Abstract: There is provided a flexible membrane for use in a microelectromechanical transducer, the flexible membrane comprising an electromagnetic waveguide. There is further provided a microelectromechanical system comprising a substrate which comprises the flexible membrane, and a process for forming the flexible membrane. The flexible membrane may be configured to operate within an optical microphone system.

Abstract: A system for jamming a target acquisition, which starts at a position and may be detected by a detector that provides a detection signal in response to the target acquisition includes a warning device for outputting a warning, in case the detector outputs a detection signal. The system also includes an optical jammer configured to provide at least one jamming signal, and a directing device configured to direct the jamming signal towards the position in response to the output warning in order to prevent target acquisition or at least to make target acquisition more difficult.

Abstract: The present disclosure is directed to the method and system which use an image caught by a photographic device for calculating a brightness of a space and acquiring a state of an object, and adjust the illuminant device and/or the shading device for the space to make the brightness of the space achieve the proper level.

Abstract: A human body sensing device comprises: an infrared sensor which detects a human body; a rotatable group of lenses having a plurality of lenses arranged around the sensor, the lenses being configured to: generate unit sensing zones defined by a sensing distance extending radially outwardly from the group and a small width extending in a rotation direction of the group; and form a plurality of alternating layers of a regional sensing zone including one or more than one of the unit sensing zones and a non-sensing zone not including any of the unit sensing zones, in a rotation direction of the group; a rotary drive which rotates the group; a rotation position sensor which detects a rotation position of the group; and a recognizer which recognizes the location and/or movement of a human body based on the output level indicated by the infrared sensor and the rotation position.

Abstract: Extreme ultraviolet light (EUV) is produced in a laser-produced plasma (LPP) EUV light source when laser light strikes a target. Measuring reflected light from the target by a Return Beam Diagnostics (RBD) module provides data on EUV production, including but not limited to target position, target focus, target shape, and target profile. In a RBD module, a controller sequences an optical switch to direct the reflected light between a blocking element and a sensing device, providing greater flexibility in measuring the reflected light during different aspects of the EUV generation process, such as different power levels and duty cycles of the laser light striking the target.

Abstract: A method and device are disclosed for simulating a light source having a light intensity profile that varies in time. The method includes providing a light source; using a mask to at least partially block light emitted by the light source; and adjusting the position of the mask in accordance with an electrical signal representative of the light intensity profile so as to adjust the extent to which the mask blocks light from the light source, and thereby providing the light intensity profile that varies in time. The device can include a mask to at least partially block light from a light source; and an actuator for adjusting the position of the mask in accordance with the electrical signal.

Abstract: An IR camera includes a first optical subsystem for generating an IR image of an object and a second optical subsystem for generating a visual light image of the object. The IR camera further includes a focusing device for focusing the first optical subsystem. The IR camera also has a processor for determining a focus distance for focusing the first optical subsystem on the object. The processor determines the focus distance based on a displacement of a feature in the visual light image.

Abstract: Scanning beam display systems that scan one servo beam and an excitation beam onto a screen that emits visible light under excitation of the light of the excitation beam and control optical alignment of the excitation beam based on positioning of the servo beam on the screen via a feedback control.

Abstract: According to one embodiment, a resonator control apparatus includes: a first light source that outputs resonance light ?0; a second light source that outputs first control light ?1; a third light source that outputs second control light ?2 of a visible wavelength region or a near-infrared wavelength region; a pair of high reflective mirrors whose resonator length is set to (½)×?(wavelength of the resonance light ?0×integer); a photodetector that monitors transmitted light from the mirror pair; an integrator that captures and integrates two signals detected by the photodetector; a resonator length control unit that controls the resonator length of the mirror pair; and a driver that applies, to the resonator length control unit, a voltage that is calculated by capturing an output signal from the integrator in such a way as to maximize transmittance detected by the photodetector.

Abstract: Disclosed herein is an intrusion detection apparatus which includes an infrared emission unit for emitting infrared beams and an infrared reception unit for receiving the infrared beams. The infrared emission unit adjusts an emission direction in which the infrared beams are emitted based on information received from the infrared reception unit, and adjusts an optical axis which is formed with the infrared reception unit depending on whether infrared beam values corresponding to the adjusted emission direction fall within the normal range. The infrared reception unit adjusts a detection direction in which the infrared beams are detected based on information received from the infrared emission unit, and adjusts an optical axis which is formed with the infrared emission unit depending on whether infrared beam values corresponding to the adjusted detection direction fall within the normal range. The intrusion into a relevant region is detected using the optical axis.

Abstract: A lighting apparatus has a directable beam and comprises a lamp for forming a beam of visible light; a steering mechanism, e.g. mirror for directing the beam in a desired direction; and a light and movement sensor, e.g. a video camera configured to detect movement in an image formed from radiation reflected from the beam. The sensor detects movement of the whole of an object within the beam or, if only part of the object is in the beam, the whole of the part within the beam. The apparatus also comprises a processor configured to control the steering mechanism to direct the beam in accordance with movement detected in the image of the beam, e.g. movement of an object or shadow within the beam.

Abstract: A passive electro-optical tracker uses a two-band IR intensity ratio to discriminate high-speed projectiles and obtain a speed estimate from their temperature, as well as determining the trajectory back to the source of fire. In an omnidirectional system a hemispheric imager with an MWIR spectrum splitter forms two CCD images of the environment. Three methods are given to determine the azimuth and range of a projectile, one for clear atmospheric conditions and two for nonhomogeneous atmospheric conditions. The first approach uses the relative intensity of the image of the projectile on the pixels of a CCD camera to determine the azimuthal angle of trajectory with respect to the ground, and its range. The second calculates this angle using a different algorithm. The third uses a least squares optimization over multiple frames based on a triangle representation of the smeared image to yield a real-time trajectory estimate.

Abstract: A human body sensing device comprises: an infrared sensor which detects a human body; a rotatable group of lenses having a plurality of lenses arranged around the sensor, the lenses being configured to: generate unit sensing zones defined by a sensing distance extending radially outwardly from the group and a small width extending in a rotation direction of the group; and form a plurality of alternating layers of a regional sensing zone including one or more than one of the unit sensing zones and a non-sensing zone not including any of the unit sensing zones, in a rotation direction of the group; a rotary drive which rotates the group; a rotation position sensor which detects a rotation position of the group; and a recognizer which recognizes the location and/or movement of a human body based on the output level indicated by the infrared sensor and the rotation position.

Abstract: A seeker/receiver system for a moving body, such as for guiding the moving body to a target, includes an optics/receiver portion that tilts as a unit relative to other parts of the moving body. The optics/receiver portion includes a window which may be used to enclose and protect one or both of a pair of receivers or detectors, such as a laser energy detector or receiver, and an infrared energy detector or receiver. By moving the window and the receivers as a unit a set positional relationship is maintained between all of the elements of the optics/receiver portion. This simplifies the optics by obviating the need for all aspects of the window to present the same properties to energy detectors that tilt relative to it. The optics/receiver portion may be tilted using a tilt mechanism such as a gimbal.

Abstract: The present invention relates to a device for coupling between a plasma column serving as an antenna and an electric power signal generator, associated with a laser. This device comprises at least two conducting electrodes, each pierced with a hole, these holes being coaxial, the electrodes being connected on the one hand to a high voltage direct current source and on the other hand to power signal alternating current source, the laser(s) being placed do that its (their) beam arrives along the axis of said holes of the electrodes.

Abstract: Scanning beam display systems that scan at least one invisible servo beam and an excitation beam onto a screen that emits visible light under excitation of the light of the excitation beam and control optical alignment of the excitation beam based on positioning of the servo beam on the screen via a feedback control.

Abstract: The invention relates to a device and method for communicating with a thermal detector module and an appropriate thermal detector for a use with such a control device. The device for communicating with a thermal detector module comprises a means for providing a collimated beam of thermal infrared radiation and means for modulating the intensity of the collimated beam of thermal infrared radiation. The intensity modulated thermal infrared beam, when directed on to the thermal detector module from a position within the module's field of view, is suitable for triggering a response from the thermal detector module. The intensity modulated thermal infrared beam may also be encoded with a digital signal to control the function of the thermal detector.

Abstract: An apparatus for acquiring information on a time waveform of a terahertz wave is comprised of a terahertz wave-generating unit, a waveform information-detecting unit, and a delay unit for changing the time after the terahertz wave is generated in the generating unit until it is detected as waveform information of the terahertz wave in the detecting unit, wherein the delay unit is configured so as to change a propagating distance of the terahertz wave generated by the generating unit, and associates waveform information of the terahertz wave, which is detected in the detecting unit, and the propagating distance every terahertz wave generated by the generating unit.

Abstract: Attenuators used to regulate optical signals are disclosed. According to one aspect of the present invention, an assembly including an IR source and an IR sensor is provided to sense blockage of optical signals transmitted between two collimators via a fixed common light blocker that is driven by a stepper motor. The movement of the light blocker is sensed by a sensing assembly including an IR source and IR sensor. By detecting the photocurrent from the IR sensor and a feedback circuit, the attenuation of the optical signals can be well controlled.

Abstract: An information acquisition apparatus includes a pulse generator 9, a detector 10, a first delay unit 15, a second delay unit 16 and a computation unit. The pulse generator 9 is excited by a first laser beam to generate a terahertz wave in the form of a pulse. The detector 10 is excited by a second laser beam coherent to the first laser beam to detect the terahertz wave from object 2 that is irradiated with the pulse of the terahertz wave. The first delay unit 15 changes the delay time in such a way that the detector 10 can detect the pulse signal of the terahertz wave from the object 2. The second delay unit 16 changes the delay time by not greater than the temporal width of the pulse signal detected by the detector 10.

Abstract: Attenuators used to regulate optical signals are disclosed. According to one aspect of the present invention, an assembly including an IR source and an IR sensor is provided to sense blockage of optical signals transmitted between two collimators via a fixed common light blocker that is driven by a stepper motor. The movement of the light blocker is sensed by a sensing assembly including an IR source and IR sensor. By detecting the photocurrent from the IR sensor and a feedback circuit, the attenuation of the optical signals can be well controlled.

Abstract: A laser beam steering module includes an optics assembly that directs a first portion of a laser beam through an output aperture and a second portion of through a sensing path. The optics assembly adjusts a position of the laser beam through the output aperture and sensing path responsive to position control signals. A sensor array in the sensing path receives the second portion of the laser beam and in response thereto generates electrical beam position signals indicating a position of laser beam through the output aperture. The electrical beam position signals have values that are a function of a temperature of the sensor array and are used in generating the position control signals to adjust the position of the laser beam as a function of the values of the electrical beam position signals. A thermal stabilization circuit stabilizes the temperature of the sensor array responsive to thermal control signals.

Abstract: A system for displaying images comprises a plurality of light sources, comprising at least one non-visible light source. The system further comprises a spatial light modulator operable to modulate non-visible light from the non-visible light source to encode one or more objects and for presentation on a display. Finally, the system comprises a detector operable to detect at least a portion of the non-visible light presented on the display.

Abstract: The present invention concerns a device for detecting crossing of a horizontal land demarcation marker of a carriageway for motor vehicles, characterized in that it includes at least one box (2) to be placed under the vehicle and enclosing means for projecting two light beams (4, 6) onto the carriageway (8) in two distinct zones (10, 12) that do not overlap, and distinct means for picking up each of the two light beams (14, 16) after reflection onto the carriageway (8).

Abstract: A radiation sensitive sensor (1) which detects electromagnetic radiation within a narrow band of the electromagnetic spectrum using a single, fixed infrared detector (12) to cover a 360° area in a plurality of segmented sectors obtained by rotation of a mirror (19) for each of the sectors with detection of the radiation from each sector providing an indication of the presence of a physical phenomena (50) such as a forest fire. The use of a single fixed detector and the mirror rotation allows for a solar powered unit which is able to be employed either singularly or in a system of grid locations to cover a wide sensor area in order to provide continuous operation and reliable alarm indications.

Abstract: An infrared detection system for seeing multiple pixel scenes and/or connecting multiple detectors, within each communications path, includes a data processor, optical toggles and/or electrical switches, and a large number of pixels and detectors. For the spatial net, the data processor sends signals to the optical toggle and electric switches connecting neighboring pixels and other detector elements to the data processor. A single communications path serves several pixels and detector elements thereby minimizing interconnection congestion from the pixels to the processing circuitry.

Abstract: An infrared detection system for seeing multiple pixel scenes and/or connecting multiple detectors, within each communications path, includes a data processor, optical toggles and/or electrical switches, and a large number of pixels and detectors. For the spatial net, the data processor sends signals to the optical toggle and electric switches connecting neighboring pixels and other detector elements to the data processor. A single communications path serves several pixels and detector elements thereby minimizing interconnection congestion from the pixels to the processing circuitry.

Abstract: The present invention relates to an integrated apparatus for monitoring wafers and for process control in the semiconductor manufacturing process, by means of at least two different measurements that can be installed inside any part of the semiconductor production line, i.e., inside the photocluster equipment, the CVD equipment or the CMP equipment. The apparatus comprises a measuring unit for performing at least one optical measurement in predetermined sites on said wafer, illumination sources for illuminating said wafer via measuring unit, supporting means for holding, rotating and translating the wafer and a control unit. The measuring unit comprises: at least two measuring sub-units, one of them being normal-incidence optical measuring system.

Abstract: The present invention relates to an integrated apparatus for monitoring wafers and for process control in the semiconductor manufacturing process, by means of optical measurements at more than one spectral range that can be installed inside any part of the semiconductor production line, i.e., inside the photocluster equipment, the CVD equipment or the CMP equipment. The apparatus comprises a measuring unit (110) for performing optical measurements in predetermined sites on said wafer, illumination sources for illuminating said wafer via measuring unit (10,50), supporting means (30) for holding, rotating and translating the wafer and a control unit (120). The measuring unit (110) comprises: (a) at least two separate optical units, each operating at a different distinct spectral range; (b) a separate optical window for each optical unit (31, 32); (c) at least one movable optical head (34); (d) mechanical means for translating said optical head relatively to the wafer's surface.

Abstract: The Hyperspectral Imaging Method and Apparatus provides the means of locating materials of economic and military value and accurately determining their spatial location and extent. The identification of a material is made by comparing its surface spectral reflectance properties in a scene with a set of reference template spectra. If there is enough spectral difference between materials of interest such as, for example, camouflage and vegetation or healthy and blighted corn, a detection will be made. The determination of spatial location and extent is may by the rapid collection of spectral measurements (nominally tens of thousands per second) in the form of an image and the reference of this image with GPS position to very high accuracy. Target identification and geolocation is computed in near realtime or realtime.

Abstract: A microscope for use in transmissive and reflective infrared spectral analysis of a sample positioned on a sample plane. The microscope uses a collimated beam for infinity correction. A collimated irradiating beam of infrared energy is input to the microscope and focused through a single confocal aperture whereupon the beam is re-collimated and provided to a focusing lens. The focusing lens focuses the beam on a subject sample which generates a resulting image beam. The resulting image beam is re-collimated and provided to an optical element which focuses the resulting image beam back through the single confocal aperture and to an infrared detector. In a preferred embodiment, the size of the single confocal aperture is adjustable and a dichroic element is included for providing simultaneous viewing and infrared measurement of a measured sample. Also in a preferred embodiment, a detector mounting apparatus is included for facilitating orientation of a detector at an infrared output of the microscope.

Abstract: A system and technique to incorporate threat detectors within the FLIR's ical train and use the radiation reflected off of insertable protective filters, or a coated clear window, to determine if the threat is still present. If there has been some change in laser threat status then there is allowed the removal or insertion of the protective filter.

Abstract: A thermal imaging device (10) has single integrated circuit chip (86) to perform various analog signal processing (ASP) functions. The imaging device (10) has a detector array (50) including a plurality of detectors (50') each of which generate an electrical signal (78) indicative of the infrared flux incident thereon. These electrical signals (78) are processed and provided in the form of serial analog video signals (52) to the ASP chip (86). The ASP chip (86) includes circuitry (200) for correcting for the differing responsivity of serial manufactured detector arrays (50), circuitry (202) for correcting the gain of the serial analog signal (52) globally, and circuitry (206) for sensing the gain of a processing serial analog signal (90) which the ASP chip (86) provides to an analog-to-digital (A/D) converter (92) of the thermal imaging device (10).

Abstract: Regarding a reflected light from any line portion, which is parallel to the longitudinal direction of the alignment mark 11, on the alignment mark 11, the cylindrical lens 33 functions merely as a glass plate, while the cylindrical lens 34 converges the light onto a pixel on the line sensor 35a, performing optical integration and simplifying image processing. Regarding a reflected light from any line portion, which is parallel to the lateral direction of the alignment mark 11, on the alignment mark 11, the cylindrical lens 34 functions merely as a glass plate, while the cylindrical lens 33 magnifies and forms a line image on the line sensor 35a along the pixel row of that. A toroidal lens can be used in place of the cylindrical lenses 33 and 34.

Abstract: A charged particle beam exposure system is directed to an exposure process of an electron beam for sequentially scanning an electron beam employing a blanking aperture array including a plurality of blanking apertures. The system facilitates re-focusing for compensation of focus error due to Coulumb effect and makes wiring the blanking aperture array easier. The system further allows exposure without an irradiation gap. The blanking aperture array 6 is formed with a plurality of said blanking apertures 62 arranged in a two-dimensional configuration. A control system 24 controls the blanking aperture array 62 to set the blanking aperture to the ON state where the charged particle beams pass through the blanking aperture and reach the object 19 to be exposed or the OFF state where the charged particle beams cannot reach the object 19 to be exposed.

Abstract: A beam scanning galvanometer is disclosed which oscillates a mirror in a non-resonant mode. The moving parts of the galvanometer are made with as small a moment of inertia as possible because the mirror is oscillated in a non-resonant mode. The galvanometer uses two sets of crossed leaf-springs to support the mirror instead of bearings which are usually used in non-resonant galvanometers. Each of the sets of leaf-springs is formed of a single strip of cold rolled stainless steel. The springs are embedded in uniquely shaped cavities in a permanent magnet that supports the mirror at a distance very close to an axis of rotation of the mirror. The mirror is specially shaped with beveled edges so that its moment of inertia is low and so that it can oscillate in very close proximity to a driving current coil which surrounds the mirror supporting magnet. A magnetic position sensor is used to detect as angular position of the mirror during operation of the galvanometer.

Abstract: The imaging and illumination system with aspherization and aberration correction by phase steps includes two transparent phase plates within the optical train of a stepper illumination system. The first plate places each ray at the corrected position on the axial stigmatism plate to satisfy the sine condition. The second plate, which is the axial stigmatism plate, ensures that each ray of light focuses at the focal point. The aberration corrected light is reflected by a deformable mirror toward a secondary mirror, a primary mirror and finally onto a wafer to project a single field of large dimension. The secondary and primary mirrors provide aspherization by forming phase steps in the surfaces of the mirrors. The deformable mirror, to permit realtime correction of aberrations and manipulation of the beam for each field imaged by the system. A set of two-dimensional scanning mirrors is placed between the laser light source and a reticle containing to pattern which is to be transferred to the wafer.

Abstract: System for irradiating the surface of a substrate with atomic or molecular ions by rapid scanning of a beam in two dimensions over the surface of the substrate. A scanning system is shown for deflecting the beam in two dimensions relative to a reference axis and a magnetic ion beam transport system following the scanning system is arranged to receive the beam from the scanning system over the range of two dimensional deflections of the scanning system and constructed to impose magnetic field conditions along the beam path of characteristics selected to reorient the two-dimensionally deflected beam to a direction having a predetermined desired relationship with the axis in the two dimensions at the desired instantaneous two dimensional displacement of the beam from the axis, to produce the desired scan of the beam over the substrate.

Abstract: An optoelectronic viewing system for imaging a field of view on a monitor includes a telescope for generating an optical image of the field of view, a scanning device for electronically scanning the optical image and an electronic evaluation unit for processing the scanning signals and displaying the image on the monitor. In order to create a field of view which is large enough for surveillance with a long-range viewing system that has sufficient resolution, a mirror system for pivoting the direction of beam incidence in the vertical and horizontal direction is placed ahead of the telescope. The mirror system is driven for reproducibly and consecutively passing through a succession of fixed predetermined pivoted positions. The scanned image signals obtained from the individual pivoted positions are combined into a field of view.

Abstract: An apparatus for accurately measuring laser beam intensity profiles so as to permit adjusting the oscillation mode of the laser to achieve good workability of the beam. The beam from a CO.sub.2 laser generator is attenuated and applied to an infrared sensor which produces an electrical analog signal representing the beam intensity. The sensed signal is amplified and applied via an A/D converter and an interface to a computer. The computer controls a scanner which scans successive scanning lines of the laser beam profile across the sensor. The computer also produces a visual image of the laser beam intensity profile from the sensor signal. An operator veiwing such image can make an accurate and convenient measurement of the laser beam intensity profile, thereby providing a basis for quantitative analysis in quality inspection of workpieces subjected to the laser beam.

Abstract: Apparatus for the detection of an enemy infrared camera. This apparatus includes a continuous infrared laser 1 directed towards camera 25, a receiver 10 of the infrared signals sent by the camera, a processing circuit 23 of these signals, able to determine a delay time, a delay circuit 22 supplying electrical signals delayed by the said delay time in relation to the reception of infrared signals, and a pulsed laser 16 sending to camera 25 laser pulses respectively on reception of the delayed signals. The apparatus causes a very bright spot to be created on the camera screen which represents a picture of a dummy object displaced by a predetermined distance from the apparatus. This spot overshadows the spot on the screen corresponding to the true location of the apparatus.Application is for detection of an enemy infrared camera placed on a tank.

Abstract: An I. R. target detection arrangement having a high-inertia line scan and a low inertia frame scan. The line scan is performed by scanning a line of I. R. detectors broadside over a section of the target scene, storing the detector outputs for each point on each line, repeating the line scan and output storage a number of times without change of frame scan, accumulating the outputs for each point obtained in repeated scans, and stepping the frame scan to the next section. A greater signal/noise ratio is thus obtained. Upon detecting a target, the frame scan is switched to a continuous mode and the field of view is narrowed and magnification increased.In each section interlacing may be obtained by stepping the frame scan half the line pitch and repeating the line scan process before proceeding to the next section.