performed for a time and at a temperature and a pressure sufficient to produce a second microstructure in the welded area of the burner. The second microstructure is defined by a second number of voids less than the first number of voids.

Abstract: An assembly of a cylinder head and a fuel injector with an injector tip for an internal combustion engine with at least one combustion chamber, wherein the fuel injector at the end facing a combustion chamber of the internal combustion engine is at least partially surrounded by a heat shield, wherein in the region of the heat shield a heat dissipation device is provided, through which heat can be dissipated from the combustion chamber of the internal combustion engine, wherein the heat shield surrounds the fuel injector as far as the injector tip, wherein the heat shield is designed as a tapering collar towards the injector tip and is integrated into an injector sleeve or into the cylinder head.

Abstract: The present invention discloses a stove burner. The present invention, by designing the outer-ring fire cover body and the outer fire-spraying ring into two independent structures, enables the outer-ring fire cover body to be made of a heat-resisting material of low price, which reduces the manufacturing cost of the entire stove burner; besides, with the outer edge of the annular cover body plate in contact with the top of the outer fire-spraying ring and the cover body ring attached to the sidewall of the inner ring tube close to the gas inlet tube, this structure can better achieve good airtightness of the annular chamber.

Abstract: A system includes a plurality of interconnected mixing assemblies configured to mix a first fuel and water to generate a first mixture, and mix a second fuel and the water to generate a second mixture. The first and second fuel mixtures are configured to combust in a plurality of combustors of a gas turbine. The interconnected mixing assemblies include first and second fuel passages, a water passage, first and second mixers, first and second fuel valves, and first and second water valves disposed in an integrated housing. The first fuel valve has a first fuel flow coefficient between approximately 1.0 to 1.5, the second fuel valve has a second fuel flow coefficient between approximately 3.0 to 5.0, the first water valve has a first water flow coefficient between approximately 0.4 to 0.55, and the second water valve has a second water flow coefficient between approximately 3.5 to 5.0.

Abstract: The invention relates to a cooling device for a spraying nozzle, in particular for cold gas spraying, and to a spraying nozzle assembly equipped with such a cooling device. The spraying nozzle is surrounded by an enclosure forming the cooling device, wherein it is provided according to the invention that a cooling line within the enclosure forms a closed system which can be supplied with a cooling medium by way of an inlet and an outlet. The cooling medium therefore advantageously does not come into contact with the spraying nozzle, which is inserted into a receiving opening in the enclosure by means of a loose fit. The closure may also advantageously taper conically towards the mouth of the spraying nozzle, and therefore coatings can also be applied to difficultly accessible components by means of the spraying nozzle assembly according to the invention.

Abstract: A lance including: a central pipe having a wear-resistant ceramic layer coated on an inner wall thereof; a central casing pipe having a casing pipe groove in an outer wall thereof, in which the central casing pipe is fitted over the central pipe; an intermediate pipe fitted over the central casing pipe, in which a combustion-supporting gas chamber is formed between a front part of the central pipe and the intermediate pipe, and an intermediate pipe groove is formed in an outer wall of the rear part; and an outer casing pipe fitted over the intermediate pipe, in which a cooling medium chamber is formed between a front part of the intermediate pipe and the outer casing pipe, and a cooling medium injection channel is defined by an inner wall of the outer casing pipe and the intermediate pipe groove.

Abstract: A gas generator includes an injector that injects a fuel and an oxidizer, and a combustor that mixes and burns the fuel and the oxidizer injected from the injector. The injector includes a plurality of injection elements arranged on a face plate. Each of the injection elements includes unlike-impingement type injection nozzles that inject the fuel and the oxidizer toward a combustion point in front of the face plate, and injection nozzles that inject fuel for dilution to a dilution point DP forward further than the combustion point.

Abstract: A mist generating apparatus is provided. The apparatus has a longitudinal axis and comprises first and second opposing surfaces which define a transport fluid nozzle between them. The apparatus also has a working fluid passage having a supply passage connectable to a supply of working fluid, and an outlet on one of the first and second surfaces. The working fluid outlet communicates with the transport fluid nozzle. The transport fluid nozzle has a nozzle inlet connectable to a supply of transport fluid, a nozzle outlet, and a throat portion intermediate the nozzle inlet and nozzle outlet. The nozzle throat has a cross sectional area which is less than that of either the nozzle inlet—or the nozzle outlet. The transport fluid nozzle projects radially from the longitudinal axis such that the nozzle defines a rotational angle of at least 5 degrees about the longitudinal axis.

Abstract: According to various embodiments, a system includes a gasification fuel injector. The gasification fuel injector includes a tip portion, an annular coolant chamber disposed in the tip portion, a recessed surface for cooling control and a first structural support extending through the annular coolant chamber. The first structural support divides the annular coolant chamber into a first passage and a second passage.

Abstract: A lance (10), for conducting a pyrometallurgical operation by top submerged lancing (TSL) injection, wherein the lance (10) has at least an inner pipe (12) and outer pipe (14) which are substantially concentric. The lower outlet of the inner pipe (12) is set at a level relative to the lower, outlet end of the outer pipe (14) required for pyrometallurgical operation. The lance (10) further includes a shroud (22) through which the outer pipe (14) extends and which is mounted on and extends along an upper portion of the outer pipe (14) to define with the outer pipe (14) a passageway (28) along which gas is able to be supplied for flow towards the outlet end of the outer pipe (14) for discharge exteriorly of the lance (10). The shroud (22) is longitudinally adjustable relative to the outer pipe (14) to enable substantial maintenance of, or variation in, a longitudinal spacing between the outlet ends of the shroud (22) and the outer pipe (14).

Abstract: To achieve an improvement of heat exchanger effectiveness (heat transfer rate) without any increase of a fan motor output. The gas heated by the heating units or the gas cooled down by the cooling units is sent to the blowing nozzles 2 by a fan. Then, the blowing nozzles 2 blow the gas sent by the fan through their outlets. Each of the outlets has a non-circular planar shape with a projection portion thereof being projected inwardly. This allows a shape of the gas in cross section perpendicular to a direction where the gas is blown through the outlet of each of the blowing nozzles 2 to be changed by the projection portion with time (switching phenomenon). Such a switching phenomenon enables to be increased the heat exchanger effectiveness (heat transfer rate) on the printed board even if any output of the fan motor for rotating the fan does not increase.

Abstract: A method for treating combustible material of the present invention includes providing a pipe opened to a molten substance surface above the molten substance surface of molten substance stored in a furnace body for smelting nonferrous metals, and blowing combustible material containing valuable metals and oxygen-enriched air into the molten substance surface of the molten substance from the pipe.

Abstract: A bell plate is rotated about a rotational axis, and coating material is supplied to a discharge surface of the bell plate such that the coating material is projected away from the bell plate. A working fluid is blown at least temporarily as a transonic or supersonic flow onto the coating material coming from the bell plate by means of a dispensing device. Furthermore, a spray head for a rotary atomizer is provided for applying a coating material to an object, having a bell plate which can be rotated about a rotational axis and which has a discharge surface, wherein coating material can be supplied to the discharge surface such that the coating material is projected away from the bell plate. A dispensing device which can blow a working fluid at least temporarily as a transonic or supersonic flow onto the coating material coming from the bell plate.

Abstract: Methods and apparatuses for upgrading a pyrolysis oil stream and a hydrocarbon stream are provided herein. In an embodiment, a method for upgrading a pyrolysis oil stream and a hydrocarbon stream includes separately introducing the pyrolysis oil stream and the hydrocarbon stream into a reaction zone to form a mixture of the pyrolysis oil stream and the hydrocarbon stream in the reaction zone. The mixture of the pyrolysis oil stream and the hydrocarbon stream is catalytically cracked in the presence of a particulate cracking catalyst in the reaction zone. The pyrolysis oil stream is maintained at a temperature of less than or equal to about 100° C. substantially up to introduction into the reaction zone.

Abstract: A fuel injector includes a body having a fuel injection port, and a seal ring on the body. The body has a diameter-shrink portion of which an outer diameter is shrunk. The seal ring is engaged with the diameter-shrink portion. The diameter-shrink portion has a radially concaved annular groove with which a tip end portion of the seal ring is engaged. It is restricted that the seal ring is rubbed against an inner surface of the assembling hole and the seal ring is damaged.

Abstract: Apparatuses, systems, mobile gasification systems, and methods for gasifying residual biomass are described. An example system may include a mobile gasification system configured to gasify feedstock generated from residual biomass to provide syngas. The mobile gasification system may be configured to generate electrical power using the syngas. The mobile gasification system may be configured to be installed in a transportable structure.

Abstract: The invention relates to a burner, particularly for the gasification of solid carbonaceous materials by partial combustion. The burner comprises a central channel (2) and at least one coaxial channel (6). The channels (2, 6) are defined by concentric walls (3, 5) having free downstream outer ends profiled to define an annular slit (10) forming a discharge end of the coaxial channel (6) and converging towards an adjacent discharge end of the central channel (2). The burner (1) is encased by a cooling jacket (14) and comprises a front face (21) with double walls spaced by one or more baffles (28) defining a coolant flow path operatively connected to the cooling jacket (14). The cooling jacket (14) has an upstream section (14A) and a transitional section (25) narrowing down to the front face (21) having a smaller outer diameter than the upstream cooling jacket section.

Abstract: A fuel system for an engine is disclosed. The fuel system may have a fuel injector configured to inject fuel into a cylinder of the engine. The fuel system may also have a first fuel supply line configured to supply liquid fuel to the fuel injector to cool the fuel injector. The fuel system may further have a second fuel supply line configured to direct fuel from the fuel injector back to the fuel injector for discharge into a cylinder of the engine.

Abstract: The invention relates to a metering module (10) including a metering valve (12). The metering module further includes a cooling device through which a cooling fluid flows. Said cooling device comprises a first chamber (26) that has a cooling fluid inlet (42). The metering valve (12) has an additional cooling member (36) containing a second chamber (52) which is hydraulically connected to the first chamber (26) via at least one opening (50).

Abstract: A torch tip for a plasma arc torch includes a body having a first end, configured to attach to the torch, and a second end, where an end wall is disposed. A plasma exit orifice is formed in the end wall. At least two castellations are formed in the end wall. Each castellation has a castellation width defined by the distance between the sidewalls of that castellation. At least one slot is disposed between two castellations. Each slot has a slot width defined by a distance between the sidewalls of its adjacent castellations. The slot width can be at least twice the castellation width. Each slot also has a slot floor and an exterior shape. The slot floor can have slope that tapers toward the first end of the body in an outward radial direction and the exterior shape of the slot can have a generally V-shaped or U-shaped contour.

Abstract: A system for supplying fuel to a combustor includes a combustion chamber and a fuel nozzle that provides fluid communication into the combustion chamber. A plurality of passages circumferentially arranged around the combustion chamber provide fluid communication into the combustion chamber. A liquid fuel plenum provides fluid communication to the plurality of passages. A baffle circumferentially surrounds at least a portion of the liquid fuel plenum inside the plurality of passages and forms a plurality of lobes around the liquid fuel plenum.

Abstract: Disclosed herein is an ambient mist head for extinguishing fires that comprises a plurality of mist nozzles attached to a head. The mist nozzles are arranged spatially on the head at various angles. The number of mist nozzles, the spatial arrangement and the angular placement of the mist nozzles can vary, depending on the area of coverage required. The angular placement of the mist nozzles on the head is effected so that the mist stream emerging from one mist nozzle does not impinge on a mist stream emerging from another mist nozzle. The angular placement of the mist nozzles thereby provides a maximal amount of mist production, and minimizes the occurrence of streams of water droplets.

Abstract: A system for cutting a workpiece into one or more portions or final pieces, and then transferring the final pieces to a receiving location, includes a conveyor configured to support and advance workpiece, as well as a cutter configured to cut the workpiece into the final pieces. At least one fluid nozzle is positioned relative to the conveyor and selectively activatable to discharge a stream of fluid at a predetermined location(s) on the final piece, thereby to propel the final piece from the conveyor to a receiving location. A controller activates the nozzle to direct the fluid stream at the target position(s) on the final pieces.

Abstract: A burner having a high shape factor nozzle including a nozzle opening having a shape factor from about 10 to about 75, the shape factor being defined as the square of the nozzle perimeter divided by twice the nozzle cross-sectional area, and an annular nozzle surrounding the high shape factor nozzle, wherein the high shape factor nozzle is configured to be supplied with one of a fuel gas and an oxidizer gas, and the annular nozzle is configured to be supplied with the other of a fuel gas and an oxidizer gas. A method of rapid energy release combustion, including supplying a fuel gas and an oxidizer gas to a burner having a high shape factor nozzle and an annular nozzle surrounding the high shape factor nozzle.

Abstract: A plasma torch head, a plasma torch shaft and a plasma torch for providing a quick and simple possibility of changing the plasma torch head are described.

Abstract: This application relates to a nozzle (3) for a liquid-cooled plasma cutting torch, having at least one groove (6a) which is arranged on an outer wall (4) of the nozzle (3) with which the liquid makes contact, is oriented with the direction of its longitudinal axis (18) approximately perpendicular to the nozzle mid-axis (17) of the nozzle (3) and reduces the wall thickness (15) of the nozzle (3), at least in this region, and has a groove base (12, 13) that reaches into the wall thickness (15), wherein the groove base (12, 13) of the groove (6a) is formed so as to be approximately parallel to the contour of the inner wall (5) of the nozzle (3).

Abstract: A dual-temperature, multi-plenum showerhead for use in semiconductor processing equipment is described. The showerhead may supply multiple separate gases to a wafer reaction area while keeping the gases largely segregated within the showerhead. Additionally, the showerhead may be configured to allow a faceplate of the showerhead to be maintained at a significantly higher temperature than the rest of the showerhead.

Abstract: A cap assembly for a bundled tube fuel injector includes an impingement plate and an aft plate that is disposed downstream from the impingement plate. The aft plate includes a forward side that is axially separated from an aft side. A tube passage extends through the impingement plate and the aft plate. A tube sleeve extends through the impingement plate within the tube passage towards the aft plate. The tube sleeve includes a flange at a forward end and an aft end that is axially separated from the forward end. A retention plate is positioned upstream from the impingement plate. A spring is disposed between the retention plate and the flange. The spring provides a force so as to maintain contact between at least a portion of the aft end of the tube sleeve and the forward side of the aft plate.

Abstract: A fuel injector for an engine is disclosed. The fuel injector may have a fuel nozzle with at least one injection orifice, and a needle element movable within the fuel nozzle between a first position at which the needle element inhibits fuel flow and a second position at which fuel flow is substantially uninhibited. The fuel injector may also have a control chamber located at a base end of the needle element, a body, and a control valve disposed within the body and movable to selectively drain the control chamber, thereby causing the needle element to move between the first and second positions. The fuel injector may further have an armature disposed within an armature cavity of the body and selectively energized to move the control valve, and a pressure reducer disposed within the body and configured to reduce a pressure of the armature cavity.

Abstract: A pressure atomizing nozzle for injecting fuel includes an inlet housing configured to thermally isolate the interior space from external conditions and to remain relatively cool under operation so as to substantially eliminate heat soak back from the inlet housing to the interior space thereof after operation. First and second coolant conduits cool the nozzle tip region actively during operation and passively after operation. A cooling air jacket is configured to thermally isolate inboard components from exterior conditions, to provide clean air during operation to the nozzle tip region for diluting carbon to reduce carbon deposits in the nozzle tip region and for cooling the same, and to provide passive cooling to the nozzle tip region after operation.

Abstract: Provided is a substrate processing apparatus. The substrate processing apparatus includes a chamber body having an opened upper side, the chamber body providing an inner space in which processes with respect to a substrate are performed, a chamber lid disposed on an upper portion of the chamber body to close the opened upper side of the chamber body, and a showerhead disposed on a lower portion of the chamber lid to supply a reaction gas into the inner space. The showerhead includes a flange contacting the chamber lid, the flange having a passage recessed from a top surface of the flange to allow a refrigerant to flow therein, and a flat plate disposed inside the flange, the flat plate having at least one injection hole for injecting the reaction gas in a thickness direction thereof.

Abstract: The present invention intends to provide a shower of a large diameter MOCVD reactor, and the difficulty for manufacturing the shower does not obviously increase when its size increases. The shower of a large diameter MOCVD reactor of the present invention comprises III group chamber, V group chamber and a cooling water chamber, and it is characterized in that, III group chamber, V group chamber and cooling water chamber are all separated as N chambers, wherein N is a natural number greater than or equal to 2 and each chamber is an individual unity.

Abstract: HVOF torches introduce fuel and oxidizer reactants into a central passage so as to form a concentric stream having an axial stream of oxidizer surrounded by an annular stream of fuel that is positioned against a sidewall that bounds the central passage. The fuel can be introduced so as to swirl about the axial stream of oxidizer. The torch can be formed by a body having the central passage therethrough and an insert residing in the central passage and having an oxidizer passage therethrough. A portion of the insert can have a reduced cross section so as to form an annular fuel chamber, from which the flow of fuel into a passage first section is restricted so as to distribute the fuel against the sidewall. The torch can be provided with a cooling jacket to prevent damage to the body.

Abstract: A temperature controlled showerhead for chemical vapor deposition (CVD) chambers enhances heat dissipation to enable accurate temperature control with an electric heater. Heat dissipates by conduction through a showerhead stem and fluid passageway and radiation from a back plate. A temperature control system includes one or more temperature controlled showerheads in a CVD chamber with fluid passageways serially connected to a heat exchanger.

Abstract: A method of assembling an injection device for use in a reactor injector feed assembly includes extending the injection device at least partially into a cavity. The injection device includes a plurality of substantially concentric conduits coupled to a modular tip that includes a plurality of cooling channels and a plurality of substantially annular nozzles defined therein. The method also includes coupling at least one coolant distribution device in flow communication with the plurality of cooling channels to facilitate removing heat from an outer surface of the injection device.