With Means To Prevent Parasitic Conduction Channels Patents (Class 257/394)
  • Patent number: 6737713
    Abstract: An integrated circuit is described having a substrate, a power transistor in a first region of the subtracted, and a plurality of barrier regions of the substrate around the first region. Each barrier region includes a barrier transistor and at least one substrate connection connecting the barrier transistor to at least one floating region of the substrate adjacent the barrier region.
    Type: Grant
    Filed: July 2, 2002
    Date of Patent: May 18, 2004
    Assignee: Tripath Technology, Inc.
    Inventors: Sorin Stefan Georgescu, Carl Sawtell
  • Patent number: 6713820
    Abstract: A semiconductor device is provided in which each of contacts between a source and a drain of a MOS transistor and a metallic wiring is either a contact having an arbitrary one side longer than the other side, or source contacts and well contacts are made batting contacts each having an arbitrary one side of a diffusion region having the same polarity as that of a well shorter than the other side. Thus, the contact shape is longitudinal in a transistor width direction, which makes it possible that a large current is caused to flow with a small interval of gates thereof.
    Type: Grant
    Filed: April 8, 2002
    Date of Patent: March 30, 2004
    Assignee: Seiko Instruments Inc.
    Inventors: Toshihiko Omi, Kazutoshi Ishii
  • Patent number: 6709926
    Abstract: An integrated circuit includes memory cells having array transistors separated by minimum lithographic feature size, and unsilicided metal bit lines encapsulated by a diffusion barrier while high performance logic transistors may be formed on the same chip without compromise of performance including an effective channel silicided contacts for low source/drain contact resistance, extension and halo implants for control of short channel effects and a dual work function semiconductor gate having a high impurity concentration and correspondingly thin depletion layer thickness commensurate with state of the art gate dielectric thickness. This structure is achieved by of an easily planarized material, and using a similar mask planarized to the height of the structures of differing materials to decouple substrate and gate implantations in the logic transistors.
    Type: Grant
    Filed: May 31, 2002
    Date of Patent: March 23, 2004
    Assignee: International Business Machines Corporation
    Inventors: Dureseti Chidambarrao, Omer H. Dokumaci, Bruce Bennett Doris, Oleg Gluschenkov, Rajarao Jammy, Jack Allan Mandelman
  • Patent number: 6707104
    Abstract: A lateral high-breakdown-voltage transistor comprises an n− drain region and an n+ source region formed in a p− silicon substrate, separated from each other, a gate electrode formed on a channel, insulated from the substrate, an n+ drain contact region formed in the drain region, drain wiring electrically connected to the drain region via the drain contact region, a p+ substrate contact region formed in contact with the source region, and source wiring electrically connected to the source region and also connected to the semiconductor layer via the substrate contact region. The transistor is characterized in that the substrate contact regions have respective portions made to be in contact with the source wiring, and accordingly laterally extend from inside the contact surface of the source wiring to outside the contact surface.
    Type: Grant
    Filed: October 23, 2002
    Date of Patent: March 16, 2004
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kiminori Watanabe, Keisuke Matsuoka, Takao Ito
  • Patent number: 6686634
    Abstract: In an integrated pressure sensor including a semiconductor substrate having a p type single crystal silicon substrate and an n type epitaxial layer of which a portion is etched by electrochemical etching to have a diaphragm, an impurity diffusion layer piercing the n type epitaxial layer at least defining the diaphragm is formed for isolation. An etching wire is formed on the surface of the n type epitaxial layer with insulation and the first end of the etching wire extends to the inside of the surface and is connected to the n type epitaxial layer. The second opposite end extends to an edge of the semiconductor substrate. The etching wire does not cross the impurity layer inside the surface of the semiconductor substrate to prevent the etching wire from short-circuiting with the impurity diffusion layer during the electrochemical etching.
    Type: Grant
    Filed: August 16, 2002
    Date of Patent: February 3, 2004
    Assignee: Denso Corporation
    Inventor: Seiichiro Ishio
  • Patent number: 6686635
    Abstract: A method for forming transistors static-random-access-memory. The method comprises the steps of: providing a substrate which at least comprises a cell area and periphery area, wherein the cell area comprises a first P-type region, a second P-type region, a first N-type region and a second N-type region, the periphery area comprises numerous periphery P-type regions and numerous periphery N-type regions; covering the first P-type region, the second P-type region and the periphery P-type regions by a first photoresist; forming numerous N-type sources and numerous N-type drains in the first P-type region, the second P-type region and the periphery P-type regions. Remove the first photoresist.
    Type: Grant
    Filed: January 3, 2002
    Date of Patent: February 3, 2004
    Assignee: United Microelectronics Corp.
    Inventor: Chih-Yuan Hsiao
  • Patent number: 6677651
    Abstract: A semiconductor device includes a semiconductor substrate, a silicon oxide layer formed on the semiconductor substrate, a gate electrode formed over the silicon oxide layer, and a side wall structure formed over the silicon oxide layer and adjacent the gate electrode. In one configuration, the thickness of the silicon oxide layer under the sidewall structure is thicker than the thickness of the silicon oxide layer under the gate electrode.
    Type: Grant
    Filed: December 17, 2002
    Date of Patent: January 13, 2004
    Assignee: Oki Electric Industry Co., Ltd.
    Inventors: Masahiro Yoshida, Shunichi Tokitoh
  • Patent number: 6642582
    Abstract: A circuit structure integrated in a semiconductor substrate comprises at least one pair of transistors each being formed each in a respective active area region and having a source region and a drain region, as well as a channel region intervening between the source and drain regions and being overlaid by a gate region. The gate regions are connected electrically together by an overlying conductive layer and respective contacts. The contacts between the gate regions and the conductive layer are formed above the active areas.
    Type: Grant
    Filed: July 30, 1999
    Date of Patent: November 4, 2003
    Assignee: STMicroelectronics S.r.l.
    Inventors: Giovanna Dalla Libera, Federico Pio
  • Patent number: 6624495
    Abstract: An method and apparatus for high voltage control of isolation region transistors (320) in an integrated circuit. Isolation region transistors (320) are formed between active devices by selective implantation of channel stop implants (140). Isolation region transistors (320) are those areas with a conductor (130) over an isolation region (120) with no channel stop implant (140). This provides an isolation region transistor (320) with a lower threshold voltage than the areas with channel stop implant (140). The voltage threshold of the isolation region transistors 320 are adjustable to a range of voltages by varying the length of channel stop implant (140). The apparatus may be fabricated using conventional fabrication processes.
    Type: Grant
    Filed: January 30, 1998
    Date of Patent: September 23, 2003
    Assignee: Altera Corporation
    Inventor: Dominik J. Schmidt
  • Patent number: 6621116
    Abstract: An EPROM structure includes a NMOS transistor integrated with a capacitor. The terminal names of the NMOS transistor follow the conventional nomenclature: drain, source, body and gate. The gate of the NMOS transistor is connected directly and exclusively to one of the capacitor plates. In this configuration, the gate is now referred to as the “floating gate”. The remaining side of the capacitor is referred to as the “control gate”.
    Type: Grant
    Filed: December 20, 2001
    Date of Patent: September 16, 2003
    Inventor: Michael David Church
  • Patent number: 6611009
    Abstract: A cross-coupled transistor pair includes separately arranged first and second active areas. A gate area of a first transistor is arranged symmetrically on portions of the first and second active areas. A gate area of a second transistor is also arranged symmetrically on portions of the first and second active areas. A first signal line extends between drain areas of the first transistor and the gate area of the second transistor. A second signal line extends between drain areas of the second transistor and the gate area of the first transistor. Metal lines can be provided to connect a source voltage, data signal lines, or control signals to common source areas of the first and second transistors. Methods for constructing cross-coupled transistor pairs are also provided.
    Type: Grant
    Filed: December 6, 2001
    Date of Patent: August 26, 2003
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Kyu-Nam Lim
  • Patent number: 6611023
    Abstract: A fully depleted silicon on insulator (SOI) field effect transistor (FET) includes a gate positioned above a channel region and an aligned back gate positioned below the channel region and the buried oxide later. Alignment of the back gate with the gate is achieved utilizing a disposable gate process and retrograde doping of the backgate.
    Type: Grant
    Filed: May 1, 2001
    Date of Patent: August 26, 2003
    Assignee: Advanced Micro Devices, Inc.
    Inventors: William G. En, Srinath Krishnan
  • Patent number: 6573560
    Abstract: A trench MOS-gated device having an upper surface includes a substrate having an upper layer of doped monocrystalline semiconductor material of a first conduction type. A gate trench in the upper layer has sidewalls and a floor lined with a first dielectric material and a centrally disposed core that is formed of a second dielectric material and extends upwardly from the first dielectric material on the trench floor to contact an interlevel dielectric layer overlying the gate trench. The remainder of the trench is substantially filled with a conductive material that encompasses and contacts the core of second dielectric material. A doped well region of a second conduction type overlies a drain zone of the first conduction type in the upper layer, and a heavily doped source region of the first conduction type contiguous to the gate trench and a heavily doped body region of the second conduction type are disposed in the well region at the upper surface.
    Type: Grant
    Filed: November 6, 2001
    Date of Patent: June 3, 2003
    Assignee: Fairchild Semiconductor Corporation
    Inventor: Praveen Muraleedharan Shenoy
  • Patent number: 6563181
    Abstract: A semiconductor device (20) includes an isolated p-well (22) formed in a substrate (21) by a buried n-well (25) and an n-well ring (24). The n-well ring (24) extends from a surface of the semiconductor device (20) to the buried n-well (25). The isolated p-well (22) includes a plurality of n-well plugs (27) extending from the surface of the semiconductor device (20) into the isolated p-well (22) and contacting the buried n-well (25). The plurality of n-well plugs (27) reduces an n-well resistance to provide better noise isolation for high frequency signals.
    Type: Grant
    Filed: November 2, 2001
    Date of Patent: May 13, 2003
    Assignee: Motorola, Inc.
    Inventors: Yang Du, Suman Kumar Banerjee, Rainer Thoma, Alain Duvallet
  • Patent number: 6563178
    Abstract: A first gate electrode for an n-channel MOSFET includes first and second metal films and a low-resistivity metal film. The first metal film has been deposited on a first gate insulating film and is made of a first metal having a work function located closer to the conduction band of silicon with reference to an intermediate level of silicon bandgap. The second metal film has been deposited on the first metal film and is made of a second metal having a work function located closer to the valence band of silicon with reference to the intermediate level of silicon bandgap. The low-resistivity metal film has been deposited on the second metal film. A second gate electrode for a p-channel MOSFET includes: the second metal film, which has been deposited on a second gate insulating film and is made of the second metal; and the low-resistivity metal film deposited on the second metal film.
    Type: Grant
    Filed: March 28, 2001
    Date of Patent: May 13, 2003
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Masaru Moriwaki, Takayuki Yamada
  • Patent number: 6563159
    Abstract: Provided is a substrate of a semiconductor integrated circuit which can easily manufacture an integrated circuit having a soft error resistance, a latch up resistance and an ESD resistance increased. A thickness of a semiconductor surface layer having a lower impurity concentration than that of each of substrate single crystals 51 and 55 is varied according to a resistance which should be possessed by each section such as a memory cell section 5, a logic section 6, an input-output section 8 or the like for a region where each section is to be formed.
    Type: Grant
    Filed: May 27, 1998
    Date of Patent: May 13, 2003
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Tatsuya Kunikiyo, Ken-ichiro Sonoda
  • Publication number: 20030085432
    Abstract: A semiconductor device (20) includes an isolated p-well (22) formed in a substrate (21) by a buried n-well (25) and an n-well ring (24). The n-well ring (24) extends from a surface of the semiconductor device (20) to the buried n-well (25). The isolated p-well (22) includes a plurality of n-well plugs (27) extending from the surface of the semiconductor device (20) into the isolated p-well (22) and contacting the buried n-well (25). The plurality of n-well plugs (27) reduces an n-well resistance to provide better noise isolation for high frequency signals.
    Type: Application
    Filed: November 2, 2001
    Publication date: May 8, 2003
    Inventors: Yang Du, Suman Kumar Banerjee, Rainer Thoma, Alain Duvallet
  • Publication number: 20030085431
    Abstract: A trench MOS-gated device having an upper surface includes a substrate having an upper layer of doped monocrystalline semiconductor material of a first conduction type. A gate trench in the upper layer has sidewalls and a floor lined with a first dielectric material and a centrally disposed core that is formed of a second dielectric material and extends upwardly from the first dielectric material on the trench floor to contact an interlevel dielectric layer overlying the gate trench. The remainder of the trench is substantially filled with a conductive material that encompasses and contacts the core of second dielectric material. A doped well region of a second conduction type overlies a drain zone of the first conduction type in the upper layer, and a heavily doped source region of the first conduction type contiguous to the gate trench and a heavily doped body region of the second conduction type are disposed in the well region at the upper surface.
    Type: Application
    Filed: November 6, 2001
    Publication date: May 8, 2003
    Inventor: Praveen Muraleedharan Shenoy
  • Patent number: 6531750
    Abstract: A method of forming shallow junction MOSFETs is achieved. A gate oxide layer is formed overlying a substrate. A first electrode layer, of polysilicon or metal, is deposited. A silicon nitride layer is deposited. The silicon nitride layer and the first electrode layer are etched through to form temporary MOSFET gates. Ions are implanted into the substrate to form lightly doped junctions. A spacer layer is deposited. The spacer layer and the gate oxide layer are anisotropically etched to form sidewall spacers. Ions are implanted into the substrate to form heavily doped junctions. The silicon nitride layer is etched away. A second electrode layer, of polysilicon or metal, is deposited overlying the substrate, the sidewall spacers, and the first polysilicon layer. The second electrode layer is polished down to the top surfaces of the sidewall spacers to complete the MOSFETs and to form permanent gates and conductive connections to the source and drain junctions.
    Type: Grant
    Filed: August 31, 2001
    Date of Patent: March 11, 2003
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Lap Chan, Cher Liang Cha, Ravishankar Sundaresan
  • Patent number: 6518628
    Abstract: An integrated CMOS circuit arrangement and a method of manufacturing same, which includes both a first MOS transistor and a second MOS transistor complementary thereto, wherein one of the MOS transistors is arranged at the floor of a trench and the other is arranged at the principal surface of a semiconductor substrate. The MOS transistors are arranged relative to one another such that a current flow through the MOS transistors respectively occurs substantially parallel to a sidewall of the trench that is arranged between the MOS transistors.
    Type: Grant
    Filed: November 15, 1999
    Date of Patent: February 11, 2003
    Assignee: Siemens Aktiengesellschaft
    Inventors: Wolfgang Krautschneider, Franz Hofmann, Lothar Risch
  • Patent number: 6512251
    Abstract: The semiconductor switching element blocks in both directions between a first and a second load terminal. The switching element has a field effect transistor and a bipolar transistor. The field effect transistor has a controlled gate, a source connected to the first load terminal, a drain connected to the second load terminal and a body connection. The bipolar transistor has a base, an emitter, and a collector. The emitter is connected to the body connection of the field effect transistor.
    Type: Grant
    Filed: May 30, 2001
    Date of Patent: January 28, 2003
    Assignee: Infineon Technologies AG
    Inventor: Wolfgang Werner
  • Publication number: 20020190331
    Abstract: The present invention provides a semiconductor device and a method of manufacture therefor. The semiconductor device includes a semiconductor substrate having a gate formed there over. The semiconductor device further includes an isolation region having at least one source/drain region formed there over.
    Type: Application
    Filed: June 15, 2001
    Publication date: December 19, 2002
    Applicant: Agere Systems Guardian Corp.
    Inventor: Ian Wylie
  • Patent number: 6489653
    Abstract: A lateral high-breakdown-voltage transistor comprises an n− drain region and an n+ source region formed in a p− silicon substrate, separated from each other, a gate electrode formed on a channel, insulated from the substrate, an n+ drain contact region formed in the drain region, drain wiring electrically connected to the drain region via the drain contact region, a p+ substrate contact region formed in contact with the source region, and source wiring electrically connected to the source region and also connected to the semiconductor layer via the substrate contact region. The transistor is characterized in that the substrate contact regions have respective portions made to be in contact with the source wiring, and accordingly laterally extend from inside the contact surface of the source wiring to outside the contact surface.
    Type: Grant
    Filed: December 26, 2000
    Date of Patent: December 3, 2002
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Kiminori Watanabe, Keisuke Matsuoka, Takao Ito
  • Patent number: 6489657
    Abstract: A semiconductor device comprising a high withstand voltage MOS transistor of an offset drain/offset source structure easing a high electric field generated between a channel and a parasitic channel stopper in an operating state and preventing changes of a threshold voltage Vth, on-resistance Ron, or other characteristics, said device characterized in that a parasitic channel stopper layer containing an impurity is formed with a concentration gradient wherein the impurity concentration decreases along with approaching a channel region and a method of producing the same.
    Type: Grant
    Filed: September 18, 2000
    Date of Patent: December 3, 2002
    Assignee: Sony Corporation
    Inventor: Hideki Mori
  • Patent number: 6472716
    Abstract: A shallow P well and a deep P well are formed in the surface of a P type semiconductor substrate so as to partially overlap each other and these wells are surrounded by an N well, a deep bottom N type well and a connection N well. The impurity concentration of this overlapping region is higher than the impurity concentration of the P well or of the deep P well and a P+ type region is formed in the surface of the overlapping region. A potential (VBB) different from the ground potential is applied to the P+ type region. The P+ type region is formed in overlapping region and, thereby, the layout of the semiconductor device can be scaled down.
    Type: Grant
    Filed: September 24, 2001
    Date of Patent: October 29, 2002
    Assignees: Mitsubishi Denki Kabushiki Kaisha, Mitsubishi Electric Engineering Company Limited
    Inventors: Futoshi Igaue, Katsumi Dosaka
  • Publication number: 20020117720
    Abstract: A method of fabricating a MOS capacitor in a complementary MOS fabrication process with dual-doped poly gates comprises providing a substrate of a first conductive type, the substrate having a first well of the first conductive type and a second well of a second conductive type. A dielectric layer is formed on the substrate. A first poly gate of the first conductive type is formed on the dielectric layer over the first well and a second poly gate of the second conductive type is formed on the dielectric layer over the second well. A first doped region of the first conductive type is formed in the substrate at each side of the first poly gate. A second doped region of the second conductive type is formed in the substrate at each side of the second poly gate layer. A spacer is formed on sidewalls of the first poly gate and the second poly gate, wherein a portion of the dielectric layer is also removed to expose a portion of the first doped region and a portion of the second doped region.
    Type: Application
    Filed: February 20, 2002
    Publication date: August 29, 2002
    Inventors: David Lee, Chewnpu Jou
  • Patent number: 6441436
    Abstract: A SOI DRAM unit comprising a MOS transistor and an improved SOI substrate having a back-gate control. The SOI substrate includes a first insulating layer, a first semiconductor layer having a first conductivity type, a second insulating layer, and a second semiconductor layer having a first conductivity type formed on a substrate. The MOS transistor includes a gate formed on the second semiconductor layer and a source and drain region, having a second conductivity type, formed on either side of the gate in the second semiconductor layer, wherein the source and the drain electrically connects to a bit line and a capacitor, respectively. A first oxidation region is formed in the first semiconductor layer below the source region and a second oxidation region is formed in the first semiconductor layer below the drain region. Both the first oxidation and second oxidation regions are contiguous with the second insulating layer.
    Type: Grant
    Filed: November 29, 2000
    Date of Patent: August 27, 2002
    Assignee: United Microelectronics Corp.
    Inventors: De-Yuan Wu, Chih-Cheng Liu
  • Patent number: 6424010
    Abstract: An SOI layer is formed on a silicon substrate with a buried insulating layer therebetween. An SOI-MOSFET is formed including a drain region and a source region that are formed to define a channel formation region at the SOI layer and including a gate electrode layer opposite to the channel formation region with an insulating layer therebetween. A field-shield (FS) isolation structure is formed to have an FS plate opposite to a region of the SOI layer in the vicinity of the edge portion of the drain region and the source region, and to electrically isolate the SOI-MOSFET from other elements by applying a prescribed potential to the FS plate to fix the potential of the region of the SOI layer opposite to the FS plate. The channel formation region includes the edge portions on both sides and a central portion between the edge portions in a direction of a channel width, and a channel length at the edge of prescribed region is smaller than a channel length at the central portion.
    Type: Grant
    Filed: October 9, 1998
    Date of Patent: July 23, 2002
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Shigenobu Maeda, Yasuo Yamaguchi, Toshiaki Iwamatsu
  • Publication number: 20020094643
    Abstract: A process for passivating the semiconductor-dielectric interface of a MOS structure to reduce the interface state density to a very low level. A particular example is a MOSFET having a tungsten electrode that in the past has prevented passivation of the underlying semiconductor-dielectric interface to an extent sufficient to reduce the interface state density to less than 5×1010/cm2-eV. Though substantially impervious to molecular hydrogen, thin tungsten layers are shown to be pervious to atomic hydrogen, enabling atomic hydrogen to be diffused through a tungsten electrode into an underlying semiconductor-dielectric interface.
    Type: Application
    Filed: January 16, 2001
    Publication date: July 18, 2002
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Paul M. Solomon, Douglas A. Buchanan, Eduard A. Cartier, Kathryn W. Guarini, Fenton R. McFeely, Huiling Shang, John J. Yourkas
  • Patent number: 6414363
    Abstract: A semiconductor device that operates at high speed using a low voltage power source, in which the output of each gate in the standby state is stable, and which has a delay time that is not affected by the frequency of the input signal. TrQ1 to TrQ8, which form multiple stages of the inverters are designed to have a low threshold voltage in order to accomplish low voltage operation. When input node A is at “L” in the standby state, TrQ2, Q3, Q6, and Q8 which cut-off are connected to high threshold voltage TrQn1 and Qp1. In the standby state, power cutting TrQn1 and Qp1 cut off in accordance with chip selecting signals CS, /CS, thereby blocking the flow of sub-threshold current to TrQ1˜Q8. Since TrQ1, Q4, Q5 and Q8 are not cut off at this time, the output potential of each inverter is stable.
    Type: Grant
    Filed: November 7, 2000
    Date of Patent: July 2, 2002
    Assignee: NEC Corporation
    Inventor: Ichiro Mizuguchi
  • Publication number: 20020074610
    Abstract: An electronic device architecture is described comprising a field effect device in an active region 22 of a substrate 10. Channel stop implant regions 28a and 28b are used as isolation structures and are spaced apart from the active region 22 by extension zones 27a and 27b. The spacing is established by using an inner mask layer 20 and an outer mask layer 26 to define the isolation structures.
    Type: Application
    Filed: October 25, 2001
    Publication date: June 20, 2002
    Inventors: Lily X. Springer, Binghua Hu, Chin-Yu Tsai, Jozef C. Mitros
  • Patent number: 6396112
    Abstract: A method is provided for forming buried source line in semiconductor devices. It is known in the art to form buried contacts on the surface of a semiconductor substrate. The present invention discloses a method of fabricating a semiconductor device, particularly a memory cell, having both the source region and the source line buried within the substrate. The source line is formed in a trench in the substrate over the source region. The trench walls are augmented with voltage anti-punch-through protection. The trench also provides the attendant advantages of extended sidewall area, smaller sheet resistance, and yet smaller cell area, therefore, smaller chip size, and faster access time as claimed in the embodiments of this invention. The buried source disclosed here is integrated with source line which is also buried within the substrate.
    Type: Grant
    Filed: February 20, 2001
    Date of Patent: May 28, 2002
    Assignee: Taiwan Semiconductor Manufacturing Company
    Inventors: Chia-Ta Hsieh, Jenn Tsao, Di-Son Kuo, Yai-Fen Lin, Hung-Cheng Sung
  • Patent number: 6380598
    Abstract: A radiation hardened memory device having static random access memory cells includes active gate isolation structures to prevent leakage currents between active regions formed adjacent to each other on a substrate. The active gate isolation structure includes a gate oxide and polycrystalline silicon gate layer electrically coupled to a voltage terminal resulting in an active gate isolation structure that prevents a conductive channel extending from adjacent active regions from forming. The gate oxide of the active gate isolation structures is relatively thin compared to the conventional oxide isolation regions and thus, will be less susceptible to any adverse influence from trapped charges caused by radiation exposure.
    Type: Grant
    Filed: September 10, 1999
    Date of Patent: April 30, 2002
    Assignee: STMicroelectronics, Inc.
    Inventor: Tsiu C. Chan
  • Patent number: 6380022
    Abstract: The present invention creates a useful BJT by increasing the gain associated with the parasitic BJT on an SOI or bulk type MOSFET. This is done by masking those manufacturing steps that minimize the BJT's beta value, by intentionally increasing the beta value of the BJT, and by driving the base of the BJT with the circuit. Once the gain is increased sufficiently, the BJT may be used productively in the circuit. Because the physical structure of the BJT is already part of the silicon water, its productive use does not require additional space.
    Type: Grant
    Filed: April 20, 2000
    Date of Patent: April 30, 2002
    Assignee: Hewlett-Packard Company
    Inventor: Jonathan P Lotz
  • Patent number: 6376886
    Abstract: In a field effect transistor including a semiconductor substrate which is divided into an active area and an inactive area, a comb-shaped gate electrode having a trunk portion formed on the inactive area and gate fingers formed on the active area, source ohmic electrodes and drain ohmic electrodes formed on the active area and alternating with the gate fingers of the comb-shaped gate electrodes, a comb-shaped source lead-out electrode having a trunk portion formed on the inactive area and fingers each connected to one of the source ohmic electrodes and formed on the active area, and a comb-shaped drain lead-out electrode having a trunk portion formed on the inactive area and fingers each connected to one of the drain ohmic electrodes and formed on the active area, edges of the fingers of the comb-shaped source lead-out electrode recede from edges of respective ones of the source ohmic electrodes, or edges of the fingers of the comb-shaped drain lead-out electrode recede from edges of respective ones of the dr
    Type: Grant
    Filed: March 5, 2001
    Date of Patent: April 23, 2002
    Assignee: NEC Corporation
    Inventor: Noriaki Mizuhara
  • Patent number: 6365945
    Abstract: A submicron semiconductor device having a self-aligned channel stop implant region, and a method for fabricating the semiconductor device using a trim and etch is disclosed. The semiconductor device includes a plurality of active regions separated by insulating regions. The method for fabricating the device includes depositing a nitride over a substrate and selectively covering the active regions with a mask, wherein the mask extends beyond boundaries of the active regions to narrow the width of the insulating regions. Thereafter, a channel stop implant is performed to form channel stops. The mask is then trimmed to the boundaries of the active regions after formation of the channel stops, followed by etching the nitride in exposed areas of the mask. Field oxide is then grown in the insulating regions, whereby the field oxide is self-aligned to the channel stops.
    Type: Grant
    Filed: May 2, 2000
    Date of Patent: April 2, 2002
    Assignee: Advance Micro Devices, Inc.
    Inventors: Michael K. Templeton, Masaaki Higashitani, John Jianshi Wang
  • Patent number: 6323525
    Abstract: A semiconductor device having a MISFET with an EV source/drain structure has a gate electrode formed on part of a first p-type semiconductor layer via a gate insulating film. A second n+-type semiconductor layer is formed in the prospective source and drain regions of the first semiconductor layer via the gate electrode, and a third n−-type semiconductor layer is formed on the second semiconductor layer. Each of source and drain regions is formed from the second and third semiconductor layers. The upper edge of the source/drain regions is formed above the boundary between the first semiconductor layer and the gate insulating film. In an ON state, part of a depletion layer in the drain region is formed in the third semiconductor layer, and part of a depletion layer in the source region is formed in the second semiconductor layer.
    Type: Grant
    Filed: September 16, 1998
    Date of Patent: November 27, 2001
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Mitsuhiro Noguchi, Yukihito Oowaki
  • Patent number: 6320234
    Abstract: A semiconductor device has a semiconductor substrate having a peripheral circuit area and a memory cell area. A border region having a well of a first conductivity is formed between the peripheral circuit area and the memory cell area. A well of a second conductivity is formed in the peripheral circuit area. The well in the peripheral circuit area is in contact with the border region but not in contact with the memory cell area. Dummy transistors are formed in the border region. The dummy transistors are arranged with substantially the same transistor forming density as that of the memory cell area.
    Type: Grant
    Filed: November 29, 1999
    Date of Patent: November 20, 2001
    Assignee: Seiko Epson Corporation
    Inventors: Junichi Karasawa, Kunio Watanabe, Takashi Kumagai
  • Publication number: 20010038134
    Abstract: In a MOSFET, a source region, a drain region and a channel region disposed between the source region and the drain region are provided. And the width W(x) of the channel region is changed according to the following mathematical equation.
    Type: Application
    Filed: April 19, 2001
    Publication date: November 8, 2001
    Applicant: NEC Corporation
    Inventor: Shigetaka Kumashiro
  • Patent number: 6307230
    Abstract: A transistor having an improved sidewall gate structure and method of construction is provided. The improved sidewall gate structure may include a semiconductor substrate (12) having a channel region (20). A gate insulation (36) may be adjacent the channel region (20) of the semiconductor substrate (12). A gate (38) may be formed adjacent the gate insulation (36). A sidewall insulation body (28) may be formed adjacent a portion of the gate (38). The sidewall insulation body (28) is comprised of a silicon oxynitride material. An epitaxial layer (30) may be formed adjacent a portion of the sidewall insulation body (28) and adjacent the semiconductor substrate (12) substantially outward of the channel region (20). A buffer layer (32) may be formed adjacent a portion of the sidewall insulation body (28) and adjacent the epitaxial layer (30).
    Type: Grant
    Filed: October 12, 1999
    Date of Patent: October 23, 2001
    Assignee: Texas Instruments Incorporated
    Inventors: Amitava Chatterjee, Wei William Lee, Greg A. Hames, Quzhi He, Iqbal Ali, Maureen A. Hanratty
  • Patent number: 6300655
    Abstract: A plurality of memory cell transistors are formed on a principal surface of a semiconductor substrate in a plurality of active regions defined by an isolation region. Each memory cell transistor uses one word line as its gate electrode and has a pair of source and drain regions defined by the gate electrode and the isolation region. One of a pair of source and drain regions is connected to one of a plurality of bit lines, and the other region is connected to one of a plurality of capacitors. Three sides of the other region are defined by the isolation region. The other region includes a first impurity doped region extending to under another word line adjacent to the one word line and a second impurity doped region partially overlapping the first impurity doped region and the gate electrode.
    Type: Grant
    Filed: March 10, 1999
    Date of Patent: October 9, 2001
    Assignee: Fujitsu Limited
    Inventors: Taiji Ema, Koichi Hashimoto
  • Patent number: 6288424
    Abstract: In important applications of circuits comprising transistors of the lateral DMOST type, such as (half) bridges, the voltage on the output may become higher or lower than the supply voltage or earth in the case of an inductive load. The injection of charge carriers into the substrate can be prevented by screening the drain (18) of the Low-Side transistor from the substrate by means of a p-type buried layer (13) and an n-type buried layer (14) below said p-type buried layer. In order to avoid parasitic npn-action between the n-type buried layer (14) and the n-type drain (18), not only the back-gate regions (16a, 16c) at the edge of the transistor, but also the back-gate regions (16b) in the center of the transistor, are connected to the p-type buried layer, for example by means of a p-type well. As a result, throughout the relatively high-ohmic buried layer, the potential is well defined, so that said npn-action is prevented.
    Type: Grant
    Filed: September 22, 1999
    Date of Patent: September 11, 2001
    Assignee: U.S. Philips Corporation
    Inventor: Adrianus W. Ludikhuize
  • Patent number: 6281088
    Abstract: An SRAM cell and a method of manufacturing the same are disclosed. An SRAM cell including pull down devices, access devices and pull up devices each having source and drain regions with LDD structure, the source and drain regions of the access devices having: N+ source and drain regions; N− source and drain regions formed under the N+ source and drain regions; and P− impurity regions whose predetermined portion is overlapped with the N− source and drain region.
    Type: Grant
    Filed: June 2, 1999
    Date of Patent: August 28, 2001
    Assignee: Hyundai Electronics Industries Co., Ltd.
    Inventor: Jae-Kap Kim
  • Publication number: 20010015465
    Abstract: The present invention discloses a method for forming transistors for semiconductor devices that can prevent degradation of device properties by interrupting a current path from a drain junction region to a source junction region with an insulating channel barrier structure. The method includes the steps of: forming a device isolating film for defining an active region, and simultaneously forming a channel barrier film at the lower portion of a gate electrode formation region; partially etching the upper portion of the channel barrier film to form a recess; filling the recess above the upper portion of the channel barrier film with silicon; patterning a gate oxide film and a gate electrode on the stacked structure of the channel barrier film and silicon; and forming the transistor by forming source/drain junction regions in the exposed semiconductor substrate.
    Type: Application
    Filed: January 2, 2001
    Publication date: August 23, 2001
    Inventors: Jeong Kug Lee, Yeon Cheol Heo
  • Patent number: 6242782
    Abstract: The provision of an isolation gate connecting unassociated active areas of adjacent transistors formed in a semiconductor substrate provides effective isolation of the adjacent transistors with no additional process steps required. The isolation gate is tied to a reference to ensure that a channel between the unassociated active areas is not formed, and effective isolation is provided. The adjacent transistors are cross coupled to form sense amplifiers for dynamic random access memory devices.
    Type: Grant
    Filed: July 29, 1998
    Date of Patent: June 5, 2001
    Assignee: Micron Technology, Inc.
    Inventors: Stephen L. Casper, Brian M. Shirley, Kevin G. Duesman
  • Patent number: 6239472
    Abstract: A MOSFET structure having substantially reduced parasitic junction capacitance, relaxed thermal budget constraints and resiliency to hot carrier damage is disclosed. The MOSFET structure includes a gate stack that is disposed over a gate oxide that is in turn disposed over an active region of a substrate. A pair of shallow trenches are defined on either side of the gate stack, and an intrinsic silicon material is disposed within the pair of shallow trenches up to a top surface of the gate stack. The MOSFET structure further includes source and drain implanted impurities that are defined in an upper portion of the intrinsic silicon material. The upper portion is configured to extend down into the intrinsic silicon material to a target diffusion level that is just below the gate oxide of the gate stack.
    Type: Grant
    Filed: September 1, 1998
    Date of Patent: May 29, 2001
    Assignee: Philips Electronics North America Corp.
    Inventor: Jayarama N. Shenoy
  • Patent number: 6228747
    Abstract: Disposable spacers of an organic material or a low-temperature inorganic material provide advantages in the formation of STI trenches and contact holes and additional freedom in line spacing.
    Type: Grant
    Filed: March 18, 1999
    Date of Patent: May 8, 2001
    Assignee: Texas Instruments Incorporated
    Inventor: Keith A. Joyner
  • Patent number: 6225669
    Abstract: A field effect transistor (FET) structure, and method for making the same, which further suppresses short-channel effects based on variations within the gate dielectric itself. The FET structure utilizes non-uniform gate dielectrics to alter the vertical electric field presented along the channel. The thickness and/or dielectric constant of the gate dielectric is varied along the length of the channel to present a vertical electric field which varies in a manner that tends to reduce the short-channel effects and gate capacitances.
    Type: Grant
    Filed: September 30, 1998
    Date of Patent: May 1, 2001
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Wei Long, Yowjuang William Liu, Don Wollesen
  • Patent number: 6218694
    Abstract: In a semiconductor memory device has a first contact region that is provided with a plurality of contacts in the source/drain region on one side of a third interconnect, and a second contact region that is provided with a plurality of contacts in the source/drain region on the other side of the third interconnect. The source region is connected via the contacts of a first contact region to the first interconnect, and the drain region is connected via the contacts of the first contact region to the second interconnect.
    Type: Grant
    Filed: June 23, 1999
    Date of Patent: April 17, 2001
    Assignee: NEC Corporation
    Inventor: Keishi Araoka
  • Patent number: 6153915
    Abstract: In a semiconductor device and a method of manufacturing the same according to the invention, a p-type diffusion region for electrically connecting a back gate region and an electrode layer together is formed at a source region. Thereby, both of source region and p-type diffusion region are electrically connected to the electrode layer, so that the source region and the back gate region are maintained at the same potential. As a result, it is possible to provide the semiconductor device and the method of manufacturing the same which can suppress operation of a parasitic bipolar transistor formed in the semiconductor device even if a gate electrode has a large width.
    Type: Grant
    Filed: May 4, 1998
    Date of Patent: November 28, 2000
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventors: Fumitoshi Yamamoto, Tomohide Terashima