Abstract: A boron nitride, boron carbide, or boron carbonitride film can be deposited using a remote plasma chemical vapor deposition (CVD) technique. A boron-containing precursor is provided to a reaction chamber, where the boron-containing precursors has at least one boron atom bonded to a hydrogen atom. Radical species, such as hydrogen radical species, are provided from a remote plasma source and into the reaction chamber at a substantially low energy state or ground state. A hydrocarbon precursor may be flowed along with the boron-containing precursor, and a nitrogen-containing plasma species may be introduced along with the radical species from the remote plasma source and into the reaction chamber. The boron-containing precursor may interact with the radical species along with one or both of the hydrocarbon precursor and the nitrogen-containing precursor to deposit the boron nitride, boron carbide, or boron carbonitride film.

Abstract: A semiconductor memory device includes: a semiconductor substrate; a memory cell array provided in a first region; a first transistor provided in a second region; a second transistor provided in a third region; and an insulative laminated film. The first and second transistors each include a semiconductor layer, a gate electrode, and a gate insulating film. A concentration of boron (B) in the gate electrode of the second transistor is higher than that of the first transistor. The insulative laminated film includes a first insulating film contacting the surface of the semiconductor substrate, and a second insulating film having a smaller diffusion coefficient of hydrogen (H) than that of the first insulating film. The second insulating film has a first portion contacting the semiconductor portion, and the first portion surrounds the third region.

Abstract: In a top-gate transistor in which an oxide semiconductor film, a gate insulating film, a gate electrode layer, and a silicon nitride film are stacked in this order and the oxide semiconductor film includes a channel formation region, nitrogen is added to regions of part of the oxide semiconductor film and the regions become low-resistance regions by forming a silicon nitride film over and in contact with the oxide semiconductor film. A source and drain electrode layers are in contact with the low-resistance regions. A region of the oxide semiconductor film, which does not contact the silicon nitride film (that is, a region overlapping with the gate insulating film and the gate electrode layer) becomes the channel formation region.

Abstract: Provided is an active matrix substrate 20a in which either a plurality of source lines (data lines) 15S or a plurality of gate lines 13G, as constituent elements of the active matrix substrate 20a, are vertical lines extending in the longitudinal direction, and the other are horizontal lines. Among a plurality of pixel control elements 16T that are provided in correspondence to a plurality of pixels and are connected with the data line 15S and the gate lines 13G so as to control display of the corresponding pixels, respectively, a part of the pixel control elements 16T connected with one same horizontal line are arranged on one side with respect to the respective vertical lines to which the pixel control elements are connected, the side being different from a side on which the other pixel control elements connected with the same horizontal line are arranged.

Abstract: An array substrate and a manufacturing method thereof, a display panel and display device relating to display technology are provided. The array substrate includes: a substrate; a light shielding layer being of electrical conductive over the substrate; a buffer layer over the light shielding layer; an active layer insulated from the light shielding layer by the buffer layer and shielded by the light shielding layer against light radiation; a gate insulating layer disposed over the active layer; and a patterned first electrode layer having a first electrode over the gate insulating layer, the first electrode being a gate electrode; wherein the patterned first electrode layer further comprises a second electrode over the buffer layer, the second electrode having at least a portion in contact with the buffer layer. The buffer layer comprises a first via-hole, and the second electrode is in electrical connection with the light shielding layer through the first via-hole.

Abstract: Embodiments of methods and structures for forming a 3D integrated wiring structure are disclosed. The method can include forming an insulating layer on a front side of a first substrate; forming a semiconductor layer on a front side of the insulating layer; patterning the semiconductor layer to expose at least a portion of a surface of the insulating layer; forming a plurality of semiconductor structures over the front side of the first substrate, wherein the semiconductor structures include a plurality of conductive contacts and a first conductive layer; joining a second substrate with the semiconductor structures; performing a thinning process on a backside of the first substrate to expose the insulating layer and one end of the plurality of conductive contacts; and forming a conductive wiring layer on the exposed insulating layer.

Abstract: A gate driving circuit includes a plurality of driving stages, wherein an ith (where i is a natural number of 2 or more) driving stage among the plurality of driving stages includes: a output unit outputting an ith output signal including a high voltage generated based on a clock signal in response to a low voltage at a Q-node; a stabilization unit providing the low voltage to the Q-node in response to a switching signal applied to an A-node after the ith output signal is outputted; and an inverter unit outputting the switching signal for controlling the stabilization unit to the A-node.

Abstract: A method of forming a semiconductor device that includes forming a vertically orientated channel in a semiconductor fin structure that is present on a supporting substrate; and depositing a doped amorphous semiconductor material on an upper surface of the semiconductor fin structure that is opposite a base surface of the semiconductor fin structure that is in contact with the supporting substrate. The method further includes recrystallizing the doped amorphous semiconductor material with an anneal duration for substantially a millisecond duration or less to provide a doped polycrystalline source and/or drain region at the upper surface of the semiconductor fin structure.

Abstract: Systems, methods and apparatus for coexistence of high voltage and low voltage devices and circuits on a same integrated circuit fabricated in silicon-on-insulator (SOI) technology are described. In particular, techniques for mitigating back gate effects are described, including using of resistive and/or capacitive couplings to control surface potentials at regions of a substrate used for the SOI fabrication proximate the high voltage and low voltage devices and circuits. In one case, an N-type implant is used to provide a high potential differential with respect to a substrate potential.

Abstract: A display device and method of manufacturing the same are provided. A display device includes: a device substrate, a light-emitting element on the device substrate, an encapsulating structure on the light-emitting element, a touch structure on the encapsulating structure, an elastic insulating layer on the touch structure, the elastic insulating layer including an elastic material, and a high-permittivity particles dispersed in the elastic insulating layer.

Abstract: The present technology relates to a solid-state imaging device capable of protecting a photoelectric conversion film with a sealing film that has excellent sealing properties and coverage, a method of manufacturing the solid-state imaging device, and an electronic apparatus. A solid-state imaging device includes: a photoelectric conversion film formed on the upper side of a semiconductor substrate; and a sealing film that is formed on the upper layer of the photoelectric conversion film and has a lower etching rate than that of silicon oxide. The present technology can be applied to solid-state imaging devices having a photoelectric conversion film on the upper side of a semiconductor substrate, and the like, for example.

Abstract: By using at least one of a processor device and model transistor cells, a set of design parameters for at least one of a transistor cell and a drift structure of a wide band-gap semiconductor device is determined, wherein an on state failure-in-time rate and an off state failure-in-time rate of a gate dielectric of the transistor cell are within a same order of magnitude for a predefined on-state gate-to-source voltage, a predefined off-state gate-to-source voltage, and a predefined off-state drain-to-source voltage.

Abstract: A doped diamond semiconductor and method of production using a laser is disclosed herein. As disclosed, a dopant and/or a diamond or sapphire seed material may be added to a graphite based ablative layer positioned below a confinement layer, the ablative layer also being graphite based and positioned above a backing layer, to promote formation of diamond particles having desirable semiconductor properties via the action of a laser beam upon the ablative layer. Dopants may be incorporated into the process to activate the reaction sought to produce a material useful in production of a doped semiconductor or a doped conductor suitable for the purpose of modulating the electrical, thermal or quantum properties of the material produced. As disclosed, the diamond particles formed by either the machine or method of confined pulsed laser deposition disclosed may be arranged as semiconductors, electrical components, thermal components, quantum components and/or integrated circuits.

Abstract: A semiconductor storage device includes a base body, a stacked body, a plurality of columns, and a plurality of first contacts. The base body includes a substrate, a semiconductor element on the substrate, a lower wiring layer above the semiconductor element in a thickness direction of the base body and connected to the semiconductor element, and a lower conductive layer above the lower wiring layer in the thickness direction. The stacked body is above the lower conductive layer and including an alternating stack of conductive layers and insulating layers. Each of the columns includes a semiconductor body extending through the stacked body and electrically connected to the lower conductive layer. The plurality of first contacts extend through the stacked body and electrically connected to the lower conductive layer. The lower conductive layer is separately provided under each of the plurality of first contacts.

Abstract: Disclosed herein is a composite transistor which includes a first transistor including a control electrode, a first active region, a first A extending part, and a first B extending part, and a second transistor including a control electrode, a second active region, a second A extending part, and a second B extending part. The first active region, the second active region, and the control electrode overlap one another. Both the first A extending part, and the first B extending part extend from the first active region and both the second A extending part and the second B extending part extend from the second active region. The first electrode is connected to the first A extending part, the second electrode is connected to the second A extending part, and the third electrode is connected to the first B extending part and the second B extending part.

Abstract: A manufacturing method of a semiconductor device comprises forming an ohmic electrode on a surface of a semiconductor substrate, the ohmic electrode including an aluminum layer in a side opposite to a side in contact with the semiconductor substrate, performing a heat treatment on the ohmic electrode, performing an acid treatment on a surface of the aluminum layer in the ohmic electrode that has been subjected to the heat treatment and forming a wiring electrode in the side of the aluminum layer opposite to the side where the semiconductor substrate is provided after the acid treatment.

Abstract: A liquid-crystal display including: a gate line extending in a first direction; a gate electrode protruding from the gate line; a gate insulating layer arranged on the gate electrode; an active layer arranged on the gate insulating layer while being insulated from the gate electrode; a data line arranged on the active layer and extending in a second direction; a source electrode protruding from the data line, having a portion overlapping the gate electrode on a plane, and including a plurality of source electrode branches that are separate from each other; a drain electrode being separate from the source electrode, and including a plurality of drain electrode branches, each being arranged between two of the plurality of source electrode branches, and a drain electrode connecting part connecting the plurality of drain electrode branches; a pixel electrode defining a pixel region; a liquid-crystal layer arranged on the pixel electrode.

Abstract: The disclosure provides a display apparatus. The display apparatus of the disclosure includes a substrate having a plurality of pixel regions, a plurality of active elements, a plurality of first signal lines and second signal lines, a plurality of ground signal lines and a plurality of light emitting diodes (LEDs). The plurality of ground signal lines are disposed on the substrate and arranged to alternate with the first signal lines. At least one LED has first and second electrodes. The first electrode of at least one LED is electrically connected with a corresponding active element. A second electrode of at least one LED is electrically connected with a corresponding ground signal line. At least two LEDs disposed in an identical pixel region is electrically connected with an identical ground signal line between two first signal lines adjacent to each other. The display apparatus of the disclosure has high resolution.

Abstract: According to one embodiment, a semiconductor memory device includes a stacked body, memory pillars, first and second insulation layers and an isolation region. The stacked body above a substrate includes conductive layers isolated from each other and stacked along a first direction crossing the substrate surface. The memory pillars extend through the stacked body along the first direction. The first insulation layer is provided above the memory pillars. The isolation region is provided higher than upper surfaces of the memory pillars in the stacked body along the first direction, and isolates the stacked body in a second direction crossing the first direction. The second insulation layer is provided on the first insulation layer and a side wall of the isolation region.

Abstract: In integrated optical structures (e.g., silicon-to-silicon-nitride mode converters) implemented in semiconductor-on-insulator substrates, wire waveguides whose sidewalls substantially consist of portions coinciding with crystallographic planes and do not extend laterally beyond the top surface of the wire waveguide may provide benefits in performance and/or manufacturing needs. Such wire waveguides may be manufactured, e.g., using a dry-etch of the semiconductor device layer down to the insulator layer to form a wire waveguide with exposed sidewalls, followed by a smoothing crystallographic wet etch.

Abstract: A crystalline oxide semiconductor thin film that is composed mainly of indium oxide and comprises surface crystal grains having a single crystal orientation.

Abstract: A display apparatus including a first thin film transistor disposed on a substrate and including a first active layer, a second thin film transistor disposed on the first thin film transistor and including a second active layer overlapping the first thin film transistor, a first planarization layer disposed between the first thin film transistor and the second thin film transistor, the first planarization layer including a first insulating layer and a second insulating layer disposed on the first insulating layer, and a first buffer layer disposed between the first planarization layer and the second thin film transistor, in which an upper surface of the second insulating layer and an upper surface of the first insulating layer are substantially flush with each other.

Abstract: The present invention provides a thin film transistor including a gate electrode, a source electrode, a drain electrode, and a semiconductor layer, which are laminated on a substrate. The semiconductor layer is a polysilicon thin film. The polysilicon thin film in regions corresponding to the source electrode and the drain electrode has a smaller crystal grain size than that of the polysilicon thin film in a channel region between the source electrode and the drain electrode.

Abstract: The purpose of the invention is to form a flexible display device where the substrate is made of resin, wherein the TFT can be annealed in high temperature; consequently, a reliability of the TFT is improved. The concrete measure is as follows. A display device having a pixel electrode and a TFT including a semiconductor layer on a substrate comprising: a source region of the semiconductor layer connects with a source electrode, a drain region of the semiconductor layer connects with a drain electrode; the pixel electrode connects with the source electrode; the drain electrode connects with a video signal line; a distance between the drain electrode and the substrate is smaller than a distance between the semiconductor and the substrate, the semiconductor layer is formed between the pixel electrode and the substrate.

Abstract: A transistor may include a semiconductor, a source electrode, a drain electrode, and a gate electrode. The semiconductor may include a first doped region, a second doped region, a source region, a drain region, and a channel region. The channel region is positioned between the source region and the drain region. The first doped region is positioned between the channel region and the source region. The second doped region is positioned between the channel region and the drain region. A doping concentration of the first doped region is lower than a doping concentration of the source region. A doping concentration of the second doped region is lower than a doping concentration of the drain region. The source electrode is electrically connected to the source region. The drain electrode is electrically connected to the drain region. The gate electrode overlaps the channel region.

Abstract: A display device includes a substrate having flexibility, a transistor having a gate insulating film and further having a semiconductor layer and a gate electrode that sandwich the gate insulating film, the transistor formed in an area where the substrate is bent, and a gate wiring line so formed on the substrate as to be connected to the gate electrode, and the gate electrode has an area that is present in an area where the gate electrode overlaps with the semiconductor layer and is thinner than at least part of the gate wiring line.

Abstract: Methods and structures of a three-dimensional memory device are disclosed. In an example, the memory device includes a substrate and a first alternating conductor/dielectric stack disposed on the substrate and a dielectric layer disposed over the first alternating conductor/dielectric stack. A second alternating conductor/dielectric stack is disposed on the dielectric layer. The NAND memory device includes one or more array common source contacts extending orthogonally with respect to the surface of the substrate through the first layer stack and the second layer stack, wherein at least one of the one or more array common source contacts includes a first conductive contact and a second conductive contact that is disposed over and electrically connected with the first conductive contact.

Abstract: An organic light-emitting diode (OLED) display is disclosed. In one aspect, the display includes a substrate and an active pattern formed over the substrate and including first to fourth regions. A gate insulation layer is formed over the active pattern and the substrate, and a first gate electrode is formed over the gate insulation layer and partially overlapping the active pattern. The first gate electrode, the first region and the second region define a first transistor. A second gate electrode is formed on the same layer as the first gate electrode. The second gate electrode, the third region and the fourth region define a second transistor, and the second gate electrode, the second region and the fourth region define a third transistor. A first insulating interlayer is formed over the first gate electrode, the second gate electrode, and the gate insulation layer.

Abstract: Discussed are a liquid crystal display (LCD) device and a method of manufacturing the LCD device. The LCD device can include a plurality of pixel areas defined by intersections of a plurality of gate lines and a plurality of data lines, a gate disposed in each of the plurality of pixel areas, a gate insulator disposed to cover the gate, an active layer disposed on only the gate with the gate insulator therebetween, a thin film transistor (TFT) configured to include a source, which is disposed at a first side of the active layer, and a drain disposed at a second side of the active layer, a pixel electrode connected to the drain of the TFT and configured to supply a data voltage to a corresponding pixel area, a common electrode configured to supply a common voltage to the corresponding pixel area, and a lightly doped drain (LDD) disposed between the active layer and the source and between the active layer and the drain. At least a portion of the LDD can be disposed on the gate.

Abstract: A display device with a narrow bezel is provided. The display device includes a pixel circuit and a driver circuit which are provided on the same plane. The driver circuit includes a selection circuit and a buffer circuit. The selection circuit includes a first transistor. The buffer circuit includes a second transistor. The first transistor has a region overlapping with the second transistor. One of a source and a drain of the first transistor is electrically connected to a gate of the second transistor. One of a source and a drain of the second transistor is electrically connected to the pixel circuit.

Abstract: A thin film transistor substrate according to an embodiment comprises: a support substrate; a bonding layer disposed on the support substrate; a thin film transistor disposed on the bonding layer, wherein the thin film transistor includes a channel layer containing a nitride-based semiconductor layer, a source electrode electrically connected to a first region of the channel layer, a drain electrode electrically connected to a second region of the channel layer, a gate electrode disposed below the channel layer, and a depletion forming layer disposed between the channel layer and the gate electrode; and a pixel electrode disposed on the thin film transistor and electrically connected to the drain electrode of the thin film transistor. The thin film transistor substrate according to the embodiment, and a display panel and a display device including the same have an advantage of implementing high resolution and reproducing a soft moving image by providing a high carrier mobility.

Abstract: An electroluminescence device and a display device including an electroluminescence device are provided. The electroluminescence device includes an anode including silver, wherein at least a portion of the anode substantially extends in a horizontal direction; a first layer provided over the anode; an organic layer including a luminescent layer; a cathode provided over the organic layer; and an insulating layer provided over an end portion of the anode and an end portion of the first layer, wherein at least a portion of the cathode substantially extends in the horizontal direction in a light emission region, wherein a surface of the insulating layer has a curved portion, and wherein at least a portion of the cathode within a region of the insulating layer above the curved portion extends along a first angled upward direction between the horizontal direction and the thickness direction of the anode.

Abstract: A circuit comprises an array of programmable memory elements fabricated on a substrate, each memory element having one or more processable regions which, when processed by an external process in which a material is applied to at least partially cover one or more of the regions, are configured to program that memory element to one of multiple states; a first set of control lines connected to the array of memory elements, by which the contents of each individual memory element are capable of being accessed by control signals applied to a respective combination of at least two control lines in the first set of control lines; and an array of second circuit elements, different to the memory elements, each connected to a control line of the first set of control lines and to another control line of a second set of control lines, different to the first set of control lines, so as to provide access to second circuit elements in the array.

Abstract: A three-dimensional memory device and method of manufacturing the same, an isolation structure is embedded between the common source region and the substrate thereunder, which can inhibit the undesired diffusion of impurities during the implantation of the common source region, avoiding operation failure due to excessive diffusion of impurities. In programming and reading states of the three-dimensional memory device, electrons flow from the common source region to bit line; while in erase states, holes are injected from the substrate. Due to the isolation structure, the three-dimensional memory device achieves spatial separation of electrons from holes required for programming/erasing, improving the erasing efficiency and the integration as well.

Abstract: This disclosure relates generally to the three-dimensional (3D) integrated thin-film transistors (TFTs) with silicon and metal-oxide (MO) semiconductors as the active layers. In one or more embodiments, an apparatus is provided that comprises a first transistor comprising a silicon active layer, and a second transistor comprising a metal oxide active layer. The second transistor is vertically stacked on the first transistor, and the first transistor and the second transistor share a gate electrode formed between the silicon active layer and the metal oxide active layer. With these embodiments, the gate electrode corresponds to a top gate of the first transistor and a bottom gate of the second transistor.

Abstract: The present disclosure discloses a TFT, a manufacturing method, an array substrate, a display panel, and a device. The TFT includes a hydrogen-containing buffer layer located on a substrate; an oxide semiconductor layer located on the buffer layer, wherein the oxide semiconductor layer includes a conductor region and a semiconductor region; a source or drain located on the conductor region, and electrically connected to the conductor region; and a gate structure located on the semiconductor region.

Abstract: The present disclosure provides a thin-film transistor having a plurality of carbon nanotubes in its active layer, its manufacturing method, and an array substrate. The manufacturing method as such comprises: forming an insulating layer to at least substantially cover a channel region of the active layer between a source electrode and a drain electrode of the thin-film transistor, wherein the insulating layer is configured to substantially insulate from an environment, and have substantially little influence on, the plurality of carbon nanotubes in the active layer.

Abstract: According to one embodiment, a display device includes a first substrate including a first area and a second area, the first area including a display area where pixels are arranged, and the second area being adjacent to the first area and where wirings are arranged, wherein the wirings are covered with a protection layer, the second area includes a peripheral area and a central area in an arrangement direction of the wirings, and a thickness of at least one of the first substrate and the protection layer varies between the peripheral area and the central area.

Abstract: The present inventive concept relates to a display device. A display device according to an exemplary embodiment of the present inventive concept include: a base layer including a plurality of islands in which a pixel is disposed, a plurality of bridges disposed around each of the plurality of islands, a plurality of first wires disposed in a bridge of the plurality of bridges connected to the pixel is disposed; an inorganic insulating layer disposed on the base layer and having an opening exposing a portion of the bridge; and an organic material layer covering the opening, wherein adjacent islands of the plurality of islands are connected to each other through at least the bridge of the plurality of bridges, and the plurality of first wires are disposed on the organic material layer.

Abstract: A bi-directional semiconductor switching device includes first and second vertical field effect transistors (FETs) formed in tandem from a semiconductor substrate. A source for the first FET is on a first side of the substrate and a source for the second FET is on a second side of the substrate opposite the first side. Gates for both the first and second FETs are disposed in tandem in a common set of trenches formed a drift region of the semiconductor substrate that is sandwiched between the sources for the first and second FETs. The drift layer acts as a common drain for both the first FET and second FET.

Abstract: A semiconductor device includes a semiconductor region made of a material to which conductive impurities are added, an insulating film formed on a surface of the semiconductor region, and an electroconductive gate electrode formed on the insulating film. The gate electrode is made of a material whose Fermi level is closer to a Fermi level of the semiconductor region than a Fermi level of Si in at least a portion contiguous to the insulating film.

Abstract: A display device includes: a flexible substrate including a bending area bent in one direction; an insulating layer on the flexible substrate and comprising a plurality of opening patterns spaced apart from each other at the bending area; and a wavy line extending through the plurality of opening patterns.

Abstract: According to an embodiment, a semiconductor memory device comprises control gate electrodes and a semiconductor layer. The control gate electrodes are stacked above a substrate. The semiconductor layer has as its longitudinal direction a direction perpendicular to the substrate. The semiconductor memory device further comprises first and second control gate electrodes and third and fourth control gate electrodes stacked sequentially above the substrate and first through fourth via contacts connected to these first through fourth control gate electrodes. The third and fourth control gate electrodes face the first and second control gate electrodes. Positions of the first and second via contacts are far from each other. Positions of the third and fourth via contacts are close to each other.

Abstract: A display panel with reduced power consumption is described. An example of the display panel includes an array of light emitting elements that are controllable to form an image, and a Thin-Film-Transistor (TFT) backplane comprising circuitry to drive the array of light emitting elements. The TFT backplane includes a plurality of field effect transistors (FETs). Each FET includes a source electrode, a drain electrode, a channel layer contacting the source electrode and the drain electrode, and a gate electrode adjacent to the channel layer and separated from the channel layer by an insulator. The channel layer includes a layer of metal phosphide.

Abstract: An oxide semiconductor transistor according to an exemplary embodiment of the present invention includes: a substrate; a first gate electrode disposed on the substrate; a gate insulating layer disposed on the substrate and the first gate electrode; an oxide semiconductor layer disposed on the gate insulating layer; an etch stopper layer disposed on the oxide semiconductor layer; and a source electrode and a drain electrode disposed on the oxide semiconductor layer and the etch stopper layer and spaced apart from each other.

Abstract: A semiconductor structure, device, or vertical field effect transistor is comprised of a drain, a drift layer disposed in a first direction relative to the drain and in electronic communication with the drain, a barrier layer disposed in the first direction relative to the drift layer and in electronic communication with the drain, the barrier layer comprising a current blocking layer and an aperture region, a two-dimensional hole gas-containing layer disposed in the first direction relative to the barrier layer, a gate electrode oriented to alter an energy level of the aperture region when a gate voltage is applied to the gate electrode, and a source in ohmic contact with the two-dimensional hole gas-containing layer. At least one of an additional layer, the drain, the drift region, the current blocking layer, the two-dimensional hole gas-containing layer, and the aperture region comprises diamond.

Abstract: A vertical memory device includes a first structure having a lower semiconductor pattern structure filling a recess on a substrate and protruding from an upper surface of the substrate in a first direction substantially perpendicular to the upper surface of the substrate, the lower semiconductor pattern structure including a first undoped semiconductor pattern, a doped semiconductor pattern, and a second undoped semiconductor pattern sequentially stacked, and a lower surface of the doped semiconductor pattern being lower than the upper surface of the substrate, and an upper semiconductor pattern extending in the first direction on the lower semiconductor pattern structure, and a plurality of gate electrodes surrounding a sidewall of the first structure, the plurality of gate electrodes being at a plurality of levels, respectively, so as to be spaced apart from each other in the first direction.

Abstract: A display substrate includes a first substrate having a display area and a non-display area, a plurality of pixels at the display area, and a gate driving circuit at the non-display area and including an output transistor including a channel region, an insulation layer covering the output transistor, and a capacitor on the insulation layer, electrically connected to the output transistor, and including a first capacitor electrode on the insulation layer, overlapping the channel region of the output transistor, and electrically connected to a first electrode of the output transistor, a first protection layer covering the first capacitor electrode, and a second capacitor electrode on the first protection layer, overlapping the channel region of the output transistor, and electrically connected to a gate electrode of the output transistor.

Abstract: The present disclosure provides a low-temperature polycrystalline silicon array substrate which includes a substrate, a groove disposed on the substrate, a buffer layer disposed on the substrate, and a polycrystalline silicon active layer disposed on the buffer layer, the groove is located at a channel of a thin film transistor, and the buffer layer covers the groove to form an air layer in the groove. The present disclosure further provides a manufacturing method of a low-temperature polycrystalline silicon array substrate, mainly including: manufacturing a groove at a channel of a thin film transistor on a substrate; depositing a metal sacrificial layer on the substrate, and etching the metal sacrificial layer except the groove through an etching process; sequentially forming a buffer layer and an amorphous silicon layer on the substrate; and removing the metal sacrificial layer in the groove to form an air layer in the groove.

Abstract: A thin film transistor, a method for fabricating the same, an array substrate, and a display device are provided. The method comprises forming an active layer on a substrate, wherein source-and-drain-to-be-formed regions of the active layer are thicker than a semiconductor region between the source-and-drain-to-be-formed regions, and by a patterning process, forming a gate on the active layer, and forming a pattern of source and drain in the source-and-drain-to-be-formed regions of the active layer.