With Lightly Doped Portion Of Drain Region Adjacent Channel (e.g., Ldd Structure) Patents (Class 257/336)
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Publication number: 20120037985Abstract: Transistors are described, along with methods and systems that include them. In one such transistor, a field plate is capacitively coupled between a first terminal and a second terminal. A potential in the field plate modulates dopant in a diffusion region in a semiconductor material of the transistor. Additional embodiments are also described.Type: ApplicationFiled: August 16, 2010Publication date: February 16, 2012Inventor: Michael Smith
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Publication number: 20120037987Abstract: A semiconductor structure includes a substrate, a first well region of a first conductivity type overlying the substrate, a second well region of a second conductivity type opposite the first conductivity type overlying the substrate, a cushion region between and adjoining the first and the second well regions, an insulation region in a portion of the first well region and extending from a top surface of the first well region into the first well region, a gate dielectric extending from over the first well region to over the second well region, wherein the gate dielectric has a portion over the insulation region, and a gate electrode on the gate dielectric.Type: ApplicationFiled: October 24, 2011Publication date: February 16, 2012Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsueh-Liang Chou, Chen-Bau Wu, Weng-Chu Chu, Tsung-Yi Huang, Fu-Jier Fan
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Publication number: 20120037986Abstract: A semiconductor device includes a body region of a first conductivity type and a gate pattern disposed on the body region. The gate pattern has a linear portion extending in a first direction and having a uniform width and a bending portion extending from one end of the linear portion. The portion of a channel region located beneath the bending portion constitutes a channel whose length is greater than the length of the channel constituted by the portion of the channel region located beneath the linear portion.Type: ApplicationFiled: July 15, 2011Publication date: February 16, 2012Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Yongdon Kim, Eungkyu Lee, Sungryoul Bae, Soobang Kim, Dong-Eun Jang
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Patent number: 8110897Abstract: The semiconductor device of the present invention includes: a gate insulating film formed on a semiconductor region of a first conductivity type; a gate electrode formed on the gate insulating film; and a channel doped layer of the first conductivity type formed in the semiconductor region beneath the gate electrode. The channel doped layer contains carbon as an impurity.Type: GrantFiled: March 3, 2010Date of Patent: February 7, 2012Assignee: Panasonic CorporationInventor: Taiji Noda
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Patent number: 8106467Abstract: A transistor is formed in the active region of a semiconductor substrate. A sidewall structure is disposed on the sidewalls of a gate electrode. A stress control film covers the semiconductor substrate. The sidewall structure includes a first portion extending along partial upper sidewalls of the gate electrode, a second portion extending from partial lower sidewalls of the gate electrode to partial surfaces of the active region, a third portion extending along partial surfaces of the first active region outer than the second portions, and a fourth portion facing the sidewalls of the gate electrode and an upper surface of the active region via the first to third portions. A Young's modulus of the first portion is lower than that of the third portion. The transistor is of an n-type and stress in the stress control film is tensile, or the transistor is of a p-type and stress is compressive.Type: GrantFiled: May 8, 2006Date of Patent: January 31, 2012Assignee: Fujitsu Semiconductor LimitedInventor: Masashi Shima
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Publication number: 20120018803Abstract: In one form a lateral MOSFET includes an active gate positioned laterally between a source region and a drain region, the drain region extending from an upper surface of a monocrystalline semiconductor body to a bottom surface of the monocrystalline semiconductor body, and a non-active gate positioned above the drain region. In another form the lateral MOSFET includes a gate positioned laterally between a source region and a drain region, the drain region extending from an upper surface of a monocrystalline semiconductor body to a bottom surface of the monocrystalline semiconductor body, the source region and the drain region being of a first conductivity type, a heavy body region of a second conductivity type in contact with and below the source region, and the drain region comprising a lightly doped drain (LDD) region proximate an edge of the gate and a sinker extending from the upper surface of the monocrystalline body to the bottom surface of the monocrystalline semiconductor body.Type: ApplicationFiled: September 29, 2011Publication date: January 26, 2012Inventors: Thomas E. Grebs, Gary M. Dolny, Daniel M. Kinzer
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Publication number: 20120012931Abstract: The present invention discloses a SOI MOS device having BTS structure and manufacturing method thereof. The source region of the SOI MOS device comprises: two heavily doped N-type regions, a heavily doped P-type region formed between the two heavily doped N-type regions, a silicide formed above the heavily doped N-type regions and the heavily doped P-type region, and a shallow N-type region which is contact to the silicide; an ohmic contact is formed between the heavily doped P-type region and the silicide thereon to release the holes accumulated in body region of the SOI MOS device and eliminate floating body effects thereof without increasing the chip area and also overcome the disadvantages such as decreased effective channel width of the devices in the BTS structure of the prior art.Type: ApplicationFiled: September 7, 2010Publication date: January 19, 2012Applicant: Shanghai Institute of Microsystem and Information Technology, Chinese AcademyInventors: Jing Chen, Jiexin Luo, Qingqing Wu, Xiaolu Huang, Xi Wang
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Publication number: 20120012930Abstract: According to one embodiment, a semiconductor device includes a semiconductor substrate, and first and second transistors. The substrate has a first conductivity type. The first and second transistors are provided on the substrate. The first and second transistors each include a gate electrode provided on the substrate, a gate insulating film provided between the substrate and the gate electrode, a source and a drain region of a second conductivity type, and a high-concentration channel region of the first conductivity type. The source and drain regions are provided in regions of an upper portion of the substrate. A region directly under the gate electrode is interposed between the regions. The high-concentration channel region is formed on a side of the source region of the region of the upper portion directly under the gate electrode. The high-concentration channel region has an effective impurity concentration higher than that of the upper portion.Type: ApplicationFiled: May 17, 2011Publication date: January 19, 2012Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Kumiko Sato, Hirofumi Hirasozu, Tomoko Matsudai
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Patent number: 8097518Abstract: There is provided a semiconductor device including a semiconductor substrate (10), a high concentration diffusion region (22) formed within the semiconductor substrate (10), a first low concentration diffusion region (24) that has a lower impurity concentration than the high concentration diffusion region (22) and is provided under the high concentration diffusion region (22), and a bit line(30) that includes the high concentration diffusion region (22) and the first low concentration diffusion region (24) and serves as a source region and a drain region, and a manufacturing method therefor. Reduction of source-drain breakdown voltage of the transistor is suppressed, and a low-resistance bit line can be formed. Thus, a semiconductor device that can miniaturize memory cells and a manufacturing method therefor can be provided.Type: GrantFiled: October 6, 2010Date of Patent: January 17, 2012Assignee: Spansion LLCInventor: Masatomi Okanishi
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Publication number: 20110309439Abstract: According to one embodiment, a semiconductor device includes a semiconductor substrate, a first conductivity-type region, a second conductivity-type source region, a gate insulating film and a gate electrode. The first conductivity-type region is provided in an upper layer portion of the semiconductor substrate. The second conductivity-type source region and a second conductivity-type drain region are arranged by being separated from each other in an upper layer portion of the first conductivity-type region. The gate insulating film is provided on the semiconductor substrate. The gate electrode is provided on the gate insulating film. An effective concentration of impurities in a channel region corresponding to a region directly below the gate electrode in the first conductivity-type region has a maximum at an interface between the gate insulating film and the channel region, and decreases toward a lower part of the channel region.Type: ApplicationFiled: March 21, 2011Publication date: December 22, 2011Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Tomoko Matsudai, Koichi Endo, Kumiko Sato, Norio Yasuhara
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Patent number: 8080845Abstract: A semiconductor device includes a gate insulating film formed over a semiconductor substrate, a gate electrode formed over the gate insulating film, a source region formed in the semiconductor substrate, a first drain region formed on the other side of the gate electrode and formed in the semiconductor substrate, the first drain region having one end extending below the gate electrode, the first drain region having a first impurity concentration, a second drain region formed in the first drain region and spaced apart from the gate electrode by a first distance, the second drain region having a second impurity concentration higher than the first impurity concentration, a third drain region formed in the first drain region and spaced apart from the gate electrode by a second distance, the second distance being greater than the first distance, the third drain region having a third impurity concentration.Type: GrantFiled: June 17, 2009Date of Patent: December 20, 2011Assignee: Fujitsu Semiconductor LimitedInventor: Masashi Shima
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Patent number: 8076736Abstract: A semiconductor device according to the present invention comprises a silicon carbide semiconductor substrate (1) including a silicon carbide layer (2); a high-concentration impurity region (4) provided in the silicon carbide layer (2); an ohmic electrode (9) electrically connected with the high-concentration impurity region (4); a channel region electrically connected with the high-concentration impurity region; a gate insulating layer (14) provided on the channel region; and a gate electrode (7) provided on the gate insulating layer (14). The ohmic electrode (9) contains an alloy of titanium, silicon and carbon, and the gate electrode (7) contains titanium silicide.Type: GrantFiled: February 12, 2008Date of Patent: December 13, 2011Assignee: Panasonic CorporationInventors: Masashi Hayashi, Shin Hashimoto
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Patent number: 8067801Abstract: A semiconductor device is provided, which comprises a first transistor and a second transistor formed in a semiconductor layer. The first transistor includes a first source region and a first drain region sandwiching a first gate electrode with the first source region. The second transistor includes an LDD region and a drift region sandwiching the second gate electrode with the LDD region, and a second drain region adjacent to the drift region to sandwich the second gate electrode with the second source region. The first gate electrode has a first sidewall formed on sides thereof and the second gate electrode has a second sidewall formed on sides thereof. The width of the former along the first insulator differs from the width of the latter along the second insulator.Type: GrantFiled: July 29, 2008Date of Patent: November 29, 2011Assignee: Kabushiki Kaisha ToshibaInventors: Tomoko Matsudai, Norio Yasuhara, Manji Obatake
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Patent number: 8063443Abstract: An MOS-bipolar hybrid-mode LDMOS device has a main gate input and a control gate input wherein the device operates in an MOS mode when both gate inputs are enabled, and operates in a bipolar mode when the main gate input is enabled and the control gate input is disabled. The device can drive the gate of a power MOSFET to deliver the high current required by the power MOSFET while in the bipolar mode, and provide a fully switching between supply voltage and ground to the gate of the power MOSFET while in the MOS mode.Type: GrantFiled: October 30, 2007Date of Patent: November 22, 2011Assignee: Fairchild Semiconductor CorporationInventor: Jun Cai
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Publication number: 20110278670Abstract: Apparatuses, systems, and methods for tunneling MOSFETs (TFETs) using a self-aligned heterostructure source and isolated drain. TFETs that have an abrupt junction between source and drain regions have an increased probability of carrier direct tunneling (e.g., electrons and holes). The increased probability allows a higher achievable on current in TFETs having the abrupt junction.Type: ApplicationFiled: May 11, 2010Publication date: November 17, 2011Inventors: WEI-YIP LOH, Kanghoon Jeon, Chanro Park
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Patent number: 8053843Abstract: A semiconductor device for ESD protection includes a semiconductor substrate of a first conductivity type and a well region of a second conductivity type formed within the substrate. The well region is characterized by a first depth. The device includes an MOS transistor, a first bipolar transistor, and a second bipolar transistor. The MOS transistor includes a first lightly doped drain (LDD) region of a second depth within the well region, and a drain region and an emitter region within in the first LDD region. The emitter region is characterized by a second conductivity type. The first bipolar transistor is associated with the emitter region, the first LDD region, and the well region, and is characterized by a first trigger voltage. The second bipolar transistor is associated with the first LDD region, the well region, and the substrate, and is characterized by a second trigger voltage.Type: GrantFiled: June 11, 2009Date of Patent: November 8, 2011Assignee: Semiconductor Manufacturing International (Shanghai) CorporationInventors: Chi Kang Liu, Ta Lee Yu, Quan Li
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Patent number: 8049338Abstract: A power semiconductor module includes: an interconnect layer including an electrical conductor patterned on a dielectric layer, the electrical conductor including a power coupling portion having a thickness sufficient to carry power currents and a control coupling portion having a thickness thinner than that of the power coupling portion; and a semiconductor power device physically coupled to the interconnect layer and electrically coupled to the power coupling portion of the electrical conductor.Type: GrantFiled: April 7, 2006Date of Patent: November 1, 2011Assignee: General Electric CompanyInventors: Eladio Clemente Delgado, Richard Alfred Beaupre, Stephen Daley Arthur, Ernest Wayne Balch, Kevin Matthew Durocher, Paul Alan McConnelee, Raymond Albert Fillion
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Patent number: 8048765Abstract: According to an exemplary embodiment, a method for fabricating a MOS transistor, such as an LDMOS transistor, includes forming a gate stack over a well. The method further includes forming a recess in the well adjacent to a first sidewall of the gate stack. The method further includes forming a source region in the recess such that a heterojunction is formed between the source region and the well. The method further includes forming a drain region spaced apart from a second sidewall of the gate stack. In one embodiment, the source region can comprise silicon germanium and the well can comprise silicon. In another embodiment, the source region can comprise silicon carbide and the well can comprise silicon.Type: GrantFiled: August 28, 2009Date of Patent: November 1, 2011Assignee: Broadcom CorporationInventors: Xiangdong Chen, Bruce Chih-Chieh Shen, Henry Kuo-Shun Chen
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Patent number: 8048730Abstract: Disclosed are a semiconductor device and a method for manufacturing the same. The semiconductor device includes an isolation area formed on a semiconductor substrate to define NMOS and PMOS areas, a gate insulating layer and a gate formed on each of the NMOS and PMOS areas, a primary gate spacer formed at sides of the gate, LDD areas formed in the semiconductor substrate at sides of the gate, a secondary gate spacer formed at sides of the primary gate spacer, source and drain areas formed in the semiconductor substrate at sides of the gate of the PMOS area; and source and drain areas formed in the semiconductor substrate at sides of the gate of the NMOS area, wherein the source and drain areas of the NMOS area are deeper than the source and drain areas of the PMOS area.Type: GrantFiled: August 13, 2009Date of Patent: November 1, 2011Assignee: Dongbu Hitek Co., Ltd.Inventor: Eun Jong Shin
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Patent number: 8049275Abstract: There is provided a thin film transistor having improved reliability. A gate electrode includes a first gate electrode having a taper portion and a second gate electrode with a width narrower than the first gate electrode. A semiconductor layer is doped with phosphorus of a low concentration through the first gate electrode. In the semiconductor layer, two kinds of n?-type impurity regions are formed between a channel formation region and n+-type impurity regions. Some of the n?-type impurity regions overlap with a gate electrode, and the other n?-type impurity regions do not overlap with the gate electrode. Since the two kinds of n?-type impurity regions are formed, an off current can be reduced, and deterioration of characteristics can be suppressed.Type: GrantFiled: October 31, 2005Date of Patent: November 1, 2011Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventor: Shunpei Yamazaki
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Patent number: 8043911Abstract: The invention includes methods of forming semiconductor constructions in which a single etch is utilized to penetrate through a titanium-containing layer and partially into a silicon-containing layer beneath the titanium-containing layer. The etch can utilize CH2F2. The silicon-containing layer can contain an n-type doped region and a p-type doped region. In some methods, the silicon-containing layer can contain an n-type doped region laterally adjacent a p-type doped region, and the processing can be utilized to form a transistor gate containing n-type doped silicon simultaneously with the formation of a transistor gate containing p-type doped silicon.Type: GrantFiled: January 10, 2008Date of Patent: October 25, 2011Assignee: Micron Technology, Inc.Inventor: David J. Keller
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Patent number: 8039323Abstract: A semiconductor device includes a semiconductor layer with an impurity of a first conductivity type diffused therein, and a local insulating layer, source layer, and a drain layer formed therein. The drain layer has an impurity of a second conductivity type opposite to the first conductivity type. A gate electrode is formed over the semiconductor layer extending from over the local insulating layer to the source layer. A low-concentration diffusion layer is formed in the semiconductor layer below the drain layer. First and second gate insulating films are formed between the gate electrode and the semiconductor layer, and respectively extending from an end, on the source layer side, of the gate electrode to the local insulating layer without reaching the local insulating layer, and extending from an end on another side of the local insulating layer to the source layer.Type: GrantFiled: May 4, 2010Date of Patent: October 18, 2011Assignee: Oki Semiconductor Co., Ltd.Inventor: Hiroyuki Tanaka
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Patent number: 8039897Abstract: In one form a lateral MOSFET includes an active gate positioned laterally between a source region and a drain region, the drain region extending from an upper surface of a monocrystalline semiconductor body to a bottom surface of the monocrystalline semiconductor body, and a non-active gate positioned above the drain region. In another form the lateral MOSFET includes a gate positioned laterally between a source region and a drain region, the drain region extending from an upper surface of a monocrystalline semiconductor body to a bottom surface of the monocrystalline semiconductor body, the source region and the drain region being of a first conductivity type, a heavy body region of a second conductivity type in contact with and below the source region, and the drain region comprising a lightly doped drain (LDD) region proximate an edge of the gate and a sinker extending from the upper surface of the monocrystalline body to the bottom surface of the monocrystalline semiconductor body.Type: GrantFiled: December 19, 2008Date of Patent: October 18, 2011Assignee: Fairchild Semiconductor CorporationInventors: Thomas E. Grebs, Gary M. Dolny, Daniel M. Kinzer
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Patent number: 8035140Abstract: An semiconductor device is disclosed. The device includes a semiconductor body, a layer of insulating material disposed over the semiconductor body, and a region of gate electrode material disposed over the layer of insulating material. Also included are a source region adjacent to gate region and a drain region adjacent to the gate region. A gate connection is disposed over the semiconductor body, wherein the gate connection includes a region of gate electrode material electrically coupling a contact region to the gate electrode. An insulating region is disposed on the semiconductor body beneath the gate connection.Type: GrantFiled: July 26, 2007Date of Patent: October 11, 2011Assignee: Infineon Technologies AGInventors: Albert Birner, Qiang Chen
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Patent number: 8030705Abstract: Provided are a semiconductor device and a method of fabricating the semiconductor device. The semiconductor device can provide a trench MOS transistor having an up-drain structure. The semiconductor device can include a first conductive type well in a semiconductor substrate, a second conductive type well on the first conductive type well, trenches formed by removing portions of the second conductive type well and the first conductive type well; gates provided in the trenches with a gate dielectric being between each gate and the walls of the trench, a first conductive type source region and a second conductive type body region on the second conductive type well, the first conductive type source region surrounding a lateral surface of the gate, and a common drain between the gates, the common drain being connected to the first conductive type well.Type: GrantFiled: April 14, 2008Date of Patent: October 4, 2011Assignee: Dongbu Hitek Co., Ltd.Inventor: Byung Tak Jang
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Publication number: 20110233671Abstract: A threshold voltage adjusted long-channel transistor fabricated according to short-channel transistor processes is described. The threshold-adjusted transistor includes a substrate with spaced-apart source and drain regions formed in the substrate and a channel region defined between the source and drain regions. A layer of gate oxide is formed over at least a part of the channel region with a gate formed over the gate oxide. The gate further includes at least one implant aperture formed therein with the channel region of the substrate further including an implanted region within the channel between the source and drain regions. Methods for forming the threshold voltage adjusted transistor are also disclosed.Type: ApplicationFiled: June 7, 2011Publication date: September 29, 2011Applicant: MICRON TECHNOLOGY, INC.Inventor: Ethan Williford
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Patent number: 8021971Abstract: An integrated circuit is provided including a narrow gate stack having a width less than or equal to 65 nm, including a silicide region comprising Pt segregated in a region of the silicide away from the top surface of the silicide and towards an lower portion defined by a pulldown height of spacers on the sidewalls of the gate conductor. In a preferred embodiment, the spacers are pulled down prior to formation of the silicide. The silicide is first formed by a formation anneal, at a temperature in the range 250° C. to 450° C. Subsequently, a segregation anneal at a temperature in the range 450° C. to 550° C. The distribution of the Pt along the vertical length of the silicide layer has a peak Pt concentration within the segregated region, and the segregated Pt region has a width at half the peak Pt concentration that is less than 50% of the distance between the top surface of the silicide layer and the pulldown spacer height.Type: GrantFiled: November 4, 2009Date of Patent: September 20, 2011Assignee: International Business Machines CorporationInventors: Anthony G. Domenicucci, Christian Lavoie, Ahmet S. Ozcan
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Publication number: 20110220996Abstract: According to one embodiment, a semiconductor device includes a semiconductor substrate, an element isolation insulating film, a source layer, a drain layer, a gate electrode, a gate insulating film, a first punch-through stopper layer, and a second punch-through stopper layer. The semiconductor substrate is a first conductivity type. The element isolation insulating film divides an upper layer portion of the semiconductor substrate into a plurality of first active regions. The source layer and the drain layer are a second conductivity type and are formed in spaced to each other in an upper portion of each of the first active regions. The gate electrode is provided in a region directly above a channel region on the semiconductor substrate located between the source layer and the drain layer. The gate insulating film is provided between the semiconductor substrate and the gate electrode.Type: ApplicationFiled: September 17, 2010Publication date: September 15, 2011Applicant: Kabushiki Kaisha ToshibaInventors: Hiroyuki KUTSUKAKE, Kenji Gomikawa, Yoshiko Kato, Norihisa Arai, Tomoaki Hatano
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Publication number: 20110215403Abstract: The present invention discloses a high voltage metal oxide semiconductor (HVMOS) device and a method for making same. The high voltage metal oxide semiconductor device comprises: a substrate; a gate structure on the substrate; a well in the substrate, the well defining a device region from top view; a first drift region in the well; a source in the well; a drain in the first drift region, the drain being separated from the gate structure by a part of the first drift region; and a P-type dopant region not covering all the device region, wherein the P-type dopant region is formed by implanting a P-type dopant for enhancing the breakdown voltage of the HVMOS device (for N-type HVMOS device) or reducing the ON resistance of the HVMOS device (for P-type HVMOS device).Type: ApplicationFiled: March 2, 2010Publication date: September 8, 2011Inventors: Tsung-Yi Huang, Huan-Ping Chu, Ching-Yao Yang, Hug-Der Su
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Publication number: 20110215404Abstract: The present disclosure provides a semiconductor device having a transistor. The transistor includes a source region, a drain region, and a channel region that are formed in a semiconductor substrate. The channel region is disposed between the source and drain regions. The transistor includes a first gate that is disposed over the channel region. The transistor includes a plurality of second gates that are disposed over the drain region.Type: ApplicationFiled: March 8, 2010Publication date: September 8, 2011Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ming Zhu, Lee-Wee Teo, Harry Hak-Lay Chuang
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Patent number: 8013390Abstract: An insulated-gate field-effect transistor (100, 100V, 140, 150, 150V, 160, 170, 170V, 180, 180V, 190, 210, 210W, 220, 220U, 220V, 220W, 380, or 480) has a hypoabrupt vertical dopant profile below one (104 or 264) of its source/drain zones for reducing the parasitic capacitance along the pn junction between that source/drain zone and adjoining body material (108 or 268). In particular, the concentration of semiconductor dopant which defines the conductivity type of the body material increases by at least a factor of 10 in moving from that source/drain zone down to an underlying body-material location no more than 10 times deeper below the upper semiconductor surface than that source/drain zone. The body material preferably includes a more heavily doped pocket portion (120 or 280) situated along the other source/drain zone (102 or 262).Type: GrantFiled: November 4, 2010Date of Patent: September 6, 2011Assignee: National Semiconductor CorporationInventor: Constantin Bulucea
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Patent number: 8008718Abstract: The semiconductor device of the present invention is a semiconductor device including P-type and N-type thin film transistors, at least one of the N-type thin film transistors having an off-set gate structure, at least one of the P-type thin film transistors having a LDD structure, wherein a P-type high concentration impurity layer for forming the at least one P-type thin film transistor is formed on the semiconductor layer in a region other than a region below a gate electrode and a sidewall spacer and contains a higher concentration of a P-type impurity together with an impurity contained in an N-type low concentration impurity layer and an N-type high concentration impurity layer for forming the N type thin film transistor.Type: GrantFiled: October 17, 2005Date of Patent: August 30, 2011Assignee: Sharp Kabushiki KaishaInventor: Sumio Katou
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Patent number: 8004038Abstract: A semiconductor device includes a first high-voltage well having a first dopant disposed in a semiconductor substrate; a second high-voltage well having a second dopant disposed in the semiconductor substrate, laterally adjacent to the first high-voltage well; a low-voltage well having the second dopant disposed overlying the second high-voltage well; a drain region having the first dopant disposed in the first high-voltage well; a source having the first dopant disposed in the low-voltage well; and a gate disposed on the semiconductor substrate and laterally between the source and the drain, wherein the gate includes a thin gate dielectric and a gate electrode.Type: GrantFiled: May 22, 2006Date of Patent: August 23, 2011Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Hsing-Yi Chien, Yu-Chang Jong, Te-Yin Hsia, Ruey-Shin Liu
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Publication number: 20110198690Abstract: A Metal Oxide Semiconductor (MOS) transistor comprising: a source; a gate; and a drain, the source, gate and drain being located in or on a well structure of a first doping polarity located in or on a substrate; wherein at least one of the source and the drain comprises a first structure comprising: a first region forming a first drift region, the first region being of a second doping polarity opposite the first doping polarity; a second region of the second doping polarity in or on the first region, the second region being a well region and having a doping concentration which is higher than the doping concentration of the first region; and a third region of the second doping polarity in or on the second region. Due to the presence of the second region the transistor may have a lower ON resistance when compared with a similar transistor which does not have the second region. The breakdown voltage may be influenced only to a small extent.Type: ApplicationFiled: February 12, 2009Publication date: August 18, 2011Inventors: Yong Hai Hu, Elizabeth Ching Tee Kho, Zheng Chao Liu, Deb Kumar Pal, Michael Mee Gouh Tiong, Jian Liu, Kia Yaw Kee, William Siang Lim Lau
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Publication number: 20110186926Abstract: According to one embodiment, a semiconductor device comprises a high-k gate dielectric overlying a well region having a first conductivity type formed in a semiconductor body, and a semiconductor gate formed on the high-k gate dielectric. The semiconductor gate is lightly doped so as to have a second conductivity type opposite the first conductivity type. The disclosed semiconductor device, which may be an NMOS or PMOS device, can further comprise an isolation region formed in the semiconductor body between the semiconductor gate and a drain of the second conductivity type, and a drain extension well of the second conductivity type surrounding the isolation region in the semiconductor body. In one embodiment, the disclosed semiconductor device is fabricated as part of an integrated circuit including one or more CMOS logic devices.Type: ApplicationFiled: January 29, 2010Publication date: August 4, 2011Applicant: BROADCOM CORPORATIONInventors: Akira Ito, Xiangdong Chen
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Patent number: 7982263Abstract: In a high frequency amplifying MOSFET having a drain offset region, the size is reduced and the on-resistance is decreased by providing conductor plugs 13 (P1) for leading out electrodes on a source region 10, a drain region 9 and leach-through layers 3 (4), to which a first layer wirings 11a, 11d (M1) are connected and, further, backing second layer wirings 12a to 12d are connected on the conductor plugs 13 (P1) to the first layer wirings 11s, 11d (M1).Type: GrantFiled: October 30, 2009Date of Patent: July 19, 2011Assignee: Renesas Electronics CorporationInventors: Yutaka Hoshino, Shuji Ikeda, Isao Yoshida, Shiro Kamohara, Megumi Kawakami, Tomoyuki Miyake, Masatoshi Morikawa
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Publication number: 20110169077Abstract: An apparatus is disclosed to increase a breakdown voltage of a semiconductor device. The semiconductor device includes a modified breakdown shallow trench isolation (STI) region to effectively reduce a drain to source resistance when compared to a conventional semiconductor device, thereby increasing the breakdown voltage of the semiconductor device when compared to the conventional semiconductor device. The modified breakdown STI region allows more current to pass from a source region to a drain region of the semiconductor device, thereby further increasing the break down voltage of the semiconductor device from that of the conventional semiconductor device. The semiconductor device may include a modified well region to further reduce the drain to source resistance of the semiconductor device.Type: ApplicationFiled: January 14, 2010Publication date: July 14, 2011Applicant: Broadcom CorporationInventor: Akira Ito
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Publication number: 20110169078Abstract: A disclosed power transistor, suitable for use in a switch mode converter that is operable with a switching frequency exceeding, for example, 5 MHz or more, includes a gate dielectric layer overlying an upper surface of a semiconductor substrate and first and second gate electrodes overlying the gate dielectric layer. The first gate electrode is laterally positioned overlying a first region of the substrate. The first substrate region has a first type of doping, which may be either n-type or p-type. A second gate electrode of the power transistor overlies the gate dielectric and is laterally positioned over a second region of the substrate. The second substrate region has a second doping type that is different than the first type. The transistor further includes a drift region located within the substrate in close proximity to an upper surface of the substrate and laterally positioned between the first and second substrate regions.Type: ApplicationFiled: March 22, 2011Publication date: July 14, 2011Applicant: FREESCALE SEMICONDUCTOR, INC.Inventors: Hongning Yang, Jiang-Kai Zuo
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Patent number: 7977743Abstract: A semiconductor device is provided. In an embodiment, the device includes a substrate and a transistor formed on the substrate. The transistor may include a gate structure, a source region, and a drain region. The drain region includes an alternating-doping profile region. The alternating-doping profile region may include alternating regions of high and low concentrations of a dopant. In an embodiment, the transistor is a high voltage transistor.Type: GrantFiled: February 25, 2009Date of Patent: July 12, 2011Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chen-Liang Chu, Chun-Ting Liao, Fei-Yuh Chen, Tsung-Yi Huang
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Publication number: 20110156143Abstract: This invention published a parasitic vertical PNP bipolar transistor in BiCMOS (Bipolar Complementary Metal Oxide Semiconductor) process; the bipolar transistor comprises a collector, a base and an emitter. Collector is formed by active region with p-type ion implanting layer. It connects a p-type buried layer which formed in the bottom region of STI (Shallow Trench Isolation). The collector terminal connection is through the p-type buried layer and the adjacent active region. The base is formed by active region with n type ion implanting which is on the collector. Its connection is through the original p-type epitaxy layer after converting to n-type. The emitter is formed by the p-type epitaxy layer on the base region with heavy p-type doped. This invention also comprises the fabrication method of this parasitic vertical PNP bipolar in BiCMOS (Bipolar Complementary Metal Oxide Semiconductor) process.Type: ApplicationFiled: December 22, 2010Publication date: June 30, 2011Inventors: Tzuyin CHIU, TungYuan Chu, Wensheng Qian, YungChieh Fan, Donghua Liu, Jun Hu
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Publication number: 20110156142Abstract: A semiconductor device is provided which includes a semiconductor substrate, a gate structure formed on the substrate, sidewall spacers formed on each side of the gate structure, a source and a drain formed in the substrate on either side of the gate structure, the source and drain having a first type of conductivity, a lightly doped region formed in the substrate and aligned with a side of the gate structure, the lightly doped region having the first type of conductivity, and a barrier region formed in the substrate and adjacent the drain. The barrier region is formed by doping a dopant of a second type of conductivity different from the first type of conductivity.Type: ApplicationFiled: December 24, 2009Publication date: June 30, 2011Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Lee-Wee Teo, Ming Zhu, Harry Hak-Lay Chuang
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Patent number: 7968921Abstract: An asymmetric insulated-gate field-effect transistor (100) has a source (240) and a drain (242) laterally separated by a channel zone (244) of body material (180) of a semiconductor body. A gate electrode (262) overlies a gate dielectric layer (260) above the channel zone. A more heavily doped pocket portion (250) of the body material extends largely along only the source. Each of the source and drain has a main portion (240M or 242M) and a more lightly doped lateral extension (240E or 242E). The drain extension is more lightly doped than the source extension. The maximum concentration of the semiconductor dopant defining the two extensions occurs deeper in the drain extension than in the source extension. Additionally or alternatively, the drain extension extends further laterally below the gate electrode than the source extension. These features enable the threshold voltage to be highly stable with operational time.Type: GrantFiled: March 27, 2009Date of Patent: June 28, 2011Assignee: National Semiconductor CorporationInventors: Constantin Bulucea, William D. French, Sandeep R. Bahl, Jeng-Jiun Yang, D. Courtney Parker, Peter B. Johnson, Donald M. Archer
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Publication number: 20110140199Abstract: A high voltage ESD protective diode having high avalanche withstand capability and capable of being formed by using manufacturing steps identical with those for a high voltage transistor to be protected, the device having a structure in which a gate oxide film is formed over a substrate surface at a PN junction formed of an N type low concentration semiconductor substrate constituting a cathode region and a P type low concentration diffusion region constituting an anode region, and a gate electrode which is disposed overriding the gate oxide film and a field oxide film is connected electrically by way of a gate plug with an anode electrode, whereby an electric field at the PN junction is moderated upon avalanche breakdown to obtain a high avalanche withstand capability. Further, the withstand voltage can be adjusted by changing the length of the field oxide film.Type: ApplicationFiled: December 7, 2010Publication date: June 16, 2011Inventors: Tomoyuki MIYOSHI, Shinichiro Wada, Yohei Yanagida
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Publication number: 20110133274Abstract: A LDMOS transistor is implemented in a first impurity region on a substrate. The LDMOS transistor has a source that includes a second impurity region. The second impurity region is implanted into the surface of the substrate within the first impurity region. Additionally, the LDMOS transistor has a drain that includes a third impurity region. The third impurity region is implanted into the surface of the substrate within the first impurity region. The third impurity region is spaced a predetermined distance away from a gate of the LDMOS transistor. The drain of the LDMOS transistor further includes a fourth impurity region within the third impurity region. The fourth impurity region provides an ohmic contact for the drain.Type: ApplicationFiled: February 14, 2011Publication date: June 9, 2011Applicant: VOLTERRA SEMICONDUCTOR CORPORATIONInventors: Budong You, Marco A. Zuniga
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Publication number: 20110133273Abstract: A semiconductor device including a low-concentration impurity region formed on the drain side of an n-type MIS transistor, in a non-self-aligned manner with respect to an end portion of the gate electrode. A high-concentration impurity region is placed with a specific offset from the gate electrode and a sidewall insulating film. The semiconductor device enables the drain breakdown voltage to be sufficient and the on-resistance to decrease. A silicide layer is also formed on the surface of the gate electrode, thereby achieving gate resistance reduction and high frequency characteristics improvement.Type: ApplicationFiled: February 8, 2011Publication date: June 9, 2011Applicant: FUJITSU SEMICONDUCTOR LIMITEDInventor: Masashi Shima
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Publication number: 20110133275Abstract: A semiconductor device includes a semiconductor-on-insulator region on a substrate. The semiconductor-on-insulator region includes a first semiconductor region overlying a dielectric region. The device includes an MOS transistor and a bipolar transistor. The MOS transistor has a drain region, a body region, and a source region in the first semiconductor region. The MOS transistor also includes a gate. The device also includes a second semiconductor region overlying the substrate and adjacent to the drain region, and a third semiconductor region overlying the substrate and adjacent to the second semiconductor region. The bipolar transistor includes has the drain region of the MOS transistor as an emitter, the second semiconductor region as a base, and the third semiconductor region as a collector. Accordingly, the drain of the MOS transistor also functions as the emitter of the bipolar transistor. Additionally, the gate and the base are coupled by a resistive element.Type: ApplicationFiled: February 15, 2011Publication date: June 9, 2011Inventor: James Pan
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Patent number: 7956425Abstract: Thin film transistors (TFT) and methods for making same. The TFTs generally comprise: (a) a semiconductor layer comprising source and drain terminals and a channel region therebetween; (b) a gate electrode comprising a gate and a gate dielectric layer between the gate and the channel region; (c) a first dielectric layer adjacent to the gate electrode and in contact with the source and drain terminals, the first dielectric layer comprising a material which comprises a dopant therein; and (d) an electrically functional source/drain extensions in the channel region, adjacent to the source and drain terminals, comprising a material which comprises the same dopant as the first dielectric layer.Type: GrantFiled: February 2, 2010Date of Patent: June 7, 2011Assignee: Kovio, Inc.Inventor: James Montague Cleeves
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Patent number: 7952142Abstract: MOSFET gate structures comprising multiple width offset spacers are provided. A first and a second gate structure are formed on a semiconductor substrate. A pair of first offset spacers are formed adjacent either side of the first gate structure. Each of the first offset spacers comprises a first silicon oxide layer with a first dielectric layer overlying. A pair of second offset spacers are formed adjacent either side of the second gate structure. Each of the second offset spacers comprises a second silicon oxide layer with a second dielectric layer overlying. Ion implanted doped regions are formed in the semiconductor substrate adjacent the first and second offset spacers respectively to form a first and second MOSFET device. A maximum width of each of the first offset spacers is different from that of the second offset spacers. The first silicon oxide layer is thinner than the second silicon oxide layer.Type: GrantFiled: October 17, 2008Date of Patent: May 31, 2011Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventor: Shien-Yang Wu
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Patent number: 7944035Abstract: A semiconductor die has devices such as MOSgated devices, diodes and the like formed into the top and bottom surfaces of the die. One terminal of each of the devices terminal in the interior center of the die and a common contact is made to the interior center of the die at one edge of the die. Various packages for the die having a reduced foot print on a support substrate are disclosed.Type: GrantFiled: May 16, 2007Date of Patent: May 17, 2011Assignee: International Rectifier CorporationInventor: Igor Bol
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Publication number: 20110108913Abstract: A LDMOS with double LDD and trenched drain is disclosed. According to some preferred embodiment of the present invention, the structure contains a double LDD region, including a high energy implantation to form lightly doped region and a low energy implantation thereon to provide a low resistance path for current flow without degrading breakdown voltage. At the same time, a P+ junction made by source mask is provided underneath source region to avoid latch-up effect from happening.Type: ApplicationFiled: January 13, 2011Publication date: May 12, 2011Applicant: FORCE MOS TECHNOLOGY CO., LTD.Inventor: Fu-Yuan HSIEH