Laterally Symmetric Regions Patents (Class 257/165)
  • Patent number: 8741773
    Abstract: Embodiments of the invention provide a method of forming nickel-silicide. The method may include depositing first and second metal layers over at least one of a gate, a source, and a drain region of a field-effect-transistor (FET) through a physical vapor deposition (PVD) process, wherein the first metal layer is deposited using a first nickel target material containing platinum (Pt), and the second metal layer is deposited on top of the first metal layer using a second nickel target material containing no or less platinum than that in the first nickel target material; and annealing the first and second metal layers covering the FET to form a platinum-containing nickel-silicide layer at a top surface of the gate, source, and drain regions.
    Type: Grant
    Filed: January 8, 2010
    Date of Patent: June 3, 2014
    Assignee: International Business Machines Corporation
    Inventors: Asa Frye, Andrew Simon
  • Patent number: 8421124
    Abstract: An NPN bipolar junction transistor is disclosed that exhibits a collector-to-emitter breakdown voltage greater than 10 volts and a beta greater than 300. The large value of beta is obtained by fabricating the transistor with an extra N-type layer that reduces recombination of electrons and holes.
    Type: Grant
    Filed: March 15, 2010
    Date of Patent: April 16, 2013
    Assignee: Macronix International Co., Ltd.
    Inventors: Cheng-Chi Lin, Shuo-Lun Tu, Shih-Chin Lien
  • Patent number: 7943501
    Abstract: A method of forming (and apparatus for forming) tantalum silicide layers (including tantalum silicon nitride layers), which are typically useful as diffusion barrier layers, on a substrate by using a vapor deposition process with a tantalum halide precursor compound, a silicon precursor compound, and an optional nitrogen precursor compound.
    Type: Grant
    Filed: January 3, 2008
    Date of Patent: May 17, 2011
    Assignee: Micron Technology, Inc.
    Inventor: Brian A. Vaartstra
  • Patent number: 7807498
    Abstract: A substrate for fixing an integrated circuit (IC) element comprises: a substrate for fixing an integrated circuit element includes: a plurality of metal posts that are aligned in a longitudinal direction and a lateral direction in plan view, each of the plurality of metal posts having a first surface and a second surface facing an opposite direction to the first surface, the plurality of metal posts being configured identically; and a joining section that joins each of the plurality of metal posts together at a portion of each of the plurality of metal posts between the first surface and the second surface.
    Type: Grant
    Filed: July 10, 2008
    Date of Patent: October 5, 2010
    Assignee: Seiko Epson Corporation
    Inventors: Masanobu Shoji, Toru Fujita
  • Patent number: 7488993
    Abstract: A semiconductor device, includes: a semiconductor substrate of 100 micrometers or less in thickness; an electrode pattern formed above the semiconductor substrate; and an insulation film of 50 micrometers or greater in thickness residing on parts of the upper surface side of the semiconductor substrate other than at least on the electrode pattern.
    Type: Grant
    Filed: February 28, 2005
    Date of Patent: February 10, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kenichi Tokano, Motoshige Kobayashi, Kazuyuki Saito
  • Patent number: 7420228
    Abstract: A bipolar transistor comprising a collector region of a first conduction type, and a subcollector region of the first conduction type at a first side of the collector region. The transistor further includes a base region of the second conduction type provided at a second side of the collector region, and an emitter region of the first conduction type which is provided above the base region on the side remote from the collection region. A carbon-doped semiconductor region is provided on the first side alongside the collector region. The bipolar transistor is characterized in that the carbon-doped semiconductor region has a carbon concentration of 1019-1021 cm?3 and the base region has a smaller cross section than the collector region and the collector region has, in the overlap region with the base region, a region having an increased doping compared with the remaining region.
    Type: Grant
    Filed: October 7, 2005
    Date of Patent: September 2, 2008
    Assignee: Infineon Technologies AG
    Inventors: Josef Bock, Thomas Meister, Reinhard Stengl, Herbert Schafer
  • Patent number: 7414273
    Abstract: A two-dimensional silicon controlled rectifier (2DSCR) having the anode and cathode forming a checkerboard pattern. Such a pattern maximizes the anode to cathode contact length (the active area) within a given SCR area, i.e., effectively increasing the SCR width. Increasing the physical SCR area, increases the current handling capabilities of the SCR.
    Type: Grant
    Filed: July 7, 2005
    Date of Patent: August 19, 2008
    Assignees: Sarnoff Corporation, Sarnoff Europe
    Inventors: Russell Mohn, Cong-Son Trinh, Phillip Czeslaw Jozwiak, John Armer, Markus Paul Josef Mergens
  • Patent number: 7378328
    Abstract: A fast, reliable, highly integrated memory device formed of a carbon nanotube memory device and a method for forming the same, in which the carbon nanotube memory device includes a substrate, a source electrode, a drain electrode, a carbon nanotube having high electrical and thermal conductivity, a memory cell having excellent charge storage capability, and a gate electrode. The source electrode and drain electrode are arranged with a predetermined interval between them on the substrate and are subjected to a voltage. The carbon nanotube connects the source electrode to the drain electrode and serves as a channel for charge movement. The memory cell is located over the carbon nanotube and stores charges from the carbon nanotube. The gate electrode is formed in contact with the upper surface of the memory cell and controls the amount of charge flowing from the carbon nanotube into the memory cell.
    Type: Grant
    Filed: February 13, 2006
    Date of Patent: May 27, 2008
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Won-bong Choi, In-kyeong Yoo, Jae-uk Chu
  • Patent number: 7196351
    Abstract: Phase change memories may exhibit improved properties and lower cost in some cases by forming the phase change material layers in a planar configuration. A heater may be provided below the phase change material layers to appropriately heat the material to induce the phase changes. The heater may be coupled to an appropriate conductor.
    Type: Grant
    Filed: December 15, 2004
    Date of Patent: March 27, 2007
    Assignee: Ovonyx, Inc.
    Inventors: Chien Chiang, Charles Dennison, Tyler Lowrey
  • Patent number: 7170106
    Abstract: A power semiconductor device includes trenches disposed in a first base layer of a first conductivity type at intervals to partition main and dummy cells, at a position remote from a collector layer of a second conductivity type. In the main cell, a second base layer of the second conductivity type, and an emitter layer of the first conductivity type are disposed. In the dummy cell, a buffer layer of the second conductivity type is disposed. A gate electrode is disposed, through a gate insulating film, in a trench adjacent to the main cell. A buffer resistor having an infinitely large resistance value is inserted between the buffer layer and emitter electrode. The dummy cell is provided with an inhibiting structure to reduce carriers of the second conductivity type to flow to and accumulate in the buffer layer from the collector layer.
    Type: Grant
    Filed: September 9, 2005
    Date of Patent: January 30, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masakazu Yamaguchi, Hideaki Ninomiya, Ichiro Omura, Tomoki Inoue
  • Patent number: 7078740
    Abstract: A power semiconductor device includes trenches disposed in a first base layer of a first conductivity type at intervals to partition main and dummy cells, at a position remote from a collector layer of a second conductivity type. In the main cell, a second base layer of the second conductivity type, and an emitter layer of the first conductivity type are disposed. In the dummy cell, a buffer layer of the second conductivity type is disposed. A gate electrode is disposed, through a gate insulating film, in a trench adjacent to the main cell. A buffer resistor having an infinitely large resistance value is inserted between the buffer layer and emitter electrode. The dummy cell is provided with an inhibiting structure to reduce carriers of the second conductivity type to flow to and accumulate in the buffer layer from the collector layer.
    Type: Grant
    Filed: May 12, 2004
    Date of Patent: July 18, 2006
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masakazu Yamaguchi, Hideaki Ninomiya, Ichiro Omura, Tomoki Inoue
  • Patent number: 6809349
    Abstract: A power semiconductor device includes trenches disposed in a first base layer of a first conductivity type at intervals to partition main and dummy cells, at a position remote from a collector layer of a second conductivity type. In the main cell, a second base layer of the second conductivity type, and an emitter layer of the first conductivity type are disposed. In the dummy cell, a buffer layer of the second conductivity type is disposed. A gate electrode is disposed, through a gate insulating film, in a trench adjacent to the main cell. A buffer resistor having an infinitely large resistance value is inserted between the buffer layer and emitter electrode. The dummy cell is provided with an inhibiting structure to reduce carriers of the second conductivity type to flow to and accumulate in the buffer layer from the collector layer.
    Type: Grant
    Filed: January 30, 2003
    Date of Patent: October 26, 2004
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Masakazu Yamaguchi, Hideaki Ninomiya, Ichiro Omura, Tomoki Inoue
  • Patent number: 6483188
    Abstract: A radio-frequency (RF) integrated circuit is described. In one embodiment, the IC comprises multiple metal layers forming multiple transistors on a non-epitaxial substrate. The transistors are step and mirror symmetric. Also, the RF signal lines are on a top metal layer above all other metal layers and the power and ground planes are on a bottom metal layer below all other metal layers. The top and bottom metal layers are separated by a shield that extends beyond the RF signal lines by a distance that is at least the same distance that the shield is away from the RF lines. Low frequency signals are on signal lines below the top metal layer.
    Type: Grant
    Filed: May 15, 2000
    Date of Patent: November 19, 2002
    Assignee: Atheros Communications, Inc.
    Inventors: Chik Patrick Yue, Masoud Zargari, David Su
  • Patent number: 6033924
    Abstract: A method for fabricating a field emission device (200) includes the steps of forming on the surface of a substrate (110) a cathode (112), forming on the cathode (112) a dielectric layer (114), forming an emitter well (115) in the dielectric layer (114), forming within the emitter well (115) an electron emitter structure (118) having a surface (123), forming on a portion of the dielectric layer (114) a gate electrode (116), depositing on the dielectric layer (114) a sacrificial layer (210), thereafter depositing on the surface (123) of the electron emitter structure (118) a coating material (220, 320, 420) that has an emission-enhancing material, and then removing the sacrificial layer (210).
    Type: Grant
    Filed: July 25, 1997
    Date of Patent: March 7, 2000
    Assignee: Motorola, Inc.
    Inventors: Sung P. Pack, Babu R. Chalamala
  • Patent number: 5793066
    Abstract: An insulated gate base resistance controlled thyristor with a high controllable current capability is described. The device has a high density of MOS-channels modulating the resistance of the base region of the NPN transistor of the thyristor structure. The higher MOS channel density is achieved by contacting directly only the N.sup.++ emitter and the P.sup.+ cells (and not the P base region of the NPN transistor) to the cathode electrode. The N.sup.++ cells (i.e. the P base regions each containing an N.sup.++ emitter) and the P.sup.+ cells are connected in certain regions under the MOS gate by a P.sup.- region to provide a higher base resistance when a positive bias is applied to the MOS gate, thereby facilitating latching of the thyristor. The added MOS gate controlled base resistance between cells allows the P base cells to be designed with smaller dimensions for high maximum controllable current without affecting latch-up capability.
    Type: Grant
    Filed: September 26, 1995
    Date of Patent: August 11, 1998
    Assignee: International Rectifier Corporation
    Inventor: Janardhanan S. Ajit
  • Patent number: 5731605
    Abstract: A power semiconductor component which can be turned off by gate control and whose semiconductor body has a plurality of unit cells arranged side by side which are comprised of a p-emitter region (1) adjacent to the anode, an adjoining lightly doped n-base region (2), followed by a p-base region (3) and an n-emitter region (4) embedded therein and which unit cells form a thyristor structure. At least one p-region (5) is embedded in the n-emitter region (4) of the unit cells, with the p-region forming a ballast resistor and being provided with two ohmic contacts, one of which forms the outer cathode metallization (K), which has no contact with the n-emitter region (4), and the other of which is a floating contact (K') which simultaneously contacts the n-emitter region (4) ohmically.
    Type: Grant
    Filed: July 26, 1996
    Date of Patent: March 24, 1998
    Assignee: Daimler-Benz Aktiengesellschaft
    Inventors: Heinrich Schlangenotto, Josef Serafin
  • Patent number: 5710442
    Abstract: A semiconductor device sets an impurity density of a p base layer in a bevel end-face region to a density lower than that in an operating region and has a parasitic channel preventive region provided between the bevel end-face region and the operating region. Since the blocking-voltage and the current-carrying capacity can be adjusted independently from each other, the blocking voltage and the current-carrying capacity can be both improved.
    Type: Grant
    Filed: January 22, 1996
    Date of Patent: January 20, 1998
    Assignee: Hitachi, Ltd.
    Inventors: Atsuo Watanabe, Katsuaki Saito
  • Patent number: 5654562
    Abstract: An insulated gate semiconductor device (10) is fabricated by providing at least one ballast resistor (40) having a sheet resistance of at least one square. The ballast resistor (40) is formed in the emitter region (17) between two adjacent portions of the base region (26) at the top surface of the semiconductor body in which the device (10) is fabricated. The ballast resistor (40) improves the latch resistance of the device (10) in overload conditions.
    Type: Grant
    Filed: March 3, 1995
    Date of Patent: August 5, 1997
    Assignee: Motorola, Inc.
    Inventors: William L. Fragale, Paul J. Groenig, Vasudev Venkatesan
  • Patent number: 5525816
    Abstract: There is disclosed an insulated gate bipolar transistor which includes a p type semiconductor region (11) formed in a surface of an n.sup.- semiconductor layer (3) by double diffusion in corresponding relation to a p type base region (4) of an IGBT cell adjacent thereto, and an emitter electrode (9) formed on and connected to the p type semiconductor region (11) through a contact hole (CH.sub.P) having a width (W.sub.ch2) which is greater than a width (W.sub.ch1) of a contact hole (CH.sub.1), thereby preventing device breakdown due to latch-up by the operation of a parasitic thyristor during an ON state and during an ON-state to OFF-state transition even if main and control electrodes in an active region are reduced in size.
    Type: Grant
    Filed: October 21, 1994
    Date of Patent: June 11, 1996
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Hideki Takahashi
  • Patent number: 5485024
    Abstract: An ESD protection circuit which provides protection for CMOS devices against ESD potentials of up to about 10 kV is provided. The ESD protection circuit is able to provide protection against both positive-going and negative-going high energy electrical transients, and is able to maintain a high impedance state when driven to a voltage beyond the supply rails of CMOS integrated circuit, but less than tile breakdown voltage of the ESD protection circuit. The ESD protection circuit routes currents associated with ESD potentials to a predetermined arbitrary point which may be selected during the fabrication process to meet the needs of a particular application. The structure of the ESD protection circuit permits the holding current to be adjusted to accommodate the current capacity of various external circuits.
    Type: Grant
    Filed: December 30, 1993
    Date of Patent: January 16, 1996
    Assignee: Linear Technology Corporation
    Inventor: Robert L. Reay
  • Patent number: 5323044
    Abstract: A bi-directional switch includes a well region of a first conductivity type placed within a substrate. A first region of second conductivity type is placed within the well. A second contact region of second conductivity type is placed within the well. A drift region of second conductivity is placed between the first contact and the second contact. The drift region is separated from the first contact by a first channel region and is separated from the second contact by a second channel region. A first gate region is placed over the first channel region and a second gate region over the second channel region.
    Type: Grant
    Filed: October 2, 1992
    Date of Patent: June 21, 1994
    Assignee: Power Integrations, Inc.
    Inventors: Vladimir Rumennik, Wayne B. Grabowski
  • Patent number: 5306952
    Abstract: In a multi-layer aluminum interconnection structure, improved reliability as well as a stable via-hole resistance are achieved by promoting mixing at an interface between aluminum-containing interconnection layers and improving coverage of an upper aluminum interconnection layer at a connection hole. A first interconnection layer is electrically connected to a second interconnection layer through a connection hole. The second interconnection layer is provided with a titanium film, a titanium nitride film and aluminum alloy film. A connection hole is filled with a tungsten film. A tungsten film is formed on a surface of the first interconnection layer. The titanium film is in contact with the tungsten film through the connection hole.
    Type: Grant
    Filed: October 13, 1992
    Date of Patent: April 26, 1994
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Megumi Matsuura, Tomohiro Ishida
  • Patent number: RE36818
    Abstract: There is disclosed an insulated gate bipolar transistor which includes a p type semiconductor region (11) formed in a surface of an n.sup.- semiconductor layer (3) by double diffusion in corresponding relation to a p type base region (4) of an IGBT cell adjacent thereto, and an emitter electrode (9) formed on and connected to the p type semiconductor region (11) through a contact hole (CH.sub.P) having a width (W.sub.ch2) which is greater than a width (W.sub.ch1) of a contact hole (CH.sub.1), thereby preventing device breakdown due to latch-up by the operation of a parasitic thyristor during an ON state and during an ON-state to OFF-state transition even if main and control electrodes in an active region are reduced in size.
    Type: Grant
    Filed: October 10, 1997
    Date of Patent: August 15, 2000
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Hideki Takahashi