Having Structure To Improve Output Signal (e.g., Exposure Control Structure) Patents (Class 257/229)
  • Patent number: 11923387
    Abstract: An imaging device that makes it possible to smoothly transfer electric charges from a photoelectric converter to a transfer destination is provided. This imaging device includes: a semiconductor layer having a front surface and a back surface, the back surface being on an opposite side of the front surface; photoelectric converter that is embedded in the semiconductor layer and generates electric charges corresponding to a received light amount; and a transfer section that includes a first trench gate and a second trench gate and transfers the electric charges from the photoelectric converter to a single transfer destination via the first trench gate and the second trench gate, the first trench gate and the second trench gate each extending from the front surface to the back surface of the semiconductor layer into the photoelectric converter.
    Type: Grant
    Filed: August 5, 2022
    Date of Patent: March 5, 2024
    Assignee: Sony Semiconductor Solutions Corporation
    Inventor: Takashi Machida
  • Patent number: 11888008
    Abstract: There is provided a imaging device including: an N-type region formed for each pixel and configured to perform photoelectric conversion; an inter-pixel light-shielding wall penetrating a semiconductor substrate in a depth direction and formed between N-type regions configured to perform the photoelectric conversion, the N-type regions each being formed for each of pixels adjacent to each other; a P-type layer formed between the N-type region configured to perform the photoelectric conversion and the inter-pixel light-shielding wall; and a P-type region adjacent to the P-type layer and formed between the N-type region and an interface on a side of a light incident surface of the semiconductor substrate.
    Type: Grant
    Filed: September 29, 2021
    Date of Patent: January 30, 2024
    Assignee: Sony Semiconductor Solutions Corporation
    Inventors: Tetsuya Uchida, Ryoji Suzuki, Hisahiro Ansai, Yoichi Ueda, Shinichi Yoshida, Yukari Takeya, Tomoyuki Hirano, Hiroyuki Mori, Hirotoshi Nomura, Yoshiharu Kudoh, Masashi Ohura, Shin Iwabuchi
  • Patent number: 11509886
    Abstract: A photoelectric conversion device includes a first pixel including a photoelectric converter, a first node to which charge is transferred from the photoelectric converter, and a first transistor that resets a voltage of the first node, and configured to output a first signal in accordance with a voltage of the first node, a second pixel including a second node to which a predetermined voltage is supplied and a second transistor that resets a voltage of the second node, and configured to output a second signal in accordance with a voltage of the second node; and a control line connected to the first transistor and the second transistor. The first transistor resets the first node to a first voltage, and the second transistor resets the second node to a second voltage having a smaller amplitude than the first voltage.
    Type: Grant
    Filed: December 26, 2019
    Date of Patent: November 22, 2022
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Yoichiro Handa, Yoichi Wada
  • Patent number: 11417692
    Abstract: An image sensing device includes a plurality of image sensor pixels including a first image sensor pixel and a second image sensor pixel and a transmission driver. The transmission driver is coupled to first and second transfer gates to apply a first transmission signal to the first transfer gate to control the first transfer gate and a second transmission signal to the second transfer gate to control the second transfer gate. A first distance between the first image sensor pixel and the transmission driver is shorter than a second distance between the second image sensor pixel and the transmission driver, and the first and second transfer gates of the first image sensor pixel are different in structure from the first and second transfer gates of the second image sensor pixel, respectively.
    Type: Grant
    Filed: April 19, 2021
    Date of Patent: August 16, 2022
    Assignee: SK hynix Inc.
    Inventor: Jae Hyung Jang
  • Patent number: 11404459
    Abstract: A pixel unit and a manufacturing method thereof, a sensor, and a sensor array are provided. The pixel unit comprises: a photosensitive unit, configured to generate a photo-generated carrier according to received radiation; at least two transmission units, connected between the photosensitive unit and at least two floating diffusion nodes, and configured to transfer the photo-generated carrier from the photosensitive unit to the at least two floating diffusion nodes; and the at least two floating diffusion nodes, configured to store and output the photo-generated carrier generated by the photosensitive unit. Among the at least two floating diffusion nodes, the floating diffusion node spaced by more transmission units from the photosensitive unit has a lower electric potential.
    Type: Grant
    Filed: September 28, 2020
    Date of Patent: August 2, 2022
    Assignee: Ningbo ABAX Sensing Electronic Technology Co., Ltd.
    Inventor: Shuyu Lei
  • Patent number: 11329085
    Abstract: A pixel array includes a semiconductor substrate, a plurality of isolation layer segments, and a plurality of photodiodes. Each of the plurality of isolation layer segments extends through the semiconductor substrate in a first direction. Each of the plurality of isolation layer segments encloses a portion of the semiconductor substrate in a plane perpendicular to the first direction. The plurality of isolation layer segments form a grid that defines a plurality of isolated sections of the semiconductor substrate. The plurality of isolated sections of the semiconductor substrate include the portions of the semiconductor substrate. Each of the photodiodes is formed in a respective one of the plurality of isolated sections of the semiconductor substrate.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: May 10, 2022
    Assignee: OMIVISION TECHNOLOGIES, INC.
    Inventors: Qin Wang, Gang Chen
  • Patent number: 11139330
    Abstract: A photoelectric conversion apparatus that includes a pixel region having photoelectric conversion elements includes a semiconductor layer having first and second surfaces, and the photoelectric conversion elements are disposed between the first and second surfaces. With a virtual plane extending along the second surface between the first and second surfaces being a third plane, the pixel region includes an element isolating portion constituted by an insulator disposed closer to the first surface than the third plane, and first and second isolating portions constituted by grooves provided in the semiconductor layer to pass through the third plane. The first isolating portion overlaps the element isolating portion in a normal direction to the third plane. An end of the second isolating portion on a side on the first surface is closer to the second surface than an end of the first isolating portion on a side on the first surface is.
    Type: Grant
    Filed: March 26, 2020
    Date of Patent: October 5, 2021
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Nobutaka Ukigaya, Hideshi Kuwabara
  • Patent number: 11075238
    Abstract: A method of manufacturing an image sensor includes at least the following steps. A storage node is formed in a substrate. A gate dielectric layer, a storage gate electrode, and a first dielectric layer are sequentially formed over the substrate. A portion of the first dielectric layer is removed to form an opening. A protection layer and a shielding layer are sequentially filled into the opening. The protection layer laterally surrounds the shielding layer and at least a portion of the protection layer is located between the storage gate electrode and the shielding layer. A second dielectric layer is formed over the shielding layer.
    Type: Grant
    Filed: July 28, 2019
    Date of Patent: July 27, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Ching-Hung Cheng, Kai-Fung Chang
  • Patent number: 11069727
    Abstract: The imaging element includes, within a pixel, a semiconductor substrate, a photoelectric conversion unit formed in the semiconductor substrate, a first charge storage unit that stores a charge generated by the photoelectric conversion unit, and a first transfer gate unit formed on an opposite surface of the semiconductor substrate on an opposite side of a light incident surface and used for transfer of a charge from the photoelectric conversion unit to the first charge storage unit. The first transfer gate unit includes a first electrode embedded in a first trench formed in the semiconductor substrate from the opposite surface of the semiconductor substrate. The photoelectric conversion unit includes the first electrode, and a second electrode surrounding at least a portion of a periphery of the first electrode.
    Type: Grant
    Filed: February 19, 2018
    Date of Patent: July 20, 2021
    Assignee: SONY CORPORATION
    Inventors: Takashi Machida, Ryoto Yoshita
  • Patent number: 11032500
    Abstract: Disclosed herein is a radiation detector, comprising: pixels arranged in an array, the pixels comprising peripheral pixels at a periphery of the array and interior pixels at an interior of the array, each of the pixels configured to generate an electrical signal on an electrode thereof, upon exposure to a radiation; an electronic system configured to provide first compensation to the peripheral pixels for a dark noise of the peripheral pixels and to provide second compensation to the interior pixels for a dark noise of the interior pixels, the first compensation and the second compensation being different.
    Type: Grant
    Filed: April 21, 2020
    Date of Patent: June 8, 2021
    Assignee: SHENZHEN XPECTVISION TECHNOLOGY CO., LTD.
    Inventor: Peiyan Cao
  • Patent number: 10840289
    Abstract: To solve at least one of various problems in an image sensor in a 2PD scheme. A solid-state image pickup element includes a plurality of pixels each including a photoelectric conversion element formed on a silicon substrate, in which some pixels in the plurality of pixels each have the photoelectric conversion element partitioned by a first-type separating region extending in a plate shape in a direction along a thickness direction of the silicon substrate, and other pixels in the plurality of pixels each have the photoelectric conversion element partitioned by a second-type separating region formed with a material different from a material of the first-type separating region, the second-type separating region extending in a plate shape in the direction along the thickness direction of the silicon substrate.
    Type: Grant
    Filed: July 24, 2017
    Date of Patent: November 17, 2020
    Assignee: Sony Corporation
    Inventor: Shinichiro Noudo
  • Patent number: 10741593
    Abstract: A pixel cell includes a photodiode disposed in a semiconductor material layer to accumulate image charge photogenerated in the photodiode in response to incident light. A storage transistor is coupled to the photodiode to store the image charge photogenerated in the photodiode. The storage transistor includes a storage gate disposed proximate a first surface of the semiconductor material layer. The storage gate includes a pair of vertical transfer gate (VTG) portions. Each one of the pair of VTG portions extends a first distance into the semiconductor material layer through the first surface of the semiconductor material layer. A storage node is disposed below the first surface of the semiconductor material layer and between the pair of VTG portions of the storage gate to store the image charge transferred from the photodiode in response to a storage signal.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: August 11, 2020
    Assignee: OmniVision Technologies, Inc.
    Inventors: Keiji Mabuchi, Sohei Manabe
  • Patent number: 10418400
    Abstract: An imaging device which does not include a color filter and does not need arithmetic processing using an external processing circuit is provided. A first circuit includes a first photoelectric conversion element, a first transistor, and a second transistor; a second circuit includes a second photoelectric conversion element, a third transistor, and a fourth transistor; a third circuit includes a fifth transistor, a sixth transistor, a seventh transistor, and a second capacitor; the spectroscopic element is provided over the first photoelectric conversion element or the second photoelectric conversion element; and the first circuit and the second circuit is connected to the third circuit through a first capacitor.
    Type: Grant
    Filed: December 1, 2017
    Date of Patent: September 17, 2019
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Yoshiyuki Kurokawa
  • Patent number: 10367018
    Abstract: An image sensor includes a photosensitive device, a storage device, and a driving circuit. The storage device is adjacent to the photosensitive device and includes a storage node, a gate dielectric layer, a storage gate electrode, and etch stop layer, a shielding layer, and a protection layer. The gate dielectric layer is over the storage node. The storage gate electrode is over the gate dielectric layer. The etch stop layer covers the gate dielectric layer and the storage gate electrode. The shielding layer is over the storage gate electrode. The protection layer is sandwiched between the etch stop layer and the shielding layer. The driving circuit is adjacent to the storage device.
    Type: Grant
    Filed: January 30, 2018
    Date of Patent: July 30, 2019
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ching-Hung Cheng, Kai-Fung Chang
  • Patent number: 10361238
    Abstract: A pixel includes a semiconductor layer with a charge accumulation layer extending in the semiconductor layer. A transistor has a read region penetrating into said semiconductor layer down to a first depth. An insulating wall penetrates into the semiconductor layer from an upper surface and containing an insulated conductor connected to a node of application of a potential. The insulating wall includes at least a portion provided with a deep insulating plug penetrating into the insulated conductor down to a second depth greater than the first depth. A continuous portion of the insulating wall laterally delimits, at least partially, a charge accumulation area and includes a wall portion with the deep insulating plug at least partially laterally delimiting the read region of the transistor.
    Type: Grant
    Filed: September 13, 2017
    Date of Patent: July 23, 2019
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventor: Francois Roy
  • Patent number: 10355041
    Abstract: A pixel includes a semiconductor layer with a charge accumulation layer extending in the semiconductor layer. A transistor has a read region penetrating into said semiconductor layer down to a first depth. An insulating wall penetrates into the semiconductor layer from an upper surface and containing an insulated conductor connected to a node of application of a potential. The insulating wall includes at least a portion provided with a deep insulating plug penetrating into the insulated conductor down to a second depth greater than the first depth. A continuous portion of the insulating wall laterally delimits, at least partially, a charge accumulation area and includes a wall portion with the deep insulating plug at least partially laterally delimiting the read region of the transistor.
    Type: Grant
    Filed: September 13, 2017
    Date of Patent: July 16, 2019
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventor: Francois Roy
  • Patent number: 10326969
    Abstract: A vision system of a vehicle includes a camera disposed at a vehicle and having a field of view exterior of the vehicle. The camera includes an imaging array having rows and columns of photosensing elements that may include red light sensing elements, green light sensing elements and blue light sensing elements. An image processor is operable to process image data captured by the camera. A display is disposed in the vehicle and viewable by a driver of the vehicle and is operable to display images derived from captured image data. Responsive to image processing of captured image data by the image processor, temporal noise in images derived from captured image data is reduced by determining a change in luminance of photosensing elements from a first frame of captured image data to a second frame of captured image data.
    Type: Grant
    Filed: August 11, 2014
    Date of Patent: June 18, 2019
    Assignee: MAGNA ELECTRONICS INC.
    Inventor: Thomas Wierich
  • Patent number: 10274654
    Abstract: A pixel arrangement structure, a display panel and a display device are provided. The pixel arrangement structure includes a plurality of repeating units, each repeating unit includes one first sub-pixel, one second sub pixel and two third sub-pixels; the four sub-pixels of each repeating unit constitute two pixels, with the first sub-pixel and the second sub-pixel being shared by the two pixels; in a first direction of the pixel array, the sub-pixel density is equal to 1.5 times of the pixel density, in a second direction of the pixel array, the sub-pixel density is equal to 1.5 times of the pixel density; wherein, the first direction and the second direction are different directions.
    Type: Grant
    Filed: May 5, 2016
    Date of Patent: April 30, 2019
    Assignee: BOE Technology Group Co., Ltd.
    Inventors: Xiaodan Jin, Lujiang Huangfu, Yinan Liang
  • Patent number: 10044992
    Abstract: A solid-state imaging apparatus comprises a pixel unit including G-pixels 110-G, R-pixels 110-R, and B-pixels 110-B, an image signal output interval of the G-pixels 110 made shorter than image signal output intervals of the R-pixels and B-pixels. Regarding lights respectively having wavelength bands near a green color, near a red color, and near a blue color, the G-pixels 110-G have higher sensitivity to the wavelength band near the green color than both to the wavelength band near the red color and wavelength band near the blue color, the R-pixels 110-R have higher sensitivity to the wavelength band near the red color than both to the wavelength band near the green color and wavelength band near the blue color, and the B-pixels 110-B have higher sensitivity to the wavelength band near the blue color than both to the wavelength band near the green color and wavelength band near the red color.
    Type: Grant
    Filed: October 5, 2015
    Date of Patent: August 7, 2018
    Assignee: CANON KABUSHIKI KAISHA
    Inventor: Hisashi Takado
  • Patent number: 10033947
    Abstract: An imaging system may include multi-port pixels. A multi-port pixel may include a photodiode that generates electrical charge in response to received light and a plurality of access ports that couple the electrical charge onto one of a corresponding plurality of pixel output lines. The photodiode may generate electrical charge for one or more different integration times while a frame is being captured. Charge generated during the different integration times may be coupled onto different respective pixel output lines through different respective access ports. Multiple pixels in a given column of the pixel array may simultaneously couple charge generated during different integration times onto different pixel output lines through different access ports.
    Type: Grant
    Filed: May 12, 2016
    Date of Patent: July 24, 2018
    Assignee: SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
    Inventor: Raminda Madurawe
  • Patent number: 10031101
    Abstract: An ion sensor is configured such that part of a P well on which part a sensing section is provided is different, in dopant concentration, from the other part of the P well so that electric charges are injected merely to the sensing section in a state where a voltage is applied to an N-type substrate.
    Type: Grant
    Filed: October 16, 2015
    Date of Patent: July 24, 2018
    Assignees: SHARP KABUSHIKI KAISHA, NATIONAL UNIVERSITY CORP TOYOHASHI UNIVERSITY
    Inventors: Satoshi Saitoh, Toshio Yoshida, Tomohiro Konishi, Kazuaki Sawada
  • Patent number: 9966407
    Abstract: A unit pixel of an image sensor which operates in global shutter mode is provided. The unit pixel includes a photo diode area including a photo diode configured to accumulate photocharges generated from incident light during a first period and a storage diode area including a storage diode configured to receive and store the photocharges from the photo diode. The photo diode corresponds to a micro lens that focuses the incident light.
    Type: Grant
    Filed: August 20, 2015
    Date of Patent: May 8, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Young Chan Kim, Jung Chak Ahn, Hyuk Soon Choi, Kyung Ho Lee, Jun Suk Lee, Young Woo Jung
  • Patent number: 9793312
    Abstract: A pixel includes a semiconductor layer with a charge accumulation layer extending in the semiconductor layer. A transistor has a read region penetrating into said semiconductor layer down to a first depth. An insulating wall penetrates into the semiconductor layer from an upper surface and containing an insulated conductor connected to a node of application of a potential. The insulating wall includes at least a portion provided with a deep insulating plug penetrating into the insulated conductor down to a second depth greater than the first depth. A continuous portion of the insulating wall laterally delimits, at least partially, a charge accumulation area and includes a wall portion with the deep insulating plug at least partially laterally delimiting the read region of the transistor.
    Type: Grant
    Filed: August 5, 2016
    Date of Patent: October 17, 2017
    Assignee: STMicroelectronics (Crolles 2) SAS
    Inventor: Francois Roy
  • Patent number: 9749565
    Abstract: Image capturing systems with interline CCD structures designed to reduce the delay between captures of subsequent image frames are disclosed. Proposed interline CCD structures include two or more sets of storage units associated with a given set of photodetecting elements, where each photodetecting element is associated with one storage unit of each set of storage units in that the charge generated by the photodetecting element during the acquisition of a particular image frame (i.e. during a particular exposure period) may be stored any one of these storage units prior to read-out. Providing multiple sets of storage units allows read-out of charge corresponding to one image frame and stored in one set of storage units while accumulating charge corresponding to another image frame in another set of storage units, thus reducing the delay between captures of different image frames. Consequently, errors and artifacts of the image capturing system can be minimized.
    Type: Grant
    Filed: February 2, 2016
    Date of Patent: August 29, 2017
    Assignee: ANALOG DEVICES, INC.
    Inventors: Erik D. Barnes, Jonathan Goldberg
  • Patent number: 9743027
    Abstract: In one form, a pixel for use in image sensing comprises a photodetector, a sink device, and a readout circuit. The photodetector is formed in a semiconductor substrate and has a charge collection region for receiving photocharge representative of incident light. The sink device is formed in the semiconductor substrate and adjacent to the charge collection region and has a gate overlying and insulated from the semiconductor substrate and receiving a responsivity control signal. The readout circuit transfers the photocharge collected by the charge collection region of the photodetector to an output in response to a select signal. In another form, the pixel may be used in an image sensor having a pixel array of such pixels.
    Type: Grant
    Filed: June 24, 2015
    Date of Patent: August 22, 2017
    Assignee: Semiconductor Components Industries, LLC
    Inventor: Nikolai Bock
  • Patent number: 9609241
    Abstract: There is described in one embodiment an indicia reading terminal having an image sensor pixel array incorporated therein, wherein the terminal is operative for decoding of decodable indicia and for providing color frames of image data for storage or transmission. An image sensor based terminal in one embodiment can include an image sensor having a hybrid monochrome and color image sensor pixel array wherein the image sensor pixel array includes a first subset of monochrome pixels and a second subset of color pixels. In one embodiment, an output response curve for the image sensor pixel array can include a logarithmic pattern.
    Type: Grant
    Filed: November 6, 2015
    Date of Patent: March 28, 2017
    Assignee: Hand Held Products, Inc.
    Inventor: Ynjiun P. Wang
  • Patent number: 9583527
    Abstract: An image sensor includes a plurality of photodiodes disposed in a semiconductor material and a floating diffusion disposed in the semiconductor material adjacent to a photodiode in the plurality of photodiodes. A transfer gate is disposed to transfer image charge generated in the photodiode into the floating diffusion. A first electrical contact with a first cross sectional area is coupled to the transfer gate. A second electrical contact with a second cross sectional area is coupled to the floating diffusion, and the second cross sectional area is greater than the first cross sectional area. The image sensor also includes pixel transistor region disposed in the semiconductor material including a first electrical connection to the semiconductor material. A third electrical contact with a third cross sectional area is coupled to the first electrical connection to the semiconductor material, and the third cross sectional area is greater than the first cross sectional area.
    Type: Grant
    Filed: January 28, 2016
    Date of Patent: February 28, 2017
    Assignee: OmniVision Technologies, Inc.
    Inventors: Kevin Ka Kei Leung, Hsin-Neng Tai, Hung-Ming Weng
  • Patent number: 9575381
    Abstract: A semiconductor device includes a photodiode, a first transistor, and a second transistor. The photodiode has a function of supplying a charge corresponding to incident light to a gate of the first transistor, the first transistor has a function of accumulating the charge supplied to the gate, and the second transistor has a function of retaining the charge accumulated in the gate of the first transistor. The second transistor includes an oxide semiconductor.
    Type: Grant
    Filed: January 6, 2011
    Date of Patent: February 21, 2017
    Assignee: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventors: Yoshiyuki Kurokawa, Takayuki Ikeda
  • Patent number: 9570498
    Abstract: An image sensor device may include an array of image sensing pixels arranged in rows and columns. Each image sensing pixel may include an image sensing photodiode, a first source follower transistor coupled to the image sensing photodiode, and a switch coupled to the image sensing photodiode. Each image sensor device may include a second source follower transistor coupled to the switch, and a row selection transistor coupled to the first and second source follower transistors.
    Type: Grant
    Filed: December 31, 2014
    Date of Patent: February 14, 2017
    Assignee: STMICROELECTRONICS (CROLLES 2) SAS
    Inventors: François Roy, Frédéric Lalanne, Pierre Emmanuel Marie Malinge
  • Patent number: 9534893
    Abstract: An imaging device intended to be placed on board a satellite or an aircraft comprises at least two detector arrays that are arranged in the same focal plane. Each detector array itself comprises a unidirectional detector and at least one additional detector, produced on one same single-piece substrate dedicated to said detector array. The arrangement of the detectors in the focal plane is then carried out in a modular fashion, by positioning the respective substrates of the detector arrays. Several arrangements are proposed that are compatible with the unidirectional and bidirectional push-broom scanning modes.
    Type: Grant
    Filed: November 21, 2013
    Date of Patent: January 3, 2017
    Assignee: Airbus Defence and Space
    Inventors: Michel Tulet, Gilles Planche
  • Patent number: 9508557
    Abstract: Provided is a method for processing a semiconductor substrate to reduce line roughness, the method comprising: positioning a substrate in a film-forming system, the film-forming system comprising a chuck having a clamping mechanism configured to hold the substrate in a processing chamber and flex the substrate by displacing a center of the substrate relative to a peripheral edge of the substrate so as to create a concave surface during processing; coating the substrate with a layer of material; performing a post apply bake process; flexing the substrate to create the concave surface either during the post apply bake or following the post apply bake process, wherein the concave surface has a degree of concavity measured at the center of the substrate that exceeds a base number of microns; and unflexing the substrate and inducing tensile stress in the layer of material on the substrate.
    Type: Grant
    Filed: April 1, 2015
    Date of Patent: November 29, 2016
    Assignee: Tokyo Electron Limited
    Inventor: Hoyoung Kang
  • Patent number: 9508766
    Abstract: An image sensor includes a photoelectric conversion element in a substrate, a first storage region spaced apart from the photoelectric conversion element in the substrate, a gate on the first storage region, a light shielding layer covering the gate, a dielectric layer disposed between the gate and the light shielding layer and extending onto a top surface of the substrate, an interlayer insulating structure covering the light shielding layer, and a micro-lens overlapping with the photoelectric conversion element on the interlayer insulating structure. The light shielding layer includes a first portion covering a sidewall of the gate, and a second portion on a top surface of the gate. The first portion has a first thickness corresponding to a vertical height from a bottom surface of the first portion to a top surface of the first portion, and the first thickness is greater than a second thickness of the second portion.
    Type: Grant
    Filed: July 30, 2015
    Date of Patent: November 29, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: HyunPil Noh, Dong-Chul Lee, Seokha Lee, Chan Park, Seungho Shin
  • Patent number: 9502599
    Abstract: There is provided a method of producing a semiconductor device. The method includes the steps of: forming a first hard mask having an opening above a substrate; forming a sacrificial film above a side surface of the opening of the first hard mask; forming a second hard mask in the opening having the sacrificial film above the side surface; removing the sacrificial film after the second hard mask is formed; ion implanting a first conductivity-type impurity through the first hard mask; and ion implanting a second conductivity-type impurity through the first and second hard masks.
    Type: Grant
    Filed: September 29, 2010
    Date of Patent: November 22, 2016
    Assignee: Sony Semiconductor Solutions Corporation
    Inventor: Yasufumi Miyoshi
  • Patent number: 9496300
    Abstract: The imaging device disclosed herein includes: a plurality of photodetection sections having a light-receiving face, the plurality of photodetection sections being disposed in a two-dimensional array along a first direction and along a second direction different from the first direction, such that the light-receiving faces of the plurality of photodetection sections constitute an imaging plane; a transparent layer; and a plurality of spectroscopic sections having a greater refractive index than the transparent layer and being disposed in a two-dimensional array in a plane of arrangement. Zeroth order diffracted light and ±first order diffracted light, derived from light transmitted through each spectroscopic section and a portion of the transparent layer neighboring the spectroscopic section, respectively enter distinct photodetection sections among the plurality of photodetection sections.
    Type: Grant
    Filed: December 18, 2012
    Date of Patent: November 15, 2016
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Tatsuya Nakamura, Seiji Nishiwaki, Shinichi Wakabayashi, Masaaki Suzuki
  • Patent number: 9410901
    Abstract: A high sensitivity image sensor comprises an epitaxial layer of silicon that is intrinsic or lightly p doped (such as a doping level less than about 1013 cm?3). CMOS or CCD circuits are fabricated on the front-side of the epitaxial layer. Epitaxial p and n type layers are grown on the backside of the epitaxial layer. A pure boron layer is deposited on the n-type epitaxial layer. Some boron is driven a few nm into the n-type epitaxial layer from the backside during the boron deposition process. An anti-reflection coating may be applied to the pure boron layer. During operation of the sensor a negative bias voltage of several tens to a few hundred volts is applied to the boron layer to accelerate photo-electrons away from the backside surface and create additional electrons by an avalanche effect. Grounded p-wells protect active circuits as needed from the reversed biased epitaxial layer.
    Type: Grant
    Filed: March 10, 2015
    Date of Patent: August 9, 2016
    Assignee: KLA-Tencor Corporation
    Inventors: Yung-Ho Alex Chuang, Jingjing Zhang, John Fielden
  • Patent number: 9356161
    Abstract: A semiconductor device includes: a photoelectric conversion section made of semiconductor; a color filter made of an inorganic material to which a metal ion is added; and a getter film formed between the photoelectric conversion section and the color filter and configured to trap the metal ion.
    Type: Grant
    Filed: January 20, 2014
    Date of Patent: May 31, 2016
    Assignee: Sony Corporation
    Inventor: Tomoko Miki
  • Patent number: 9324746
    Abstract: A pixel circuit for a global shutter of a substrate-stacked image sensor may include a semiconductor chip including: a photodiode configured to output electric charges generated through a light sensing operation; and a reset node configured to receive a reset voltage from a reset voltage node and reset the photodiode. The semiconductor chip may have a structure in which the semiconductor chip is stacked over another semiconductor chip.
    Type: Grant
    Filed: September 26, 2014
    Date of Patent: April 26, 2016
    Assignee: SILICONFILE TECHNOLOGIES INC.
    Inventors: Jin Eun Choi, Jae Won Uhm, Seung Hoon Sa
  • Patent number: 9231020
    Abstract: Some demonstrative embodiments include devices and/or methods of gettering on silicon on insulator (SOI) substrate. For example, a complementary metal-oxide-semiconductor (CMOS) integrated circuit (IC) may include a plurality of pixels arranged on a wafer, a pixel of the pixels including: a silicon active area; at least one non-silicided leakage-sensitive component formed on the active area, the leakage-sensitive component is sensitive to metal contaminants; a non-leakage-sensitive area formed on the active area, the non-leakage-sensitive area surrounding the leakage-sensitive component; and at least one silicided gettering region formed on the non-leakage-sensitive area to trap the metal contaminants.
    Type: Grant
    Filed: January 16, 2014
    Date of Patent: January 5, 2016
    Assignee: TOWER SEMICONDUCTOR LTD.
    Inventors: Dmitry Veinger, Assaf Lahav, Omer Katz, Ruthie Shima-Edelstein
  • Patent number: 9142576
    Abstract: There is provided a solid-state image sensor including a photoelectric conversion part which generates a charge corresponding to received light and accumulates the charge therein, a charge holding part in which before the charge accumulated in the photoelectric conversion part is transferred to a floating diffusion region, the charge is held for a predetermined time, a first transfer gate which transfers the charge accumulated in the photoelectric conversion part to the charge holding part, a second transfer gate which transfers the charge held in the charge holding part to the floating diffusion region, and a charge discharging gate which discharges the charge in the photoelectric conversion part. Before charge accumulation in the photoelectric conversion part for the next frame is started, part of the charge accumulated in the charge holding part is discharged.
    Type: Grant
    Filed: September 13, 2013
    Date of Patent: September 22, 2015
    Assignee: SONY CORPORATION
    Inventor: Takashi Machida
  • Patent number: 9041132
    Abstract: A solid-state image pickup device includes a plurality of pixels, each of the pixels including a photoelectric conversion portion, a charge holding portion, a floating diffusion, and a transfer portion. The pixel also includes a beneath-holding-portion isolation layer and a pixel isolation layer. An end portion on a photoelectric conversion portion side of the pixel isolation layer is away from the photoelectric conversion portion compared to an end portion on a photoelectric conversion portion side of the beneath-holding-portion isolation layer, and an N-type semiconductor region constituting part of the photoelectric conversion portion is disposed under at least part of the beneath-holding-portion isolation layer.
    Type: Grant
    Filed: September 29, 2010
    Date of Patent: May 26, 2015
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Masahiro Kobayashi, Yuichiro Yamashita, Yusuke Onuki
  • Patent number: 9041073
    Abstract: Image sensors are provided. In the image sensor, an area of a device isolation layer may be reduced and elements may be isolated from each other by a channel stop region extending between the photoelectric conversion region and the device isolation layer, such that a dark current property of the image sensor may be improved.
    Type: Grant
    Filed: June 26, 2013
    Date of Patent: May 26, 2015
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jungchak Ahn, Yitae Kim
  • Patent number: 9024361
    Abstract: Provided is a solid-state imaging device including: a photodiode which converts an optical signal to signal charges; a transfer gate which transfers the signal charges from the photodiode; an impurity diffusion layer to which the signal charges are transferred by the transfer gate; and a MOS transistor of which a gate is connected to the impurity diffusion layer. The impurity diffusion layer has a first conduction type semiconductor layer and a second conduction type semiconductor layer which is formed in the first conduction type semiconductor layer and under an end portion of the transfer gate.
    Type: Grant
    Filed: July 19, 2010
    Date of Patent: May 5, 2015
    Assignee: Sony Corporation
    Inventors: Hiroyuki Ohri, Yasunori Sogoh
  • Patent number: 9000491
    Abstract: Insulating layers can be formed over a semiconductor device region and etched in a manner that substantially reduces or prevents the amount of etching of the underlying channel region. A first insulating layer can be formed over a gate region and a semiconductor device region. A second insulating layer can be formed over the first insulating layer. A third insulating layer can be formed over the second insulating layer. A portion of the third insulating layer can be etched using a first etching process. A portion of the first and second insulating layers beneath the etched portion of the third insulating layer can be etched using at least a second etching process different from the first etching process.
    Type: Grant
    Filed: June 19, 2014
    Date of Patent: April 7, 2015
    Assignee: STMicroelectronics, Inc.
    Inventors: Nicolas Loubet, Qing Liu, Prasanna Khare
  • Publication number: 20150076566
    Abstract: The performances of a semiconductor device are improved. A semiconductor device has a photodiode and a transfer transistor formed in a pixel region. Further, the semiconductor device has a second transistor formed in a peripheral circuit region. The transfer transistor includes a first gate electrode, and a film part formed of a thick hard mask film formed over the first gate electrode. The second transistor includes a second gate electrode, source/drain regions, silicide layers formed at the upper surface of the second gate electrode, and the upper surfaces of the source/drain regions.
    Type: Application
    Filed: September 10, 2014
    Publication date: March 19, 2015
    Inventor: Takeshi KAMINO
  • Publication number: 20150041865
    Abstract: A pixel arrangement includes a photodiode, a reset transistor configured to be controlled by a reset signal and coupled to a reset input voltage, a transfer gate transistor configured to transfer charge from the photodiode to a node, wherein the transfer gate transistor is controlled by a transfer gate voltage, and a source follower transistor controlled by the voltage on the node and coupled to a source follower voltage. A capacitor is coupled between the node and an input voltage. During a read operation the input voltage is increased to boost the voltage at the node. The increased input voltage may, for example, be one the reset input voltage, said source follower voltage, said transfer gate voltage and a boosting voltage.
    Type: Application
    Filed: August 8, 2014
    Publication date: February 12, 2015
    Applicants: STMicroelectronics (Research & Development) Limited, STMICROELECTRONICS (GRENOBLE 2) SAS
    Inventors: Graeme Storm, Christophe Mandier, Laurence Stark
  • Patent number: 8953076
    Abstract: A photoelectric conversion device comprises a p-type region, an n-type buried layer formed under the p-type region, an element isolation region, and a channel stop region which covers at least a lower portion of the element isolation region, wherein the p-type region and the buried layer form a photodiode, and a diffusion coefficient of a dominant impurity of the channel stop region is smaller than a diffusion coefficient of a dominant impurity of the buried layer.
    Type: Grant
    Filed: December 20, 2013
    Date of Patent: February 10, 2015
    Assignee: Canon Kabushiki Kaisha
    Inventors: Hajime Ikeda, Yoshihisa Kabaya, Takanori Watanabe, Takeshi Ichikawa, Mineo Shimotsusa
  • Publication number: 20150014751
    Abstract: A sensor and its fabrication method are provided. The sensor comprises: a base substrate, a group of gate lines and a group of data lines arranged as crossing each other, and a plurality of sensing elements arranged in an array and defined by the group of gate lines and the group of data lines, each sensing element comprising a Thin Film Transistor (TFT) device and a photodiode sensing device, wherein the photodiode sensor device comprises: a bias line disposed on the base substrate; a transparent electrode disposed on the bias line and being electrically contacted with the bias line; a photodiode disposed on the transparent electrode; and a receiving electrode disposed on the photodiode; the TFT device is located above the photodiode. When the sensor is functioning, light is directly transmitted onto the photodiode sensor device through the base substrate. In comparison with conventional technologies, the light loss is largely reduced and the light absorption usage ratio is improved.
    Type: Application
    Filed: November 26, 2012
    Publication date: January 15, 2015
    Inventors: Tiansheng Li, Shaoying Xu, Zhenyu Xie
  • Publication number: 20150001589
    Abstract: A photoelectric conversion device includes: a first semiconductor region of a first conductivity type, which configures a first photoelectric conversion element; a second semiconductor region of the first conductivity type, which configures a second photoelectric conversion element; a third semiconductor region of the first conductivity type; a fourth semiconductor region of the first conductivity type; a first gate electrode, configuring a first transfer transistor conjointly; and a second gate electrode, configuring a second transfer transistor. At a side of the first gate electrode which is toward the first semiconductor region in plan view of the surface of the semiconductor substrate, a length of the side of the first gate electrode toward the first semiconductor region, is shorter than a length of the active region, and a length of the side of the first gate electrode toward the first semiconductor region, is longer than a length of the first semiconductor region.
    Type: Application
    Filed: June 26, 2014
    Publication date: January 1, 2015
    Inventors: Koichi Tazoe, Yu Arishima, Akira Okita, Kazuki Ohshitanai, Yasuharu Ota
  • Patent number: 8921855
    Abstract: It is disclosed that, as an embodiment, a test circuit includes a test signal supply unit configured to supply a test signal via a signal line to signal receiving units provided in a plurality of columns, wherein the test signal supply unit is a voltage buffer or a current buffer, and the test circuit has a plurality of test signal supply units and a plurality of signal lines, and wherein at least one test signal supply unit is electrically connected to one signal line different from a signal line to which another test signal supply unit is electrically connected.
    Type: Grant
    Filed: March 2, 2012
    Date of Patent: December 30, 2014
    Assignee: Canon Kabushiki Kaisha
    Inventors: Akira Okita, Masaaki Iwane, Yu Arishima, Masaaki Minowa
  • Publication number: 20140374803
    Abstract: A horizontal scanning period is divided into n parts (n is a natural number), so that horizontal scanning can be performed (n×y) times in one frame period. That is, n signals can be outputted from each pixel, and storage times of the n signals are different from one another. Then, since a signal suited to the intensity of light irradiated to each pixel can be selected, information of an object can be accurately read.
    Type: Application
    Filed: June 30, 2014
    Publication date: December 25, 2014
    Inventor: Hajime Kimura