Abstract: For generating an image for inspection of a substrate, a camera is provided above this substrate with an optical axis orienting downward and a plurality of multi-colored light emitting members are set around the optical axis of the camera so as to be within a specified angular range with respect to a target area on the substrate. The camera is operated to generate an image of the target area for inspection while switched-on conditions of these light emitting members are being controlled such that the colors and angles of light illuminating this target area are varied according to a specified kind of the purpose of this inspection.

Abstract: Integrated inspection and test systems for liquid crystal display (LCD) active plates. The integrated inspection and test systems may combine visual imaging inspection and an electronic sensing such as voltage imaging, electron beam sensing or charge sensing, in which the potential defect information obtained by the visual inspection system is combined with the potential defect information obtained by the electronic sensing system to produce a defect report. One or more high-resolution visual cameras are scanned over a stationary plate, and the image data from the camera(s) is processed to detect potential defects. A high-resolution electronic sensing system examines the stationary plate, and the image data from the sensor(s) is processed to detect potential defects. The potential defects from the visual image data and electronic sensing image data are processed to produce the final defect information.

Abstract: A surface inspection apparatus and a method for inspecting the surface of a sample are capable of inspecting discriminatingly between scratches of various configuration and adhered foreign objects that occur on the surface of a work target when the work target (for example, an insulating film on a semiconductor substrate) is subjected to a polishing process such as CMP or a grinding process, in semiconductor manufacturing process or magnetic head manufacturing process. In the invention, the scratch and foreign object that occur on the polished or ground surface of the sample is epi-illuminated and slant-illuminated by use of approximately same light flux, the difference between the scattered light intensity from the shallow scratch and from the foreign object is applied to thereby discriminate between the shallow scratch and the foreign object, and the directionality of the scattered light is detected to discriminate between the linear scratch and the foreign object.

Abstract: Wafer inspection systems and methods are provided. One inspection system includes a module measurement cell coupled to a host inspection system by a wafer handler. The module measurement cell is configured to inspect a wafer using one or more modes prior to inspection of the wafer by the host inspection system. The one or more modes include backside inspection, edge inspection, frontside macro defect inspection, or a combination thereof. Another inspection system includes two or more low resolution electronic sensors arranged at multiple viewing angles. The sensors are configured to detect light returned from a wafer substantially simultaneously. A method for analyzing inspection data includes selecting a template corresponding to a support device that contacts a backside of a wafer prior to inspection of the backside of the wafer. The method also includes subtracting data representing the template from inspection data generated by inspection of the backside of the wafer.

Abstract: Wafers in a cassette are mapped without having to open the cassette. The cassette is at least partially transparent to a particular type of radiation. A source of the radiation is directed into the cassette, through a transparent or translucent part of the cassette, and an imaging sensor sensitive to the radiation detects radiation that is reflected off the wafers inside the cassette. A second source of radiation and a second camera preferably provide additional images of the wafers from a different angle. By processing these images, the spatial orientation of the wafers and loading status of the cassette can be determined.

Abstract: A lithographic apparatus transfers a pattern from a patterning device onto a substrate and includes a projection system to project a patterned radiation beam onto the substrate; a controllable actuator to adjust a distance between the projection system and the substrate; and a particle detector system to detect a particle on a surface of the substrate. The particle detector system has illumination optics directing the radiation to a detection area of the surface of the substrate, detection optics receiving radiation from the detection area of the surface of the substrate, and a detector coupled to the detection optics to produce a measurement signal. The apparatus further has a processing system to determine the height of a particle from the measurement signal, generate a height excess signal if the height exceeds a threshold value, and control the actuator in response to the height excess signal.

Abstract: An apparatus and method to inspect a display panel that can correctly detect a defect of the display panel itself. In the method of inspecting the display panel, a first image is captured from the display panel in a state in which no pattern is applied to the display panel. Light is then irradiated on the display panel in a state in which a pattern is applied to the display panel, and a second image is captured from the display panel. The first image can be compared with the second image, and a determination can be made as to whether or not a defect of the display panel is present.

Abstract: The present invention relates to a nondestructive method or inspecting defects of the cladding of a nuclear fuel rod, which is featured by a wave emitter obliquely discharging an inspection wave to an inspected tube and a receiver arranged at a side of the inspected tube with respect to the wave emitter. If liquid is accumulated inside the tube, the incident inspection wave will be refracted so that the receiver can receive the refracted inspection wave at a specific location. The method can determine whether liquid is accumulated inside the tube and further is able to detect the level of the liquid.

Abstract: The method for optimizing inspection speed during optical inspection of parts in high, low and fluorescent light applications. There are described autofocus mechanisms and methods optimized for fluorescent and non-fluorescent applications that when combined with a high speed CCD camera and high numerical aperture (NA) optics, achieve superior signal to noise ratio, resolution, and inspection speed performance.

Abstract: To provide a winding appearance inspection device of a tape capable of gathering a line speed in an inspection process, as well as capable of inspecting a winding appearance of the tape wound on a roll body core, even in a reel having a flange formed in a roll body core (a roll body core). Winding appearance inspection device 10 serves as a device that evaluates the winding appearance of the tape such as film T or the like wound on roll body core H, comprising light projector 12 that irradiates a light along winding surface S of the tape such as film T or the like that at least partially passes near the roll body core H, and receiver 13 that receives the light.

Abstract: An inspection device for metal rings of a Continuously Variable Transmission (CVT) V-belt which does not perform excessive detection of gloss marks as a detrimental manufacturing flaw configured with a first low-pass cutting portion for cutting out a predetermined low-frequency component contained in an electrical signal outputted from a first light detector or an electrical signal correlated to its electrical signal and a second low-pass cutting portion for cutting out a predetermined low-frequency component contained in an electrical signal outputted from a second light detector or an electrical signal correlated to its electrical signal, which precede a difference value calculation portion. The difference value calculation portion calculates a difference value between an electrical signal which passes through the first low-pass cutting portion and an electrical signal which passes through the second low-pass cutting portion.

Abstract: Particles in a glass substrate are measured by executing following steps: sequentially conveying a plurality of glass substrates; scanning with a camera a unit area of a glass substrate in a direction of a travel path of the glass substrate and storing particle information thereof; shifting the camera to a position corresponding to a next unit area for a succeeding glass substrate; storing information on the particles in the unit area of the succeeding glass substrate obtained by scanning the glass substrate; estimating whether a sum of the respective scanned unit areas is within an allowed limit of an area of a glass substrate; and returning to the third step if an answer from the fifth step is “No” or storing information on the particles in the entire glass substrate if the answer is “Yes”.

Abstract: An apparatus for evaluating a fiber web running in a card includes a camera for scanning the fiber web along a length and width portion thereof to detect useful fibers and empty locations in the fiber web and to generate signals representing the useful fibers and empty locations; and an evaluating device connected to the camera for determining a distribution of useful fibers per area unit in the fiber web from the signals.

Abstract: A device for controlling a continuous movement of an object with symmetry of revolution (1) comprises a conveyor (5) having two parallel guides, (6) and at least one pair of belts (8) stretched on the guides, between and on which these objects move at the level of the guides. These belts form an angle (11) between a top track and a lower track of each of the belts. The belts in the pair have the same direction of rotation around the guides, the same value of the measured angle (11) from the upper track to the lower track, and the same displacement speed. Preferably, the pair of belts consists of a single folded belt.

Abstract: The invention provides a surface inspection apparatus and a method for inspecting the surface of a sample that are capable of inspecting discriminatingly between the scratch of various configuration and the adhered foreign object that occur on the surface of a work target when the work target (for example, an insulating film on a semiconductor substrate) is subjected to polishing process such as CMP or grinding process in semiconductor manufacturing process or magnetic head manufacturing process.

Abstract: For examining defects in sheet material, in particular bank notes, the sheet material is convexly curved and tested in the area of the convex curvature. A detector is disposed tangentially to an apex line of the convex curvature for detecting elevations on the bank note surface due to bank note defects against a light background. A suitable optic is used to image this silhouette onto the detector. The detector is formed as a pixel array, and the number and height of shaded pixels are assessed as measures of defect density and size and nature of defects.

Abstract: An apparatus and a method for detecting an amount of depolarization of a linearly polarized beam transmitted by a birefringent medium in the direction of the optical axis thereof includes a first beam splitter for separating an on-axis portion of the linearly polarized beam into the orthogonal components, two photodetectors for detecting each component, a second beam splitter for separating an off-axis portion of the linearly polarized beam into the orthogonal components, the second beam splitter being disposed off-axis of the incident linearly polarized beam, a second set of photodetectors for detecting the components separated by the second beam splitter, and a subtracting device for subtracting the signals received by the second set of photodetectors from the respective signals received by the first two photodetectors.

Abstract: A machine vision inspection system for industrial parts such as plastic molded caps or the like can reliably detect defects at very high inspection rates on the order of 1600 per minute of a variety of cap colors and liners including previously difficult to inspect combinations. Advantageously, the system includes an inclined inspection ramp which provides separation between the caps which are processed through an inspection station to provide accurate imaging of each individual cap without interference from adjacent caps. Further, the inspection station includes a reflective device which provides accurate and reliable imaging of numerous views of caps with a single color to detect and identify defects.

Abstract: According to the present invention, there is disclosed a defect detection apparatus comprising an illuminating unit which irradiates an inspection object with illuminating light, and an image pickup unit which picks up an image of diffracted light from the inspection object to perform defect inspection of the inspection object from image data picked up by the image pickup unit, the apparatus further comprising a diffraction angle calculation unit to obtain the diffraction angle of the illuminating light with respect to the inspection object, which is optimum for picking up the image of the diffracted light, based on design information of the inspection object, and an illuminating setting unit which sets the angle of incidence of the illuminating unit to the diffraction angle calculated by the diffraction angle calculation unit.

Abstract: A web inspection system provides detection of web flaws along the machine direction and cross direction of a web. The detectable percent contrast between good web material and bad web material in one embodiment approaches noise level. The web inspection system utilizes a multiple of smart cameras connected to a host computer via an ethernet hub. Each smart camera includes a line scan camera for producing digital pixels, a means for lighting and pixel correction on a pixel by pixel basis, a web edge detector for monitoring the edges of a web, a multi-pipeline flaw detection pre-processor for detecting very small changes in the web material, a run length encoder for generating data regarding the location of each group of potential flaws in a cross direction, a 2D blob detector and analyzer for generating data regarding the location of block flaws along a machine direction, and an inspect/reject analysis for determining the actual flaw data from the potential flaw data.

Abstract: An adaptive median filter (40) provides dynamic detection and correction of digital image defects which are caused by defective or malfunctioning elements of a radiation detector array (20). The adaptive median filter receives (100) lines of pixel values of a digital image that may have defects and a user-defined defect threshold. The lines of pixel values are scanned on a pixel-by-pixel basis using a kernel of n×n pixels, where the kernel contains the candidate pixel being examined (120). Each kernel is numerically reordered (130) and a median value is calculated (140). A defect threshold value is calculated by multiplying the user-defined defect threshold criteria and the candidate pixel value (150). A reference value is calculated by subtracting the candidate pixel value and the median value (160). The reference value is compared to the defect threshold value (170).

Abstract: Apparatus for spatial filtering includes a Fourier lens, adapted to collect radiation emitted from a point and to separate the collected radiation into spatial components in a Fourier plane of the lens, and a programmable spatial filter, positioned at the Fourier plane. An image sensor is optically coupled to capture an image of the spatial components of the collected radiation in the Fourier plane, while the components are incident on the filter. A filter controller is coupled to receive and analyze the image captured by the image sensor and, responsive thereto, to control the spatial filter so as to block one or more of the spatial components.

Abstract: The assessment of the effects of yarn faults is carried out by simulating the fabric image. In a first step, the yarn is examined by a measuring member for parameters associated with the volume and/or the surface. In a second step, these parameters are converted into grey values or color values, and these values are assigned to image spots. Finally, the image spots are reproduced on a video display unit and/or a printer. An image is generated thereby, representing a simulation of a woven or knitted fabric produced from the examined yarn.

Abstract: A measurement system (1) has a camera with a lens (12) and a separate sensor (10) mounted so that their planes (13,11) intersect at an object plane (3) according to the Scheimpflug principle. A reference camera(4) is normal and provides a 2D normal image which is used by an image processor (25) to determine a calibration image. This allows the image processor to determine height of the object (2). A single image capture provides an image of the full object, such as a ball grid array (BGA).

Abstract: A device and a method for processing valuable documents, such as securities, involves the separating of sheets of such documents into strips of documents. These strips are inspected and are subsequently cut into individual valuable documents, such as banknotes.

Abstract: A paper sensor uses two sample and hold circuits which are fired by the phase and antiphase of an oscillator that also drives an infrared light emitting diode (LED). These circuits sample the output from a phototransistor. If the outputs from the phototransistor are different when the LED is lit and unlit, then a comparator will give an output, thus synchronously filtering out unwanted infrared light that may cause a false paper reading.

Abstract: Apparatus for detecting defects in a substrate comprises a laser for providing a laser beam, and a bi-cell photodiode comprising two cells. Circuitry coupled to the bi-cell photodiode provides a signal equal to (L−R)/(L+R), where L and R equal the signal strengths of the signals provided by the left and right photodiode cells, respectively. The photodiode is biased so that it exhibits reduced capacitance, and can provide increased output signal bandwidth.

Abstract: Substrate inspection apparatus in accordance with the invention comprises optics for reflecting a laser beam off of a substrate and a detector for detecting the reflected laser beam. If a defect is present at the point where the laser reflects off the substrate, the laser will be deflected at an angle. Circuitry coupled to the detector generates a first signal that provides a measure of the extent to which the laser beam is deflected. (This signal is a measure of the slope of the defect walls.) An integrator receives that signal, and generates a second signal that is the integral of the first signal. The second signal is a measure of the height of the defect. The first and second signals provide a measure of the types of defects present on the substrate, and are used to determine whether the substrate is acceptable or should be rejected. In accordance with a second embodiment of the invention, laser beams are reflected off both the top and bottom surfaces of the substrate and detected by detectors.

Abstract: A method for automatically setting illumination intensity of light sources used within either positional recognition devices or quality control devices that, in turn, are used in devices that automatically equip components on a printed circuit board or ceramic substrates. The individual light sources are successively varied and an image of a component to be placed on a printed circuit board or substrate is registered by a camera. The resulting picture elements are registered as grayscale values and stored in an image evaluation unit. The grayscale values are either represented as useful structures of the component or unwanted structures of the component dependent on the illumination intensity of the individual light sources. The stored grayscale values for all of the light sources are summed according to respective useful and unwanted structures of the component and then compared to one another.

Abstract: A machine vision method and system for inspecting a material. The system comprises a light source arranged to illuminate the material and an imaging device configured to acquire image data corresponding to at least one characteristic of the material while the material is being illuminated by the light source. An image processor is configured to normalize the image data and to control adjustment of an exposure control level for the imaging device based upon the normalized image data. An exemplary method of implementing the machine vision system may include illuminating a material using a light source and obtaining image data corresponding to the material using an imaging device. The image data may be normalized and the adjustment of an exposure control level of the imaging device may be controlled based on the normalized image data.

Abstract: A method and apparatus is disclosed for non-contact, on-line inspection of objects including a ball grid array package by means of a shadow moiré technique combined with a novel flash phase-shifting method. The grid pitch size, ball height, ball diameter, missing ball, coplananity can be determined or measured within several seconds. The apparatus includes a camera for viewing the object, a plurality of light sources arranged in a line for illuminating the object to be inspected, a frame grabber for capturing images of the object, an I/O adapter card for controlling the light sources and a personal computer for data processing. The individual components are integrated into system which provides a three dimensional map which is obtained quantitatively using a novel algorithm. The system can provide coplananity data, as well as data relating to grid pitch, ball height, ball diameter, and missing ball information.

Abstract: A system and method of the present invention allows the inspection of an object having an annular opening, such as a container or can, and uses a plurality of cameras that acquire grayscale images of arcuate sectors that together comprise a circumferential area within the opening. A processor is connected to the plurality of cameras for receiving the grayscale images and determining defects within the container based on contrast differences and grayscale intensity. The invention allows smart analysis of defects using qualitative inspections and quantitative measurements at higher speeds.

Abstract: Method of measuring a distortion angle between the longitudinal extent of the weft threads or rows of stitches in a textile strip (T) that is being continuously transported in a transporting apparatus (M) and the perpendicular to the transport direction, by means of a lighting arrangement (100A), a photoelectric sensor arrangement (107) with a plurality of sensor elements and an evaluation device (115) connected to the sensor arrangement for processing the values sampled from the sensor fields in order to obtain the distortion angle, wherein an arrangement of sensor elements with a plurality of rows and columns is used in which individual elements can be accessed as desired, and in a sequence of scanning steps different predetermined groups of sensor elements are interrogated, each of which is situated substantially on a sensor-field line, the groups involved in each scanning step being determined such that the scanned sensor-field lines are positioned at progressively altered angles with respect to the trans

Abstract: A method for checking products with labels, wherein:

Abstract: The invention relates to a method and arrangement for measuring the quality of wood. The wood comprises not only a pure body but also components of bark and knots, having optical properties different from those of the pure body. Barked trees (308) are turned into wood powder (322). The wood powder (322) is illuminated with optical radiation and the radiation is received by means of a camera (330). The camera (330) transmits a signal consistent with the radiation reflected from or passed through the wood powder (322) to a computer (332) which, by means of the optical properties of the wood powder (322), determines the amount of bark, knots, and/or defective wood present in the wood.

Abstract: P-polarized light or having a strong P-polarized component is directed onto a filmed substrate at two (or more) different incidence angles, one angle being relatively large and the other angle being relatively small as measured from a surface normal. Light that is scattered into a back region of the hemispherical space above the substrate surface is collected and the intensity of the collected light is measured for each of the two incident angles. A defect can be classified as either a hole in the film or a particle on the film based on the relative intensities of the collected light.

Abstract: An inspection system for a sheet of glass. The system comprises a first laser and a second laser, each of which provide a sheet of light, a cylindrical lens system, and a first light detection system and a second light detection system. The first laser is located at the focal point of the lens system. The second laser is located at a distance from the lens system that is greater than that of the first laser, and off of the axis of the lens system. The first light detection system receives light from the first laser and the second light detection system receives light from the second laser. The inspection system is adapted to position a sheet of glass between the lens system and the detection systems. A method is also described.

Abstract: A web inspection system provides detection of web flaws along the machine direction and cross direction of a web. The detectable percent contrast between good web material and bad web material in one embodiment approaches noise level. The web inspection system utilizes a multiple of smart cameras connected to a host computer via an ethernet hub. Each smart camera includes a line scan camera for producing digital pixels, a means for lighting and pixel correction on a pixel by pixel basis, a web edge detector for monitoring the edges of a web, a multi-pipeline flaw detection pre-processor for detecting very small changes in the web material, a run length encoder for generating data regarding the location of each group of potential flaws in a cross direction, a 2D blob detector and analyzer for generating data regarding the location of block flaws along a machine direction, and an inspect/reject analysis for determining the actual flaw data from the potential flaw data.

Abstract: A beam of light from a light source is irradiated toward a surface of a transparent plate at an angle of incidence ranging from 86 to 89 degrees or at an angle of incidence ranging from 60 to 89 degrees after being polarized as a P-polarized light beam or S-polarized light beam by a polarizing element disposed between the light source and the transparent plate. This enables a reflected image from a front surface of the transparent plate to be projected on a screen without being influenced by reflection from a rear surface of the transparent plate. By visually inspecting the reflected image on the screen, or by picking up the reflected image by a camera and visually inspecting a picture on a monitor display, or by picking up the reflected image by a camera to obtain density signals representative of the reflected image and calculating the irregularities of the surface of the transparent plate on the basis of the density signals by an image processor.

Abstract: An apparatus inputs an image of a regularly latticed-patterns. The inputted image data is transformed into frequency data by the Fourier transformation. The frequency data is restored into image data after it is processed. The processing of the frequency data includes a process for removing a frequency component corresponding to the latticed patterns. The processing of the frequency data further includes a process for removing a frequency component corresponding to a shape of an area of the latticed patterns. The processed data is used for detecting and examining a defect. It is possible to examine a defect accurately.

Abstract: A machine vision inspection system for industrial parts such as plastic molded caps or the like can reliably detect defects at very high inspection rates on the order of 1600 per minute of a variety of cap colors and liners including previously difficult to inspect combinations. Advantageously, the system includes an inclined inspection ramp which provides separation between the caps which are processed through an inspection station to provide accurate imaging of each individual cap without interference from adjacent caps. Further, the inspection station includes a light source which is provided on the back side of the cap in the form of an infrared LED strobe light which provides accurate and reliable lighting for appropriate imaging of caps of any color to detect and identify defects therein.

Abstract: A method to monitor a dimension of a pellicle includes projecting a first light signal against a surface of the pellicle. A second light signal reflected from the surface of the pellicle is detected, with the second light signal being a representation of the first light signal. The method determines if the dimension of the pellicle is within an allowable value based on a characteristic of the detected second light signal. The characteristic of the detected second light signal can include time periods between pulses of the detected second light signal, an intensity of the detected second light signal, or a positional displacement of the detected second light signal.

Abstract: Residue such as nitride remaining on the surface of a semiconductor wafer following plasma etching using nitride is detected after the wafer is transferred from the etching chamber to an exit load lock station. A pair of color sensors are coupled with a color analyzer to operate in a differential manner to analyze the color of the surface of the wafer. The presence of nitride residue is sensed as the color purple.

Abstract: An apparatus for evaluating a fiber web running in a card includes a camera for scanning the fiber web along a length and width portion thereof to detect useful fibers and empty locations in the fiber web and to generate signals representing the useful fibers and empty locations; and an evaluating device connected to the camera for determining a distribution of useful fibers per area unit in the fiber web from the signals.

Abstract: The method which is applicable to the inspection of bobbins of yarn of any size, color and material, is based on the acquisition of images of the surface of the bobbin and on their processing by a computer program in order to evaluate defects, and comprises various steps of exploring the bobbin (1) taking a plurality of images of various areas of said bobbin, each step occurring under specific conditions of lighting and relative position of particular image sensors (3, 4) in order to identify specific defects, displacing either the bobbin (1) or the image acquisition device (3, 4), or bot to explore, sector by sector, the whole surface of interest, each of the focused images, related to a particular defect being processed individually by the evaluation program.

Abstract: A variable intensity lighting system for use with a machine vision apparatus for capturing high contrast images of articles to be inspected, such as semiconductor packages, includes an LED or optical fiber element and flash lamp array configured in multiple segments which are operable to be controlled as to light output intensity by a programmable intensity control circuit operably connected to a microprocessor. The intensity control circuit includes multiple digital potentiometers operable to control selected segments of the lighting array. The control circuit is adapted to control up to 64 segments of the lighting array individually at 64 incremental intensity levels, respectively. The control circuit may include a light failure module to detect a segment failure or a reversed connection.