For Charge-coupled Device (epo) Patents (Class 257/E21.185)
  • Patent number: 8900912
    Abstract: Embodiments of the invention relate to a camera assembly including a rear-facing camera and a front-facing camera operatively coupled together (e.g., bonded, stacked on a common substrate). In some embodiments of the invention, a system having an array of frontside illuminated (FSI) imaging pixels is bonded to a system having an array of backside illuminated (BSI) imaging pixels, creating a camera assembly with a minimal size (e.g., a reduced thickness compared to prior art solutions). An FSI image sensor wafer may be used as a handle wafer for a BSI image sensor wafer when it is thinned, thereby decreasing the thickness of the overall camera module. According to other embodiments of the invention, two package dies, one a BSI image sensor, the other an FSI image sensor, are stacked on a common substrate such as a printed circuit board, and are operatively coupled together via redistribution layers.
    Type: Grant
    Filed: June 26, 2013
    Date of Patent: December 2, 2014
    Assignee: OmniVision Technologies, Inc.
    Inventors: Gang Chen, Ashish Shah, Duli Mao, Hsin-Chih Tai, Howard E. Rhodes
  • Patent number: 8574941
    Abstract: A method for manufacturing a solid-state imaging device in which a charge generator that detects an electromagnetic wave and generates signal charges is formed on a semiconductor substrate and a negative-charge accumulated layer having negative fixed charges is formed above a detection plane of the charge generator. The method includes the steps of: forming an oxygen-feed film capable of feeding oxygen on the detection plane of the charge generator; forming a metal film that covers the oxygen-feed film on the detection plane of the charge generator; and performing heat treatment for the metal film in an inactive atmosphere to thereby form an oxide of the metal film between the metal film and the oxygen-feed film on the detection plane of the charge generator, the oxide being to serve as the negative-charge accumulated layer.
    Type: Grant
    Filed: June 6, 2011
    Date of Patent: November 5, 2013
    Assignee: Sony Corporation
    Inventors: Susumu Hiyama, Tomoyuki Hirano
  • Patent number: 8497536
    Abstract: Embodiments of the invention relate to a camera assembly including a rear-facing camera and a front-facing camera operatively coupled together (e.g., bonded, stacked on a common substrate). In some embodiments of the invention, a system having an array of frontside illuminated (FSI) imaging pixels is bonded to a system having an array of backside illuminated (BSI) imaging pixels, creating a camera assembly with a minimal size (e.g., a reduced thickness compared to prior art solutions). An FSI image sensor wafer may be used as a handle wafer for a BSI image sensor wafer when it is thinned, thereby decreasing the thickness of the overall camera module. According to other embodiments of the invention, two package dies, one a BSI image sensor, the other an FSI image sensor, are stacked on a common substrate such as a printed circuit board, and are operatively coupled together via redistribution layers.
    Type: Grant
    Filed: September 16, 2011
    Date of Patent: July 30, 2013
    Assignee: OmniVision Technologies, Inc.
    Inventors: Gang Chen, Ashish Shah, Duli Mao, Hsin-Chih Tai, Howard E. Rhodes
  • Patent number: 8354699
    Abstract: A transistor of a pixel cell for use in a CMOS imager with a low threshold voltage of less than about 0.4 V is disclosed. The transistor is provided with high dosage source and drain regions around the gate electrode and with the halo implanted regions and/or the lightly doped LDD regions and/or the enhancement implanted regions omitted from at least one side of the gate electrode. The low threshold transistor is electrically connected to a high voltage transistor with a high threshold voltage of about 0.7 V.
    Type: Grant
    Filed: March 21, 2011
    Date of Patent: January 15, 2013
    Assignee: Round Rock Research, LLC
    Inventor: Howard E. Rhodes
  • Patent number: 8278131
    Abstract: A method and apparatus for operating an imager pixel that includes the act of applying a relatively small first polarity voltage and a plurality of pulses of a second polarity voltage on the gate of a transfer transistor during a charge integration period.
    Type: Grant
    Filed: August 12, 2011
    Date of Patent: October 2, 2012
    Assignee: Micron Technology, Inc.
    Inventor: John Ladd
  • Patent number: 8247847
    Abstract: A solid-state imaging device including a first transfer electrode portion and a second transfer electrode portion having a pattern area ratio higher than that of the first transfer electrode portion. The first transfer electrode portion includes a plurality of first transfer electrodes having a single-layer structure of metal material. The second transfer electrode portion includes a plurality of second transfer electrodes having a single-layer structure of polycrystalline silicon or amorphous silicon.
    Type: Grant
    Filed: November 4, 2009
    Date of Patent: August 21, 2012
    Assignee: Sony Corporation
    Inventors: Kaori Takimoto, Masayuki Okada, Takeshi Takeda
  • Patent number: 8114696
    Abstract: Provided is a CMOS image sensor with an asymmetric well structure of a source follower. The CMOS image sensor includes: a well disposed in an active region of a substrate; a drive transistor having one terminal connected to a power voltage and a first gate electrode disposed to cross the well; and a select transistor having a drain-source junction between another terminal of the drive transistor and an output node, and a second gate electrode disposed in parallel to the drive transistor. A drain region of the drive transistor and a source region of the select transistor are asymmetrically arranged.
    Type: Grant
    Filed: December 16, 2010
    Date of Patent: February 14, 2012
    Assignee: Intellectual Ventures II LLC
    Inventor: Hee-Jeong Hong
  • Patent number: 8021908
    Abstract: A method and apparatus for operating an imager pixel that includes the act of applying a relatively small first polarity voltage and a plurality of pulses of a second polarity voltage on the gate of a transfer transistor during a charge integration period.
    Type: Grant
    Filed: November 10, 2010
    Date of Patent: September 20, 2011
    Assignee: Micron Technology, Inc.
    Inventor: John Ladd
  • Patent number: 7910963
    Abstract: A transistor of a pixel cell for use in a CMOS imager with a low threshold voltage of about 0.3 V to less than about 0.7 V is disclosed. The transistor is provided with high dosage source and drain regions around the gate electrode and with the halo implanted regions and/or the lightly doped LDD regions and/or the enhancement implanted regions omitted from at least one side of the gate electrode. The low threshold transistor is electrically connected to a high voltage transistor with a high threshold voltage of about 0.7 V.
    Type: Grant
    Filed: February 23, 2010
    Date of Patent: March 22, 2011
    Assignee: Round Rock Research, LLC
    Inventor: Howard E. Rhodes
  • Patent number: 7879642
    Abstract: A sensor having photodiodes whose sensitivity and storage capacity can be increased is provided. The sensor is formed by arranging the photodiodes in an array with first region of second conductivity type is formed on the principal surface of a substrate of a first conductivity type. A pixel separating region of the first conductivity type is formed to penetrate through the first semiconductor region to separate the regions of the adjacent photodiodes. A second region of the second conductivity type used to drain excess charge is formed in substrate at a position away from the junction surface between substrate and the first region and below the junction surface.
    Type: Grant
    Filed: June 15, 2007
    Date of Patent: February 1, 2011
    Assignee: Texas Instruments Incorporated
    Inventors: Hidetoshi Shimada, Karuya Mori
  • Patent number: 7851798
    Abstract: A method and apparatus for operating an imager pixel that includes the act of applying a relatively small first polarity voltage and a plurality of pulses of a second polarity voltage on the gate of a transfer transistor during a charge integration period.
    Type: Grant
    Filed: May 4, 2005
    Date of Patent: December 14, 2010
    Assignee: Micron Technology, Inc.
    Inventor: John Ladd
  • Patent number: 7816169
    Abstract: Disclosed is an ordered microelectronic fabrication sequence in which color filters are formed by conformal deposition directly onto a photodetector array of a CCD, CID, or CMOS imaging device to create a concave-up pixel surface, and, overlayed with a high transmittance planarizing film of specified index of refraction and physical properties which optimize light collection to the photodiode without additional conventional microlenses. The optically flat top surface serves to encapsulate and protect the imager from chemical and thermal cleaning treatment damage, minimizes topographical underlayer variations which would aberrate or cause reflection losses of images formed on non-planar surfaces, and, obviates residual particle inclusions induced during dicing and packaging. A CCD imager is formed by photolithographically patterning a planar-array of photodiodes on a semiconductor substrate. The photodiode array is provided with metal photoshields, passivated, and, color filters are formed thereon.
    Type: Grant
    Filed: December 31, 2008
    Date of Patent: October 19, 2010
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yang-Tung Fan, Chiou-Shian Peng, Cheng-Yu Chu, Shih-Jane Lin, Yen-Ming Chen, Fu-Jier Fan, Kuo-Wei Li
  • Patent number: 7791114
    Abstract: A transistor of a pixel cell for use in a CMOS imager with a low threshold voltage of about 0.3 V to less than about 0.7 V is disclosed. The transistor is provided with high dosage source and drain regions around the gate electrode and with the halo implanted regions and/or the lightly doped LDD regions and/or the enhancement implanted regions omitted from at least one side of the gate electrode. The low threshold transistor is electrically connected to a high voltage transistor with a high threshold voltage of about 0.7 V.
    Type: Grant
    Filed: March 20, 2008
    Date of Patent: September 7, 2010
    Assignee: Round Rock Research, LLC
    Inventor: Howard E. Rhodes
  • Patent number: 7704775
    Abstract: The invention provides CCD type solid-state imaging apparatus comprises: photoelectric conversion elements; a plurality of first transfer paths extending in a first direction; and second transfer paths extending in a first direction; the first transfer paths and the second transfer paths respectively including a plurality of discretely formed first layer transfer electrode films and second layer transfer electrode films formed between the first layer transfer electrode films and whose ends are laminated on the ends of the adjacent first layer transfer electrode films via insulating films. The thickness of the insulating film between the first layer transfer electrode film and the second layer transfer electrode film constituting the second transfer path shown is smaller than the thickness of the insulating film between the first layer transfer electrode film and the second layer transfer electrode film constituting the first transfer path shown.
    Type: Grant
    Filed: June 19, 2006
    Date of Patent: April 27, 2010
    Assignee: Fujifilm Corporation
    Inventor: Shinji Uya
  • Patent number: 7557390
    Abstract: A solid image capturing element comprising a plurality of vertical shift registers arranged to each correspond to a column of a plurality of light receiving pixels in a matrix arrangement, a horizontal shift register provided on an output side of the plurality of vertical shift registers, and an output section provided on an output side of the horizontal shift register. In this solid image capturing element, a reverse conductive semiconductor region is formed over one major surface of one conductive semiconductor substrate, the plurality of light receiving pixels, the plurality of vertical shift registers, the horizontal shift register, and the output section are formed in the semiconductor region, and a portion of the semiconductor region where the output section is formed has a higher dopant concentration than the portion of the semiconductor region where the horizontal shift register is formed.
    Type: Grant
    Filed: October 17, 2003
    Date of Patent: July 7, 2009
    Assignee: Sanyo Electric co., Ltd.
    Inventors: Yoshihiro Okada, Yuzo Otsuru
  • Patent number: 7485906
    Abstract: Disclosed is an ordered microelectronic fabrication sequence in which color filters are formed by conformal deposition directly onto a photodetector array of a CCD, CID, or CMOS imaging device to create a concave-up pixel surface, and, overlayed with a high transmittance planarizing film of specified index of refraction and physical properties which optimize light collection to the photodiode without additional conventional microlenses. The optically flat top surface serves to encapsulate and protect the imager from chemical and thermal cleaning treatment damage, minimizes topographical underlayer variations which would aberrate or cause reflection losses of images formed on non-planar surfaces, and, obviates residual particle inclusions induced during dicing and packaging. A CCD imager is formed by photolithographically patterning a planar-array of photodiodes on a semiconductor substrate. The photodiode array is provided with metal photoshields, passivated, and, color filters are formed thereon.
    Type: Grant
    Filed: December 20, 2006
    Date of Patent: February 3, 2009
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yang-Tung Fan, Chiou-Shian Peng, Cheng-Yu Chu, Shih-Jane Lin, Yen-Ming Chen, Fu-Jier Fan, Kuo-Wei Lin
  • Patent number: 7397075
    Abstract: A transistor of a pixel cell for use in a CMOS imager with a low threshold voltage of about 0.3 V to less than about 0.7 V is disclosed. The transistor is provided with high dosage source and drain regions around the gate electrode and with the halo implanted regions and/or the lightly doped LDD regions and/or the enhancement implanted regions omitted from at least one side of the gate electrode. The low threshold transistor is electrically connected to a high voltage transistor with a high threshold voltage of about 0.7 V.
    Type: Grant
    Filed: August 24, 2005
    Date of Patent: July 8, 2008
    Assignee: Micron Technology, Inc.
    Inventor: Howard E. Rhodes
  • Patent number: 7393728
    Abstract: A method of manufacturing an array substrate of a transflective liquid crystal display is provided. Utilizing backward exposure and half-tone photo-mask to reduce the number of photo-masks used in the manufacturing process, only three to four photo-masks are used to manufacture a transflective liquid crystal display.
    Type: Grant
    Filed: October 17, 2006
    Date of Patent: July 1, 2008
    Assignee: Au Optronics Corporation
    Inventor: Shih-Chieh Lin
  • Patent number: 7326598
    Abstract: A method of fabricating polycrystalline silicon according to an embodiment includes forming a semiconductor layer of amorphous silicon on a substrate having a first region and a second region surrounding the first region; forming a plurality of flat align keys in the second region using a first mask; forming a plurality of convex align keys by etching the semiconductor layer in the first region, the plurality of convex align keys having steps against the substrate; and crystallizing the semiconductor layer in the first region by aligning a second mask with respect to the plurality of convex align keys.
    Type: Grant
    Filed: February 14, 2006
    Date of Patent: February 5, 2008
    Assignee: LG.Philips LCD Co., Ltd.
    Inventor: Young-Joo Kim
  • Patent number: 7253092
    Abstract: Disclosed herein is a method of making integrated circuits. In one embodiment the method includes forming tungsten plugs in the integrated circuit and forming electrically conductive interconnect lines in the integrated circuit after formation of the tungsten plugs. At least one tungsten plug is electrically connected to at least one electrically conductive interconnect line. Thereafter at least one electrically conductive interconnect line is contacted with water for a period of time less than 120 minutes.
    Type: Grant
    Filed: June 24, 2003
    Date of Patent: August 7, 2007
    Assignee: NEC Electronics America, Inc.
    Inventors: Elizabeth A. Dauch, John W. Jacobs
  • Patent number: 7195989
    Abstract: Three-dimensional structures are electrochemically fabricated by depositing a first material onto previously deposited material through voids in a patterned mask where the patterned mask is at least temporarily adhered to a substrate or previously formed layer of material and is formed and patterned onto the substrate via a transfer tool patterned to enable transfer of a desired pattern of precursor masking material. In some embodiments the precursor material is transformed into masking material after transfer to the substrate while in other embodiments the precursor is transformed during or before transfer. In some embodiments layers are formed one on top of another to build up multi-layer structures. In some embodiments the mask material acts as a build material while in other embodiments the mask material is replaced each layer by a different material which may, for example, be conductive or dielectric.
    Type: Grant
    Filed: May 7, 2004
    Date of Patent: March 27, 2007
    Assignee: Microfabrica Inc.
    Inventors: Michael S. Lockard, Dennis R. Smalley
  • Patent number: 7125740
    Abstract: A method of fabricating a solid-state image pickup device comprising forming mask patterns corresponding to patterns of first and third transfer electrodes, which are to be alternately arranged in each vertical transfer register formation region and which are to extend in parallel to each other between light receiving portions adjacent to each other in the vertical direction, on a first electrode material layer. The method also includes forming side walls on each of the mask patterns. The method further includes patterning the first electrode material layer via the mask patterns having the side walls, to form first and third transfer electrodes formed by the first layer.
    Type: Grant
    Filed: July 12, 2004
    Date of Patent: October 24, 2006
    Assignee: Sony Corporation
    Inventors: Junji Yamane, Kunihiko Hikichi