With Devices Vertically Spaced In Different Layers Of Semiconductor Material (e.g., "3-dimensional" Integrated Circuit) Patents (Class 257/278)
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Patent number: 11621249Abstract: A 3D semiconductor device, the device including: a first level; and a second level, where the first level includes single crystal silicon and a plurality of logic circuits, where the second level is disposed above the first level and includes a plurality of arrays of memory cells, where the single crystal silicon includes an area, and where the area is greater than 1,000 mm2.Type: GrantFiled: August 6, 2021Date of Patent: April 4, 2023Assignee: Monolithic 3D Inc.Inventors: Zvi Or-Bach, Jin-Woo Han, Brian Cronquist
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Patent number: 11616078Abstract: A three-dimensional (3D) semiconductor memory device including: first and second semiconductor layers horizontally spaced apart from each other; a buried insulating layer between the first and second semiconductor layers; a first cell array structure disposed on the first semiconductor layer, and a second cell array structure disposed on the second semiconductor layer; and an isolation structure disposed on the buried insulating layer between the first and second cell array structures, wherein the first cell array structure includes: an electrode structure including electrodes, which are stacked in a direction perpendicular to a top surface of the first semiconductor layer; and a first source structure disposed between the first semiconductor layer and the electrode structure, the first source structure is extended onto the buried insulating layer, and the isolation structure is between the first source structure of the first cell array structure and a second source structure of the second cell array structurType: GrantFiled: August 19, 2021Date of Patent: March 28, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Jongseon Ahn, Jaeryong Sim, Giyong Chung, Jeehoon Han
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Patent number: 11257689Abstract: A 3D semiconductor device, the device comprising: a first level, wherein said first level comprises a first layer, said first layer comprising first transistors, and wherein said first level comprises a second layer, said second layer comprising first interconnections; a second level overlaying said first level, wherein said second level comprises a third layer, said third layer comprising second transistors, and wherein said second level comprises a fourth layer, said fourth layer comprising second interconnections; and a plurality of connection paths, wherein said plurality of connection paths provides connections from a plurality of said first transistors to a plurality of said second transistors, wherein said second level is bonded to said first level, wherein said bonded comprises oxide to oxide bond regions, wherein said bonded comprises metal to metal bond regions, and wherein said first level comprises a plurality of trench capacitors.Type: GrantFiled: October 11, 2021Date of Patent: February 22, 2022Assignee: MONOLITHIC 3D INC.Inventors: Zvi Or-Bach, Brian Cronquist, Deepak Sekar
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Patent number: 11121121Abstract: A 3D semiconductor device, the device including: a first level; a second level; and a third level, where the first level includes single crystal silicon and a plurality of logic circuits, where the plurality of logic circuits includes a first logic circuit and a second logic circuit, where the second level is disposed directly above the first level and includes a first plurality of arrays of memory cells, where the third level is disposed directly above the second level and includes a plurality of on-chip RF circuits, and where a portion of interconnections between the first logic circuit and the second logic circuit includes the plurality of on-chip RF circuits.Type: GrantFiled: September 2, 2019Date of Patent: September 14, 2021Assignee: MONOLITHIC 3D Inc.Inventors: Zvi Or-Bach, Jin-Woo Han, Brian Cronquist
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Patent number: 10847432Abstract: A display device includes a pixel connected to a data line, a data pad connected to the data line, and a first test area. The first test area includes a test control line transmitting a test control signal, a test signal line transmitting a test signal, and a first switch connected to the data pad. The first switch includes a gate electrode connected to the test control line, first and second semiconductor layers overlapping the gate electrode, a source electrode connected to the first and second semiconductor layers, and a drain electrode spaced from the source electrode and connected to the first and second semiconductor layers. The source electrode and the drain electrode are connected to the test signal line and data pad, respectively. One of the first or second semiconductor layers includes an oxide semiconductor and the other of the first or second semiconductor layer includes a silicon-based semiconductor.Type: GrantFiled: September 1, 2017Date of Patent: November 24, 2020Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Jihyun Ka, Wonkyu Kwak, Hansung Bae
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Patent number: 10763861Abstract: The present invention discloses a processor comprising three-dimensional memory (3D-M) array (3D-processor). Instead of logic-based computation (LBC), the 3D-processor uses memory-based computation (MBC). It comprises an array of computing elements, with each computing element comprising an arithmetic logic circuit (ALC) and a 3D-M-based look-up table (3DM-LUT). The ALC performs arithmetic operations on the LUT data, while the 3DM-LUT is stored in at least one 3D-M array.Type: GrantFiled: April 13, 2017Date of Patent: September 1, 2020Assignees: HangZhou HaiCun Information Technology Co., Ltd.Inventors: Guobiao Zhang, Chen Shen
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Patent number: 10571248Abstract: A system includes one or more wafer geometry measurement tools configured to obtain geometry measurements from a wafer. The system also includes one or more processors in communication with the one or more wafer geometry measurement tools. The one or more processors are configured to apply a correction model to correct the geometry measurements obtained by the one or more wafer geometry measurement tools. The correction model is configured to correct measurement errors caused by a transparent film positioned on the wafer.Type: GrantFiled: July 13, 2017Date of Patent: February 25, 2020Assignee: KLA-Tencor CorporationInventors: Helen Liu, Andrew Zeng
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Patent number: 10388780Abstract: According to one embodiment, a semiconductor device includes a first electrode, a first semiconductor region of a first conductivity type, a second semiconductor region of a second conductivity type, a second electrode, and a first layer. The first layer includes at least one selected from the group consisting of silicon nitride, silicon oxide, and silicon oxynitride. The first layer includes a first portion, a second portion, and a third portion. The first portion is provided on the second electrode. The second portion is provided on the first portion. A content of silicon of the second portion is higher than a content of silicon of the first portion. A third portion is provided on the second portion. A content of silicon of the third portion is lower than the content of silicon of the second portion.Type: GrantFiled: July 18, 2018Date of Patent: August 20, 2019Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage CorporationInventor: Tomotaka Narita
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Patent number: 10204873Abstract: In some examples, a device includes a substrate and a conductive pad extending through the substrate, wherein the substrate is coupled to the conductive pad at an interface and the substrate extends laterally from the interface to define a substrate extension. In some examples, the device also includes a semiconductor die mounted on the first side of the substrate. In some examples, the device includes a breakpoint that defines a torque tolerance that is less than a torque tolerance of the device at other points. In some examples, the device is configured to break at the breakpoint in response to force being applied to the substrate extension on the first side of the substrate.Type: GrantFiled: May 8, 2017Date of Patent: February 12, 2019Assignee: Infineon Technologies Americas Corp.Inventors: Eung San Cho, Chuan Cheah
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Patent number: 10163930Abstract: A semiconductor device includes bit lines extending along a first direction, the bit lines being arranged along a second direction intersecting the first direction, a plurality of channel layers disposed under the bit lines, the plurality of channel layers extending in a third direction perpendicular to a plane extending along the first and second directions and spaced apart along the second direction, so that each channel layer is at least partially overlapped with at least two of the bit lines, and a contact plug extending, from the channel layer, toward one of the bit lines overlapped with the channel layer.Type: GrantFiled: December 5, 2017Date of Patent: December 25, 2018Assignee: SK Hynix Inc.Inventor: Nam Jae Lee
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Patent number: 10050057Abstract: A semiconductor device includes bit lines extending along a first direction, the bit lines being arranged along a second direction intersecting the first direction, a plurality of channel layers disposed under the bit lines, the plurality of channel layers extending in a third direction perpendicular to a plane extending along the first and second directions and spaced apart along the second direction, so that each channel layer is at least partially overlapped with at least two of the bit lines, and a contact plug extending, from the channel layer, toward one of the bit lines overlapped with the channel layer.Type: GrantFiled: December 5, 2017Date of Patent: August 14, 2018Assignee: SK Hynix Inc.Inventor: Nam Jae Lee
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Patent number: 9941275Abstract: An Integrated Circuit device, including: a first layer including first single crystal transistors; a second layer overlaying the first layer, the second layer including second single crystal transistors, where the second layer thickness is less than one micron, where a plurality of the first transistors is circumscribed by a first dice lane of at least 10 microns width, and there are no first conductive connections to the plurality of the first transistors that cross the first dice lane, where a plurality of the second transistors are circumscribed by a second dice lane of at least 10 microns width, and there are no second conductive connections to the plurality of the second transistors that cross the second dice lane, and at least one thermal conducting path from at least one of the second single crystal transistors to an external surface of the device.Type: GrantFiled: March 27, 2017Date of Patent: April 10, 2018Assignee: MONOLITHIC 3D INC.Inventors: Zvi Or-Bach, Brian Cronquist, Deepak Sekar
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Patent number: 9917109Abstract: A semiconductor device includes a wiring embedded in an insulating layer, an oxide semiconductor layer over the insulating layer, a source electrode and a drain electrode electrically connected to the oxide semiconductor layer, a gate electrode provided to overlap with the oxide semiconductor layer, and a gate insulating layer provided between the oxide semiconductor layer and the gate electrode. The insulating layer is formed so that part of a top surface of the wiring is exposed. The part of the top surface of the wiring is positioned higher than part of a surface of the insulating layer. The wiring in a region exposed from the insulating layer is electrically connected to the source electrode or the drain electrode. The root-mean-square roughness of a region which is part of the surface of the insulating layer and in contact with the oxide semiconductor layer is 1 nm or less.Type: GrantFiled: March 3, 2011Date of Patent: March 13, 2018Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Teruyuki Fujii, Ryota Imahayashi
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Patent number: 9905547Abstract: A chipset with light energy harvester, includes a substrate, a functional element layer, and a light energy harvesting layer, both are stacked vertically on the substrate, and an interconnects connected between the functional element layer and the light energy harvesting layer.Type: GrantFiled: October 14, 2015Date of Patent: February 27, 2018Assignee: NATIONAL APPLIED RESEARCH LABORATORIESInventors: Chang-Hong Shen, Jia-Min Shieh, Wen-Hsien Huang, Tsung-Ta Wu, Chih-Chao Yang, Tung-Ying Hsieh
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Patent number: 9679840Abstract: A computer implemented layout method for an integrated circuit (IC) structure and IC structure are provided. The layout method can include placing a circuit cell and an inter-layer via together in a first device layer of the IC structure, and placing a metal pattern in a second device layer of the IC structure. The inter-layer via and the metal pattern may be configured to form a direct connection channel for the circuit cell and the metal pattern.Type: GrantFiled: March 20, 2014Date of Patent: June 13, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Yi-Lin Chuang, Ching-Fang Chen, Jia-Jye Shen
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Patent number: 9640445Abstract: A method of fabricating a switched-capacitor converter includes providing a semiconductor layer having a top surface and a bottom surface, forming switching elements on the top surface of the semiconductor layer, forming a first insulation layer and first interconnection patterns on the switching elements, forming a second insulation layer over the first insulation layer and the first interconnection patterns, forming a second interconnection pattern over the second insulation layer, forming a third insulation layer over the second insulation layer and the second interconnection pattern, forming third interconnection patterns and a lower interconnection pattern over the bottom surface of the semiconductor layer, forming a capacitor over the lower interconnection pattern, forming a fourth insulation layer over the bottom surface of the semiconductor layer to expose an upper electrode pattern of the capacitor, forming a fifth insulation layer covering the capacitor, and forming pads in the fifth insulation layeType: GrantFiled: April 15, 2016Date of Patent: May 2, 2017Assignee: SK Hynix Inc.Inventor: Jae Ho Hwang
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Patent number: 9601204Abstract: A three-dimensional (3D) semiconductor memory device includes a CMOS circuit structure including a plurality of column blocks each comprising a plurality of page buffer circuits, and a lower wiring structure and a memory structure sequentially stacked over the CMOS circuit structure. The memory structure overlaps a first circuit region of the CMOS circuit structure and does not overlap a second circuit region of the CMOS circuit structure, and the plurality of column blocks are contained within the first circuit region of the CMOS circuit structure.Type: GrantFiled: October 27, 2014Date of Patent: March 21, 2017Assignee: Samsung Electronics Co., Ltd.Inventors: Jintaek Park, Youngwoo Park, Jaeduk Lee
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Patent number: 9478284Abstract: An object of this invention is to provide a semiconductor memory device capable of increasing the read transfer rate by performing the read operation in parallel while suppressing the voltage drop when a large current is passed to a memory chain and reducing a chip area by reducing the number of peripheral circuits to feed power. A semiconductor memory device according to this invention includes upper and lower electrodes in a flat plate shape, first and second select transistors extending in first and second directions respectively, and a wire arranged between the first select transistor and the second select transistor and the wire and the lower electrode are configured to be electrically insulated from each other by turning off the first select transistor (see FIG. 2).Type: GrantFiled: May 20, 2013Date of Patent: October 25, 2016Assignee: Hitachi, Ltd.Inventors: Yoshitaka Sasago, Hiroyuki Minemura, Kenzo Kurotsuchi, Seiji Miura, Satoru Hanzawa
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Patent number: 9177610Abstract: An apparatus includes a semiconductor device including a three-dimensional (3D) memory. The 3D memory includes multiple memory cells arranged in multiple physical levels above a substrate. The 3D memory includes circuitry associated with operation of the multiple memory cells and includes a differential signaling interface.Type: GrantFiled: April 7, 2014Date of Patent: November 3, 2015Assignee: SANDISK TECHNOLOGIES INC.Inventors: Manuel Antonio D'Abreu, Stephen Skala, Dimitris Pantelakis, Radhakrishnan Nair, Deepak Pancholi
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Patent number: 9031684Abstract: A method and system for integrated circuit fabrication is disclosed. In an example, the method includes determining a first process parameter of a wafer and a second process parameter of the wafer, the first process parameter and the second process parameter corresponding to different wafer characteristics; determining a variation of a device parameter of the wafer based on the first process parameter and the second process parameter; constructing a model for the device parameter as a function of the first process parameter and the second process parameter based on the determined variation of the device parameter of the wafer; and performing a fabrication process based on the model.Type: GrantFiled: November 1, 2011Date of Patent: May 12, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Nai-Han Cheng, Chin-Hsiang Lin, Chi-Ming Yang, Chun-Lin Chang, Chih-Hong Hwang
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Patent number: 8952441Abstract: According to one embodiment, a device includes a first fin structure having first to n-th semiconductor layers (n is a natural number equal to or more than 2) stacked in a first direction perpendicular to a surface of a semiconductor substrate, and extending in a second direction parallel to the surface of the semiconductor substrate, first to n-th memory cells provided on surfaces of the first to n-th semiconductor layers in a third direction perpendicular to the first and second directions respectively, and first to n-th select transistors connected in series to the first to n-th memory cells respectively.Type: GrantFiled: May 16, 2013Date of Patent: February 10, 2015Assignee: Kabushiki Kaisha ToshibaInventors: Kiwamu Sakuma, Haruka Kusai, Yasuhito Yoshimizu, Masahiro Kiyotoshi
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Patent number: 8900921Abstract: A semiconductor device has a core semiconductor device with a through silicon via (TSV). The core semiconductor device includes a plurality of stacked semiconductor die and semiconductor component. An insulating layer is formed around the core semiconductor device. A conductive via is formed through the insulating layer. A first interconnect structure is formed over a first side of the core semiconductor device. The first interconnect structure is electrically connected to the TSV. A second interconnect structure is formed over a second side of the core semiconductor device. The second interconnect structure is electrically connected to the TSV. The first and second interconnect structures include a plurality of conductive layers separated by insulating layers. A semiconductor die is mounted to the first interconnect structure. The semiconductor die is electrically connected to the core semiconductor device through the first and second interconnect structures and TSV.Type: GrantFiled: December 11, 2008Date of Patent: December 2, 2014Assignee: STATS ChipPAC, Ltd.Inventors: Sun Mi Kim, OhHan Kim, KyungHoon Lee
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Patent number: 8895370Abstract: A vertical conduction power device includes respective gate, source and drain areas formed in an epitaxial layer on a semiconductor substrate. The respective gate, source and drain metallizations are formed by a first metallization level. The gate, source and drain terminals are formed by a second metallization level. The device is configured as a set of modular areas extending parallel to each other. Each modular area has a rectangular elongate source area perimetrically surrounded by a gate area, and a drain area defined by first and second regions. The first regions of the drain extend parallel to one another and separate adjacent modular areas. The second regions of the drain area extend parallel to one another and contact ends of the first regions of the drain area.Type: GrantFiled: September 30, 2013Date of Patent: November 25, 2014Assignee: STMicroelectronics S.R.L.Inventors: Ferruccio Frisina, Giuseppe Ferla, Angelo Magri′
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Patent number: 8884442Abstract: Through the intermetal dielectric (2) and the semiconductor material of the substrate (1) a contact hole is formed, and a contact area of a connection metal plane (3) that faces the substrate is exposed in the contact hole. A metallization (11) is applied, which forms a connection contact (12) on the contact area, a through-contact (13) in the contact hole and a connection contact (20) on a contact area facing away from the substrate and/or on a vertical conductive connection (15) of the upper metal plane (24).Type: GrantFiled: August 9, 2011Date of Patent: November 11, 2014Assignee: ams AGInventors: Jochen Kraft, Stefan Jessenig, Günther Koppitsch, Franz Schrank, Jordi Teva, Bernhard Löffler, Jörg Siegert
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Patent number: 8871626Abstract: FinFETS and methods for making FinFETs with a vertical silicide structure. A method includes providing a substrate with a plurality of fins, forming a gate stack above the substrate wherein the gate stack has at least one sidewall and forming an off-set spacer adjacent the gate stack sidewall. The method also includes growing an epitaxial film which merges the fins to form an epi-merge layer, forming a field oxide layer adjacent to at least a portion of the off-set spacer and removing a portion of the field oxide layer to expose a portion of the epi-merge-layer. The method further includes removing at least part of the exposed portion of the epi-merge-layer to form an epi-merge sidewall and an epi-merge spacer region and forming a silicide within the epi-merge sidewall to form a silicide layer and two silicide sidewalls.Type: GrantFiled: October 11, 2012Date of Patent: October 28, 2014Assignee: International Business Machines CorporationInventors: Veeraraghavan S. Basker, Chung-Hsun Lin, Tenko Yamashita, Chun-Chen Yeh
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Patent number: 8803206Abstract: A 3D semiconductor device, including: a first layer including first transistors; a second layer including second transistors; where the second transistors are aligned to the first transistors, and a first circuit including at least one of the first transistors, where the first circuit has a first circuit output connected to at least one of the second transistors, and where at least one of the second transistors is connected to a device output, and where the device output includes a contact port for connection to external devices, and where at least one of the second transistors is substantially larger than at least one of the first transistors.Type: GrantFiled: April 3, 2013Date of Patent: August 12, 2014Assignee: Monolithic 3D Inc.Inventors: Zvi Or-Bach, Brian Cronquist, Deepak Sekar
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Patent number: 8791506Abstract: Embodiments disclosed herein include methods in which a pair of openings are formed into semiconductor material, with the openings being spaced from one another by a segment of the semiconductor material. Liners are formed along sidewalls of the openings, and then semiconductor material is isotropically etched from bottoms of the openings to merge the openings and thereby completely undercut the segment of semiconductor material. Embodiments disclosed herein may be utilized in forming SOI constructions, and in forming field effect transistors having transistor gates entirely surrounding channel regions. Embodiments disclosed herein also include semiconductor constructions having transistor gates surrounding channel regions, as well as constructions in which insulative material entirely separates an upper semiconductor material from a lower semiconductor material.Type: GrantFiled: September 2, 2011Date of Patent: July 29, 2014Assignee: Micron Technology, Inc.Inventors: Ted Taylor, Xiawan Yang
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Patent number: 8766332Abstract: A die is formed with different and optimized critical dimensions in different device levels and areas of those device levels using photolithography and etch techniques. One aspect of the invention provides for a memory array formed above a substrate, with driver circuitry formed in the substrate. A level of the memory array consists of, for example, parallel rails and a fan-out region. It is desirable to maximize density of the rails and minimize cost of lithography for the entire memory array. This can be achieved by forming the rails at a tighter pitch than the CMOS circuitry beneath it, allowing cheaper lithography tools to be used when forming the CMOS, and similarly by optimizing lithography and etch techniques for a device level to produce a tight pitch in the rails, and a more relaxed pitch in the less-critical fan-out region.Type: GrantFiled: September 13, 2012Date of Patent: July 1, 2014Assignee: SanDisk 3D LLCInventors: James M. Cleeves, Roy E. Scheuerlein
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Patent number: 8754443Abstract: Memory devices and methods of making memory devices are shown. Methods and configurations as shown provide folded and vertical memory devices for increased memory density. Methods provided allow trace wiring in a memory array to be formed on or near a surface of a memory device.Type: GrantFiled: September 15, 2012Date of Patent: June 17, 2014Assignee: Micron Technology, Inc.Inventors: Suraj J. Mathew, Chandra Mouli
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Patent number: 8735902Abstract: Memories and their formation are disclosed. One such memory has a first array of first memory cells extending in a first direction from a first surface of a semiconductor. A second array of second memory cells extends in a second direction, opposite to the first direction, from a second surface of the semiconductor. Both arrays may be non-volatile memory arrays. For example, one of the memory arrays may be a NAND flash memory array, while the other may be a one-time-programmable memory array.Type: GrantFiled: May 10, 2010Date of Patent: May 27, 2014Assignee: Micron Technology, Inc.Inventors: Sanh D. Tang, John Zahurak, Siddartha Kondoju, Haitao Liu, Nishant Sinha
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Patent number: 8697569Abstract: A method of forming a conductive element on a substrate and the resulting assembly are provided. The method includes forming a groove in a sacrificial layer overlying a dielectric region disposed on a substrate. The groove preferably extends along a sloped surface of the substrate. The sacrificial layer is preferably removed by a non-photolithographic method, such as ablating with a laser, mechanical milling, or sandblasting. A conductive element is formed in the groove. The grooves may be formed. The grooves and conductive elements may be formed along any surface of the substrate, including within trenches and vias formed therein, and may connect to conductive pads on the front and/or rear surface of the substrate. The conductive elements are preferably formed by plating and may or may not conform to the surface of the substrate.Type: GrantFiled: July 23, 2010Date of Patent: April 15, 2014Assignee: Tessera, Inc.Inventors: Vage Oganesian, Belgacem Haba, Ilyas Mohammed, Craig Mitchell, Piyush Savalia
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Publication number: 20140054585Abstract: A lateral semiconductor device having a vertical region for providing a protective avalanche breakdown (PAB) is disclosed. The lateral semiconductor device has a lateral structure that includes a conductive substrate, semi-insulating layer(s) disposed on the conductive substrate, device layer(s) disposed on the semi-insulating layer(s), along with a source electrode and a drain electrode disposed on the device layer(s). The vertical region is separated from the source electrode by a lateral region wherein the vertical region has a relatively lower breakdown voltage level than a relatively higher breakdown voltage level of the lateral region for providing the PAB within the vertical region to prevent a potentially damaging breakdown of the lateral region. The vertical region is structured to be more rugged than the lateral region and thus will not be damaged by a PAB event.Type: ApplicationFiled: August 22, 2013Publication date: February 27, 2014Applicant: RF Micro Devices, Inc.Inventor: Andrew P. Ritenour
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Patent number: 8633515Abstract: Embodiments of a semiconductor structure include a first current electrode region, a second current electrode region, and a channel region. The channel region is located between the first current electrode region and the second current electrode region, and the channel region is located in a fin structure of the semiconductor structure. A carrier transport in the channel region is generally in a horizontal direction between the first current electrode region and the second current electrode region. A contact extends into the first current electrode region and is electrically coupled to the first current electrode region.Type: GrantFiled: September 13, 2012Date of Patent: January 21, 2014Assignee: Freescale Semiconductor, Inc.Inventors: Marius K. Orlowski, James D. Burnett
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Patent number: 8624332Abstract: A vertical conduction electronic power device includes respective gate, source and drain areas in an epitaxial layer arranged on a semiconductor substrate. The respective gate, source and drain metallizations may be formed by a first metallization level. Corresponding gate, source and drain terminals or pads may be formed by a second metallization level. The power device is configured as a set of modular areas extending parallel to each other, each having a rectangular elongate source area perimetrically surrounded by a narrow gate area. The modular areas are separated from each other by regions with the drain area extending parallel and connected at the opposite ends thereof to a second closed region with the drain area forming a device outer peripheral edge.Type: GrantFiled: September 26, 2005Date of Patent: January 7, 2014Assignee: STMicroelectronics S.R.L.Inventors: Ferruccio Frisina, Giuseppe Ferla, Angelo Magrì
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Patent number: 8574982Abstract: A method and circuit for implementing an embedded dynamic random access memory (eDRAM), and a design structure on which the subject circuit resides are provided. The embedded dynamic random access memory (eDRAM) circuit includes a stacked field effect transistor (FET) and capacitor. The capacitor is fabricated directly on top of the FET to build the eDRAM.Type: GrantFiled: February 25, 2010Date of Patent: November 5, 2013Assignee: International Business Machines CorporationInventors: Karl Robert Erickson, David Paul Paulsen, John Edward Sheets, II, Kelly L. Williams
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Patent number: 8513058Abstract: a method for producing a semiconductor device provided in such a manner that a first layer and a second layer are laminated to ensure that their TSVs are arranged in almost a straight line, including: first layer production steps including steps of preparing a substrate, forming a transistor of an input/output circuit on an upper surface of the substrate, forming an insulation layer so as to cover the transistor, and forming a TSV in the insulation layer; second layer production steps including steps of preparing a substrate, forming a transistor of a logic circuit on an upper surface of the substrate, forming an insulation layer so as to cover the transistor, and forming a TSV in the insulation layer; a connection step of connecting surfaces of the first layer and the second layer on a side opposite to substrates of the first layer and the second layer to ensure that the TSV of the first layer and the TSV of the second layer are arranged in almost a straight line; and a step of removing the substrate of theType: GrantFiled: February 2, 2011Date of Patent: August 20, 2013Assignee: Renesas Electronics CorporationInventors: Toshiaki Iwamatsu, Yuichi Hirano
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Patent number: 8481372Abstract: In accordance with the present techniques, there is provided a JFET device structures and methods for fabricating the same. Specifically, there is provided a transistor including a semiconductor substrate having a source and a drain. The transistor also includes a doped channel formed in the semiconductor substrate between the source and the drain, the channel configured to pass current between the source and the drain. Additionally, the transistor has a gate comprising a semiconductor material formed over the channel and dielectric spacers on each side of the gate. The source and the drain are spatially separated from the gate so that the gate is not over the drain and source.Type: GrantFiled: December 11, 2008Date of Patent: July 9, 2013Assignee: Micron Technology, Inc.Inventor: Chandra Mouli
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Patent number: 8476733Abstract: A semiconductor device 100 includes: a body region 105 of a first conductivity type placed on a principal surface of a substrate 101; a silicon carbide layer 102 including a drift region 107 of a second conductivity type; a channel layer 115 of the second conductivity type formed by silicon carbide and placed on the body region 105 and the drift region 107 on a surface of the silicon carbide layer 102; a gate insulating film 111 placed on the channel layer 115; a gate electrode 113 insulated from the silicon carbide layer 102 by the gate insulating film 111; a source electrode 116 provided on the silicon carbide layer 102; and a drain electrode 114 provided on a reverse surface of the substrate 101, wherein the source electrode 116 is in contact with the body region 105 and the channel layer 115; and a second conductivity type impurity concentration on a surface of the silicon carbide layer 102 that is in contact with the source electrode 116 is less than or equal to a second conductivity type impurity concenType: GrantFiled: November 15, 2010Date of Patent: July 2, 2013Assignee: Panasonic CorporationInventors: Kunimasa Takahashi, Chiaki Kudou
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Patent number: 8471306Abstract: A double-sided integrated circuit chips, methods of fabricating the double-sided integrated circuit chips and design structures for double-sided integrated circuit chips. The method includes removing the backside silicon from two silicon-on-insulator wafers having devices fabricated therein and bonding them back to back utilizing the buried oxide layers. Contacts are then formed in the upper wafer to devices in the lower wafer and wiring levels are formed on the upper wafer. The lower wafer may include wiring levels. The lower wafer may include landing pads for the contacts. Contacts to the silicon layer of the lower wafer may be silicided.Type: GrantFiled: July 28, 2011Date of Patent: June 25, 2013Assignee: International Business Machines CorporationInventors: Kerry Bernstein, Timothy Dalton, Jeffrey Peter Gambino, Mark David Jaffe, Paul David Kartschoke, Stephen Ellinwood Luce, Anthony Kendall Stamper
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Patent number: 8427865Abstract: There is provided a semiconductor storage device which is capable of further reducing a size of a memory cell, and increasing a storage capacity. Plural memory cells each including a transistor formed on a semiconductor substrate, and a variable resistive device having a resistance value changed by voltage supply and connected between source and drain terminals of the transistor are arranged longitudinally and in an array to configure a three-dimensional memory cell array. A memory cell structure has a double channel structure in which an inside of a switching transistor is filled with a variable resistance element, particularly, a phase change material. The switching transistor is turned off by application of a voltage to increase a channel resistance so that a current flows in the internal phase change material to operate the memory.Type: GrantFiled: April 5, 2012Date of Patent: April 23, 2013Assignee: Hitachi, Ltd.Inventors: Akio Shima, Yoshitaka Sasago, Masaharu Kinoshita, Toshiyuki Mine, Norikatsu Takaura, Takahiro Morikawa, Kenzo Kurotsuchi, Satoru Hanzawa
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Patent number: 8415218Abstract: A method of growing an epitaxial silicon layer is provided. The method comprising providing a substrate including an oxygen-terminated silicon surface and forming a first hydrogen-terminated silicon surface on the oxygen-terminated silicon surface. Additionally, the method includes forming a second hydrogen-terminated silicon surface on the first hydrogen-terminated silicon surface through atomic-layer deposition (ALD) epitaxy from SiH4 thermal cracking radical assisted by Ar flow and flash lamp annealing continuously. The second hydrogen-terminated silicon surface is capable of being added one or more layer of silicon through ALD epitaxy from SiH4 thermal cracking radical assisted by Ar flow and flash lamp annealing continuously. In one embodiment, the method is applied for making devices with thin-film transistor (TFT) floating gate memory cell structures which is capable for three-dimensional integration.Type: GrantFiled: October 27, 2008Date of Patent: April 9, 2013Assignees: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) CorporationInventor: Fumitake Mieno
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Patent number: 8314448Abstract: Embodiments of a semiconductor structure include a first current electrode region, a second current electrode region, and a channel region. The channel region is located between the first current electrode region and the second current electrode region, and the channel region is located in a fin structure of the semiconductor structure. A carrier transport in the channel region is generally in a horizontal direction between the first current electrode region and the second current electrode region.Type: GrantFiled: May 11, 2011Date of Patent: November 20, 2012Assignee: Freescale Semiconductor, Inc.Inventors: Marius K. Orlowski, James D. Burnett
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Patent number: 8283706Abstract: A die is formed with different and optimized critical dimensions in different device levels and areas of those device levels using photolithography and etch techniques. One aspect of the invention provides for a memory array formed above a substrate, with driver circuitry formed in the substrate. A level of the memory array consists of, for example, parallel rails and a fan-out region. It is desirable to maximize density of the rails and minimize cost of lithography for the entire memory array. This can be achieved by forming the rails at a tighter pitch than the CMOS circuitry beneath it, allowing cheaper lithography tools to be used when forming the CMOS, and similarly by optimizing lithography and etch techniques for a device level to produce a tight pitch in the rails, and a more relaxed pitch in the less-critical fan-out region.Type: GrantFiled: June 10, 2008Date of Patent: October 9, 2012Assignee: SanDisk 3D LLCInventors: James M. Cleeves, Roy E. Scheuerlein
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Patent number: 8264018Abstract: Provided is a semiconductor memory device. The semiconductor memory device may include a local bitline extending in a direction substantially vertical to an upper surface of a semiconductor substrate and a local wordline intersecting the local bitline. The local bitline is electrically connected to a bitline channel pillar penetrating a gate of a bitline transistor, and the local wordline is electrically connected to a wordline channel pillar penetrating a gate of a wordline transistor.Type: GrantFiled: May 11, 2010Date of Patent: September 11, 2012Assignee: Samsung Electronics Co., Ltd.Inventors: Hong Sik Yoon, Jinshi Zhao, Ingyu Baek, Hyun Jun Sim, Minyoung Park
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Patent number: 8241989Abstract: An integrated circuit with stacked devices. One embodiment provides a surface of a first semiconductor structure of a first crystalline semiconductor material including first and second portions. First structures are formed on the first portions. The second portions remain uncovered. Sacrificial structures of a second, different crystalline material are formed on the second portions. A second semiconductor structure of the first crystalline semiconductor material is formed over the sacrificial structures and over the first structures.Type: GrantFiled: November 14, 2008Date of Patent: August 14, 2012Assignee: Qimonda AGInventor: Franz Hofmann
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Patent number: 8207571Abstract: A semiconductor device having a non-volatile memory and a method of manufacturing the same are provided. The semiconductor device includes a base material and a stack structure. The stack structure disposed on the base material at least includes a tunneling layer, a trapping layer and a dielectric layer. The trapping layer is disposed on the tunneling layer. The dielectric layer has a dielectric constant and is disposed on the trapping layer. The dielectric layer is transformed from a first solid state to a second solid state when the dielectric layer undergoes a process.Type: GrantFiled: February 23, 2011Date of Patent: June 26, 2012Assignee: Macronix International Co., Ltd.Inventors: Sheng-Chih Lai, Hang-Ting Lue
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Patent number: 8169819Abstract: There is provided a semiconductor storage device which is capable of further reducing a size of a memory cell, and increasing a storage capacity. Plural memory cells each including a transistor formed on a semiconductor substrate, and a variable resistive device having a resistance value changed by voltage supply and connected between source and drain terminals of the transistor are arranged longitudinally and in an array to configure a three-dimensional memory cell array. A memory cell structure has a double channel structure in which an inside of a switching transistor is filled with a variable resistance element, particularly, a phase change material. The switching transistor is turned off by application of a voltage to increase a channel resistance so that a current flows in the internal phase change material to operate the memory.Type: GrantFiled: January 17, 2010Date of Patent: May 1, 2012Assignee: Hitachi, Ltd.Inventors: Akio Shima, Yoshitaka Sasago, Masaharu Kinoshita, Toshiyuki Mine, Norikatsu Takaura, Takahiro Morikawa, Kenzo Kurotsuchi, Satoru Hanzawa
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Patent number: 8164165Abstract: A novel three dimensional wafer stack and the manufacturing method therefor are provided. The three dimensional wafer stack includes a first wafer having a first substrate and a first device layer having thereon at least one chip, a second wafer disposed above the first wafer and having a second substrate, and at least one pedestal arranged between and extending from the first substrate to the second substrate. The pedestal arranged in the device layer is used for preventing the low-k materials existing in the device layer from being damaged by the stresses.Type: GrantFiled: June 20, 2006Date of Patent: April 24, 2012Assignee: Industrial Technology Research InstituteInventors: Chi-Shih Chang, Ra-Min Tain, Shyi-Ching Liau, Wei-Chung Lo, Rong-Shen Lee
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Patent number: 8148759Abstract: Memory cells are constructed from double-gated four terminal transistors having independent gate control. DRAM cells using one transistor to implement a Ferroelectric FeRAM are described. Top gates provide conventional access while independent bottom gates provide control to optimize memory retention for given speed and power parameters as well as to accommodate hardening against radiation. In a single transistor cell without a capacitor, use of the bottom gate allows packing to a density approaching 2 F2. Using a ferroelectric material as the gate insulator produces a single-transistor FeRAM cell that overcomes the industry-wide Write Disturb problem. The memory cells are compatible with SOI logic circuitry for use as embedded RAM in SOC applications.Type: GrantFiled: February 28, 2011Date of Patent: April 3, 2012Assignee: American Semiconductor, Inc.Inventors: Dale G. Wilson, Douglas R. Hackler, Sr.
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Patent number: 8131250Abstract: A Self-Synchronized Radio Frequency RF-Interconnect (SSRFI), based on capacitor coupling and peak detection, for vertically interconnecting active device layers in three-dimensional (3D) integrated circuits (IC), as well as wireless communication and RF signal transmission/receiving.Type: GrantFiled: February 17, 2006Date of Patent: March 6, 2012Assignee: The Regents of the University of CaliforniaInventors: Qun Gu, Zhiwei Xu, Jenwei Ko, Mau Chung Frank Chang