Abstract: A hybrid medical apparatus having an imaging unit, an irradiation unit, and a patient support apparatus is provided. The imaging unit is configured to record image data of an examination region. The irradiation unit is configured to carry out an irradiation of at least a part of the examination region. The imaging unit and the irradiation unit have a common isocenter. The irradiation unit is arranged for rotational movement along a first perimeter independently of the imaging unit. An X-ray source and an X-ray detector of the imaging unit are arranged for movement such that a central beam between the X-ray source and the X-ray detector runs through the common isocenter. The patient support apparatus and/or the imaging unit and/or the irradiation unit is movable along a first spatial axis such that the examination region of the examination object is able to be arranged in the common isocenter.

Abstract: A collimator for a detector is disclosed. The collimator comprises: a bottom plate provided with imaging through holes distributed in an array, each of the imaging through holes comprising a first hole segment and a second hole segment, the transverse size of the first hole segment gradually decreasing in a direction from a free end to the second hole segment, and the transverse size of the second hole segment gradually decreasing in a direction from the free end to the first hole segment; a shielding case formed on the bottom plate; and a top plate disposed in the shielding case and closing at least a part of an opening of the shielding case, the top plate being provided with shielding through holes distributed in an array, and the imaging through holes being in one-to-one correspondence with the shielding through holes.

Abstract: An apparatus for cleaning a lidar sensor may include: a contaminant detector configured to detect a contaminant adhering to a window cover of the lidar sensor; a rotator configured to rotate the window cover; a cleaner configured to clean the window cover; and a controller configured to control the rotator to rotate the window cover to a cleaning region for removing the contaminant, and control the cleaner to remove the contaminant, when the contaminant is detected by the contaminant detector.

Abstract: A method for multidimensional direction measurement of gamma radiation in the far field by means of a group of several energy discriminating detectors synchronized with each other for detection of radiation can use unidirectional and bidirectional Compton scattering processes and lookup tables LUTSK, a defined functional value f(E1,E2), a list of defined detector pairs with an identification number i for defined detector pairs, and one or more frequency distributions Y for the acquisition of the measurement values. In some embodiments, the method can include setting up a detector system, acquiring measurement values, associating coincidence events with an Identification number, calculating a functional value, acquiring coincidence events in frequency distributions, and calculating one or more direction distributions from the frequency distributions.

Abstract: A photoelectric conversion element includes pixels that receive light and each generate charge in response to light incidence. The pixels include a first pixel that performs a first readout operation to read a reset signal and an optical signal and a second pixel on which a readout operation is performed at the same time as that of the first pixel and that performs selectively either the first readout operation or a second readout operation to read the reset signal. The photoelectric conversion element further includes, in association with each pixel, a first holding unit that holds the reset signal and the optical signal, and a first switch that controls writing to the first holding unit. A control line that controls the first switch associated with the first pixel and a control line that controls the first switch associated with the second pixel are formed of separate wirings.

Abstract: A method of determining a quantity of a first radioisotope in a source term, disintegrating into a second radioisotope, the radioisotopes respectively emitting first and second gamma rays screened by the source term, the method comprising the steps: a) determining the theoretical ratio of counts between the first and second rays emitted in the absence of screening; b) measuring the net counts associated with the first and second rays emitted by the first and second radioisotopes; c) determining the screening rates of the first and second rays by the source term based on the ratio obtained in step a) and the counts obtained in step b); d) determining the quantity of the first radioisotope based on the screening rate of either the first or the second ray determined in step c).

Abstract: A thickness of a bonding material (8) is varied in a radial direction orthogonal to a central axis (P) of the tubular anode member (6), the bonding material (8) being used for bonding a transmitting substrate (7) for supporting a target layer (9) and a tubular anode member (6) in a direction along the central axis (P). Thus, a region in which a circumferential tensile stress of the bonding material (8) is alleviated is formed in the direction along the central axis (P) to prevent a crack from developing in the bonding material (8).

Abstract: A method of recording a medicament dose using a data collection device comprises capturing, by a video camera of said data collection device, a video showing a medicament dose indicator of a medicament delivery device, adjusting a scale of an image of said medicament dose indicator in said video, adjusting said image for skew of one or more characters displayed on a component of the medicament delivery device in said video, determining the position of at least one of said one or more characters in the image, identifying the at least one character using optical character recognition and determining a medicament dose shown by the medicament dose indicator based on a result of said optical character recognition. The method may include determining whether more than one delivery of medicament is recorded in the video and, if so, whether said more than one delivery includes one or more prime shots, so that an overall dosage delivered to a user may be determined based on multiple determined medicament doses.

Abstract: A high resolution inspection apparatus using a terahertz Bessel beam. The high resolution inspection apparatus comprises a terahertz wave generating unit for generating a terahertz wave; a Bessel beam forming unit for forming a terahertz Bessel beam at an inspection target object using a terahertz wave incident from the terahertz wave generating unit; a first lens for changing an angle of the terahertz wave radiated, when the terahertz Bessel beam is transmitted through the inspection target object, to be smaller; a second lens for concentrating the terahertz wave passing through the first lens and toward a detection unit; and a terahertz wave detection unit for detecting the terahertz wave concentrated by the second lens.

Abstract: A radiation imaging system is provided. The system includes radiation imaging apparatuses having an arrangement capable of detecting a start of radiation irradiation, and comprising an output unit to output a first signal representing that the apparatus itself has detected a start of irradiation and a receiving unit to receive a second signal representing that another apparatus has detected the start. In a case in which the start of irradiation is detected in a first state, the apparatus transitions to a second state for generating the image data and outputs the first signal. The apparatus in the second state generates the image data regardless of reception of the second signal. In a case in which the second signal is received in the first state, the apparatus transitions to a third state in which power consumption is lower than the first state.

Abstract: A radiation treatment device may include a first dosimeter and a second dosimeter. Quantum efficiency of the first dosimeter may be lower than quantum efficiency of the second dosimeter. A method for monitoring beam energy may include receiving a first signal generated by a first dosimeter, receiving a second signal generated by a second dosimeter, receiving a third signal generated by the first dosimeter and receiving a fourth signal generated by the second dosimeter. The first signal and the second signal may be associated with a first radiation beam. The second signal and the fourth signal may be associated with a second radiation beam. The method may also include determining whether there is a difference between the beam energy of the first radiation beam and the second radiation beam based on at least one of the first signal, the second signal, the third signal or the fourth signal.

Abstract: A system includes a sensor base, a sensor cover having a window that is rotatably mounted to the base. The system includes a contacting cleaner and a contactless cleaner. The system further includes a processor that is programmed to actuate, first, the contactless cleaner and, then, upon determining that opacity of the window exceeds a predetermined threshold after actuation of the contactless cleaner, the contacting cleaner.

Abstract: Embodiments of the present disclosure include a system for detecting neutrons with a housing, a gas chamber at least partially defined by the housing, an anode extending through at least a portion of the gas chamber, and a pseudogas arranged within the gas chamber. The pseudogas comprises a mixture of gas and suspended solid particles that contain an element with a high cross-section for thermal neutron capture.

Abstract: A process for measuring a size distribution of a plurality of nucleic acid molecules, the process comprising: labeling the nucleic acid molecules with a fluorescent dye comprising a plurality of fluorescent dye molecules to form labeled nucleic acid molecules, such that a number of fluorescent dyes molecules attached to each nucleic acid molecule is reliably proportional to the number of base pairs in the nucleic acid molecule, the fluorescent dye molecules having a first florescence spectrum; producing, by the labeled nucleic acid molecules, the first florescence spectrum in response to irradiating the labeled nucleic acid molecules at the first wavelength; and detecting the first florescence spectrum to measure the size distribution of the plurality of nucleic acid molecules.

Abstract: Apparatus includes: pixel array having bias line; readout circuit; bias circuit supplying bias voltage to the bias line and having detector to detect current of the bias line and having amplifier and ADC; first power supply supplying voltage to the readout circuit; second power supply supplying voltage to the amplification circuit; and power supply supplying voltage to the first and second power supplies and the ADC via voltage line and ground line. The ground line includes first ground line connecting ground terminals of the first and second reference power supplies and second ground line connected to the power supply and the first ground line. Impedance of the second ground line is higher than that of the first ground line, arranged between the first and second reference power supplies.

Abstract: A linear vibration motor is disclosed. A linear vibration motor includes a housing with an accommodation space, a main magnetic circuit system accommodated in the housing, and a plurality of elastic components each including a first elastic component and a second elastic component separated and opposite to each other. The first elastic component and the second elastic component are electrically connected with an exterior circuit. The motor further includes a vibration module suspended by the elastic components and including a weight connected to the elastic components and a voice coil connected to the elastic components. The voice coil is disposed around the main magnetic circuit system and comprises an inlet terminal electrically connected with the first elastic component and an outlet terminal electrically connected with the second elastic component.

Abstract: A tool is provided that includes: a protractor base having a plurality of markings circumferentially spaced around a semicircular perimeter of the base; and a body pivotally coupled to the protractor base at a vertex thereof, the body having a pointer extending therefrom, a radiation source seat, and an aperture, the seat and aperture configured for the source to emit radiation directionally in-line with the pointer through the aperture.

Abstract: A multi charged particle beam exposure method includes calculating an effective irradiation time, for each of a plurality of control irradiation time periods for controlling an irradiation time of each beam in the multi-beams of a charged particle beam, using a blanking error time of each divided shot of a plurality of divided shots, previously acquired, due to an error of blanking control for each divided shot; generating correlation data representing a relation between the control irradiation time and the effective irradiation time; selecting, using the correlation data, for each irradiation position of a target object, the combination of the divided shots corresponding to the effective irradiation time to be closer to each desired irradiation time; and performing exposure, using the multi-beams, based on the combination of the divided shots selected for each irradiation position of the target object.

Abstract: The present disclosure relates to power-assisted steering systems and mobile inspection devices. Implementations may include and/or involve a directional control valve, a second hydraulic pump and a first driving motor. When determining an engine on a chassis has not been started, a central control unit may control start of the first driving motor according to a received travelling instruction such that the first driving motor drives the second hydraulic pump and then the power-assisted steering motor can be driven through a second oil path of the second hydraulic pump. Accordingly, the power-assisted steering system can be driven to operate when the mobile inspection device is in operation and the engine on chassis is not started, thus it is possible to drive the power-assisted steering system without the chassis engine operating.

Abstract: An optical device includes: a casing having a waterproof structure; a light transmission part provided in the casing; an air blow port for blowing air onto the light transmission part; a flow path for causing the air to flow to the air blow port, the flow path being provided to maintain the waterproof structure of the casing; an air intake port through which the air flows into the flow path; a blower part generating the flow of the air from the air intake port to the air blow port; and an observation unit accommodated in the casing to receive light from the outside via the light transmission part.

Abstract: The present disclosure describes methods, systems, and computer program products for a modular camera attachment for optical devices and its use. One computer-implemented method includes linking a modular camera accessory (MCA) to a smart device using a data connection; activating the application on the smart device for a collimation function between the MCA and a modular camera attachment-enabled optical (MCO) device; receiving collimation data from the MCA and a camera of the smart device configured to capture collimation data from the optical path of the MCO device; processing the collimation data received from the MCA and the MCO device to determine alignment indicators; using the determined alignment indicators, aligning the MCA with the MCO device optical characteristics; and activating the application on the smart device to process data received from the MCA.

Abstract: A method of X-ray imaging includes passing an X-ray beam through a pre-sample mask 8 with a plurality of apertures 32, through a sample 10, and then through a detector mask 6 with aligned apertures 34. The beams are detected. The detector mask 6 and pre-sample mask 8 are moved with respect to one another to identify the position of maximum intensity and then moved to two further positions on equal and opposite spacings on either side of the maximum. Images are acquired and a transmission image, refraction image and scattering image calculated.

Abstract: An extreme ultraviolet generation device, including a chamber with an internal space; a plasma generator to generate plasma in the internal space; a condenser in the internal space to gather light generated from the plasma; and a monitor to monitor the internal space in an omnidirectional manner.

Abstract: An apparatus that measures a concentration of a material within a sample includes signal generation circuitry that generates a first signal having at least one orthogonal function applied thereto and applies the first signal to the sample. A detector receives the first signal after the first signal passes through the sample and determines the concentration of the material within the sample based on a detected orthogonal function within the first signal received from the sample.

Abstract: Disclosed is a radiation image capturing system including a portable radiation image capturing apparatus and a portable console. The portable radiation image capturing apparatus can generate image data according to irradiated radiation and transmit the generated image data by wireless communication. The portable console includes a first wireless communication unit which can receive the image data transmitted from the radiation image capturing apparatus and a second wireless communication unit which can communicate with an external apparatus or system by wireless communication. The console gives priority to one wireless communication than the other between the wireless communication through the first wireless communication unit or the wireless communication through the second wireless communication unit.

Abstract: Methods and systems for reading out a pixel array are provided. An example system may be configured to represent the activity of at least two pixels in the array as at least two digital signals. Further, the example system may be configured to dynamically aggregate the at least two digital signals into one representative analog signal corresponding to the activity of the at least two pixels.

Abstract: Radiographic imaging, or X-ray imaging, may be used to identify information regarding the contents of a container or other sealed object without having to open the container or the sealed object. One or more visual analyses of radiographic images may identify items within a container, or a condition of such items, as well as the portions or amounts of the contents of the container that correspond to air or dunnage. Additionally, a radiographic image may be projected onto an external surface of a container, or rendered within an augmented reality device or wearable computer device, thereby providing information regarding the contents of the container to a worker or other personnel within a vicinity of the container.

Abstract: An indicator device for detecting a delamination of a composite material, including detecting a delamination of a composite material of a wind turbine or a wind turbine rotor blade is provided. The indicator device includes: A first part, a second part and an electric circuit. Therein, the first part comprises at least a part of a lower part of the electric circuit. The second part comprises at least a part of an upper part of the electric circuit. And the lower part and the upper part are electrically connected to each other at a predetermined breaking point forming the electric circuit in such a manner, that when the indicator device is in use in a composite material, if a delamination of the respective composite material occurs, the electric connection between the lower part and the upper part breaks at the predetermined breaking point, thus cutting the electric circuit.

Abstract: A quick removal socket tool includes: a rod body that has a surrounding wall defining a recess for receiving a screwdriver head and formed with a retaining hole in spatial communication with the recess; and a sliding sleeve sleeved movably on the rod body, formed with an annular groove, and being movable relative to the rod body between a retaining position, where the annular groove is misaligned from the retaining hole so that the positioning ball is disposed within the retaining hole and a groove of the screwdriver head to retain the screwdriver head within the recess, and a release position, where the annular groove is aligned with the retaining hole so that the positioning ball is disposed within the retaining hole and the annular groove to allow for removal of the screwdriver head from the recess.

Abstract: Disclosed is a radiographic imaging system which is provided with: a plurality of radiographing chambers equipped with a registration device; a console; and a management device for associating and managing the identification information of a portable radiographic imaging device with the identification information of the radiographing chambers. When the identification information of the portable radiographic imaging device is notified by the registration device of a radiographing chamber, the console displays an icon corresponding to the imaging device on a selection screen. When the identification information of the portable radiographic imaging device, as notified by the registration device, is associated with the identification information of another radiographing chamber, the management device discards the association and deletes the icon corresponding to the portable radiographic imaging device from the selection screen of the console, which is associated with said other radiographing chamber.

Abstract: Disclosed are a radiation image capturing system and a radiation image capturing apparatus. According to one implementation, the radiation image capturing system includes the radiation image capturing apparatus and a console. The detecting unit of the radiation image capturing apparatus detects start of irradiation using a first detecting method in which power consumption amount is small but a capturing condition with which the start of irradiation can be detected is limited, or a second detecting method in which power consumption amount is large but the start of irradiation can be detected under any capturing condition. The console transmits a capturing condition to the radiation image capturing apparatus. The detecting unit selects the first or second detecting method based on the capturing condition, and performs processing of detecting the start of irradiation using the selected detecting method.

Abstract: Electronic devices may include time-of-flight (ToF) image pixels. Each ToF pixel may include a photodiode, a first capacitor coupled to the photodiode via a first transfer gate, a second capacitor coupled to the photodiode via a second transfer gate, and a third capacitor coupled to the photodiode via a third transfer gate. The first transfer gate may be turned on for a given duration to store a first charge in the first capacitor. The second transfer gate may be turned on for the given duration to store a second charge in the second capacitor. The third transfer gate may be turned on for a duration that is longer than the given duration to store a third charge in the third capacitor. Depth information may be computed based on the first, second, and third stored charges and a corresponding pixel constant.

Abstract: A radiation imaging apparatus, comprising a sensor array configured to output a signal in accordance with irradiated radiation, a driving unit configured to output a signal from the sensor array by driving the sensor array, a detecting unit configured to detect irradiated radiation, a control unit configured to control the driving unit to perform first readout to read out a signal corresponding to charge accumulated in the sensor array from the sensor array and perform second readout to further read out a signal from the sensor array at least in a case where the first readout has started during irradiation of radiation, and a processing unit configured to correct the signal obtained by the first readout based on the signal obtained by the second readout.

Abstract: A radiation generating tube includes an electron emitting source configured to emit an electron beam; a target configured to generate radiation when the target is irradiated with the electron beam; a rear shield body having a tube-shaped electron passage with openings thereof at each end of the passage, and being located at the side of the electron emitting source with respect to the target, a first opening of the passage facing the electron emitting source and being separated from the electron emitting source, a second opening of the passage facing the target; and a brazing material joining the rear shield body with a peripheral edge of the target, at a position separated from the second opening. A closed space isolated from the electron passage is provided between the target and the rear shield body.

Abstract: A fluid identification assembly is provided to determine the presence or absence of multiple components within a fluid in a conduit. The assembly includes a light source and a light detector positioned to receive a portion of light from the light source reflected by the conduit and fluid. A dual-band bandpass filter may be associated with the light detector to allow multiple wavelengths of light to be monitored, thereby monitoring the composition of the fluid based on the amount of light of each wavelength absorbed by the fluid. Rather than a dual-band bandpass filter, a second light detector may be provided, along with a beam splitter to separate light from a single source for receipt of light of different wavelengths by the light detectors. The dual-band bandpass filter may also be replaced by a second light source and detector pair for analyzing fluid using multiple wavelengths of light.

Abstract: A method actuates a device for irradiating an object that has at least one target volume to be irradiated and at least one volume to be protected. The method includes defining at least one signal dose value for the volume to be protected and irradiating the object at least one of at least at times and at least in part with hadron irradiation. A dose introduced into the volume to be protected during the irradiation of the object is determined and at least one signal is emitted as soon as the introduced dose exceeds at least one signal dose value in at least one point of the volume to be protected.

Abstract: Radioactive integrated circuit (IC) devices with radioactive material embedded in the substrate of the IC itself, and including logic for “fingerprinting” (that is, determining characteristics that identify the source of the radioactive source material). Radioactive IC devices with embedded detector hardware that determine aspects of radioactivity such as total dose and/or ambient radiation. Radioactive IC devices that can determine an elapsed time based on radioactive decay rates. Radioactive smoke detector using man-made, relatively short half-life radioactive source material.

Abstract: There are provided a radiation generating apparatus and a radiation imaging apparatus that have excellent transportability. The radiation generating apparatus and radiation imaging apparatus include a radiation generating unit configured to generate radiation, an arm configured to support the radiation generating unit, and a support pillar configured to support the arm and rotate the arm, wherein the support pillar has a housing portion that has a space for housing at least a part of the radiation generating unit.

Abstract: Among other things, one or more techniques and/or systems are described for counting detection events on a detector cell of a photon counting detector array. An electronics arrangement of the detector cell comprises a digital discriminator which is configured according to an impulse response of the detector cell or, more particularly, an impulse response of a radiation detection element of the detector cell (e.g., where the radiation detection element is configured to convert energy of the radiation photon into electrical charge). The digital discriminator is configured to analyze a digital representation of a voltage signal of the detector cell and to compare a result of the analysis to one or more metrics derived based upon the impulse response of the detector cell to identify voltage pulses of the voltage signal that are indicative of detection events.

Abstract: Li-containing scintillator compositions, as well as related structures and methods are described. Radiation detection systems and methods are described which include a Cs2LiLn Halide scintillator composition.

Abstract: The present invention discloses a millimetre wave three dimensional holographic scan imaging apparatus and a method for inspecting a human body or an article. The apparatus comprises a first millimetre wave transceiver module, a second millimetre wave transceiver module, a first guide rail device to which the first millimetre wave transceiver module is connected in slidable form, a second guide rail device to which the second millimetre wave transceiver module is connected in slidable form, a driver configured to drive the first/second millimetre wave transceiver module to move along the first/second guide rail device, and a constrainer configured to constrain kinematic relation between the first and the second millimetre wave transceiver modules such that they only move in directions opposed to each other. They may increase scan speeds, improve scan stability, reduce scan operations and enhance the reliability of the apparatus.

Abstract: Methods and systems for minimizing interference among multiple illumination beams generated from a non-uniform illumination source to provide an effectively uniform illumination profile over the field of view of an inspection system are presented. In some examples, a pulsed beam of light is split into multiple illumination beams such that each of the beams are temporally separated at the surface of the specimen under inspection. In some examples, multiple illumination beams generated from a non-uniform illumination source are projected onto spatially separated areas on the surface of the specimen. A point object of interest illuminated by each area is imaged onto the surface of a time-delay integration (TDI) detector. The images are integrated such that the relative position of the illumination areas along the direction of motion of the point object of interest has no impact on the illumination efficiency distribution over the field of view.

Abstract: The present invention provides a crystalline quality evaluation apparatus (1) and a crystalline quality evaluation method for thin-film semiconductors, which are designed to evaluate crystalline quality of a sample (2) of a thin-film semiconductor (2a) by emitting excitation light and an electromagnetic wave to irradiate a measurement site of the sample (2), and detecting an intensity of a reflected electromagnetic wave from the sample (2). In the present invention, the thin-film semiconductor (2a) of the sample (2) is formed on an electrically conductive film (2b), and a dielectric (3) transparent to the excitation light is additionally disposed between the sample (2) and a waveguide (13) for emitting the electromagnetic wave therefrom.

Abstract: An of the invention relates to a direct-conversion x-ray detector for detection of x-ray radiation, including a direct converter used for detection of the x-ray radiation, at least one collimator disposed at least partly in the direction of radiation of the x-ray radiation in front of the direct converter and a least one radiation source which is disposed to the side of the direct converter and irradiates the direct converter indirectly with an additional radiation. In at least one embodiment, the a least one collimator, on a side facing towards the direct converter, includes at least one reflection layer, on which the additional radiation is reflected onto the direct converter, and includes a cooling facility through which the at least one radiation source is able to be cooled.

Abstract: A self-referencing radiation detector to test the radiochemical purity of a sample radiopharmaceutical solution. In some embodiments, the self-referencing radiation detector measures the radioactivity of a sample radiopharmaceutical solution before the sample radiopharmaceutical solution is passed through a high performance liquid chromatography column. The radiation detector then measures the radioactivity of each separated molecularly distinct species from the high performance liquid chromatography column. The radiochemical purity of the sample radiopharmaceutical solution is calculated by comparing the measured radioactivity of separated molecularly distinct species from said high performance liquid chromatography column to the measured radioactivity of the sample radiopharmaceutical solution before the sample radiopharmaceutical solution is passed through the high performance liquid chromatography column.

Abstract: The invention relates generally to sample ionization, and provides ionization probe assemblies, systems, computer program products, and methods useful for this purpose.

Abstract: A radiological image-capturing device includes: a first read control section that executes a first read mode in which electric signals stored in a plurality of pixels are read out simultaneously in units of a plurality of rows; and an emission-start determining section that determines that the emission of radiation from a radiation source onto an image-capturing panel has started when the values of the electric signals read by the first read control section have become greater than an arbitrarily settable threshold. If it is determined by the emission-start determining section that the emission of the radiation has started, the first read control section terminates the reading of the electric signals, and thereby brings the image-capturing panel into an exposure state.

Abstract: An optical sensing module including a lens and a sensing device is provided. The lens has an optical axis. The sensing device is disposed under the lens, wherein the sensing device is to receive an object beam passing the lens. The optical axis of the lens deviates from a geometric center of the sensing device. An optical sensing module including a prism film, a sensing device and a lens is further provided. The prism film has a plurality of prisms. The sensing device is disposed under the prism film, wherein the sensing device is to receive an object beam sequentially passing the prism film and the lens. The lens is disposed between the prism film and the sensing device.

Abstract: A proximity sensor detects an object to be detected. The proximity sensor includes a board; at least three light emitting portions which are mounted on a surface of the board such that not all the light emitting portions is arranged on a straight line, and which emits light; and a light receiving portion which is mounted on the surface of the board so as to have a predetermined positional relationship with the three light emitting portions, and which receives reflected light derived from light emitted from the light emitting portions and reflected by the object to be detected.

Abstract: A drawing apparatus for performing drawing on a substrate with a charged particle beam, includes: a controller configured to control a dose of the charge particle beam at each of a plurality of positions of the charged particle beam on the substrate based on information of displacement of each of the plurality of positions from a target position corresponding thereto and a target dose of the charged particle beam at the target position corresponding to each of the plurality of positions.