Manufacture Of Electrode On Semiconductor Body Using Process Other Than By Epitaxial Growth, Diffusion Of Impurities, Alloying Of Impurity Materials, Or Radiation Bombardment (epo) Patents (Class 257/E21.158)
E Subclasses
- From a gas or vapor, e.g., condensation (EPO) (Class 257/E21.16)
- Of conductive layer (EPO) (Class 257/E21.161)
- On semiconductor body comprising Group IV element (EPO) (Class 257/E21.162)
- Deposition of Schottky electrode (EPO) (Class 257/E21.163)
- O layer comprising silicide (EPO) (Class 257/E21.164)
- Conductive layer comprising silicide (EPO) (Class 257/E21.165)
- Conductive layer comprising semiconducting material (EPO) (Class 257/E21.166)
- Conductive layer comprising transition metal, e.g., Ti, W, Mo (EPO) (Class 257/E21.168)
- By physical means, e.g., sputtering, evaporation (EPO) (Class 257/E21.169)
- By chemical means, e.g., CVD, LPCVD, PECVD, laser CVD (EPO) (Class 257/E21.17)
- On semiconductor body comprising Group III-V compound (EPO) (Class 257/E21.172)
- From a liquid, e.g., electrolytic deposition (EPO) (Class 257/E21.174)
- MOS-gate structure (EPO) (Class 257/E21.177)
- Joint-gate structure (EPO) (Class 257/E21.178)
- Floating or plural gate structure (EPO) (Class 257/E21.179)
- Gate structure with charge-trapping insulator (EPO) (Class 257/E21.18)
- On semiconductor body not comprising Group IV element, e.g., Group III-V compound (EPO) (Class 257/E21.181)
- On semiconductor body comprising Group IV element excluding non-elemental Si, e.g., Ge, C, diamond, silicon compound or compound, such as SiC or SiGe (EPO) (Class 257/E21.182)
- For charge-coupled device (EPO) (Class 257/E21.183)
- PN-homojunction gate structure (EPO) (Class 257/E21.184)
- Schottky gate structure (EPO) (Class 257/E21.186)
- Heterojunction gate structure (EPO) (Class 257/E21.188)
- Insulator formed on silicon semiconductor body (EPO) (Class 257/E21.191)
- Characterized by insulator (EPO) (Class 257/E21.192)
- Characterized by conductor (EPO) (Class 257/E21.195)
- Final conductor next to insulator having lateral composition or doping variation, or being formed laterally by more than one deposition step (EPO) (Class 257/E21.196)
- Final conductor layer next to insulator being silicon e.g., polysilicon, with or without impurities (EPO) (Class 257/E21.197)
- Conductor layer next to insulator is Si or Ge or C and their non-Si alloys (EPO) (Class 257/E21.201)
- Conductor layer next to the insulator is single metal, e.g., Ta, W, Mo, Al (EPO) (Class 257/E21.202)
- Conductor layer next to insulator is metallic silicide (Me Si) (EPO) (Class 257/E21.203)
- Conductor layer next to insulator is non-MeSi composite or compound, e.g., TiN (EPO) (Class 257/E21.204)
- Characterized by sectional shape, e.g., T-shape, inverted T, spacer (EPO) (Class 257/E21.205)
- Lithography, isolation, or planarization-related aspects of making conductor-insulator-semiconductor structure, e.g., sub-lithography lengths; to solve problems arising at crossing with side of device isolation (EPO) (Class 257/E21.206)
- Insulator formed on nonelemental silicon semiconductor body, e.g., Ge, SiGe, SiGeC (EPO) (Class 257/E21.207)