In Integrated Circuit Patents (Class 257/491)
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Publication number: 20100078754Abstract: A guard ring structure for use in a semiconductor device. The guard ring structure includes a semiconductor layer stack having a first layer and a second layer on top of the first layer, gates structures formed in the first layer; and guard rings formed in the first layer. The second layer has a dopant concentration that is higher than the dopant concentration of the first layer. The gates and the guard rings are formed simultaneously using a single mask.Type: ApplicationFiled: September 30, 2008Publication date: April 1, 2010Inventors: John Victor Veliadis, Megan J. Snook
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Patent number: 7675135Abstract: Instabilities and related drawbacks that arise when interruptions of a perimetral high voltage ring extension implanted regions (RHV) of a main junction (P_tub 1, (P_tub2, . . . ) of an integrated device must be realized may be effectively prevented. This important result is achieved by an extremely simple expedient: whenever an interruption (I) of the high voltage ring extension must be created, it is not realized straight across it along a common orthogonal direction to the perimetral implanted region, on the contrary, the narrow interruption is defined obliquely or slantingly across the width of the perimetral high voltage ring extension. In case of a straight interruption, the angle of slant (?) may be generally comprises between 30 and 60 degrees and more preferably is 45 degrees or close to it. Naturally, the narrow interruption is created by masking it from dopant implantation when realizing the perimetral high voltage ring extension region.Type: GrantFiled: September 12, 2005Date of Patent: March 9, 2010Assignee: STMicroelectronics S.R.L.Inventors: Davide Patti, Giuditta Settanni
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Publication number: 20100025762Abstract: A semiconductor fabrication process according to the present invention defines an auxiliary structure with a plurality of spaces with a predetermined line-width in the oxide layer to prevent the conductive material in the spaces from being removed by etching or defined an auxiliary structure to rise the conductive structure so as to have the conductive structure being exposed by chemical mechanical polishing. Thus, the transmitting circuit can be defined without requiring an additional mask. Hence, the semiconductor fabrication process can reduce the number of required masks to lower the cost.Type: ApplicationFiled: March 13, 2009Publication date: February 4, 2010Applicant: NIKO SEMICONDUCTOR CO., LTD.Inventors: Kao-Way Tu, Cheng-Hui Tung
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Publication number: 20100013043Abstract: An integrated circuit chip and a method of fabricating an integrated circuit chip. The integrated circuit chip includes: a continuous first stress ring proximate to a perimeter of the integrated circuit chip, respective edges of the first stress ring parallel to respective edges of the integrated circuit chip; a continuous second stress ring between the first stress ring and the perimeter of the integrated circuit chip, respective edges the second stress ring parallel to respective edges of the integrated circuit chip, the first and second stress rings having opposite internal stresses; a continuous gap between the first stress ring and the second stress ring; and a set of wiring levels from a first wiring level to a last wiring level on the substrate.Type: ApplicationFiled: July 17, 2008Publication date: January 21, 2010Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Xiao Hu Liu, Chih-Chao Yang, Haining Sam Yang
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Publication number: 20100001363Abstract: A semiconductor device has an integrated passive device (IPD) formed on a substrate. The IPD can be a metal-insulator-metal capacitor or an inductor formed as a coiled conductive layer. A signal interconnect structure is formed on the front side or backside of the substrate. The signal interconnect structure is electrically connected to the IPD. A thin film ZnO layer is formed on the substrate as a part of an electrostatic discharge (ESD) protection structure. The thin film ZnO layer has a non-linear resistance as a function of a voltage applied to the layer. A conductive layer is formed on the substrate. The thin film ZnO layer is electrically connected between the signal interconnect structure and conductive layer to provide an ESD path to protect the IPD from an ESD transient. A ground interconnect structure is formed on the substrate and electrically connects the conductive layer to a ground point.Type: ApplicationFiled: July 2, 2008Publication date: January 7, 2010Applicant: STATS CHIPPAC, LTD.Inventors: Robert C. Frye, Yaojian Lin, Rui Huang
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Publication number: 20090166796Abstract: A method for manufacturing an integrated circuit includes: performing ion implantation on a wafer to make a chip in the wafer have an original doping concentration; dividing the chip into a plurality of regions; and controlling at least one region of plurality of the regions to not have further ion implantation performed thereon, thereby making the region only have single ion implantation performed thereon utilize the original doping concentration as a doping concentration of N-wells or P-wells of transistors in the region. Additionally, the region corresponds to signal output circuits of the integrated circuit.Type: ApplicationFiled: January 2, 2008Publication date: July 2, 2009Inventors: Chi-Lu Yu, Rui-Huang Cheng, Chien-Ming Lin, Ruei-Hao Huang
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Patent number: 7514749Abstract: A method of manufacturing a semiconductor integrated circuit device having on the same substrate both a high breakdown voltage MISFET and a low breakdown voltage MISFET is provided. An element isolation trench is formed in advance so that the width thereof is larger than the sum of the thickness of a polycrystalline silicon film serving as a gate electrode of a low breakdown voltage, the thickness of a gate insulating film and an alignment allowance in processing of a gate electrode in a direction orthogonal to the extending direction of the gate electrode and is larger than the thickness of the polycrystalline silicon film in a planar region not overlapping the gate electrode. It is possible to decrease the number of manufacturing steps for the semiconductor integrated circuit device.Type: GrantFiled: May 18, 2008Date of Patent: April 7, 2009Assignee: Renesas Technology Corp.Inventors: Kunihiko Kato, Masami Koketsu, Shigeya Toyokawa, Keiichi Yoshizumi, Hideki Yasuoka, Yasuhiro Takeda
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Publication number: 20090045480Abstract: A semiconductor integrated circuit includes a plurality of circuit cells on a semiconductor chip. The plurality of circuit cells are formed along a first chip side of the semiconductor chip. Each of the plurality of circuit cells has a pad. The semiconductor integrated circuit further includes a high voltage potential interconnect formed over the plurality of circuit cells. The high voltage potential interconnect has a width expanding in a length direction from a center portion to end portions of the high voltage potential interconnect.Type: ApplicationFiled: November 7, 2006Publication date: February 19, 2009Inventors: Hiroki Matsunaga, Naoki Hishikawa, Akihiro Maejima, Jinsaku Kaneda, Hiroshi Ando
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Patent number: 7485942Abstract: Systems, devices and methods are provided to improve performance of integrated circuits by providing a low-k insulator. One aspect is an integrated circuit insulator structure that includes a vapor-deposited dielectric material. The dielectric material has a predetermined microstructure formed using a glancing angle deposition (GLAD) process. The microstructure includes columnar structures that provide a porous dielectric material. One aspect is a method of forming a low-k insulator structure. In one embodiment, a predetermined vapor flux incidence angle ? is set with respect to a normal vector for a substrate surface so as to promote a dielectric microstructure with individual columnar structures. Vapor deposition and substrate motion are coordinated so as to form columnar structures in a predetermined shape. Other aspects are provided herein.Type: GrantFiled: April 18, 2006Date of Patent: February 3, 2009Assignee: Micron Technology, Inc.Inventors: Kie Y. Ahn, Leonard Forbes
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Publication number: 20090021873Abstract: It is described an Electro Static Discharge protection, wherein diodes are arranged on two electric paths both extending in between two conductors which are connected with input terminals of an ESD sensitive electronic component. Each path comprises two diodes arranged in series and with opposite polarity with respect to each other. At least one of the totally four diodes comprises a different reverse breakdown voltage. The protection circuit is formed integrally with the ESD sensitive electronic component. Due to the serial connection of two diodes in each path the corresponding ESD protection circuit comprises an extremely low capacitance.Type: ApplicationFiled: February 13, 2007Publication date: January 22, 2009Applicant: NXP B.V.Inventors: Matthias Spode, Hans Martin Ritter, Ruediger Leuner
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Patent number: 7474011Abstract: A process and system for estimating the occurrence of single event latch-up in an integrated circuit. The process involves determining the resistance between each junction and the closest appropriate tap in a regular shaped well. Each junction occurring in an irregular-shaped well is also identified. Finally, the method may make suggestions for lowering the probability that single event latch-up may occur in the integrated circuit.Type: GrantFiled: September 25, 2006Date of Patent: January 6, 2009Assignee: Integrated Device Technologies, inc.Inventors: Chuen-Der Lien, Ta-Ke Tien, Pao-Lu Louis Huang
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Publication number: 20080315344Abstract: This invention is directed to improve the electrostatic discharge strength and the latch-up strength of the semiconductor integrated circuit. To achieve the certain level of stable quality of the semiconductor integrated circuit by eliminating the variety in the electrostatic discharge strength and the latch-up strength is also aimed. The first NPN type bipolar transistor 3 and the second NPN type bipolar transistor 4 in the electrostatic discharge protection cell EC 1 are surrounded by the isolation region 6 made of the P+ type semiconductor layer and electronically isolated from other elements. The width WB1 of the isolating region 6 is larger than the width WB2 of the isolation region 7 that separates the elements comprising the internal circuit 50 from each other. This configuration can efficiently improve the electrostatic discharge strength and the latch-up strength.Type: ApplicationFiled: May 12, 2008Publication date: December 25, 2008Applicants: SANYO Electric Co., Ltd., SANYO Semiconductor Co., Ltd.Inventor: Fuminori Hashimoto
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Patent number: 7462532Abstract: A high voltage metal oxide semiconductor device comprising a substrate, an N-type epitaxial layer, an isolation structure, a gate dielectric layer, a gate, an N-type drain region, a P-type well, an N-type source region, a first N-type well and a buried N-doped region is provided. The first N-type well is disposed in the N-type epitaxial layer under the isolation structure and on one side of the gate. The first N-type well overlaps with the N-type drain region. The buried N-doped region is disposed in the substrate under the N-type epitaxial layer and connected to the first N-type well.Type: GrantFiled: October 11, 2007Date of Patent: December 9, 2008Assignee: United Microelectronics Corp.Inventors: Chih-Hua Lee, Ming-I Chen
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Patent number: 7436040Abstract: A method of diverting void diffusion in an integrated circuit includes steps of forming an electrical conductor having a boundary in a first electrically conductive layer of an integrated circuit, forming a via inside the boundary of the electrical conductor in a dielectric layer between the first electrically conductive layer and a second electrically conductive layer of the integrated circuit, and forming a slot between the via and the boundary of the electrical conductor for diverting void diffusion in the electrical conductor away from the via.Type: GrantFiled: December 29, 2005Date of Patent: October 14, 2008Assignee: LSI CorporationInventors: Derryl D. J. Allman, Hemanshu D. Bhatt, Charles E. May, Peter Austin Burke, Byung-Sung Kwak, Sey-Shing Sun, David T. Price, David Pritchard
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Publication number: 20080237773Abstract: Instabilities and related drawbacks that arise when interruptions of a perimetral high voltage ring extension implanted regions (RHV) of a main junction (P_tub 1, (P_tub2, . . . ) of an integrated device must be realized may be effectively prevented. This important result is achieved by an extremely simple expedient: whenever an interruption (I) of the high voltage ring extension must be created, it is not realized straight across it along a common orthogonal direction to the perimetral implanted region, on the contrary, the narrow interruption is defined obliquely or slantingly across the width of the perimetral high voltage ring extension. In case of a straight interruption, the angle of slant (?) may be generally comprises between 30 and 60 degrees and more preferably is 45 degrees or close to it. Naturally, the narrow interruption is created by masking it from dopant implantation when realizing the perimetral high voltage ring extension region.Type: ApplicationFiled: September 12, 2005Publication date: October 2, 2008Inventors: Davide Patti, Giuditta Settanni
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Patent number: 7427795Abstract: Drain-extended MOS transistors (T1, T2) and semiconductor devices (102) are described, as well as fabrication methods (202) therefor, in which a p-buried layer (130) is formed prior to formation of epitaxial silicon (106) over a substrate (104), and a drain-extended MOS transistor (T1, T2) is formed in the epitaxial silicon layer (106). The p-buried layer (130) may be formed above an n-buried layer (120) in the substrate (104) for high-side driver transistor (T2) applications, wherein the p-buried layer (130) extends between the drain-extended MOS transistor (T2) and the n-buried layer (120) to inhibit off-state breakdown between the source (154) and drain (156).Type: GrantFiled: June 30, 2004Date of Patent: September 23, 2008Assignee: Texas Instruments IncorporatedInventor: Sameer Pendharkar
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Patent number: 7391083Abstract: A method of manufacturing a semiconductor integrated circuit device having on the same substrate both a high breakdown voltage MISFET and a low breakdown voltage MISFET is provided. An element isolation trench is formed in advance so that the width thereof is larger than the sum of the thickness of a polycrystalline silicon film serving as a gate electrode of a low breakdown voltage, the thickness of a gate insulating film and an alignment allowance in processing of a gate electrode in a direction orthogonal to the extending direction of the gate electrode and is larger than the thickness of the polycrystalline silicon film in a planar region not overlapping the gate electrode. It is possible to decrease the number of manufacturing steps for the semiconductor integrated circuit device.Type: GrantFiled: April 18, 2006Date of Patent: June 24, 2008Assignee: Renesas Technology Corp.Inventors: Kunihiko Kato, Masami Koketsu, Shigeya Toyokawa, Keiichi Yoshizumi, Hideki Yasuoka, Yasuhiro Takeda
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Patent number: 7385273Abstract: A power semiconductor device that includes a plurality of gate structure each having a gate insulation of a first thickness, and a termination region, the termination including a field insulation body surrounding the active region and having a recess that includes a bottom insulation thicker than the first thickness.Type: GrantFiled: June 9, 2006Date of Patent: June 10, 2008Assignee: International Rectifier CorporationInventors: Hugo R Burke, Simon Green
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Patent number: 7375408Abstract: A high voltage metal oxide semiconductor device comprising a substrate, an N-type epitaxial layer, an isolation structure, a gate dielectric layer, a gate, an N-type drain region, a P-type well, an N-type source region, a first N-type well and a buried N-doped region is provided. The first N-type well is disposed in the N-type epitaxial layer under the isolation structure and on one side of the gate. The first N-type well overlaps with the N-type drain region. The buried N-doped region is disposed in the substrate under the N-type epitaxial layer and connected to the first N-type well.Type: GrantFiled: October 11, 2005Date of Patent: May 20, 2008Assignee: United Microelectronics Corp.Inventors: Chih-Hua Lee, Ming-I Chen
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Patent number: 7361965Abstract: A method and apparatus for redirecting void diffusion away from vias in an integrated circuit design includes steps of forming an electrical conductor in a first electrically conductive layer of an integrated circuit design, forming a via between a distal end of the electrical conductor and a second electrically conductive layer of the integrated circuit design, and reducing tensile stress in the electrical conductor to divert void diffusion away from the via.Type: GrantFiled: December 29, 2005Date of Patent: April 22, 2008Inventors: Derryl D. J. Allman, Hemanshu D. Bhatt, Charles E. May, Peter Austin Burke, Byung-Sung Kwak, Sey-Shing Sun, David T. Price, David Pritchard
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Patent number: 7355257Abstract: A semiconductor superjunction device has a superjunction structure formed in a drift region of the device. The superjunction structure has alternately arranged n-type regions and p-type semiconductor regions layered parallel with the drift direction of carriers, permitting current flow when turned ON and depleting when turned OFF. It also includes a first intrinsic semiconductor region between the n-type and p-type regions. The first intrinsic semiconductor region and the n-type and p-type regions sandwiching the first intrinsic semiconductor region forming a unit. A plurality of units are repetitively arranged to form a repetitively arranged structure. The value of mobility of one of electrons in the n-type region or holes in the p-type region is equal to or less than half the value of mobility of corresponding to one of electrons or holes in the first intrinsic semiconductor region.Type: GrantFiled: March 8, 2006Date of Patent: April 8, 2008Assignee: Fuji Electric Holdings Co., Ltd.Inventors: Daisuke Kishimoto, Susumu Iwamoto, Katsunori Ueno
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Patent number: 7348256Abstract: A method of fabricating an electronic device and the resulting electronic device. The method includes forming a gate oxide on an uppermost side of a silicon-on-insulator substrate; forming a first polysilicon layer over the gate oxide; and forming a first silicon dioxide layer over the first polysilicon layer. A first silicon nitride layer is then formed over the first silicon dioxide layer followed by a second silicon dioxide layer. Shallow trenches are etched through all preceding dielectric layers and into the SOI substrate. The etched trenches are filled with another dielectric layer (e.g., silicon dioxide) and planarized. Each of the preceding dielectric layers are removed, leaving an uppermost sidewall area of the dielectric layer exposed for contact with a later-applied polysilicon gate area. Formation of the sidewall area assures a full-field oxide thickness thereby producing a device with a reduced-electric field and a reduced capacitance between gate and drift regions.Type: GrantFiled: July 25, 2005Date of Patent: March 25, 2008Assignee: Atmel CorporationInventors: Gayle W. Miller, Jr., Volker Dudek, Michael Graf
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Patent number: 7327007Abstract: A technique is provided which allows easy achievement of a semiconductor device with desired breakdown voltage. In a high-potential island region defined by a p impurity region, an n+ impurity region is formed in an n? semiconductor layer, and first field plates and second field plates are formed in multiple layers above the n? semiconductor layer between the n+ impurity region and the p impurity region. The second field plates in the upper layer are located above spaces between the first field plates in the lower layer, over which an interconnect line passes. One of the second field plates which is closest to the p impurity region has a cut portion under the interconnect line, and an electrode is spaced between the first field plates located under the cut portion.Type: GrantFiled: December 3, 2004Date of Patent: February 5, 2008Assignee: Mitsubishi Denki Kabushiki KaishaInventor: Kazuhiro Shimizu
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Patent number: 7307330Abstract: A reverse blocking semiconductor device that shows no adverse effect of an isolation region on reverse recovery peak current, that has a breakdown withstanding structure exhibiting satisfactory soft recovery, that suppresses aggravation of reverse leakage current, which essentially accompanies a conventional reverse blocking IGBT, and that retains satisfactorily low on-state voltage is disclosed. The device includes a MOS gate structure formed on a n? drift layer, the MOS gate structure including a p+ base layer formed in a front surface region of the drift layer, an n+ emitter region formed in a surface region of the base layer, a gate insulation film covering a surface area of the base layer between the emitter region and the drift layer, and a gate electrode formed on the gate insulation film. An emitter electrode is in contact with both the emitter region and the base layer of the MOS gate structure.Type: GrantFiled: April 4, 2006Date of Patent: December 11, 2007Assignee: Fuji Electric Holdings Co., Ltd.Inventors: Michio Nemoto, Manabu Takei, Tatsuya Naito
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Patent number: 7301179Abstract: An ion-through region 100, 102 is provided as a first opening in a passivation film 90 on a source electrode 70 and a drain electrode 80. The passivation film 90 is coated with a sealing resin to package the semiconductor device. At this point, the ion-through region 100, 102 is filled with the sealing resin to put the sealing resin into direct contact with the source electrode 70 and the drain electrode 80. With this structure, movable ions accumulated at an interface of the sealing resin with the passivation film 90 in a high temperature and high humidity atmosphere are discharged to the source electrode 70 and the drain electrode 80 via the ion-through region 100, 102 and thus do not influence an N?-type extended drain region 30. Therefore, the drain breakdown voltage can be improved.Type: GrantFiled: August 16, 2005Date of Patent: November 27, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Saichirou Kaneko, Kazuyuki Sawada, Toshihiko Uno
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Patent number: 7279768Abstract: In a semiconductor device of the present invention, an N-type buried diffusion layer is formed across a substrate and an epitaxial layer. A P-type buried diffusion layer is formed across an upper surface of the N-type buried diffusion layer over a wide range to form a PN junction region for an overvoltage protection. A P-type diffusion region is formed so as to be connected to the P-type buried diffusion layer. A breakdown voltage of the PN junction region is lower than a breakdown voltage between a source and a drain. This structure makes it possible to prevent a concentration of a breakdown current and protect the semiconductor device from an overvoltage.Type: GrantFiled: February 23, 2006Date of Patent: October 9, 2007Assignee: Sanyo Electric Co., Ltd.Inventors: Ryo Kanda, Shuichi Kikuchi, Seiji Otake
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Patent number: 7242055Abstract: A semiconductor structure is provided that includes a Vt stabilization layer between a gate dielectric and a gate electrode. The Vt stabilization layer is capable of stabilizing the structure's threshold voltage and flatband voltage to a targeted value and comprises a nitrided metal oxide, or a nitrogen-free metal oxide, with the proviso that when the Vt stabilization layer comprises a nitrogen-free metal oxide, at least one of the semiconductor substrate or the gate dielectric includes nitrogen. The present invention also provides a method of fabricating such a structure.Type: GrantFiled: November 15, 2004Date of Patent: July 10, 2007Assignee: International Business Machines CorporationInventors: Nestor A. Bojarczuk, Jr., Cyril Cabral, Jr., Eduard A. Cartier, Martin M. Frank, Evgeni P. Gousev, Supratik Guha, Paul C. Jamison, Rajarao Jammy, Vijay Narayanan, Vamsi K. Paruchuri
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Patent number: 7238987Abstract: A high withstand voltage lateral semiconductor device capable of improving its on-state breakdown voltage and safe operation area (SOA) without lowering its current capabilities, and structured so as to be easy to produce.Type: GrantFiled: October 4, 2005Date of Patent: July 3, 2007Assignee: Matsushita Electric Industrial Co., Ltd.Inventors: Teruhisa Ikuta, Hiroyoshi Ogura, Yoshinobu Sato, Hisao Ichijo
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Patent number: 7183626Abstract: A semiconductor device which includes a passivation structure formed with a conductive strip of resistive material that crosses itself once around the active region of the device to form a first closed loop, a continuous strip that loops around the first closed loop without crossing itself which crosses itself a second time to form a second closed loop.Type: GrantFiled: November 17, 2004Date of Patent: February 27, 2007Assignee: International Rectifier CorporationInventor: Niraj Ranjan
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Patent number: 7180152Abstract: A starting wafer for high voltage semiconductor devices is formed by implanting arsenic into the top surface of a p type silicon substrate wafer to a depth of about 0.1 micron. A N type non-graded epitaxial layer is then grown atop the substrate without any diffusion step so that the arsenic is not intentionally driven. Device junction are then diffused into the epitaxially grown layer.Type: GrantFiled: July 8, 2004Date of Patent: February 20, 2007Assignee: International Rectifier CorporationInventor: Thomas Herman
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Patent number: 7178126Abstract: In the design of an integrated circuit having a semiconductor substrate and metal interconnecting lines, including a core ring with metal power and ground lines that supply power to a core area inside the core ring, one or more metal-oxide-semiconductor capacitor units are laid out below the core ring. Each unit has an active area and an insulated gate electrode, which are connected by contacts to the core ring. These capacitor units protect transistors in the core area that have gate electrodes connected to the power or ground line from plasma damage during the fabrication of the integrated circuit. Additional capacitor units laid out below the core ring may be connected to a surrounding input-output ring to protect transistors in input-output circuits, and similar units may be connected to the core ring and input-output ring as protection transistors.Type: GrantFiled: January 21, 2004Date of Patent: February 13, 2007Assignee: Oki Electric Industry Co., Ltd.Inventors: Kenji Arai, Takayuki Yamamoto
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Patent number: 7154150Abstract: An ESD device and method using parasitic bipolar transistors that are silicided. The first embodiment is a parasitic Bipolar Junction Transistor comprised of n+/n?/p?/n?/n+ regions. The emitter is formed of the second N+ region and the second N? well. The parasitic base is formed by the p? substrate or well. The collector is formed of the first well and the first n+ region. The benefit of the first embodiment is the trigger voltage is lower because the junction between the n? well (emitter) and P? substrate (base) and the junction between P? substrate (base) and the n? well have lower cross over concentrations. The second embodiment is similar to the first embodiment with the addition of the first gate. The first gate is preferably connected to the first n+ region and the Vpad. The third embodiment contains the same elements as the second embodiment with the addition of a third n+ region. The third n+ region is preferably shorted (or connected) to the first p+ region and the second n+ region.Type: GrantFiled: August 26, 2004Date of Patent: December 26, 2006Assignee: Nano Silicon Pte. Ltd.Inventors: David Hu, Jun Cai
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Patent number: 7138698Abstract: A semiconductor device comprises a high side switching element, a driver circuit, and a low side switching element. The high side switching element is formed on a first semiconductor substrate, has a current path to one end of which an input voltage is supplied, and the other end of the current path is connected to an inductance. The driver circuit is formed on the first semiconductor substrate, on which the high side switching element is formed, and drives the high side switching element. The low side switching element is formed on a second semiconductor substrate separate from the first semiconductor substrate, and has a drain connected to the inductance and a source supplied with a reference potential.Type: GrantFiled: December 9, 2004Date of Patent: November 21, 2006Assignee: Kabushiki Kaisha ToshibaInventors: Kazutoshi Nakamura, Norio Yasuhara, Tomoko Matsudai, Kenichi Matsushita, Akio Nakagawa
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Patent number: 7135751Abstract: A high breakdown voltage junction terminating structure having a loop-like RESURF structure formed on a SOI substrate is disclosed. A lateral IGBT, a lateral FWD, an output stage element and a driving circuit are formed in the inside region of the structure. The lateral IGBT and the lateral FWD are surrounded by a trench isolation region as an insulation region. Drain electrodes of high breakdown voltage NMOSFETs are provided on the inside of the high breakdown voltage junction terminating structure. Along with this, a gate electrode and a source electrode of each of the NMOSFETs are provided on the outside of the high breakdown voltage junction terminating structure. The periphery of the high breakdown voltage junction terminating structure is surrounded by a trench isolation region as a second insulation region. A control circuit is provided on the outside of the second insulation region.Type: GrantFiled: July 21, 2004Date of Patent: November 14, 2006Assignee: Fuji Electric Device Technology Co., Ltd.Inventors: Shinichi Jimbo, Tatsuhiko Fujihira
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Patent number: 7060562Abstract: A method for fabricating gate electrodes (7) in a field plate trench transistor (1) having a cell array with a plurality of trenches (3) and a plurality of mesa regions (8) arranged between the trenches comprises the following steps: application of a gate electrode layer (7) to the cell array in such a way that the gate electrode layer (7) has depressions within or above the trenches (3), application of a mask layer (10) to the cell array, etching-back of the mask layer (10) in such a way that mask layer residues (10) remain only within the depressions of the gate electrode layer (7), and etching-back of the gate electrode layer (7) using the mask layer residues (10) as an etching mask in such a way that gate electrode layer residues (7) remain only within/above the trenches (3).Type: GrantFiled: February 4, 2005Date of Patent: June 13, 2006Assignee: Infineon Technologies AGInventors: Ralf Henninger, Franz Hirler, Uli Hiller, Jan Ropohl
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Patent number: 7049674Abstract: A reverse blocking semiconductor device that shows no adverse effect of an isolation region on reverse recovery peak current, that has a breakdown withstanding structure exhibiting satisfactory soft recovery, that suppresses aggravation of reverse leakage current, which essentially accompanies a conventional reverse blocking IGBT, and that retains satisfactorily low on-state voltage is disclosed. The device includes a MOS gate structure formed on a n? drift layer, the MOS gate structure including a p+ base layer formed in a front surface region of the drift layer, an n+ emitter region formed in a surface region of the base layer, a gate insulation film covering a surface area of the base layer between the emitter region and the drift layer, and a gate electrode formed on the gate insulation film. An emitter electrode is in contact with both the emitter region and the base layer of the MOS gate structure.Type: GrantFiled: April 12, 2004Date of Patent: May 23, 2006Assignee: Fuji Electric Holdings Co., Ltd.Inventors: Michio Nemoto, Manabu Takei, Tatsuya Naito
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Patent number: 6943406Abstract: According to the present invention, there is provided a semiconductor device having, a semiconductor substrate having a surface on which an insulating layer is formed, a first-conductivity-type first semiconductor layer formed on the insulating layer and having a first impurity concentration, a first-conductivity-type second semiconductor region formed in the first semiconductor layer from a surface of the first semiconductor layer to a surface of the insulating layer, and having a concentration higher than the first impurity concentration, a second-conductivity-type third semiconductor region formed in the first semiconductor layer from the surface of the first semiconductor layer to the surface of the insulating layer with a predetermined distance between the second and third semiconductor regions, and having a second impurity concentration, a second-conductivity-type fourth semiconductor region formed in a surface portion of the second semiconductor region, and having a concentration higher than the secondType: GrantFiled: October 30, 2003Date of Patent: September 13, 2005Assignee: Kabushiki Kaisha ToshibaInventors: Takeshi Uchihara, Yasunori Usui, Hideyuki Ura, Takuma Hara
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Patent number: 6906381Abstract: A lateral semiconductor device (20) such as LDMOS, a LIGBT, a lateral diode, a lateral GTO, a lateral JFET or a lateral BJT, comprising a drift region (12) having a first surface (22) and a first conductivity type, first and second conductive (4, 8) extending into the drift region from the first surface. The lateral semiconductor device further comprises an additional region (24) or several additional regions, having a second conductivity type, between the first and second semiconductor regions (4, 8), the additional region extending into the drift region from the first surface (22), wherein the additional region forms a junction dividing the electric field between the first and second semiconductor regions when a current path is established between the first and second semiconductor regions. This allows the doping concentration of the drift region to be increased, thereby lowering the on-resistance of the device.Type: GrantFiled: June 8, 2001Date of Patent: June 14, 2005Assignee: Freescale Semiconductor, Inc.Inventors: Andre Peyre-Lavigne, Irenee Pages, Pierre Rossel, Frederic Morancho, Nathalie Cezac
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Patent number: 6897525Abstract: In order to improve the characteristics of the high breakdown voltage MOS, a semiconductor device of the present invention is characterized in that an LDMOS transistor, which comprises a source region 4, a channel region 8, and a drain region 5, and a gate electrode 7 formed on the channel region 8, and a drift region formed between the channel region 8 and the drain region 5, wherein an N?-type low concentration layer 22 serving as the drift region is formed shallowly at least below the gate electrode 7 (first N?-type layer 22A) but formed deeply in a neighborhood of the drain region 5 (second N?-type layer 22B).Type: GrantFiled: November 22, 1999Date of Patent: May 24, 2005Assignee: Sanyo Electric Co., Ltd.Inventors: Shuichi Kikuchi, Yumiko Akaishi
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Patent number: 6872999Abstract: Memory cells, word lines and bit lines are formed on the substrate. Each word line is connected to some memory cells. The bit line is disposed in a wiring layer above the word lines, the bit line being connected to some memory cells and applied with a signal read from the memory cell selected by the word lines. Signal wiring lines are disposed in a wiring layer above the bit lines and partially superposed upon the bit lines. A shield layer is disposed in a wiring layer between the bit lines and signal wiring lines. As viewed along a direction vertical to the surface of the semiconductor substrate, the shield layer includes the bit lines in an area including an area where the bit lines and signal wiring lines are superposed upon each other, openings being formed through the shield layer in areas where the bit lines are not disposed.Type: GrantFiled: July 7, 2003Date of Patent: March 29, 2005Assignee: Fujitsu LimitedInventor: Toshiyuki Uetake
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Patent number: 6870222Abstract: A device structure of a LDMOSFET has trench type sinker formed using a trench process. A semiconductor layer of a first conductive type is formed within the device structure. A field area is formed in a trench structure on one side of the semiconductor layer and a gate electrode is formed on a given surface of the semiconductor layer. A channel layer of a second conductive type is formed by laterally diffusion from the field area to a width containing both sides of the gate electrode. The source area of LDMOS is electrically connected with the substrate through the sinker. By a piercing through the source area, the sinker divides the source area into two source areas. This division reduces the parasitic resistance as well as parasitic capacitance. In addition, the device structure eliminates the need for high temperature diffusion process and reduces lateral diffusion of the sinker.Type: GrantFiled: December 28, 2000Date of Patent: March 22, 2005Assignee: Electronics and Telecommunications Research InstituteInventors: Cheon-Soo Kim, Hyun-Kyu Yoo, Nam Hwang, Jung-Woo Park
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Patent number: 6838729Abstract: The invention relates to a semiconductor component with enhanced avalanche ruggedness. At the nominal current of this semiconductor component, in the event of an avalanche the voltage applied between two electrodes is 6 % or more above the static reverse voltage at the same temperature.Type: GrantFiled: April 29, 2002Date of Patent: January 4, 2005Assignee: Infineon Technologies AGInventors: Andreas Schlögl, Markus Schmitt, Hans-Joachim Schulze, Markus Vossebürger, Armin Willmeroth
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Publication number: 20040262675Abstract: According to the present invention, there is provided a semiconductor device having, a semiconductor substrate having a surface on which an insulating layer is formed, a first-conductivity-type first semiconductor layer formed on the insulating layer and having a first impurity concentration, a first-conductivity-type second semiconductor region formed in the first semiconductor layer from a surface of the first semiconductor layer to a surface of the insulating layer, and having a concentration higher than the first impurity concentration, a second-conductivity-type third semiconductor region formed in the first semiconductor layer from the surface of the first semiconductor layer to the surface of the insulating layer with a predetermined distance between the second and third semiconductor regions, and having a second impurity concentration, a second-conductivity-type fourth semiconductor region formed in a surface portion of the second semiconductor region, and having a concentration higher than the secondType: ApplicationFiled: October 30, 2003Publication date: December 30, 2004Applicant: KABUSHIKI KAISHA TOSHIBAInventors: Takeshi Uchihara, Yasunori Usui, Hideyuki Ura, Takuma Hara
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Publication number: 20040256691Abstract: A reverse blocking semiconductor device that shows no adverse effect of an isolation region on reverse recovery peak current, that has a breakdown withstanding structure exhibiting satisfactory soft recovery, that suppresses aggravation of reverse leakage current, which essentially accompanies a conventional reverse blocking IGBT, and that retains satisfactorily low on-state voltage is disclosed. The device includes a MOS gate structure formed on a n− drift layer, the MOS gate structure including a p+ base layer formed in a front surface region of the drift layer, an n+ emitter region formed in a surface region of the base layer, a gate insulation film covering a surface area of the base layer between the emitter region and the drift layer, and a gate electrode formed on the gate insulation film. An emitter electrode is in contact with both the emitter region and the base layer of the MOS gate structure.Type: ApplicationFiled: April 12, 2004Publication date: December 23, 2004Inventors: Michio Nemoto, Manabu Takei, Tatsuya Naito
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Patent number: 6825543Abstract: A semiconductor device in which electro-thermal conversion elements and switching devices for flowing currents through the elements are integrated on a first conductive type semiconductor substrate. The switching devices are insulated gate type field effect transistors having a second conductive type first semiconductor region on one principal surface of the semiconductor substrate; a first conductive type second semiconductor region for supplying a channel region and for adjoining the first semiconductor region; a second conductive type source region on the surface of the second semiconductor region; a second conductive type drain region on the surface of the first semiconductor region; and gate electrodes on the channel region with a gate insulator film between them. The second semiconductor region is formed by a semiconductor having an impurity concentration higher than that of the first semiconductor region, and is disposed between two adjacent drain regions, separating them in a traverse direction.Type: GrantFiled: December 26, 2001Date of Patent: November 30, 2004Assignee: Canon Kabushiki KaishaInventors: Mineo Shimotsusa, Kei Fujita, Yukihiro Hayakawa
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Publication number: 20040232510Abstract: A hybrid semiconductor device is presented in which one or more diode regions are integrated into a transistor region. In a preferred embodiment the transistor region is a continuous (self-terminating) SOI LDMOS device in which are integrated one or more diode portions. Within the diode portions, since there is only one PN junction, the mechanism for breakdown failure due to bipolar turn-on is nonexistent. The diode regions are formed such that they have a lower breakdown voltage than the transistor region, and thus any transient voltage (or current) induced breakdown is necessarily contained in the diode regions. In a preferred embodiment, the breakdown voltage of the diode portions is lowered by narrowing their field plate length relative to the transistor portion of the device. This allows the device to survive any such breakdown without being destroyed, resulting in a more rugged and more reliable device.Type: ApplicationFiled: July 2, 2004Publication date: November 25, 2004Inventors: John Petruzzello, Theodore James Letavic, Mark Simpson
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Publication number: 20040227204Abstract: A high voltage MOS transistor with a gate extension that has a reduced electric field in the drain region near the gate is provided. The high voltage MOS transistor includes a first and second gate layers, and a dielectric layer between the gate layers. The first and second gate layers are electrically coupled togther and form the gate of the transistor. The second gate layer extends over the drain of the transistor above the dielectric and gate oxide layers to form the gate extension. The gate extension reduces the peak electric field in the drain by providing a wide area for the voltage to drop between the drain and the gate of the transistor. The dielectric layer also reduces the peak electric field in the drain near the gate by providing insulation between the gate and the drain. A lower electric field in the drain reduces the impact generation rate of carriers.Type: ApplicationFiled: June 28, 2004Publication date: November 18, 2004Applicant: Linear Technology CorporationInventor: Francois Hebert
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Patent number: 6818945Abstract: A semiconductor device according to one embodiment of the present invention includes: a semiconductor substrate of a first conductive type; a semiconductor layer of the first conductive type formed on the semiconductor substrate; a base layer of a second conductive type formed on the semiconductor layer; a plurality of columns of stripe trenches formed at predetermined intervals from a surface of the base layer by a predetermined depth; insulating films formed on side surfaces and bottoms of the trenches, respectively; source layers of the first conductive type formed on surface layer portions of the base layer between the trenches, respectively; stripe contact layers of the second conductive type formed each at centers of the surface layer portions of the base layer between the trenches, respectively; a gate electrode formed in every other trench among the plurality of columns of trenches; source electrodes formed in the trenches other than the trenches in which the gate electrodes are formed and on the sourType: GrantFiled: April 2, 2003Date of Patent: November 16, 2004Assignee: Kabushiki Kaisha ToshibaInventors: Yusuke Kawaguchi, Syotaro Ono, Akio Nakagawa
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Publication number: 20040222461Abstract: A lateral semiconductor device (20) such as LDMOS, a UIGBT, a lateral diode, a lateral GTO, a lateral JFRT or a lateral BJT, comprising a drift region (12) having a first surface (22) and a first conductivity type, first and second conductive regions (4, 8) extending into the drift region from the first surface. The lateral semiconductor device further comprises an additional region (24) or several additional regions, having a second conductivity type, between the first and second semiconductor regions (4, 8), the additional region extending into the drift region from the first surface (22), wherein the additional region forms a junction dividing the electric field between the first and second semiconductor regions when a current path is established between the first and second semiconductor regions. This allows the doping concentration of the drift region to be increased, thereby lowering the on-resistance of the device.Type: ApplicationFiled: June 26, 2003Publication date: November 11, 2004Inventors: Andre Peyre-Lavigne, Irenee Pages, Pierre Rossel, Frederic Morancho, Nathalie Cezac
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Publication number: 20040212033Abstract: A semiconductor device has a gate electrode formed on a P type semiconductor substrate via gate oxide films. A first low concentration (LN type) drain region is made adjacent to one end of the gate electrode. A second low concentration (SLN type) drain region is formed in the first low concentration drain region so that the second low concentration drain region is very close to the outer boundary of the second low concentration drain region and has at least a higher impurity concentration than the first low concentration drain region. A high concentration (N+ type) source region is formed adjacent to the other end of said gate electrode, and a high concentration (N+ type) drain region is formed in the second low concentration drain region having the designated space from one end of the gate electrode.Type: ApplicationFiled: May 24, 2004Publication date: October 28, 2004Applicant: Sanyo Electric Co., Ltd.Inventors: Shuichi Kikuchi, Eiji Nishibe