Sensors Not Overlaid By Electrode (e.g., Photodiodes) Patents (Class 257/233)
  • Patent number: 11869906
    Abstract: A pixel cell with an elevated floating diffusion region is formed to reduce diffusion leakage (e.g., gate induced drain leakage, junction leakage, etc.). The floating diffusion region can be elevated by separating a doped floating diffusion region from the semiconductor substrate by disposing an intervening layer (e.g., undoped, lightly doped, etc.) on the semiconductor substrate and beneath the doped floating diffusion region. For instance, the elevated floating diffusion region can be formed by stacked material layers composed of a lightly or undoped base or intervening layer and a heavy doped (e.g., As doped) “elevated” layer. In some examples, the stacked material layers can be formed by first and second epitaxial growth layers.
    Type: Grant
    Filed: July 2, 2020
    Date of Patent: January 9, 2024
    Assignee: OmniVision Technologies, Inc.
    Inventors: Seong Yeol Mun, Heesoo Kang
  • Patent number: 11862427
    Abstract: Systems and methods for implementing a detector array are disclosed. According to certain embodiments, a substrate comprises a plurality of sensing elements including a first element and a second element. The detector comprises a switching element configured to connect the first element and the second element. The switching region may be controlled based on signals generated in response to the sensing elements receiving electrons with a predetermined amount of energy.
    Type: Grant
    Filed: September 13, 2022
    Date of Patent: January 2, 2024
    Assignee: ASML Netherlands B.V.
    Inventors: Yongxin Wang, Zhonghua Dong, Rui-Ling Lai
  • Patent number: 11854909
    Abstract: A semiconductor structure and method for manufacturing thereof are provided. The semiconductor structure includes a silicon substrate having a first surface, a III-V layer on the first surface of the silicon substrate and over a first active region, and an isolation region in a portion of the III-V layer extended beyond the first active region. The first active region is in proximal to the first surface. The method includes the following operations. A silicon substrate having a first device region and a second device region is provided, a first active region is defined in the first device region, a III-V layer is formed on the silicon substrate, an isolation region is defined across a material interface in the III-V layer by an implantation operation, and an interconnect penetrating through the isolation region is formed.
    Type: Grant
    Filed: July 26, 2022
    Date of Patent: December 26, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Man-Ho Kwan, Fu-Wei Yao, Ru-Yi Su, Chun Lin Tsai, Alexander Kalnitsky
  • Patent number: 11716550
    Abstract: An imaging arrangement comprising: a plurality of pixels arranged in a matrix; and a signal processing arrangement. A first and a second line of the matrix each comprise a light-receiving pixel and a reference pixel, the light-receiving pixels each receive incident light and output a light signal based on the incident light, and each reference pixel outputs a pixel signal for forming an address signal. The processing arrangement provides a first address signal and a second address signal, wherein: the first address signal indicates the position of the first line and comprises a signal value based on the pixel signal from the first line; and the second address signal indicates the position of the second line and comprises a signal value based on the pixel signal from the second line; and the signal value of the first address signal is different to the signal value of the second address signal.
    Type: Grant
    Filed: December 12, 2019
    Date of Patent: August 1, 2023
    Assignee: Canon Kabushiki Kaisha
    Inventors: Noriyuki Shikina, Kentaro Tsukida, Yasushi Iwakura, Yoichi Wada
  • Patent number: 11699711
    Abstract: An image sensing device includes a semiconductor substrate, a material layer, a lens layer, and a lens capping layer. The semiconductor substrate includes a pixel region, which include a plurality of unit pixels, and a pixel-array peripheral region located outside of and peripheral to the pixel region. The material layer is disposed over the semiconductor substrate in the pixel region and the pixel-array peripheral region, and includes a first trench extending to a predetermined depth in the pixel-array peripheral region. The lens layer is disposed over the material layer in the pixel region and collects incident light into a unit pixel in the pixel region. The lens capping layer is disposed over the lens layer and the material layer and includes an edge region formed to fill the first trench.
    Type: Grant
    Filed: September 10, 2020
    Date of Patent: July 11, 2023
    Assignee: SK HYNIX INC.
    Inventors: Ha Neul Yoo, Yun Hui Yang
  • Patent number: 11698560
    Abstract: According to one embodiment, a display device includes a gate line extending in a first direction, first and second source lines crossing the gate line and arranged in the first direction, a first light-shielding layer having first and second openings, and an oxide semiconductor layer crossing the gate line, and in the display device, the first opening and the second opening are arranged in a second direction crossing the first direction between the first source line and the second source line, the gate line is located between the first opening and the second opening, and the oxide semiconductor layer has a first overlapping portion overlapping the first opening.
    Type: Grant
    Filed: March 18, 2022
    Date of Patent: July 11, 2023
    Assignee: Japan Display Inc.
    Inventors: Hitoshi Tanaka, Kazuhide Mochizuki
  • Patent number: 11695029
    Abstract: A method for forming a pixel includes forming, in a semiconductor substrate, a wide trench having an upper depth with respect to a planar top surface of the semiconductor substrate. The method also includes ion-implanting a floating-diffusion region between the planar top surface and a junction depth in the semiconductor substrate. In a cross-sectional plane perpendicular to the planar top surface, the floating-diffusion region has (i) an upper width between the planar top surface and the upper depth, and (ii) between the upper depth and the junction depth, a lower width that exceeds the upper width. Part of the floating-diffusion region is beneath the wide trench and between the upper depth and the junction depth.
    Type: Grant
    Filed: December 20, 2021
    Date of Patent: July 4, 2023
    Assignee: OmniVision Technologies, Inc.
    Inventors: Hui Zang, Gang Chen
  • Patent number: 11681023
    Abstract: A Lidar system includes a light emitter and an array of photodetectors. The Lidar system includes a computer having a processor and a memory storing instructions executable by the processor to actuate the light emitter to output a series of shots. The instructions include instructions to provide a first bias voltage to the photodetectors for a first period of time after the light emitter emits a first subset of the series of shots. The instructions includes instructions to provide a second bias voltage to at least one of the photodetectors for a second period of time after the light emitter emits a second subset of the series of shots, the second bias voltage greater that the first bias voltage, the second subset of shots emitted after the first subset of the series of shots.
    Type: Grant
    Filed: June 17, 2020
    Date of Patent: June 20, 2023
    Assignee: Continental Autonomous Mobility US, LLC
    Inventors: Horst Wagner, Min Ren
  • Patent number: 11664398
    Abstract: An image sensor includes a storage device, where the storage device includes a memory element, a first dielectric layer and a light shielding element. The memory element includes a storage node and a storage transistor gate, where the storage transistor gate is located over the storage node. The first dielectric layer is located over a portion of the storage transistor gate. The light shielding element is located on the first dielectric layer and includes a semiconductor layer. The semiconductor layer is electrically isolated from the memory element, where the light shielding element is overlapped with at least a part of a perimeter of the storage transistor gate in a vertical projection on a plane along a stacking direction of the memory element and the light shielding element, and the stacking direction is normal to the plane.
    Type: Grant
    Filed: June 8, 2020
    Date of Patent: May 30, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Chung-Lei Chen, Clark Lee, Wen-Sheng Wang, Chien-Li Kuo
  • Patent number: 11600735
    Abstract: A method is provided for fabricating an avalanche photodiode (APD) device, in particular, a separate absorption charge multiplication (SACM) APD device. The method includes forming a first contact region and a second contact region in a semiconductor layer. Further, the method includes forming a first mask layer above at least a first contact region of the semiconductor layer adjacent to the first contact region, and forming a second mask layer above and laterally overlapping the first mask layer. Thereby, a mask window is defined by the first mask layer and the second mask layer, and the first mask layer and/or the second mask layer are formed above a second contact region of the semiconductor layer adjacent to the second contact region.
    Type: Grant
    Filed: July 8, 2021
    Date of Patent: March 7, 2023
    Assignee: IMEC VZW
    Inventors: Ashwyn Srinivasan, Peter Verheyen, Philippe Absil, Joris Van Campenhout
  • Patent number: 11569281
    Abstract: The present technique relates to a solid-state imaging device and an imaging apparatus that enable provision of a solid-state imaging device having superior color separation and high sensitivity. The solid-state imaging device includes a semiconductor layer in which a surface side becomes a circuit formation surface, photoelectric conversion units PD1 and PD2 of two layers or more that are stacked and formed in the semiconductor layer, and a longitudinal transistor Trl in which a gate electrode is formed to be embedded in the semiconductor layer from a surface of the semiconductor layer. The photoelectric conversion unit PD1 of one layer in the photoelectric conversion units of the two layers or more is formed over a portion of the gate electrode of the longitudinal transistor Trl embedded in the semiconductor substrate and is connected to a channel formed by the longitudinal transistor Trl.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: January 31, 2023
    Assignee: SONY GROUP CORPORATION
    Inventor: Tetsuji Yamaguchi
  • Patent number: 11522098
    Abstract: Some embodiments of the present disclosure provide a semiconductor-based photon-counting sensor comprising a metal-insulator-semiconductor internal photoemission (e.g., thermionic-emission) detector formed on and/or in a first surface of a semiconductor substrate, and at least one jot formed on and/or in a second side of a semiconductor substrate. The at least one MIS photoemission detector and the at least one jot are configured such that a photocarrier generated in response to a photon incident on the MIS thermionic-emission detector is readout by the at least one jot.
    Type: Grant
    Filed: April 3, 2017
    Date of Patent: December 6, 2022
    Assignee: Trustees of Dartmouth College
    Inventors: Zhiyuan Wang, Jiaju Ma, Jifeng Liu, Eric R. Fossum, Xiaoxin Wang
  • Patent number: 11515348
    Abstract: An image sensor includes a substrate having a first surface, a charge storage portion disposed in the substrate, a light-blocking pattern disposed on the first surface overlapping the charge storage portion, and a low-refractive index pattern on the light-blocking pattern.
    Type: Grant
    Filed: June 12, 2020
    Date of Patent: November 29, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Minho Jang, Jeongsoon Kang, Taehyoung Kim, Masaru Ishii, In Sung Joe
  • Patent number: 11387279
    Abstract: An imaging element according to an embodiment of the present disclosure includes a first photoelectric conversion section and a second photoelectric conversion section that are stacked in order from light incident side and that selectively detect and photoelectrically convert light beams of different wavelength bands, and the second photoelectric conversion section is disposed at an interval narrower than a pixel pitch of the first photoelectric conversion section.
    Type: Grant
    Filed: April 24, 2019
    Date of Patent: July 12, 2022
    Assignee: SONY SEMICONDUCTOR SOLUTIONS CORPORATION
    Inventor: Takayuki Ogasahara
  • Patent number: 11271044
    Abstract: An organic photoelectric conversion device includes first and second organic photoelectric conversion elements which convert light into electrical energy. The first and second organic photoelectric conversion elements are disposed to be stacked in this order along an incident direction of the light. The first organic photoelectric conversion element includes a first element main body including a first substrate, first and second transparent electrodes, and an organic photoelectric conversion unit having sensitivity in a first wavelength band of the light, and a first protective film that covers the first element main body. The second organic photoelectric conversion element includes a second element main body including a second substrate, a third transparent electrode, an electrode, and an organic photoelectric conversion unit having sensitivity in a second wavelength band of the light, and a second protective film that covers the second element main body.
    Type: Grant
    Filed: January 31, 2019
    Date of Patent: March 8, 2022
    Assignee: HAMAMATSU PHOTONICS K.K.
    Inventors: Yasuyuki Horiuchi, Hiroyuki Sugiyama, Masato Kitabayashi, Naoki Umebayashi
  • Patent number: 11152419
    Abstract: An image sensor having pixels that include two patterned semiconductor layers. The top patterned semiconductor layer contains the photoelectric elements of pixels having substantially 100% fill-factor. The bottom patterned semiconductor layer contains transistors for detecting, resetting, amplifying and transmitting signals charges received from the photoelectric elements. The top and bottom patterned semiconductor layers may be separated from each other by an interlayer insulating layer that may include metal interconnections for conducting signals between devices formed in the patterned semiconductor layers and from external devices.
    Type: Grant
    Filed: September 4, 2019
    Date of Patent: October 19, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Jung-Chak Ahn
  • Patent number: 11094732
    Abstract: An image sensor having pixels that include two patterned semiconductor layers. The top patterned semiconductor layer contains the photoelectric elements of pixels having substantially 100% fill-factor. The bottom patterned semiconductor layer contains transistors for detecting, resetting, amplifying and transmitting signals charges received from the photoelectric elements. The top and bottom patterned semiconductor layers may be separated from each other by an interlayer insulating layer that may include metal interconnections for conducting signals between devices formed in the patterned semiconductor layers and from external devices.
    Type: Grant
    Filed: February 26, 2019
    Date of Patent: August 17, 2021
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Jung-Chak Ahn
  • Patent number: 11075237
    Abstract: There is provided a solid-state image sensor including pixels each at least including light receiving parts receiving light to generate charge, a transfer part transferring the charge accumulated in the light receiving parts, and memory parts holding the charge transferred via the transfer part, and a predetermined number of elements shared by the plurality of pixels, the predetermined number of elements being for outputting a pixel signal at a level corresponding to the charge, wherein one or some of the plurality of pixels is/are a correction pixel(s) outputting a correction pixel signal used for correcting a pixel signal outputted from pixels other than the one or some of the plurality of pixels, and one or some of the predetermined number of elements is/are formed on a wiring layer side of the light receiving parts included in the correction pixel(s).
    Type: Grant
    Filed: April 22, 2016
    Date of Patent: July 27, 2021
    Assignee: Sony Corporation
    Inventor: Yorito Sakano
  • Patent number: 10914846
    Abstract: An image sensor includes: a switching element disposed on a substrate; a photoelectric conversion element connected to the switching element; a first protective film directly covering the photoelectric conversion element; and a first organic film formed at a layer above the switching element, the first organic film being in contact with the first protective film, wherein the first organic film covers a first end portion of the photoelectric conversion element, the first end portion being at least a part of an end portion of the photoelectric conversion element, wherein the first organic film has a first covering portion at an end of the first organic film, wherein the first covering portion covers the first end portion, wherein the first covering portion is inclined down towards the photoelectric conversion element, and wherein the first organic film covers only the first end portion of the photoelectric conversion element.
    Type: Grant
    Filed: July 2, 2019
    Date of Patent: February 9, 2021
    Assignee: TIANMA JAPAN, LTD.
    Inventors: Shuhei Nara, Hiroyuki Sekine, Takayuki Ishino, Fuminori Tamura, Yoshikazu Hatazawa
  • Patent number: 10886322
    Abstract: A multi-spectral photodetector is provided, comprising: a plurality of N photodetectors where N is an integer such that N?2, each photodetector comprising an anode and a cathode separated from one another by a region of interest, all produced in a semiconductor material; at least one electrical contact for all of the N anodes; and an electrical contact associated with each of the N cathodes; said photodetectors being stacked on top of one another such that the anodes and the cathodes and finally the regions of interest of two consecutive photodetectors in the stack are arranged face to face, this stack making it possible to define a face, termed the active face of the multi-spectral photodetector, common to all the photodetectors of the stack, defined by the face of the first region of interest of the first photodetector of the stack via which photons are intended to enter the stack.
    Type: Grant
    Filed: December 18, 2017
    Date of Patent: January 5, 2021
    Assignee: SORBONNE UNIVERSITÉ
    Inventors: Mohamed Ben Chouikha, Gérard Dubois
  • Patent number: 10866478
    Abstract: According to one embodiment, a display device includes a gate line extending in a first direction, first and second source lines crossing the gate line and arranged in the first direction, a first light-shielding layer having first and second openings, and an oxide semiconductor layer crossing the gate line, and in the display device, the first opening and the second opening are arranged in a second direction crossing the first direction between the first source line and the second source line, the gate line is located between the first opening and the second opening, and the oxide semiconductor layer has a first overlapping portion overlapping the first opening.
    Type: Grant
    Filed: June 4, 2020
    Date of Patent: December 15, 2020
    Assignee: Japan Display Inc.
    Inventors: Hitoshi Tanaka, Kazuhide Mochizuki
  • Patent number: 10804327
    Abstract: Disclosed are an organic photoelectric device including a first electrode and a second electrode facing each other and a photoelectric conversion layer disposed between the first electrode and the second electrode and selectively absorbing light in a green wavelength region, wherein the photoelectric conversion layer includes a first and second photoelectric conversion materials, a light-absorption full width at half maximum (FWHM) in a green wavelength region of the first photoelectric conversion material is narrower than the light-absorption FWHM in a green wavelength region of the second photoelectric conversion material, and the first and second photoelectric conversion materials satisfy Relationship Equation 1, and an image sensor and an electronic device including the same. Tm2(° C.)?Ts2(10)(° C.)?Tm1(° C.)?Ts1(10)(° C.
    Type: Grant
    Filed: September 20, 2018
    Date of Patent: October 13, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Kiyohiko Tsutsumi, Kyung Bae Park, Takkyun Ro, Chul Joon Heo, Yong Wan Jin
  • Patent number: 10763380
    Abstract: The photodetector device comprises a substrate (1) of semiconductor material, a sensor region (2) in the substrate, a plurality of grid elements (4) arranged at a distance (d) from one another above the sensor region, the grid elements having a refractive index, a region of lower refractive index (3), the grid elements being arranged on the region of lower refractive index, and a further region of lower refractive index (5) covering the grid elements.
    Type: Grant
    Filed: June 13, 2017
    Date of Patent: September 1, 2020
    Assignee: ams AG
    Inventors: Jens Hofrichter, Jan Enenkel
  • Patent number: 10715768
    Abstract: The present technique relates to a solid-state imaging device and an imaging apparatus that enable provision of a solid-state imaging device having superior color separation and high sensitivity. The solid-state imaging device includes a semiconductor layer in which a surface side becomes a circuit formation surface, photoelectric conversion units PD1 and PD2 of two layers or more that are stacked and formed in the semiconductor layer, and a longitudinal transistor Tr1 in which a gate electrode is formed to be embedded in the semiconductor layer from a surface of the semiconductor layer. The photoelectric conversion unit PD1 of one layer in the photoelectric conversion units of the two layers or more is formed over a portion of the gate electrode of the longitudinal transistor Tr1 embedded in the semiconductor substrate and is connected to a channel formed by the longitudinal transistor Tr1.
    Type: Grant
    Filed: March 20, 2019
    Date of Patent: July 14, 2020
    Assignee: Sony Corporation
    Inventor: Tetsuji Yamaguchi
  • Patent number: 10658416
    Abstract: An image sensor may include a semiconductor substrate in which a photodiode is formed; a metal interconnection layer located above the semiconductor substrate; and an absorption layer located between the semiconductor substrate and the metal interconnection layer, wherein the absorption layer is configured to absorb light travelling through the semiconductor substrate.
    Type: Grant
    Filed: June 29, 2018
    Date of Patent: May 19, 2020
    Assignee: HUAIAN IMAGING DEVICE MANUFACTURER CORPORATION
    Inventors: Amane Oishi, Xiaolu Huang
  • Patent number: 10658474
    Abstract: Various embodiments of the present application are directed to a method for forming a thin semiconductor-on-insulator (SOI) substrate without implantation radiation and/or plasma damage. In some embodiments, a device layer is epitaxially formed on a sacrificial substrate and an insulator layer is formed on the device layer. The insulator layer may, for example, be formed with a net charge that is negative or neutral. The sacrificial substrate is bonded to a handle substrate, such that the device layer and the insulator layer are between the sacrificial and handle substrates. The sacrificial substrate is removed, and the device layer is cyclically thinned until the device layer has a target thickness. Each thinning cycle comprises oxidizing a portion of the device layer and removing oxide resulting from the oxidizing.
    Type: Grant
    Filed: August 14, 2018
    Date of Patent: May 19, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Cheng-Ta Wu, Chia-Shiung Tsai, Jiech-Fun Lu, Kuo-Hwa Tzeng, Shih-Pei Chou, Yu-Hung Cheng, Yeur-Luen Tu
  • Patent number: 10559613
    Abstract: A semiconductor device and a method for fabricating the same are provided. The semiconductor device includes a substrate, first and second recesses spaced apart from each other in a first direction within the substrate, a first gate electrode filling the first recess and protruding above the substrate, a second gate electrode filling the second recess and protruding above the substrate, a first source/drain formed between the first and second recesses, a second source/drain formed in an opposite direction to the first source/drain with respect to the first recess, and a third source/drain formed in an opposite direction to the first source/drain with respect to the second recess and electrically connected to the second source/drain.
    Type: Grant
    Filed: November 15, 2017
    Date of Patent: February 11, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sung In Kim, Jae Kyu Lee, Jae Rok Kahng
  • Patent number: 10551034
    Abstract: A theatre lighting apparatus including a base housing; and a lamp housing; wherein the lamp housing is remotely positioned in relation to the base housing by a motor; and wherein the lamp housing is comprised of a plurality of light sources and a plurality of lenses. Each of the plurality of lenses has a first surface and a second surface; each second surface of each of the plurality of lenses has an inner portion and a perimeter portion; and wherein the inner portion of each of the plurality of lenses is substantially more polished, and substantially less diffuse that the corresponding perimeter portion of each of the plurality of lenses so that light is transmitted in a substantially uniform direction through the inner portion of each of the plurality of lenses and light is transmitted in a scattered manner through the perimeter portion of each of the plurality of lenses.
    Type: Grant
    Filed: May 15, 2019
    Date of Patent: February 4, 2020
    Inventor: Richard S. Belliveau
  • Patent number: 10522525
    Abstract: A semiconductor device structure includes a first chip including a plurality of dielectric layers and a multi-layered metal structure embedded in the plurality of dielectric layer, a second chip bonded to the first chip to generate a bonding interface and including a metal structure, a first via structure extending through the first chip and crossing the bonding interface into the metal structure in the second chip, and a second via structure extending in the first chip and electrically connected to the multi-layered metal structure in the first chip. The first via structure further includes a first via metal and a first via dielectric layer, the first via dielectric layer interposes between the first via metal and the plurality of dielectric layers of the first chip and extends from the first chip to the metal structure in the second chip.
    Type: Grant
    Filed: November 1, 2017
    Date of Patent: December 31, 2019
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Cheng-Ying Ho, Wen-De Wang, Jen-Cheng Liu, Dun-Nian Yaung
  • Patent number: 10490591
    Abstract: An imaging device includes: a semiconductor substrate; a photoelectric conversion element that, in operation, generates a signal by performing photoelectric conversion on incident light; a multilayer wiring structure including a first wiring layer and a second wiring layer which are provided between the semiconductor substrate and the photoelectric conversion element; and a circuitry that is provided in the semiconductor substrate and the multilayer wiring structure, and, in operation, processes the signal. The circuitry includes a first transistor and a first capacitance element. The first transistor includes a first gate, and a first source region and a first drain region which are provided in the semiconductor substrate. The first capacitance element includes a first electrode, a second electrode, and a dielectric film disposed between the first electrode and the second electrode. The first electrode is disposed between the photoelectric conversion element and the first gate of the first transistor.
    Type: Grant
    Filed: December 12, 2017
    Date of Patent: November 26, 2019
    Assignee: Panasonic Intellectual Property Management Co., Ltd.
    Inventors: Yuuko Tomekawa, Tokuhiko Tamaki
  • Patent number: 10490581
    Abstract: Disclosed herein is a solid-state imaging apparatus including: a semiconductor base; a photodiode created on the semiconductor base and used for carrying out photoelectric conversion; a pixel section provided with pixels each having the photodiode; a first wire created by being electrically connected to the semiconductor base for the pixel section through a contact section and being extended in a first direction to the outside of the pixel section; a second wire made from a wiring layer different from the first wire and created by being extended in a second direction different from the first direction to the outside of the pixel section; and a contact section for electrically connecting the first and second wires to each other.
    Type: Grant
    Filed: August 28, 2018
    Date of Patent: November 26, 2019
    Assignee: Sony Corporation
    Inventors: Mikiko Kobayashi, Kazuyoshi Yamashita
  • Patent number: 10475814
    Abstract: A ferroelectric memory device includes a substrate, an interfacial insulation layer disposed on the substrate, a recombination induction layer disposed on the interfacial insulation layer, a ferroelectric layer disposed on the recombination induction layer, and a gate electrode disposed on the ferroelectric layer. The recombination induction layer includes a material containing holes acting as a majority carrier.
    Type: Grant
    Filed: June 15, 2018
    Date of Patent: November 12, 2019
    Assignee: SK hynix Inc.
    Inventors: Hyangkeun Yoo, Joong Sik Kim
  • Patent number: 10340304
    Abstract: The present disclosure provides CMOS image sensors. A CMOS image sensor includes a substrate having a first region and a second region connecting with the first region at a first end of the first region; a transfer transistor formed on the surface of the substrate in the second region; a floating diffusion (FD) region formed in the surface of the substrate at one side of the transfer transistor in the second region; a third implanting region formed in the surface of the substrate 200 in the first region, being formed from a first implanting region; a second implanting region and an adjacent fifth implanting region formed under the third implanting region; and a fourth implanting region formed under the second implanting region and the fifth implanting region, being electrically connected with the third implanting region by the fifth implanting region.
    Type: Grant
    Filed: June 26, 2018
    Date of Patent: July 2, 2019
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
    Inventors: Dae-Sub Jung, Deyan Chen, Xuejie Shi
  • Patent number: 10306166
    Abstract: A solid-state imaging device is provided, which includes a photodiode having a first conductivity type semiconductor area that is dividedly formed for each pixel; a first conductivity type transfer gate electrode formed on the semiconductor substrate via a gate insulating layer in an area neighboring the photodiode, and transmitting signal charges generated and accumulated in the photodiode; a signal reading unit reading a voltage which corresponds to the signal charge or the signal charge; and an inversion layer induction electrode formed on the semiconductor substrate via the gate insulating layer in an area covering a portion or the whole of the photodiode, and composed of a conductor or a semiconductor having a work function. An inversion layer is induced, which is formed by accumulating a second conductivity type carrier on a surface of the inversion layer induction electrode side of the semiconductor area through the inversion layer induction electrode.
    Type: Grant
    Filed: May 3, 2017
    Date of Patent: May 28, 2019
    Assignee: Sony Corporation
    Inventors: Yorito Sakano, Takashi Abe, Keiji Mabuchi, Ryoji Suzuki, Hiroyuki Mori, Yoshiharu Kudoh, Fumihiko Koga, Takeshi Yanagita, Kazunobu Ota
  • Patent number: 10249796
    Abstract: The present application discloses a light emitting diode comprising a substrate; and a light emitting layer on the substrate. The light emitting layer comprises, an N-type doped layer; a quantum well active layer; and a P-type doped layer. At least one of the N-type doped layer and the P-type doped layer comprises an uneven layer adapted to concentrate light emitting from the light emitting layer.
    Type: Grant
    Filed: December 10, 2015
    Date of Patent: April 2, 2019
    Assignees: BOE TECHNOLOGY GROUP CO., LTD., BOE (Hebei) Mobile Display Technology Co., Ltd.
    Inventors: Jianjie Wu, Lili Chen, Ruijun Dong, Chenru Wang, Guangquan Wang, Haiwei Sun
  • Patent number: 10192912
    Abstract: The present technology relates to a solid-state imaging device, a manufacturing method of a solid-state imaging device, and an electronic device, in which degradation of transfer characteristics of a photo diode can be suppressed. A floating diffusion is formed to reach the same depth as a layer of a photo diode formed on a silicon substrate, and a transfer transistor gate is formed therebetween. A channel that is opened/closed by control of the transfer transistor gate is formed in the silicon substrate formed with the photo diode. With this configuration, charge accumulated in the photo diode can be transferred to the floating diffusion in a vertical direction relative to the depth direction, and degradation of transfer characteristics caused by elimination of the transfer channel can be suppressed by setting the transfer channel in the depth direction. The present technology can be applied to a solid-state imaging device.
    Type: Grant
    Filed: January 17, 2018
    Date of Patent: January 29, 2019
    Assignee: Sony Semiconductor Solutions Corporation
    Inventors: Takuya Sano, Ryusei Naito, Kazunobu Ota
  • Patent number: 10186537
    Abstract: An pixel unit includes a photoelectric conversion element, a transfer transistor having a transfer gate abutting on the photoelectric conversion element, and a floating diffusion region on which the transfer gate abuts, wherein the transfer gate includes a first gate portion having a first gate width in a gate width direction, the first gate portion abutting on the floating diffusion region and extending away from the floating diffusion region in a gate length direction, and a second gate portion having a second gate width narrower than the first gate width in the gate width direction, the second gate portion extending continuously from the first gate portion in the gate length direction, and wherein a width of the second gate portion gradually decreases from the first gate width to the second gate width toward a direction away from the first gate portion.
    Type: Grant
    Filed: February 21, 2017
    Date of Patent: January 22, 2019
    Assignee: Ricoh Company Ltd.
    Inventor: Atsushi Suzuki
  • Patent number: 10163962
    Abstract: The present technology relates to a solid-state imaging apparatus, a manufacturing method therefor, and an electronic apparatus by which fine pixel signals can be suitably generated. A charge accumulation section that is formed on a first semiconductor substrate and accumulates photoelectrically converted charges, a charge-retaining section that is formed on a second semiconductor substrate and retains charges accumulated in the charge accumulation section, and a transfer transistor that is formed on the first semiconductor substrate and the second semiconductor substrate and transfers charges accumulated in the charge accumulation section to the charge-retaining section are provided. A bonding interface between the first semiconductor substrate and the second semiconductor substrate is formed in a channel of the transfer transistor.
    Type: Grant
    Filed: December 29, 2016
    Date of Patent: December 25, 2018
    Assignee: Sony Semiconductor Solution Corporation
    Inventor: Hiroshi Tayanaka
  • Patent number: 10115800
    Abstract: A method of manufacturing a bipolar junction transistor (BJT) structure is provided. Pattern etching through a second semiconductor layer and recessing a silicon germanium layer are performed to form a plurality of vertical fins each including a silicon germanium pattern, a second semiconductor pattern and a hard mask pattern sequentially stacked on a first semiconductor layer above a substrate. First spacers are formed on sidewalls of the plurality of vertical fins. Exposed silicon germanium layer above the first semiconductor layer is directionally etched away. A germanium oxide layer is conformally coated to cover all exposed top and sidewall surfaces. Condensation annealing followed by silicon oxide strip is performed. The first spacers, remaining germanium oxide layer and the hard mask pattern are removed. A dielectric material is deposited to isolate the plurality of vertical fins.
    Type: Grant
    Filed: November 29, 2017
    Date of Patent: October 30, 2018
    Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Seyoung Kim, Choonghyun Lee, Injo Ok, Soon-Cheon Seo
  • Patent number: 10097147
    Abstract: A circuit for automatically measuring gain of a built-in trans-impedance amplifier includes a current source built in a trans-impedance amplifier chip for generating a constant current to an input end of the trans-impedance amplifier. The circuit samples a voltage amplitude at an output end of the trans-impedance amplifier using a voltage amplitude sampling device, and calculates the gain of the trans-impedance amplifier. The current source has a constant reference voltage source, a reference current generator, a clock source, an AC switch, and an off-chip precision resistor. The circuit is configured to measure gain of trans-impedance amplifiers directly.
    Type: Grant
    Filed: September 14, 2017
    Date of Patent: October 9, 2018
    Assignee: XIAMEN UX HIGH-SPEED IC CO., LTD.
    Inventor: Shaoheng Lin
  • Patent number: 10068940
    Abstract: An imaging apparatus includes a micro lens, a second photoelectric conversion element that is located adjacent to a first photoelectric conversion element in a first direction, and a third photoelectric conversion element that is located adjacent to the first photoelectric conversion in a second direction intersecting with the first direction, wherein the height of a potential barrier produced at a region between the first and third photoelectric conversion elements against a signal charge is less than the height of a potential barrier produced at a region between the first and second photoelectric conversion elements against a signal charge.
    Type: Grant
    Filed: March 6, 2017
    Date of Patent: September 4, 2018
    Assignee: CANON KABUSHIKI KAISHA
    Inventors: Satoshi Koizumi, Masahiro Kobayashi
  • Patent number: 10062723
    Abstract: A semiconductor device is reduced in power consumption, the semiconductor device including a solid-state imaging device that includes pixels each having a plurality of light receiving elements. A pixel having first and second photodiodes is provided with a first transfer transistor that transfers charge in the first photodiode to a floating diffusion capacitance section, and a second transfer transistor that combines charge in the first photodiode and charge in the second photodiode, and transfers the combined charge to the floating diffusion capacitance section. Consequently, the semiconductor device is reduced in power required for activation of each transfer transistor in operation such as imaging with the solid-state imaging device.
    Type: Grant
    Filed: August 9, 2016
    Date of Patent: August 28, 2018
    Assignee: Renesas Electronics Corporation
    Inventor: Masatoshi Kimura
  • Patent number: 10038027
    Abstract: The present disclosure provides CMOS image sensors and fabrication methods thereof. An exemplary fabrication process of a CMOS image sensor includes providing a substrate having a first region and a second region connecting with the first region at a first end of the first region; forming a transfer transistor on surface of the substrate in the second region; forming a first implanting region in the substrate in the first region using a first mask; forming a second implanting region in the first implanting region by, the first implanting region being separated into a third implanting region on the second implanting region and a fourth implanting region under the second implanting region; forming a fifth region in the second region at the first end using a second mask, connecting the third implanting region with the fourth implanting region.
    Type: Grant
    Filed: January 3, 2017
    Date of Patent: July 31, 2018
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
    Inventors: Dae-Sub Jung, Deyan Chen, Xuejie Shi
  • Patent number: 9985068
    Abstract: There is provided a solid state imaging device including a pixel including a photoelectric conversion unit that generates and accumulates a charge according to a received light amount, a charge accumulation unit that accumulates the generated charge, a first transfer transistor that transfers the charge of the photoelectric conversion unit to the charge accumulation unit, a charge holding unit that holds the charge to read out as a signal, and a second transfer transistor that transfers the charge of the charge accumulation unit to the charge holding unit, in which a gate electrode of the first transfer transistor is formed to be buried up to a predetermined depth from a semiconductor substrate interface, and the charge accumulation unit is formed in a longitudinally long shape to be extended in a depth direction along a side wall of the gate electrode of the first transfer transistor to be buried therein.
    Type: Grant
    Filed: October 14, 2014
    Date of Patent: May 29, 2018
    Assignee: Sony Semiconductor Solutions Corporation
    Inventors: Taiichiro Watanabe, Fumihiko Koga
  • Patent number: 9961262
    Abstract: A solid-state imaging device and a method therefore capable of suppressing occurrence of motion distortion are provided. Each pixel includes a photo diode PD which accumulates a charge generated by photo-electric conversion in an accumulation period, a transfer transistor capable of transferring the accumulated charge in a transfer period, a floating diffusion FD to which the charge accumulated in the photo diode PD is transferred, a source-follower transistor which converts the charge of the floating diffusion FD to a voltage signal in accordance with the charge quantity, and a capacity changing portion capable of changing the capacity of the floating diffusion FD in accordance with a capacity changing signal, the capacity of the floating diffusion FD being changed by the capacity changing portion in a predetermined period in one readout period with respect to the accumulation period and a conversion gain being switched in this one readout period.
    Type: Grant
    Filed: June 29, 2017
    Date of Patent: May 1, 2018
    Assignee: Brillnics Japan Inc.
    Inventors: Shunsuke Okura, Isao Takayanagi
  • Patent number: 9923024
    Abstract: An imaging sensor pixel comprises a highly resistive N? doped semiconductor layer with a front side and a back side. At the front side, there are at least a light sensing region, a transfer gate adjacent to the light sensing region and a P-well region. The P-well region surrounds the light sensing region and the transfer gate region, and comprises at least a floating diffusion region and a first electrode outside of the floating diffusion region, wherein a first negative voltage is applied to the first electrode. The transfer gate couples between the light sensing region and the floating diffusion region. At the back side, there is a back side P+ doped layer comprising a second electrode formed on the back side P+ doped layer, wherein a second negative voltage is applied to the second electrode. The second negative voltage is more negative than the first negative voltage.
    Type: Grant
    Filed: May 26, 2017
    Date of Patent: March 20, 2018
    Assignee: OmniVision Technologies, Inc.
    Inventors: Keiji Mabuchi, Sohei Manabe, Duli Mao
  • Patent number: 9887219
    Abstract: The present technology relates to a solid-state imaging device, a manufacturing method of a solid-state imaging device, and an electronic device, in which degradation of transfer characteristics of a photo diode can be suppressed. A floating diffusion is formed to reach the same depth as a layer of a photo diode formed on a silicon substrate, and a transfer transistor gate is formed therebetween. A channel that is opened/closed by control of the transfer transistor gate is formed in the silicon substrate formed with the photo diode. With this configuration, charge accumulated in the photo diode can be transferred to the floating diffusion in a vertical direction relative to the depth direction, and degradation of transfer characteristics caused by elimination of the transfer channel can be suppressed by setting the transfer channel in the depth direction. The present technology can be applied to a solid-state imaging device.
    Type: Grant
    Filed: May 1, 2015
    Date of Patent: February 6, 2018
    Assignee: Sony Semiconductor Solutions Corporation
    Inventors: Takuya Sano, Ryusei Naito, Kazunobu Ota
  • Patent number: 9865634
    Abstract: An image sensor includes a photoelectric conversion element suitable for generating photocharges corresponding to incident light, a transfer transistor suitable for transferring the generated photocharges to a floating diffusion node based on a transfer signal, and a reset transistor suitable for resetting the floating diffusion node based on a reset signal and including a memory gate.
    Type: Grant
    Filed: December 10, 2014
    Date of Patent: January 9, 2018
    Assignee: SK Hynix Inc.
    Inventor: Do-Hwan Kim
  • Patent number: 9859323
    Abstract: A complementary metal-oxide-semiconductor (CMOS) image sensor having a passivation layer is provided. The CMOS image sensor includes a sensing device substrate. Isolation structures are positioned within trenches of the sensing device substrate. The isolation structures are arranged along opposing sides of a plurality of image sensing devices. The CMOS image sensor also includes a passivation layer. The passivation layer includes passivation sidewalls arranged along the sidewalls of the isolation structures. A metallic grid overlies the passivation layer. The metallic grid includes a metal framework surrounding openings overlying the plurality of image sensing devices. The passivation layer further includes passivation section underlying the openings.
    Type: Grant
    Filed: June 13, 2016
    Date of Patent: January 2, 2018
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Sheng-Chau Chen, Cheng-Hsien Chou, Cheng-Yuan Tsai, Sheng-Chan Li, Zhi-Yang Wang
  • Patent number: 9837458
    Abstract: The present disclosure provides an image sensor semiconductor device. The semiconductor device includes a semiconductor substrate having a first type of dopant; a semiconductor layer having a second type of dopant different from the first type of dopant and disposed on the semiconductor substrate; a photo-sensitive structure formed in the semiconductor layer; a multi-layer interconnect (MLI) structure disposed on the semiconductor layer; a color filter disposed on the MLI structure and disposed above the photo-sensitive structure; and a microlens disposed over the color filter and disposed above the photo-sensitive structure.
    Type: Grant
    Filed: October 17, 2016
    Date of Patent: December 5, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chung-Wei Chang, Han-Chi Liu, Chun-Yao Ko, Shou-Gwo Wuu