Vertical Channel Or Double Diffused Insulated Gate Field Effect Device Provided With Means To Protect Against Excess Voltage (e.g., Gate Protection Diode) Patents (Class 257/328)
  • Patent number: 11876131
    Abstract: A source pad of a main semiconductor element is electrically connected to an n+-type source region via a barrier metal. A temperature sensing part is a poly-silicon diode formed by a pn junction between a p-type poly-silicon layer that is a p-type anode region and an n-type poly-silicon layer that is an n-type cathode region. The temperature sensing part is provided, via the field insulating film, on a front surface of a same semiconductor substrate as the main semiconductor element. An anode pad and a cathode pad are in direct contact with the p-type poly-silicon layer and the n-type poly-silicon layer, respectively. The source pad, the anode pad, and the cathode pad are aluminum alloy films.
    Type: Grant
    Filed: March 27, 2019
    Date of Patent: January 16, 2024
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Yuichi Hashizume, Keishirou Kumada, Yoshihisa Suzuki, Yasuyuki Hoshi
  • Patent number: 11837659
    Abstract: An integrated circuit includes a drift region in a substrate, a drain in the substrate which includes a doped drain well, the doped drain well including a first zone, having a first concentration of a first dopant, and a second zone, having a second concentration of the first dopant, where the first concentration is smaller than the second concentration, and a gate electrode over the drift region and being separated from the doped drain well in a direction parallel to a top surface of the substrate by a distance greater than 0.
    Type: Grant
    Filed: February 2, 2021
    Date of Patent: December 5, 2023
    Assignees: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., TSMC CHINA COMPANY, LIMITED
    Inventor: Zheng Long Chen
  • Patent number: 11810975
    Abstract: According to one embodiment, a semiconductor device includes: a semiconductor layer including a first plane extending along a plane including a first axis and a second axis; a first electrode extending along the first axis; a second electrode extending along the second axis; and a third electrode above the first plane. The third electrode is electrically coupled to the first electrode and the second electrode, and includes a first portion, a second portion and a third portion. The first portion crosses the first electrode. The second portion crosses the second electrode. The third portion crosses the second electrode and is separate at a first end from the second portion.
    Type: Grant
    Filed: January 20, 2022
    Date of Patent: November 7, 2023
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventors: Kentaro Ichinoseki, Tatsuya Nishiwaki, Kikuo Aida, Kohei Oasa
  • Patent number: 11581215
    Abstract: A semiconductor-on-insulator (SOI) transistor includes a semiconductor layer situated over a buried oxide layer, the buried oxide layer being situated over a substrate. The SOI transistor is situated in the semiconductor layer and includes a transistor body, gate fingers, source regions, and drain regions. The transistor body has a first conductivity type. The source regions and the drain regions have a second conductivity type opposite to the first conductivity type. A heavily-doped body-implant region has the first conductivity type and overlaps at least one source region. A common silicided region electrically ties the heavily-doped body-implant region to the at least one source region. The common silicided region can include a source silicided region, and a body tie silicided region situated over the heavily-doped body-implant region. The source silicided region can be separated from a drain silicided region by the gate fingers.
    Type: Grant
    Filed: July 14, 2020
    Date of Patent: February 14, 2023
    Assignee: Newport Fab, LLC
    Inventors: Allan K Calvo, Paul D Hurwitz, Roda Kanawati
  • Patent number: 11563090
    Abstract: According to an embodiment of the invention, a semiconductor device includes a base body that includes silicon carbide, a first semiconductor member that includes silicon carbide and is of a first conductivity type, and a second semiconductor member that includes silicon carbide and is of a second conductivity type. A first direction from the base body toward the first semiconductor member is along a [0001] direction of the base body. The second semiconductor member includes a first region, a second region, and a third region. The first semiconductor member includes a fourth region. A second direction from the first region toward the second region is along a [1-100] direction of the base body. The fourth region is between the first region and the second region in the second direction. A third direction from the fourth region toward the third region is along a [11-20] direction of the base body.
    Type: Grant
    Filed: September 8, 2020
    Date of Patent: January 24, 2023
    Assignee: KABUSHIKI KAISHA TOSHIBA
    Inventors: Johji Nishio, Tatsuo Shimizu
  • Patent number: 11489042
    Abstract: A semiconductor device is provided.
    Type: Grant
    Filed: November 6, 2020
    Date of Patent: November 1, 2022
    Assignee: POWER MASTER SEMICONDUCTOR CO., LTD.
    Inventors: Jaegil Lee, Sangtae Han
  • Patent number: 11482615
    Abstract: A vertical-conduction MOSFET device, includes: a semiconductor body, having a front side and a back side and having a first conductivity; a trench-gate region; a body region, having the first conductivity; a source region, having a second conductivity; and a drain region, having the second conductivity. The source region, body region, and drain region are aligned with one another along a first direction and define a channel area, which, in a conduction state of the MOSFET device, hosts a conductive channel. The drain region borders on a portion of the semiconductor body having the first conductivity, thus forming a junction diode, which, in an inhibition state of the MOSFET device, is adapted to cause a leakage current to flow outside the channel area.
    Type: Grant
    Filed: May 7, 2020
    Date of Patent: October 25, 2022
    Assignee: STMICROELECTRONICS S.R.L.
    Inventors: Giuseppe Cina′, Antonio Giuseppe Grimaldi, Luigi Arcuri
  • Patent number: 11462616
    Abstract: In the described examples, a driver includes a signal controller that provides a gate control signal to a gate buffer coupled to a gate of a transistor and a field plate control signal to a field plate buffer coupled to a field plate of the transistor. The signal controller provides a rising edge on the field plate control signal causing the field plate buffer to provide a bias voltage on the field plate of the transistor a predetermined amount of time after providing a rising edge on the gate control signal that causes the gate buffer to provide a turn-on voltage on the gate of the transistor that causes the transistor to transition from a cutoff region to a saturation region and to a linear region.
    Type: Grant
    Filed: May 23, 2017
    Date of Patent: October 4, 2022
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Joseph Maurice Khayat, Marco Corsi, Lemuel Herbert Thompson
  • Patent number: 11456375
    Abstract: Provided is a semiconductor device including: a semiconductor substrate having at least first and second semiconductor layers of a first conductivity type, a third semiconductor layer of a second conductivity type, and a fourth semiconductor layer of the first conductivity type selectively provided in an upper layer portion of the third semiconductor layer; a trench gate passing through the fourth and third semiconductor layers in a thickness direction to penetrate into the second semiconductor layer; a first dummy trench gate passing through the third and second semiconductor layer in the thickness direction to penetrate into the first semiconductor layer; and a second dummy trench gate passing through the third semiconductor layer in the thickness direction to penetrate into the second semiconductor layer, the first and second dummy trench gates being disposed between the trench gates arrayed and being electrically connected to a first main electrode.
    Type: Grant
    Filed: August 28, 2020
    Date of Patent: September 27, 2022
    Assignee: Mitsubishi Electric Corporation
    Inventor: Ayanori Gatto
  • Patent number: 11437516
    Abstract: A semiconductor structure includes a gate structure disposed over a substrate, and a plurality of source/drain features disposed on the substrate and interposed by the gate structure. Each of the source/drain features includes a first doped source/drain region extended away from the substrate, and a second doped source/drain region disposed on top and side surfaces of the first doped source/drain region, in which a phosphorus doping concentration of the first doped source/drain region is lower than a doping concentration of the second doped source/drain region.
    Type: Grant
    Filed: December 16, 2016
    Date of Patent: September 6, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Szu-Chi Yang, Chih-Hsiang Huang
  • Patent number: 11417732
    Abstract: A semiconductor transistor device is described that has a source region, a body region including a vertical channel region, a drain region, a gate region laterally aside the channel region, a body contact region formed by doping, a diffusion barrier layer, and a conductive region formed of a conductive material. The body contact region electrically contacts the body region, the diffusion barrier layer being arranged in between. The doping of the body contact region is of the same conductivity type but of higher concentration than a doping of the body region. The conductive region has a contact area that forms an electrical contact to the body contact region, the contact area of the conductive region being arranged vertically above an upper end of the channel region. A method for manufacturing the semiconductor transistor device is also described.
    Type: Grant
    Filed: July 2, 2020
    Date of Patent: August 16, 2022
    Assignee: Infineon Technologies Austria AG
    Inventor: Thomas Feil
  • Patent number: 11411119
    Abstract: Double gated thin film transistors are described. In an example, an integrated circuit structure includes an insulator layer above a substrate. A first gate electrode is on the insulator layer, the first gate electrode having a non-planar feature. A first gate dielectric is on and conformal with the non-planar feature of the first gate electrode. A channel material layer is on and conformal with the first gate dielectric. A second gate dielectric is on and conformal with the channel material layer. A second gate electrode is on and conformal with the second gate dielectric. A first source or drain region is coupled to the channel material layer at a first side of the first gate dielectric. A second source or drain region is coupled to the channel material layer at a second side of the first gate dielectric.
    Type: Grant
    Filed: June 28, 2018
    Date of Patent: August 9, 2022
    Assignee: Intel Corporation
    Inventors: Aaron Lilak, Van H. Le, Abhishek A. Sharma, Tahir Ghani, Rishabh Mehandru, Gilbert Dewey, Willy Rachmady
  • Patent number: 11404408
    Abstract: A semiconductor device includes a MOS structure part and first to third temperature sensing portions. The MOS structure part has a semiconductor substrate of a first conductivity type, a first semiconductor layer of the first conductivity type, a second semiconductor layer of a second conductivity type, first semiconductor regions of the first conductivity type, trenches, and gate electrodes provided in the trenches via a gate insulating film. The first to the third temperature sensing portions are provided in plural and each includes the semiconductor substrate, the first semiconductor layer, a temperature sensing trench, a first polysilicon layer of the first conductivity type and a second polysilicon layer of the second conductivity type provided in the temperature sensing trench via an insulating film, a cathode electrode connected to the first polysilicon layer, and an anode electrode connected to the second polysilicon layer.
    Type: Grant
    Filed: May 31, 2020
    Date of Patent: August 2, 2022
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Yasuyuki Hoshi
  • Patent number: 11393919
    Abstract: An object of the present disclosure is to provide a semiconductor device capable of lowering the threshold voltage without deteriorating the RBSOA tolerance and manufacturing variation. According to the present disclosure, the semiconductor device includes a drift layer of a first conductivity type, a carrier store layer of the first conductivity type, a base layer of a second conductivity type, an emitter layer of the first conductivity type provided on the first main surface side of the base layer, an active trench provided so as to extend through the emitter layer, the base layer, and the carrier store layer and reach the drift layer, a gate insulating film, a gate electrode, and a collector layer of the second conductivity type provided on a second main surface side of the drift layer, in which peak concentration of impurities in the base layer is 1.0E17 cm?3 or higher.
    Type: Grant
    Filed: November 17, 2020
    Date of Patent: July 19, 2022
    Assignee: Mitsubishi Electric Corporation
    Inventor: Koichi Nishi
  • Patent number: 11393816
    Abstract: The present disclosure describes a metal-oxide-semiconductor field-effect transistor (MOSFET) device. The MOSFET device includes a first-type substrate, a deep-second-type well in the first-type substrate, a first-type well over the deep-second-type well, and a second-type well over the deep-second-type well. The second-type well and the deep-second-type well form an enclosed space that includes the first-type well. The MOSFET also includes an embedded semiconductor region (ESR) in a vicinity of the enclosed space. The ESR includes a dopant concentration lower than at least one of a dopant concentration of the first-type well, a dopant concentration of the second-type well, and a dopant concentration of the deep-second-type well.
    Type: Grant
    Filed: October 12, 2020
    Date of Patent: July 19, 2022
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Chien Yao Huang, Yu-Ti Su
  • Patent number: 11367798
    Abstract: A power element includes a substrate structure, an insulation layer, a dielectric layer, a transistor, and a plurality of zener diodes. The transistor is located in a transistor formation region of the substrate structure. The plurality of zener diodes are located in a circuit element formation region of the substrate structure and connected in series with each other. Each of the zener diodes includes a zener diode doping structure and a zener diode metal structure. The zener diode doping structure is formed on the insulation layer and is covered by the dielectric layer. The zener diode doping structure includes a P-type doped region and an N-type doped region that are in contact with each other. The zener diode metal structure is formed on the dielectric layer and partially passes through the dielectric layer to be electrically connected to the P-type doped region and the N-type doped region.
    Type: Grant
    Filed: August 31, 2020
    Date of Patent: June 21, 2022
    Assignee: CYSTECH ELECTRONICS CORP.
    Inventor: Hsin-Yu Hsu
  • Patent number: 11355631
    Abstract: An LDMOS transistor and a method for manufacturing the same are provided. The method includes: forming an epitaxial layer on a substrate, forming a gate structure on an upper surface of the epitaxial layer, forming a body region and a drift region in the epitaxial layer, forming a source region in the body region, forming a first insulating layer on the gate structure and an upper surface of the epitaxial layer and, forming a shield conductor layer on the first insulating layer, forming a second insulating layer covering the shield conductor layer, forming a first conductive path, to connect the source region with the substrate, and forming a drain region in the drift region. By forming the first conductive path which connects the source region with the substrate, the size of the LDMOS transistor and the resistance can be reduced.
    Type: Grant
    Filed: January 14, 2019
    Date of Patent: June 7, 2022
    Assignee: HANGZHOU SILICON-MAGIC SEMICONDUCTOR TECHNOLOGY CO., LTD.
    Inventors: Bing Wu, Chien Ling Chan, Liang Tong
  • Patent number: 11329160
    Abstract: A semiconductor device includes a semiconductor fin, a lining oxide layer, a silicon nitride based layer and a gate oxide layer. The semiconductor fin has a top fin surface, an upper fin side surface portion adjacent to the top fin surface, and a lower fin side surface contiguously connected to the upper fin side surface portion. The lining oxide layer peripherally encloses the lower fin side surface portion of the semiconductor fin. The silicon nitride based layer is disposed conformally over the lining oxide layer. The gate oxide layer is disposed conformally over the top fin surface and the upper fin side surface portion.
    Type: Grant
    Filed: February 16, 2017
    Date of Patent: May 10, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Cheng-Ta Wu, Shiu-Ko Jangjian, Chung-Ren Sun, Ming-Te Chen, Ting-Chun Wang, Jun-Jie Cheng
  • Patent number: 11322607
    Abstract: A semiconductor device has an active region through which current flows and a termination structure region. At a front surface of a semiconductor substrate of a first conductivity type, a first semiconductor layer of the first conductivity type is provided. At a surface of the first semiconductor layer, a lower parallel pn structure is provided. At a surface of the lower parallel pn structure, an upper parallel pn structure is provided in the termination structure region and a first semiconductor region of a second conductivity type is provided in the active region. A width of an upper second column is wider than a width of a lower second column. An interval between the upper second columns is wider than an interval between the lower second columns. A thickness of the upper second column is thicker than a thickness of the first semiconductor region.
    Type: Grant
    Filed: November 20, 2020
    Date of Patent: May 3, 2022
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Ryo Maeta
  • Patent number: 11314356
    Abstract: A touch sensor includes: a substrate that includes active and non-active regions; driving cells disposed on the active region that extend in a first direction; sensing cells disposed on the active region that extend in a second direction that intersects the first direction; a first connection pattern that connects adjacent driving cells; a second connection pattern that connects adjacent sensing cells; and a touch driver disposed on the non-active region that includes thin film transistors that transmit a driving signal to each of the driving cells. The thin film transistor includes: a semiconductor layer; a gate electrode disposed on the semiconductor layer with a first insulating layer interposed therebetween; and source and drain electrodes connected to the semiconductor layer and spaced apart from each other. The first connection pattern is disposed in the same layer as at least one of the source or drain electrodes or the gate electrode.
    Type: Grant
    Filed: January 14, 2021
    Date of Patent: April 26, 2022
    Assignee: SAMSUNG DISPLAY CO., LTD.
    Inventors: Il Nam Kim, Byeong Hee Won, Kyung Tea Park, Won Sang Park
  • Patent number: 11309410
    Abstract: A semiconductor device is described in which a conductive channel is present along an active gate trench of the device when a gate potential is at an on-voltage, whereas no conductive channel is present along an inactive trench of the device for the same gate potential condition.
    Type: Grant
    Filed: June 2, 2020
    Date of Patent: April 19, 2022
    Assignee: Infineon Technologies AG
    Inventors: Maria Cotorogea, Frank Wolter, Hans-Joachim Schulze, Franz-Josef Niedernostheide, Yvonne Gawlina-Schmidl
  • Patent number: 11296223
    Abstract: A semiconductor device includes a semiconductor layer of a first conductivity type. A well region that is a second conductivity type well region is formed on a surface layer portion of the semiconductor layer and has a channel region defined therein. A source region that is a first conductivity type source region is formed on a surface layer portion of the well region. A gate insulating film is formed on the semiconductor layer and has a multilayer structure. A gate electrode is opposed to the channel region of the well region where a channel is formed through the gate insulating film.
    Type: Grant
    Filed: September 1, 2021
    Date of Patent: April 5, 2022
    Assignee: ROHM CO., LTD.
    Inventors: Shuhei Mitani, Yuki Nakano, Heiji Watanabe, Takayoshi Shimura, Takuji Hosoi, Takashi Kirino
  • Patent number: 11289502
    Abstract: A memory device includes a substrate having an upper surface; a stacked structure disposed on the upper surface of the substrate, wherein the stacked structure includes a first insulating layer, a first conductive layer, a second insulating layer; a second conductive layer and a third insulating layer sequentially stacked on the substrate; a plurality of channel structures penetrating the stacked structure and electrically connected to the substrate, wherein each of the channel structures includes an upper portion corresponding to the second conductive layer and a lower portion corresponding to the first conductive layer; a memory layer disposed between the second conductive layer and the upper portion; and a plurality of isolation structures penetrating the stacked structure to separate the stacked structure into a plurality of sub-stacks.
    Type: Grant
    Filed: December 26, 2019
    Date of Patent: March 29, 2022
    Assignee: MACRONIX INTERNATIONAL CO., LTD.
    Inventors: Wei-Liang Lin, Wen-Jer Tsai
  • Patent number: 11276775
    Abstract: According to one embodiment, a semiconductor device includes: a semiconductor layer including a first plane extending along a plane including a first axis and a second axis; a first electrode extending along the first axis; a second electrode extending along the second axis; and a third electrode above the first plane. The third electrode is electrically coupled to the first electrode and the second electrode, and includes a first portion, a second portion and a third portion. The first portion crosses the first electrode. The second portion crosses the second electrode. The third portion crosses the second electrode and is separate at a first end from the second portion.
    Type: Grant
    Filed: September 3, 2019
    Date of Patent: March 15, 2022
    Assignees: KABUSHIKI KAISHA TOSHIBA, Toshiba Electronic Devices & Storage Corporation
    Inventors: Kentaro Ichinoseki, Tatsuya Nishiwaki, Kikuo Aida, Kohei Oasa
  • Patent number: 11264491
    Abstract: Provided is a semiconductor device including a semiconductor substrate provided with a transistor portion, wherein the semiconductor substrate includes, in the transistor portion, a drift region of a first conductivity type; an accumulation region of the first conductivity type that has a higher doping concentration than the drift region; a collector region of a second conductivity type; and a plurality of gate trench portions and a plurality of dummy trench portions that are provided extending in a predetermined extension direction in the top surface of the semiconductor substrate, and are arranged in an arrangement direction orthogonal to the extension direction, and the transistor portion includes a first region that includes a gate trench portion; and a second region in which the number of dummy trench portions arranged in a unit length in the arrangement direction is greater than in the first region.
    Type: Grant
    Filed: July 28, 2020
    Date of Patent: March 1, 2022
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventors: Daisuke Ozaki, Akinori Kanetake, Tohru Shirakawa, Yosuke Sakurai
  • Patent number: 11251269
    Abstract: An embodiment of a semiconductor device includes a trench gate structure extending from a first surface into a silicon carbide semiconductor body along a vertical direction. A body region of a first conductivity type adjoins a sidewall of the trench gate structure and includes a first body sub-region adjoining the sidewall and a second body sub-region adjoining the sidewall. At least one profile of dopants of the first conductivity type along the vertical direction includes a first doping peak in the first body sub-region and a second doping peak in the second body sub-region. A doping concentration of the first doping peak is larger than a doping concentration of the second doping peak.
    Type: Grant
    Filed: September 19, 2019
    Date of Patent: February 15, 2022
    Assignee: Infineon Technologies AG
    Inventors: Reinhard Ploss, Thomas Aichinger, Roland Rupp, Hans-Joachim Schulze
  • Patent number: 11251046
    Abstract: An object of the present invention is to improve the flatness of a surface electrode without increasing the number of steps in a semiconductor device having gate structures. A method of manufacturing a semiconductor device of the present invention includes the steps of discretely forming a plurality of gate structures on a first main surface of the semiconductor substrate, discretely forming a plurality of gate interlayer films covering the plurality of gate structures of the semiconductor substrate, forming a first surface electrode being thicker than the gate interlayer films on the first main surface of the semiconductor substrate between the plurality of the gate interlayer films and on the plurality of the gate interlayer films by sputtering, and removing convex portions of concave portions and the convex portions on the first surface electrode by dry etching using photolithography, to flatten an upper surface of the first surface electrode.
    Type: Grant
    Filed: February 2, 2018
    Date of Patent: February 15, 2022
    Assignee: Mitsubishi Electric Corporation
    Inventor: Tomohito Kudo
  • Patent number: 11233140
    Abstract: In a method of manufacturing a semiconductor device including a field effect transistor (FET), a sacrificial region is formed in a substrate, and a trench is formed in the substrate. A part of the sacrificial region is exposed in the trench. A space is formed by at least partially etching the sacrificial region, an isolation insulating layer is formed in the trench and the space, and a gate structure and a source/drain region are formed. An air spacer is formed in the space under the source/drain region.
    Type: Grant
    Filed: April 23, 2020
    Date of Patent: January 25, 2022
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Chun Hsiung Tsai, Clement Hsingjen Wann, Kuo-Feng Yu, Yi-Tang Lin, Yu-Ming Lin
  • Patent number: 11227896
    Abstract: A nonvolatile memory device includes a gate line extending in a first horizontal direction; a gate electrode of a pillar shape extending in a vertical direction from the gate line; a plurality of bit lines and a plurality of source lines extending in parallel in a second horizontal direction perpendicular to the first horizontal direction, the plurality of bit lines and the plurality of source lines being stacked in the vertical direction; and a plurality of cell transistors vertically stacked to surround an outer side surface of the gate electrode between the plurality of bit lines and the plurality of source lines. Each of the cell transistors includes a gate dielectric layer which surrounds the outer side surface of the gate electrode and a channel layer which surrounds an outer side surface of the gate dielectric layer.
    Type: Grant
    Filed: October 24, 2019
    Date of Patent: January 18, 2022
    Assignees: SK hynix Inc., Seoul National University R&DB Foundation
    Inventors: Yoo-Hyun Noh, Jong-Ho Lee
  • Patent number: 11215647
    Abstract: A SiC semiconductor device is provided that is capable of improving the detection accuracy of the current value of a principal current detected by a current sensing portion by restraining heat from escaping from the current sensing portion to a wiring member joined to a sensing-side surface electrode. The semiconductor device 1 includes a SiC semiconductor substrate, a source portion 27 including a principal-current-side unit cell 34, a current sensing portion 26 including a sensing-side unit cell 40, a source-side surface electrode 5 disposed above the source portion 27, and a sensing-side surface electrode 6 that is disposed above the current sensing portion 26 and that has a sensing-side pad 15 to which a sensing-side wire is joined, and, in the semiconductor device 1, the sensing-side unit cell 40 is disposed so as to avoid being positioned directly under the sensing-side pad 15.
    Type: Grant
    Filed: June 3, 2020
    Date of Patent: January 4, 2022
    Assignee: ROHM CO., LTD.
    Inventor: Katsuhisa Nagao
  • Patent number: 11217541
    Abstract: A transistor and method of manufacturing an electrically active chip seal ring surrounding the gate, gate insulator and source structure of the active core area of the transistor. The chip seal ring can be electrically coupled to the gate to seal the active core area from intrusions of contaminants, impurities, defects and or the like.
    Type: Grant
    Filed: May 8, 2019
    Date of Patent: January 4, 2022
    Assignee: Vishay-Siliconix, LLC
    Inventors: M. Ayman Shibib, Kyle Terrill
  • Patent number: 11217693
    Abstract: A semiconductor transistor includes a first lightly doped-drain region disposed in a drain region of a semiconductor substrate; a first heavily doped region disposed in the first lightly doped-drain region; and a gate located on the channel region; a gate oxide layer between the gate and the channel region; and a first insulating feature disposed in the first lightly doped-drain region between the channel region and the first heavily doped region. The gate overlaps with the first insulating feature. The thickness of the first insulating feature is greater than that of the gate oxide layer.
    Type: Grant
    Filed: December 12, 2019
    Date of Patent: January 4, 2022
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Chang-Po Hsiung, Shin-Hung Li
  • Patent number: 11211251
    Abstract: An object of the present invention is to improve the flatness of a surface electrode without increasing the number of steps in a semiconductor device having gate structures. A method of manufacturing a semiconductor device of the present invention includes the steps of discretely forming a plurality of gate structures on a first main surface of the semiconductor substrate, discretely forming a plurality of gate interlayer films covering the plurality of gate structures of the semiconductor substrate, forming a first surface electrode being thicker than the gate interlayer films on the first main surface of the semiconductor substrate between the plurality of the gate interlayer films and on the plurality of the gate interlayer films by sputtering, and removing convex portions of concave portions and the convex portions on the first surface electrode by dry etching using photolithography, to flatten an upper surface of the first surface electrode.
    Type: Grant
    Filed: February 2, 2018
    Date of Patent: December 28, 2021
    Assignee: Mitsubishi Electric Corporation
    Inventor: Tomohito Kudo
  • Patent number: 11184001
    Abstract: Power switching devices include a semiconductor layer structure that has an active region and an inactive region. The active region includes a plurality of unit cells and the inactive region includes a field insulating layer on the semiconductor layer structure and a gate bond pad on the field insulating layer opposite the semiconductor layer structure. A gate insulating pattern is provided on the semiconductor layer structure between the active region and the field insulating layer, and at least one source/drain contact is provided on the semiconductor layer structure between the gate insulating pattern and the field insulating layer.
    Type: Grant
    Filed: March 6, 2020
    Date of Patent: November 23, 2021
    Assignee: Cree, Inc.
    Inventors: Qingchun Zhang, Adam Barkley, Sei-Hyung Ryu, Brett Hull
  • Patent number: 11183572
    Abstract: A flash memory device includes a floating gate electrode formed within a substrate semiconductor layer having a doping of a first conductivity type, a pair of active regions formed within the substrate semiconductor layer, having a doping of a second conductivity type, and laterally spaced apart by the floating gate electrode, an erase gate electrode formed within the substrate semiconductor layer and laterally offset from the floating gate electrode, and a control gate electrode that overlies the floating gate electrode. The floating gate electrode may be formed in a first opening in the substrate semiconductor layer, and the erase gate electrode may be formed in a second opening in the substrate semiconductor layer. Multiple instances of the flash memory device may be arranged as a two-dimensional array of flash memory cells.
    Type: Grant
    Filed: April 20, 2020
    Date of Patent: November 23, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company Limited
    Inventors: Yu-Chu Lin, Chia-Ming Pan, Chi-Chung Jen, Wen-Chih Chiang, Keng-Ying Liao, Huai-jen Tung
  • Patent number: 11177354
    Abstract: A method of manufacturing a silicon carbide device includes: forming a trench in a process surface of a silicon carbide substrate that has a body layer forming second pn junctions with a drift layer structure, wherein the body layer is between the process surface and the drift layer structure and wherein the trench exposes the drift layer structure; implanting dopants through a bottom of the trench to form a shielding region that forms a first pn junction with the drift layer structure; forming dielectric spacers on sidewalls of the trench; and forming a buried portion of an auxiliary electrode in a bottom section of the trench, the buried portion adjoining the shielding region.
    Type: Grant
    Filed: January 16, 2020
    Date of Patent: November 16, 2021
    Assignee: Infineon Technologies AG
    Inventors: Andreas Meiser, Caspar Leendertz, Anton Mauder, Roland Rupp
  • Patent number: 11177254
    Abstract: Logic devices and methods of forming logic devices are described. An epitaxial channel is formed orthogonally to a horizontal plane of a substrate surface with a stack or horizontal transistors on the substrate surface. The first horizontal transistor having a first length and a first step, the second horizontal transistor having a second length and a second step and a third horizontal transistor has a third length and a third step. Each of the horizontal transistors is separated from adjacent layers by a horizontal isolation layer.
    Type: Grant
    Filed: October 11, 2019
    Date of Patent: November 16, 2021
    Assignee: Applied Materials, Inc.
    Inventors: Suketu Arun Parikh, Sanjay Natarajan
  • Patent number: 11171216
    Abstract: According to an embodiment, a semiconductor device includes a first semiconductor layer, a first switching element, a second switching element, and a conductor. The conductor is provided at least in part on the first semiconductor layer and located between the first switching element and the second switching element in a first direction.
    Type: Grant
    Filed: March 5, 2018
    Date of Patent: November 9, 2021
    Assignees: Kabushiki Kaisha Toshiba, Toshiba Electronic Devices & Storage Corporation
    Inventors: Hidetoshi Asahara, Akihiro Tanaka, Toru Shono
  • Patent number: 11158705
    Abstract: A method includes forming active regions of plurality of transistor cells in an inner region of a semiconductor body, each transistor cell includes a drift region of a first doping type and a compensation region of a second doping type, and forming a field stop region in an edge region of the semiconductor body. Forming the drift and compensation regions includes: forming a plurality of semiconductor layers; in each of the semiconductor layers, before forming a next layer, forming a plurality of first trenches and implanting dopant atoms of the first and/or second doping type into sidewalls of the plurality of first trenches. Forming the field stop region includes: in each semiconductor layer of a selection of the plurality of semiconductor layers, forming at least one second trench and implanting first and/or second type dopant atoms at least into one surface of the at least one second trench.
    Type: Grant
    Filed: November 27, 2019
    Date of Patent: October 26, 2021
    Assignee: Infineon Technologies Austria AG
    Inventor: Hans Weber
  • Patent number: 11158650
    Abstract: Embodiments of the present disclosure provide an apparatus and methods for forming stair-like structures with accurate profiles and dimension control for manufacturing three dimensional (3D) stacked memory cell semiconductor devices. In one embodiment, a memory cell device includes a film stack comprising alternating pairs of dielectric layers and conductive structures horizontally formed on a substrate, and an opening formed in the film stack, wherein the opening is filled with a metal dielectric layer, a multi-layer structure and a center filling layer, wherein the metal dielectric layer in the opening is interfaced with the conductive structure.
    Type: Grant
    Filed: October 18, 2019
    Date of Patent: October 26, 2021
    Assignee: Applied Materials, Inc.
    Inventors: ChangSeok Kang, Tomohiko Kitajima
  • Patent number: 11158735
    Abstract: A vertical power semiconductor transistor device includes: a drain region of a first conductivity type; a body region of a second conductivity type; a drift region of the first conductivity type which separates the body region from the drain region; a source region of the first conductivity type separated from the drift region by the body region; a gate trench extending through the source and body regions and into the drift region, the gate trench including a gate electrode; and a field electrode in the gate trench or in a separate trench. The drift region has a generally linearly graded first doping profile which increases from the body region toward a bottom of the trench that includes the field electrode, and a graded second doping profile that increases at a greater rate than the first doping profile from an end of the first doping profile toward the drain region.
    Type: Grant
    Filed: February 5, 2020
    Date of Patent: October 26, 2021
    Assignee: Infineon Technologies Austria AG
    Inventors: Ralf Siemieniec, David Laforet, Cedric Ouvrard
  • Patent number: 11121085
    Abstract: Embodiments of the disclosure are drawn to apparatuses and methods for trench walls including widened portions and/or conductive structures including constricted portions. The trench walls may include multiple widened portions spaced apart along a length of the trench wall in some examples. Similarly, in some examples, the conductive structures may include multiple constricted portions spaced apart along a length of the conductive structure. In some examples, the dimensions of the widened portions and/or the spacing between the widened portions may be based on properties of the trench wall.
    Type: Grant
    Filed: September 24, 2019
    Date of Patent: September 14, 2021
    Assignee: Micron Technology, Inc.
    Inventors: Hirokazu Matsumoto, Ryota Suzuki, Mitsuki Koda, Makoto Sato
  • Patent number: 11114572
    Abstract: A semiconductor device includes a semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type embedded in the semiconductor layer, a first trench and a second trench formed in the semiconductor layer such that the first trench and the second trench penetrate the second semiconductor layer, a first insulating film formed on at least a side surface of the first trench, a second insulating film formed on at least a side surface of the second trench, a first sinker layer of the second conductivity type formed in a first portion of the semiconductor layer, a second sinker layer of the second conductivity type formed in the first portion of the semiconductor layer, a diode impurity region of the first conductivity type which is formed on the first surface of the semiconductor layer and forms a Zener diode by pn junction between the first sinker layer and the diode impurity region, a first wiring electrically connected to the diode impurity region, and a second wiring
    Type: Grant
    Filed: June 18, 2020
    Date of Patent: September 7, 2021
    Assignee: ROHM CO., LTD.
    Inventor: Yasushi Hamazawa
  • Patent number: 11107911
    Abstract: A semiconductor device includes an inversion type semiconductor element, which has: a substrate; a drift layer; a saturation current suppression layer; a current dispersion layer; a base region; a source region; a connection layer; a plurality of trench gate structures; an interlayer insulation film; a source electrode; and a drain electrode. A channel region is provided in a portion of the base region in contact with each trench gate structure by applying a gate voltage to the gate electrode and applying a normal operation voltage as a drain voltage to the drain electrode; and a current flows between the source electrode and the drain electrode through the source region and the JFET portion.
    Type: Grant
    Filed: December 30, 2019
    Date of Patent: August 31, 2021
    Assignee: DENSO CORPORATION
    Inventors: Yuichi Takeuchi, Shuhei Mitani, Yasuhiro Ebihara, Yusuke Yamashita, Tadashi Misumi
  • Patent number: 11107914
    Abstract: An LDMOS device includes a doped drift region of a first conductivity type formed on an upper surface of a substrate having a second conductivity type. A body region of the second conductivity type is formed proximate an upper surface of the doped drift region. Source and drain regions of the first conductivity type are formed proximate an upper surface of the body region and doped drift region, respectively, and spaced laterally from one another. A gate is formed over the body region and between the source and drain regions. The gate is formed on a first insulating layer for electrically isolating the gate from the body region. A shielding structure is formed over at least a portion of the doped drift region on a second insulating layer. The gate and shielding structure are spaced laterally from one another to thereby reduce parasitic gate-to-drain capacitance.
    Type: Grant
    Filed: January 28, 2020
    Date of Patent: August 31, 2021
    Inventor: Shuming Xu
  • Patent number: 11101384
    Abstract: A power semiconductor device includes a substrate, a first well, a second well, a drain, a source, a first gate structure, a second gate structure and a doping region. The first well has a first conductivity and extends into the substrate from a substrate surface. The second well has a second conductivity and extends into the substrate from the substrate surface. The drain has the first conductivity and is disposed in the first well. The source has the first conductivity and is disposed in the second well. The first gate structure is disposed on the substrate surface and at least partially overlapping with the first well and second well. The second gate structure is disposed on the substrate surface and overlapping with the second well. The doping region has the first conductivity, is disposed in the second well and connects the first gate structure with the second gate structure.
    Type: Grant
    Filed: October 16, 2020
    Date of Patent: August 24, 2021
    Assignee: UNITED MICROELECTRONICS CORP.
    Inventors: Zong-Han Lin, Yi-Han Ye
  • Patent number: 11094809
    Abstract: A power module which includes a power semiconductor module chip, a driver chip and a charge storage element. The power semiconductor module chip is configured by forming an IGBT having a trench gate structure including a dummy trench gate, and a freewheeling diode for returning excess carrier of the emitter of the IGBT to the collector of the IGBT, in the same chip. The drive chip is used for driving the IGBT on/off. The power module is configured by packaging the power semiconductor module chip and the drive chip. The charge storage element that is connected between the gate and emitter of a dummy IGBT which can be pseudo-formed in order that the dummy trench gate be used in screening examinations.
    Type: Grant
    Filed: August 30, 2019
    Date of Patent: August 17, 2021
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Shigeki Sato
  • Patent number: 11088254
    Abstract: The present disclosure provides a semiconductor device including a recessed access device (RAD) transistor and a method of manufacturing the semiconductor device. The semiconductor device includes a substrate, a gate electrode, and a plurality of impurity regions. The substrate includes a buried layer. The gate electrode is disposed in the substrate and penetrates through the buried layer. The plurality of impurity regions are disposed in the substrate and on either side of the gate electrode.
    Type: Grant
    Filed: January 10, 2020
    Date of Patent: August 10, 2021
    Assignee: NANYA TECHNOLOGY CORPORATION
    Inventors: Yi-Hsien Chou, Chen-Hsien Huang
  • Patent number: 11088273
    Abstract: The present disclosure relates to a semiconductor device, and associated method of manufacture. The semiconductor device includes, MOSFET integrated with a p-n junction, the p-n junction arranged as a clamping diode across a source contact and a drain contact of the MOSFET. The MOSFET defines a first breakdown voltage and the clamping diode defines a second breakdown voltage, with the first breakdown voltage being greater than the second breakdown voltage so that the clamp diode is configured and arranged to receive a low avalanche current and the MOSFET is configured and arranged to receive a high avalanche current.
    Type: Grant
    Filed: December 5, 2019
    Date of Patent: August 10, 2021
    Assignee: NEXPERIA B.V.
    Inventors: Yan Lai, Mark Gajda, Barry Wynne, Phil Rutter
  • Patent number: 11084713
    Abstract: An integrated CMOS-MEMS device includes a first substrate having a CMOS device, a second substrate having a MEMS device, an insulator layer disposed between the first substrate and the second substrate, a dischargeable ground-contact, an electrical bypass structure, and a contrast stress layer. The first substrate includes a conductor that is conductively connecting to the CMOS devices. The electrical bypass structure has a conducting layer conductively connecting this conductor of the first substrate with the dischargeable ground-contact through a process-configurable electrical connection. The contrast stress layer is disposed between the insulator layer and the conducting layer of the electrical bypass structure.
    Type: Grant
    Filed: April 16, 2020
    Date of Patent: August 10, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Eason Hsieh, Fei-Lung Lai, Kuei-Sung Chang