Abstract: An information processing device includes: an acquisition unit configured to acquire color information on a specific color included in an inspection image, and a determination condition for determining a color shift with respect to the specific color; and a controller configured to: determine, based on the color information and the determination condition acquired by the acquisition unit, test image data representing a plurality of test images to be formed by an image forming apparatus; output the determined test image data to the image forming apparatus in order to form the plurality of test images; acquire luminance data on the plurality of test images, the luminance data being output from a color sensor; acquire spectral data on the plurality of test images, the spectral data being output from a spectroscopic sensor.

Abstract: A laser measuring system comprising a laser transmitter and a laser receiver is provided. The laser transmitter includes one or more laser sources for projecting an initial laser pulse and a reflective surface. The laser receiver includes a first reflective surface for reflecting the initial laser pulse to provide a first reflected laser pulse, and a second reflective surface for reflecting the initial laser pulse to provide a second reflected laser pulse. The laser receiver further includes a photo detection unit for receiving 1) a first double reflected laser pulse produced by the first reflected laser pulse reflecting off the reflective surface of the laser transmitter, and 2) a second double reflected laser pulse produced by the second reflected laser pulse reflecting off the reflective surface of the laser transmitter. The laser receiver determines an orientation angle associated with the laser receiver based on the first and second double reflected laser pulse.

Abstract: The present disclosure provides hand-held, battery-powered tools for performing operations such as crimping and cutting. A frame of the tool supports a working head, a battery, a motor connected to the battery, a controller and a camera. The tool includes a monitoring system for monitoring the performance of the tool remotely. The tool also includes control systems for controlling the performance of the tool.

Abstract: A printer includes: a memory configured to store a machine-learned model obtained by machine learning using teaching data associating at least one of reflectance of a print medium, transmittance of the print medium, and image data obtained by capturing an image of a surface of the print medium with a type of the print medium; and a print controller configured to determine a type of a print medium using at least one of reflectance of the print medium, transmittance of the print medium, and image data obtained by capturing an image of a surface of the print medium and the machine-learned model.

Abstract: Disclosed is a camera module inspector of rotating type distributing a load of processing test raw data. In an exemplary embodiment, the camera module inspector of rotating type includes a rotary index table including a plurality of socket units, a plurality of testers arranged around the rotary index table, a plurality of test control processors connected to correspond to the plurality of socket units, respectively, to be fixed on the rotary index table, a network connection unit establishing network connections with respect to the plurality of test control processors, a redundancy check processor processing the test raw data faster than the test control processor, connected to the network connection unit and data controller test raw data requiring a great deal of processing time out of the test raw data generated in the plurality of test control processors to be transmitted to the redundancy check processor through the network connection unit.

Abstract: A thickness measuring device includes a laser emitting a laser beam to an object in a semiconductor processing chamber, a quartz glass inside the chamber reflecting part of the laser beam and to transmit a remainder of the laser beam, a first light receiving sensor detecting an intensity of first reflected light reflected from the quartz glass, a second light receiving sensor detecting an intensity of second reflected light transmitted through the quartz glass and reflected from the object, and a controller configured to calculate input intensity of the laser beam based on the intensity of the first reflected light, to calculate reflectivity of the object by comparing the input intensity of the laser beam with the intensity of the second reflected light, and to measure a thickness of the object by comparing the calculated reflectivity with predetermined reflectivity values for a plurality of thicknesses.

Abstract: Disclosed are a method and system for automatic detection of a fabric defect. The method comprises: preprocessing a region of a fabric to be detected during a fabric transmission process by a noise removing device to eliminate noise interference during a detection process; triggering a camera to perform image acquisition on the fabric to be detected according to rotation information of a motor of a roller of a cloth inspection machine; and automatically identifying a defect on the fabric to be detected based on an acquisition image.

Abstract: In order to optically sense a yarn moved in the longitudinal direction of the yarn, a yarn sensor has a light source, a detector and a light guiding element. The yarn sensor is based on the effect of frustrated total internal reflection (FTIR). Because of the FTIR effect, scattered light exiting the light guiding element in the contact region between the yarn and an outer surface of the light guiding element is detected by means of the detector, in which case sensing of the yarn lying against the outer surface is enabled. Alternatively, the reduced intensity in the totally internally reflected beam is then sensed by the detector. The intensity in the totally internally reflected beam is reduced mainly by the scattered light coupled out of the light guiding element.

Abstract: An image forming apparatus includes: a first image forming unit which forms a first image on a first recording medium with a first material that is not thermally decolorizable; a second image forming unit which forms a second image on a second recording medium with a second material that is thermally decolorizable; a fixing device which is on a common carrying path shared by the first recording medium and the second recording medium and fixes the first image to the first recording medium; and a controller which controls the fixing device so that a temperature of the fixing device is lower than a decolorizing temperature of the second material when the second recording medium reaches the fixing device.

Abstract: A medium processing apparatus includes a sensor that is intermittently energized and detects a predetermined physical quantity and outputs the detection value in the energization period, the sensor stabilizing its output after an output stabilization period, which is shorter than the energization period, has lapsed, a storage unit that stores the detection value that has been detected by the sensor before the lapse of the energization period and after the lapse of the output stabilization period, and a controller that reads the detection value from the storage unit and performs a predetermined process by using the detection value read.

Abstract: A method and installation of inspecting a fragmentation pattern of a tempered glass panel by deflectometry, following a fragmentation test, the method including: (i) positioning the tempered glass panel in contact with a support; (ii) projecting by a display device a structured light pattern on the surface of at least one portion of the tempered glass panel; (iii) capturing an image reflected by the surface of the first portion of the tempered glass panel using an image capture device; and (vi) processing the images to determine the fragmentation pattern by an image processing device.

Abstract: According to various embodiments, a Raman spectroscopy method is provided for reduction of background fluorescence signal. The method may utilize a high speed optical chopper configured to periodically interrupt the laser light beam between the laser light source and the sample; and using the high speed optical chopper to provide a synchronized time-gated optical window for receiving mostly Raman signal while rejecting most or some of the fluorescence signal transmitted from the sample in response to the laser light beam before reaching the sensor.

Abstract: Disclosed is a method for modeling a digital design of a denture for a patient, said denture comprising a gingival part and a teeth part comprising a set of denture teeth, where the method comprises: obtaining a digital 3D representation of the patient's gum; obtaining virtual teeth models corresponding to the denture teeth; virtually arranging the virtual teeth models in relation to the digital 3D representation of the patient's gum; and generating a virtual outer gingival surface of the gingival part of the denture.

Abstract: A liquid droplet ejecting apparatus includes a medium supporting portion that moves in a transport direction in a state of supporting a medium; a liquid droplet ejecting portion that ejects liquid droplets (ink droplets) onto an ejection area of the medium supported by the medium supporting portion; a detection portion that detects a light amount of reflected light of light having been emitted toward the medium supporting portion or the medium supported by the medium supporting portion; and a carriage that reciprocates in a width direction intersecting the transport direction, in a state of supporting the liquid droplet ejecting portion and the detection portion, and a reflection pattern constituted of a high reflection portion having a high reflectance and a low reflection portion having a low reflectance which are repeatedly arranged in the width direction is formed on the medium supporting portion.

Abstract: A display device comprises a plurality of light emitting elements in a layer on a substrate, a plurality of microprisms positioned over the layer, a plurality of light detectors on the substrate, each light detector respectively corresponding to a light emitting element of the plurality of light emitting elements, and a display screen, wherein the light detectors are used to sense at least one property of an item in contact with the display screen.

Abstract: Systems, methods, and devices for testing gaseous samples for concentrations of specific chemicals. An apparatus has two sensing assemblies for testing for hydrogen sulfide concentrations in gaseous samples. A first assembly is disposed to expose a first side of a sensing tape to a first stream of a gaseous sample. A second assembly is disposed to expose a second side of the same sensing tape to a second stream of another gaseous sample. Both assemblies detect and analyze the hydrogen sulfide concentrations of their respective gaseous samples by way of their respective sides of the sensing tape.

Abstract: A valuable document authentication method and device. Whether a valuable document, an image sensor or a first sensor has shifted or not, the effect of authenticating the valuable document will not be affected, because a reference unit is needed to determine the location relationship between the image sensor and the first sensor before the valuable document is authenticated, thereby preventing an error occurring with the authenticated valuable document due to the fact that each sensor has shifted; moreover, when the valuable document is authenticated, even if the valuable document has shifted, the correctness of the valuable document authenticated can also be guaranteed by the conversion of the location relationship between a detection object and the sensor. Therefore, the solution provided in the present invention improves the identification accuracy and working efficiency of the authentication device, thereby providing convenience for users.

Abstract: The present invention is directed to a device for predicting amount of coarse flakes, such as metallic aluminum flakes present in a coating composition, such as automotive OEM or refinish paint. The device includes measuring flop of a layer of the coating composition applied over a test substrate by using flop prediction device of the present invention. The process is repeated with varying amounts of one or more different types of coarse flakes added to the composition and the flop vs. amount of coarse flakes present in the coating composition is plotted on a graph and then by using a curve fitting equation, a flake amount prediction curve is obtained. By measuring the flop of a wet layer of a target coating composition, the amount of coarse flakes present in the target coating composition can then be predicted by using the flake amount prediction curve. The device is most useful during the manufacture of coating compositions, such as automotive OEM and refinishes paints.

Abstract: An apparatus and a method for inspecting matter and the use thereof for sorting recyclable material including transparent material are disclosed. The apparatus comprises a lighting unit for projecting a concentrated diffused lighting onto the matter to generate a specular reflected light beam representative of the inspected matter. The apparatus comprises an imaging unit mounted according to a given imaging angle with respect to the projected concentrated diffused lighting for imaging the specular reflected light beam to provide image data representative of the inspected matter. The apparatus comprises an analyzing unit for analyzing the image data and providing matter characterization data based on the specular reflected light beam representative of the inspected matter.

Abstract: An apparatus for measuring the retroreflectivity of a surface. The apparatus comprises a light source for illuminating an area of said surface at an incident angle relative to the surface; a detector for detecting light reflected back from the surface at an observation angle relative to the surface; a signal processing unit adapted to receive a detector signal from the detector and to determine, from at least the received detector signal, a measure of retro reflectivity of the surface; a range finder for measuring a distance between the apparatus and the illuminated area. The signal processing unit is further adapted to adjust the measure of retroreflectivity responsive to the measured distance.

Abstract: An apparatus and method for automatically calibrating a media sensor configured to detect advancing print media in a printing device. In some embodiments, the apparatus selects a first light intensity level and a second light intensity level greater than the first light intensity level. A light source unit, such as a light emitting diode or laser diode is activated to emit light at the second light intensity level. The light passes though print media, for example, a roll of self-adhesive labels, that is advanced along a print path of the printing device. The amount of light transmitted through the print media is measured as the print media advances. If the measured light increases, the light source unit is reactivated to emit light at the first light intensity level. In some embodiments, the apparatus identifies whether print media has changed or an out-of-stock condition exists.

Abstract: An apparatus for measuring parameters, such as moisture content or basis weight, of a fibrous web, e.g. paper or non-wovens, comprises optical elements and a wavelength selection device for selectively directing a beam of electromagnetic radiation comprising wavelengths in at least the mid infrared (MIR) spectral range through the web; an element, such as a beam stop, arranged in the path of electromagnetic radiation emerging from the web, for separating directly transmitted from scattered electromagnetic radiation; a collector for collecting the scattered radiation; and at least one detector for detecting the scattered radiation collected by the collector.

Abstract: A band detection sensor includes LEDs configured to radiate detection light onto one side of a web, photodiodes configured to receive the detection light reflected by the web and output a detection signal corresponding to the detection light, and a discrimination section configured to discriminate bands on the web on the basis of the detection signal from the photodiodes, wherein the discrimination section includes a rise discriminating criterion indicating a rate of rise of the detection signal and generates a band signal indicative of the presence of a band when change of the detection signal fulfills the rise discriminating criterion.

Abstract: A system is described for detecting the presence of non-uniformity patterns and providing output indicative of a severity of each type of non-uniformity pattern. The system includes a computerized rating tool that assists a user in efficiently and consistently assigning expert ratings (i.e., labels) to a large collection of training images representing samples of a given product. In addition, the rating software develops a model that allows a computerized inspection system to detect the presence of non-uniformity patterns in a manufactured web material in real time and provide output indicative of a severity level of each pattern on a continuous scale. The system also includes algorithmic and hardware approaches to significantly that increase the throughput of the inspection system.

Abstract: A detection device includes: a detection member that includes an emission member emitting a beam toward a direction of a transportation path and a beam receiving member receiving a reflected beam reflected from a medium; a transmissive member that is provided to allow a regular reflected beam of the beam reflected from the medium to be obliquely incident thereto, and through which the beam emitted from the emission member is transmitted; and a multiple-layered antireflective film that is provided on the transmissive member, the antireflective film being formed such that a maximum value of reflectivity of a first incident beam incident at the same angle as an incident angle of the regular reflected beam becomes smaller than a maximum value of reflectivity of a second incident beam incident in the direction perpendicular to the transmissive member within a visible light wavelength range.

Abstract: A measuring device includes a first optical sensor row and a second optical sensor row between which a planar object to be measured is placed. The direction of the first sensor row and the direction of the second sensor row differ from one another. Each sensor of the first sensor row forms data representing a distance between the object to be measured and the sensor. Each sensor of the second sensor row forms data representing a distance between the object to be measured and the sensor in order to determine at least one property of the object to be measured on the basis of the data.

Abstract: A media presenter is described that includes a carriage moveable forwards and backwards along a linear presenter track between a first purge position, a stacking position, and a present position. The media presenter includes a sensing system that comprises: an inductive sensor; a resonant target mounted on the moveable carriage for co-operating with the inductive sensor to provide positioning information about the target relative to the inductive sensor; and an optical sensor mounted on the moveable carriage in the vicinity of the presenter track. The sensing system further comprises: a first purge target having a first optical property and mounted on the presenter track in the vicinity of the first purge position; and a present target having a second optical property and mounted on the presenter track in the vicinity of the present position.

Abstract: A method for analyzing quality of a glazing unit including: generating a digital image of a test chart produced in reflection by an outer surface of the glazing, the test chart presenting a pattern composed of a plurality of contrasted elements defining between them interface lines; calculating quantities representative of the glazing from the image generated, the calculation being carried out by a processing unit; and comparing the calculated values for the representative values relative to reference values. The representative quantities are representative of a deformation of the image of the test chart produced in reflection by the outer surface of the glazing.

Abstract: A system for measuring properties of a thin film coated glass having a light source, a spectrometer, at least one pair of probes, a first optical fiber switch and a second optical fiber switch. The pair of probes includes a first probe located on one side of a glass sheet and a second probe located on the opposite side of the glass sheet, directly across from the first probe. The first and second optical fiber switches are adapted to couple either probe to the light source and/or the spectrometer. Because the design of the system is optically symmetrical, calibration may be performed without the use of a reference material such as a tile or mirror. Each of the first and second probes has a first leg and a second leg that are separated from each other by a distance n so that angled reflections may be detected.

Abstract: An information terminal device (100) comprises a light source (171) that directs light at a display face on which a display component (110) is disposed, an object detecting sensor (170) that receives light from the display face, and a controller (300) that determines whether or not a sheet (180) has been affixed to the display face on the basis of the output from the object detecting sensor (170).

Abstract: An image displaying apparatus includes a base capable of supporting an object, a camera configured to capture a plurality of images of the object, an illumination system housing a plurality of illuminators, an illumination control system configured to control illumination provided by the plurality of illuminators, and a focus control system configured to control a focus of the camera.

Abstract: A measuring machine includes a non-contact probe that detects a step gauge without contact. The non-contact probe includes an emitting element that radiates light, a light receiving element that receives the light radiated from the emitting element, and an optical filter that covers an optical path to the light receiving element. The optical filter includes a transmission band in which the light radiated from the emitting element is transmitted and a blocking band in which light to which the light receiving element is sensitive is blocked.

Abstract: A system for measuring properties of a thin film coated glass having a light source, a spectrometer, at least one pair of probes, a first optical fiber switch and a second optical fiber switch. The pair of probes includes a first probe located on one side of a glass sheet and a second probe located on the opposite side of the glass sheet, directly across from the first probe. The first and second optical fiber switches are adapted to couple either probe to the light source and/or the spectrometer. Because the design of the system is optically symmetrical, calibration may be performed without the use of a reference material such as a tile or mirror.

Abstract: A method and a device for determining a topography under load of the surface of a material, wherein a test piece (40) of the material intended to be determined is subjected to a compression with a determined load between a first and a second clamping surface (7, 27), after which, in a compressed state, at least one representation is made of surface portions of the material that are in contact with at least one of said clamping surfaces (7, 27), and that the representation is evaluated. The compression is controlled in respect of its speed for obtaining said predetermined load, and said at least one representation is made at a chosen point in time or chosen points in time during this process.

Abstract: There is described a sensor device for spectrally resolved capture of optical detection radiation which emanates from a value document transported through a capture area of the sensor device in a predefined transport direction, comprising a detection device for spectrally resolved detection of the detection radiation in at least one predefined spectral detection range and emission of detection signals which represent at least one, in particular spectral, property of the detected detection radiation, at least one reference radiation device which emits optical reference radiation which is coupled into a detection beam path of the detection device at least partly in dependence on the position of a value document relative to the capture area, and which has a spectrum with a narrow band which is within the predefined spectral detection range, and/or at least one spectrum with an edge which is within the predefined spectral detection range, and a control and evaluation device which is configured for employing the d

Abstract: An apparatus includes: a body including a port into which a medium is insertable; a light source that is provided in the body and illuminates when an image is read for the medium that has been inserted into the port; a guide and output unit that is optically connected to the light source, guides light emitted from the light source, and outputs the guided light into the port; a receiver that detects the output light; and a determiner that determines whether the medium has been inserted into the port based on a result of the detection. The light source also illuminates when the determiner makes the determination. A region in the port through which the light output from the light guide and output unit passes exists from one end to the other end of the port in a width direction being a longitudinal direction of the port.

Abstract: A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem. The system features a variable polarization a polarizing relay assembly arranged to selectively permit the scattered light having a selected polarization orientation to pass along a detector optical axis to a light detection unit in the detection subsystem. The system also features a collector output width varying subsystem for varying the width of an output slit in response to changes in the location of the location scanned on the workpiece.

Abstract: A document photosensor is provided which comprises a substrate 11, 12, a bracket 41, 42 disposed on substrate 11, 12 for forming a light diffusion chamber 53 and a light receiving chamber 58 separated from each other, an LED chip 21, 31 surface-mounted on substrate 11, 12 in light diffusion chamber 53, and a PD chip 37, 38 surface-mounted on substrate 11, 12 in light receiving chamber 58. These chips 21, 37, 31 and 38 are secured at precise locations on a substrate 11 and 12 with accuracy on the order of a few micrometers or less to exactly detect by PD chip 37, 38 a light irradiated from LED chip 21 or 31 after reflection of the light on a bill 50 moved along a passageway 55 to improve validation performance of bill 50.

Abstract: A method and apparatus for measurement of a characteristic of a substrate. A target is present on the substrate and a measurement is performed during a scanning movement of the substrate. The scanning movement of the substrate is a linear movement and the measurement includes obtaining a reflected image of the target using a pulsed light source, the duration of a single light pulse being less than 100 psec. A lithographic apparatus includes such a measurement apparatus, and a device manufacturing method includes such a measurement method.

Abstract: An optical sensor includes: a light-emitting unit; a light-receiving unit that receives light radiated from the light-emitting unit and reflected from a detection target and that outputs an output value in response to the light received; and a correcting unit that corrects the output value of the light-receiving unit when receiving the light reflected from the detection target based on the output value of the light-receiving unit obtained by irradiating a detection area of the optical sensor with light without any light reflective objects being present in the detection area.

Abstract: A medium supplying apparatus includes a separation mechanism that separates one medium at a time from a plurality of sheet-shaped media stacked in a loading rack and transports the medium, an irradiation unit that emits light onto a surface of the medium, and a light receiving unit that receives reflected light that is acquired by allowing the light emitted by the irradiation unit to be reflected from the surface and detects a reflected light intensity that is an intensity of the reflected light. The separating force of the separation mechanism that is used for separating a next medium is controlled based on the reflected light intensity detected by the light receiving unit.

Abstract: Optical radiation sources functioning on different optical bands radiate on different optical bands and focus optical radiation on a region in a web surface as pulses in such a manner that illumination areas of the pulses overlap on the plane of the web. At most one optical radiation band is focused on the web from the direction of the normal. The spatial intensity distribution of at least one optical band differs from the uniform distribution and the intensity distributions of at least two different optical bands differ from one another in a predetermined manner. A camera forms still images of the web surface region on each optical radiation band. An image-processing unit determines the surface topography of the web on the basis of the images. In addition, a controller may control the paper manufacturing process on the basis of the determined surface topography.

Abstract: A system and method for monitoring a physiological parameter includes a garment that includes a fabric that exhibits both a light transmission property and a light reflection property. The amount of light transmitted through the fabric relative to the amount of light reflected by the fabric changes when the fabric stretches in response to motion, such as the motion induced by physiological activity (e.g., heart rate). The system includes at least one source of radiation having wavelength(s) in the range of 400 to 2200 nanometers and at least one detector responsive to such incident radiation. The source and detector are associated with the fabric such that the reception of incident radiation by the detector is directly affected by a change in the amount of light transmitted through the fabric relative to the amount of light reflected by the fabric when the fabric stretches.

Abstract: The present invention relates to a recording medium a method and an apparatus for generating virtual teeth and recording media storing a program performing the method. According to an embodiment of the present invention, a method for generating virtual teeth includes (a) acquiring a tooth image having three-dimensional information from teeth including a damaged tooth; (b) determining an image of a virtual tooth to be inserted into a position of the damaged tooth in a tooth image library having predetermined three-dimensional information and inserting the determined virtual tooth image into the acquired tooth image; and (c) modifying the virtual tooth image by considering tooth images positioned at upper and lower sides or right and left sides of the virtual tooth image. According to the embodiment of the present invention, it is possible to produce a prosthesis most suitable for the state of patient's teeth only once and an operator can minimize post-processing of the produced prosthesis.

Abstract: A non-contact, opto-electronic method to determine glass surface shape involves pattern projection in reflection from a screen. The pattern is formed of black and white or coloured squares with a central reference pattern taken as origin of the x-y axes in the subsequent quantitative analysis of the optical distortion in formed glass sheets or panels.

Abstract: A system for investigating a plurality of samples having varying positions or orientations moving with respect to the system, the system including an emitter of terahertz radiation for irradiating a sample provided in a sample space; a detector of terahertz radiation configured to detect radiation reflected from said sample space; and determining means to determine if radiation reflected from said sample space is from a sample with a predetermined orientation in the sample space.

Abstract: A paper-sheet recognition apparatus recognizes a paper sheet, which is being transported, by using an optical line sensor and a magnetic line sensor. The paper-sheet recognition apparatus includes a memory unit that stores therein magnetic templates defined in advance for respective types and respective transport directions of paper sheets, wherein the magnetic templates are defined at optical resolution representing resolution of the optical line sensor; a selecting unit that selects a magnetic template based on a type and a transport direction of the paper sheet, the type and the transport direction being obtained by analyzing optical data acquired by the optical line sensor; and a comparing unit that divides magnetic data acquired by the magnetic line sensor into pieces of data each corresponding to the optical resolution, and compares the magnetic template selected by the selecting unit with the divided magnetic data.

Abstract: In some embodiments, an inspection system includes a movable collimated light source, a sensing device, a positioning device and a retention mount. The movable collimated light source defines a source optical path and is capable of causing a collimated light beam to propagate along the source optical path. The sensing device defines a sensor optical path. The positioning device includes a positioning device stage that is movably disposed relative to the positioning device, sensing device and movable collimated light source. The retention mount is non-movably disposed on the positioning device stage and disposed within the sensor optical path such that when an item is retained within the retention mount, the item blocks at least a portion of the collimated light beam.

Abstract: A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.

Abstract: A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.