For Charge-coupled Device (epo) Patents (Class 257/E21.189)
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Patent number: 11784206Abstract: A pixel-array substrate includes a floating diffusion region and a first photodiode formed in a semiconductor substrate. A top surface of the semiconductor substrate defines a trench 1A and a trench 1B each (i) extending into the semiconductor substrate away from a planar region of the top surface between the trench 1A and the trench 1B and (ii) having a respective distal end, with respect to the floating diffusion region, located between the floating diffusion region and the first photodiode. In a horizontal plane parallel to the top surface and along an inter-trench direction between the trench 1A and the trench 1B, a first spatial separation between the trench 1A and the trench 1B increases with increasing distance from the floating diffusion region.Type: GrantFiled: October 26, 2020Date of Patent: October 10, 2023Assignee: OmniVision Technologies, Inc.Inventors: Hui Zang, Gang Chen
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Patent number: 11658198Abstract: A device includes a photodiode, a floating diffusion region, a transfer gate, and a channel region. The photodiode is disposed in a semiconductor material. The photodiode is coupled to generate charge in response to incident light. The floating diffusion region is disposed in the semiconductor material. The transfer gate is disposed between the photodiode and the floating diffusion region. The channel region associated with the transfer gate is in the semiconductor material proximate to the transfer gate. The transfer gate is coupled to transfer the charge from the photodiode to the floating diffusion region through the channel region in response to a transfer signal coupled to be received by the transfer gate. The transfer gate includes a plurality of fin structures that extend into the semiconductor material and the photodiode.Type: GrantFiled: August 20, 2020Date of Patent: May 23, 2023Assignee: OMNIVISION TECHNOLOGIES, INC.Inventors: Qin Wang, Gang Chen
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Patent number: 11658199Abstract: A device includes a photodiode, a floating diffusion region, a transfer gate, and a channel region. The photodiode is disposed in a semiconductor material. The photodiode is coupled to generate charges in response to incident light. The photodiode has a substantially uniform doping profile throughout a depth of the photodiode in the semiconductor material. The floating diffusion region is disposed in the semiconductor material. The transfer gate is disposed between the photodiode and the floating diffusion region, wherein the transfer gate includes a plurality of fin structures. The channel region associated with the transfer gate is in the semiconductor material proximate to the transfer gate. The transfer gate is coupled to transfer the charge from the photodiode to the floating diffusion region through the channel region in response to a transfer signal coupled to be received by the transfer gate.Type: GrantFiled: August 20, 2020Date of Patent: May 23, 2023Assignee: OMNIVISION TECHNOLOGIES, INC.Inventors: Qin Wang, Gang Chen
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Patent number: 11587980Abstract: A display device includes a display substrate, a light emitting element layer disposed on a surface of the display substrate and including display pixels, a sensing substrate having a surface attached to another surface of the display substrate, a sensing element layer disposed on another surface of the sensing substrate and including sending pixels that each sense light of a color, and a photorefractive layer disposed on the sensing element layer and including micro lenses.Type: GrantFiled: March 25, 2020Date of Patent: February 21, 2023Assignee: SAMSUNG DISPLAY CO., LTD.Inventors: Hyeon Gu Cho, Min Soo Choi, Seok Gyu Yoon, Jae Jin Lyu
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Patent number: 10586847Abstract: A multilayer device includes a substrate having a trench extending along a first surface of the substrate. A first layer disposed on the first surface of the substrate, the first layer comprising a given surface and another surface. A dielectric layer is formed between the given surface of the first layer and the first surface of the substrate. An active region disposed on the other surface of the first layer overlying the trench, wherein at least a portion of the active region resides substantially above a region defined by the trench.Type: GrantFiled: January 15, 2016Date of Patent: March 10, 2020Assignee: Hewlett Packard Enterprise Development LPInventors: Di Liang, Xue Huang
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Patent number: 8969134Abstract: A tape capable of laser ablation may be used in the formation of microelectronic interconnects, wherein the tape may be attached to bond pads on a microelectronic device and vias may be formed by laser ablation through the tape to expose at least a portion of corresponding bond pads. The microelectronic interconnects may be formed on the bond pads within the vias, such as by solder paste printing and solder reflow. The laser ablation tape can be removed after the formation of the microelectronic interconnects.Type: GrantFiled: May 10, 2013Date of Patent: March 3, 2015Assignee: Intel CorporationInventors: Xavier F. Brun, Takashi Kumamoto, Sufi Ahmed
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Patent number: 8963197Abstract: An LED package includes a package body having a well formed in its upper surface, where the well is configured to receive a light emitting chip. An optical lens is disposed above the package body and includes a hollow dome structure located above and encompassing the lateral extent of the light emitting chip within the well of the package body. In one implementation, the package body and the optical lens collectively include at least one protrusion and concave, where the protrusion is aligned with the concave so that the optical lens mates with the package body, thereby causing the optical lens to self align with the package body. In another implementation, a protruding inner portion of the upper surface of the package body mates with the hollow dome structure, achieving a similar purpose. Consequently, generation of an eccentric fault between the optical lens and the package body is prevented.Type: GrantFiled: December 16, 2013Date of Patent: February 24, 2015Assignee: LG Display Co., Ltd.Inventors: Myung Soo Han, Seung Ho Jang, Won Seok Choi
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Patent number: 8946784Abstract: A backside illuminated image sensor having a photodiode and a first transistor in a sensor region and located in a first substrate, with the first transistor electrically coupled to the photodiode. The image sensor has logic circuits formed in a second substrate. The second substrate is stacked on the first substrate and the logic circuits are coupled to the first transistor through bonding pads, the bonding pads disposed outside of the sensor region.Type: GrantFiled: February 18, 2013Date of Patent: February 3, 2015Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Szu-Ying Chen, Meng-Hsun Wan, Dun-Nian Yaung, Pao-Tung Chen, Jen-Cheng Liu
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Patent number: 8907375Abstract: A method of manufacturing a semiconductor device includes the steps of forming a gate electrode of a transistor on an insulator layer on a surface of a semiconductor substrate, forming an isolation region by performing ion implantation of an impurity of a first conductivity type into the semiconductor substrate, forming a lightly doped drain region by performing, after forming a mask pattern including an opening portion narrower than a width of the gate electrode on an upper layer of the gate electrode of the transistor, ion implantation of an impurity of a second conductivity type near the surface of the semiconductor substrate with the mask pattern as a mask, and forming a source region and a drain region of the transistor by performing ion implantation of an impurity of the second conductivity type into the semiconductor substrate after forming the gate electrode of the transistor.Type: GrantFiled: March 29, 2013Date of Patent: December 9, 2014Assignee: Sony CorporationInventor: Masashi Yanagita
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Patent number: 8906742Abstract: Systems and methods are disclosed for performing laser annealing in a manner that reduces or minimizes wafer surface temperature variations during the laser annealing process. The systems and methods include annealing the wafer surface with first and second laser beams that represent preheat and anneal laser beams having respective first and second intensities. The preheat laser beam brings the wafer surface temperate close to the annealing temperature and the anneal laser beam brings the wafer surface temperature up to the annealing temperature. The anneal laser beam can have a different wavelength, or the same wavelength but different orientation relative to the wafer surface. Reflectivity maps of the wafer surface at the preheat and anneal wavelengths are measured and used to select the first and second intensities that ensure good anneal temperature uniformity as a function of wafer position. The first and second intensities can also be selected to minimize edge damage or slip generation.Type: GrantFiled: August 29, 2013Date of Patent: December 9, 2014Assignee: Ultratech, Inc.Inventors: Xiaohua Shen, Yun Wang, Xiaoru Wang
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Patent number: 8900912Abstract: Embodiments of the invention relate to a camera assembly including a rear-facing camera and a front-facing camera operatively coupled together (e.g., bonded, stacked on a common substrate). In some embodiments of the invention, a system having an array of frontside illuminated (FSI) imaging pixels is bonded to a system having an array of backside illuminated (BSI) imaging pixels, creating a camera assembly with a minimal size (e.g., a reduced thickness compared to prior art solutions). An FSI image sensor wafer may be used as a handle wafer for a BSI image sensor wafer when it is thinned, thereby decreasing the thickness of the overall camera module. According to other embodiments of the invention, two package dies, one a BSI image sensor, the other an FSI image sensor, are stacked on a common substrate such as a printed circuit board, and are operatively coupled together via redistribution layers.Type: GrantFiled: June 26, 2013Date of Patent: December 2, 2014Assignee: OmniVision Technologies, Inc.Inventors: Gang Chen, Ashish Shah, Duli Mao, Hsin-Chih Tai, Howard E. Rhodes
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Patent number: 8896037Abstract: A solid-state imaging device including: a semiconductor layer; a charge accumulation region configured to be formed inside the semiconductor layer and serve as part of a photodiode; and a reflective surface configured to be disposed inside or under the charge accumulation region and be so formed as to reflect light that has passed through the charge accumulation region and direct the light toward a center part of the charge accumulation region.Type: GrantFiled: October 14, 2011Date of Patent: November 25, 2014Assignee: Sony CorporationInventors: Harumi Ikeda, Masashi Nakazawa
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Patent number: 8759164Abstract: In a method for manufacturing an integral imaging device, a layer of curable adhesive is first applied on a flexible substrate and half cured such that the curable adhesive is solidified but is capable of deforming under external forces. Then the curable adhesive is printed into a lenticular lens having a predetermined shape and size using a roll-to-roll processing device and fully cured such that the curable adhesive is capable of withstanding external forces to hold the predetermined shape and size. Last, a light emitting diode display is applied on the flexible substrate opposite to the lenticular lens such that an image plane of the light emitting diode display coincides with a focal plane of the lenticular lens.Type: GrantFiled: June 20, 2012Date of Patent: June 24, 2014Assignee: Hon Hai Precision Industry Co., Ltd.Inventor: Chia-Ling Hsu
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Patent number: 8748938Abstract: There is provided a solid-state imaging device in which a plurality of pixels is two-dimensionally arranged in a pixel region. Each of the pixels is formed in an island-shaped semiconductor. In this island-shaped semiconductor, a signal line N+ region and a P region are formed from the bottom. On an upper side surface of this P region, an N region and a P+ region are formed from an inner side of the island-shaped semiconductor. Above the P region, a P+ region is formed. By setting the P+ region and the P+ region to have a low-level voltage and setting the signal line N+ region to have a high-level voltage that is higher than the low-level voltage, signal charges accumulated in the N region are discharged to the signal line N+ region via the P region.Type: GrantFiled: February 18, 2013Date of Patent: June 10, 2014Assignee: Unisantis Electronics Singapore Pte. Ltd.Inventors: Fujio Masuoka, Nozomu Harada
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Patent number: 8648360Abstract: A light-emitting diode structure includes a base with a recessed portion, a light-emitting chip and a light-transmissive block. The light-emitting chip disposed in the recessed portion of the base and emits a light beam. The light-transmissive block disposed on the base covers the recessed portion and the light-emitting chip, so that the light beam emitted from the light-emitting chip is radiated outwardly via the light-transmissive block. The light-transmissive block is a flat-top multilateral cone including a bottom surface, a top surface, and several side surfaces connected to and located between the bottom surface and the top surface. A slot with a bottom portion is formed on the top surface of the light-transmissive block.Type: GrantFiled: May 15, 2012Date of Patent: February 11, 2014Assignee: Everlight Electronics Co., Ltd.Inventor: Kuan-Yu Chen
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Patent number: 8574941Abstract: A method for manufacturing a solid-state imaging device in which a charge generator that detects an electromagnetic wave and generates signal charges is formed on a semiconductor substrate and a negative-charge accumulated layer having negative fixed charges is formed above a detection plane of the charge generator. The method includes the steps of: forming an oxygen-feed film capable of feeding oxygen on the detection plane of the charge generator; forming a metal film that covers the oxygen-feed film on the detection plane of the charge generator; and performing heat treatment for the metal film in an inactive atmosphere to thereby form an oxide of the metal film between the metal film and the oxygen-feed film on the detection plane of the charge generator, the oxide being to serve as the negative-charge accumulated layer.Type: GrantFiled: June 6, 2011Date of Patent: November 5, 2013Assignee: Sony CorporationInventors: Susumu Hiyama, Tomoyuki Hirano
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Patent number: 8546805Abstract: Systems and methods are disclosed for performing laser annealing in a manner that reduces or minimizes wafer surface temperature variations during the laser annealing process. The systems and methods include annealing the wafer surface with first and second laser beams that represent preheat and anneal laser beams having respective first and second intensities. The preheat laser beam brings the wafer surface temperate close to the annealing temperature and the anneal laser beam brings the wafer surface temperature up to the annealing temperature. The anneal laser beam can have a different wavelength, or the same wavelength but different orientation relative to the wafer surface. Reflectivity maps of the wafer surface at the preheat and anneal wavelengths are measured and used to select first and second intensities that ensure good anneal temperature uniformity as a function of wafer position.Type: GrantFiled: January 27, 2012Date of Patent: October 1, 2013Assignee: Ultratech, Inc.Inventors: Xiaohua Shen, Yun Wang, Xiaoru Wang
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Patent number: 8441085Abstract: An electronic apparatus having a substrate with a bottom gate p-channel type thin film transistor; a resist pattern over the substrate; and a light shielding film operative to block light having a wavelength shorter than 260 nm over at least a channel part of said thin film transistor.Type: GrantFiled: August 3, 2010Date of Patent: May 14, 2013Assignee: Japan Display West Inc.Inventors: Koichi Nagasawa, Takashi Yamaguchi, Nobutaka Ozaki, Yasuhiro Kanaya, Hirohisa Takeda, Yasuo Mikami, Yoshifumi Mutoh
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Patent number: 8426287Abstract: A method of manufacturing a semiconductor device includes the steps of forming a gate electrode of a transistor on an insulator layer on a surface of a semiconductor substrate, forming an isolation region by performing ion implantation of an impurity of a first conductivity type into the semiconductor substrate, forming a lightly doped drain region by performing, after forming a mask pattern including an opening portion narrower than a width of the gate electrode on an upper layer of the gate electrode of the transistor, ion implantation of an impurity of a second conductivity type near the surface of the semiconductor substrate with the mask pattern as a mask, and forming a source region and a drain region of the transistor by performing ion implantation of an impurity of the second conductivity type into the semiconductor substrate after forming the gate electrode of the transistor.Type: GrantFiled: November 12, 2010Date of Patent: April 23, 2013Assignee: Sony CorporationInventor: Masashi Yanagita
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Patent number: 8278131Abstract: A method and apparatus for operating an imager pixel that includes the act of applying a relatively small first polarity voltage and a plurality of pulses of a second polarity voltage on the gate of a transfer transistor during a charge integration period.Type: GrantFiled: August 12, 2011Date of Patent: October 2, 2012Assignee: Micron Technology, Inc.Inventor: John Ladd
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Patent number: 8263421Abstract: An object is to provide a manufacturing method of a microcrystalline semiconductor film with favorable quality over a large-area substrate. After forming a gate insulating film over a gate electrode, in order to improve quality of a microcrystalline semiconductor film formed in an initial stage, glow discharge plasma is generated by supplying high-frequency powers with different frequencies, and a lower part of the film near an interface with the gate insulating film is formed under a first film formation condition, which is low in film formation rate but results in a good quality film. Thereafter, an upper part of the film is deposited under a second film formation condition with higher film formation rate, and further, a buffer layer is stacked on the microcrystalline semiconductor film.Type: GrantFiled: November 12, 2010Date of Patent: September 11, 2012Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Sachiaki Teduka, Satoshi Toriumi, Makoto Furuno, Yasuhiro Jinbo, Koji Dairiki, Hideaki Kuwabara
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Patent number: 8247847Abstract: A solid-state imaging device including a first transfer electrode portion and a second transfer electrode portion having a pattern area ratio higher than that of the first transfer electrode portion. The first transfer electrode portion includes a plurality of first transfer electrodes having a single-layer structure of metal material. The second transfer electrode portion includes a plurality of second transfer electrodes having a single-layer structure of polycrystalline silicon or amorphous silicon.Type: GrantFiled: November 4, 2009Date of Patent: August 21, 2012Assignee: Sony CorporationInventors: Kaori Takimoto, Masayuki Okada, Takeshi Takeda
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Patent number: 8203156Abstract: A light-emitting diode structure includes a base with a recessed portion, a light-emitting chip and a light-transmissive block. The light-emitting chip disposed in the recessed portion of the base and emits a light beam. The light-transmissive block disposed on the base covers the recessed portion and the light-emitting chip, so that the light beam emitted from the light-emitting chip is radiated outwardly via the light-transmissive block. The light-transmissive block is a flat-top multilateral cone including a bottom surface, a top surface, and several side surfaces connected to and located between the bottom surface and the top surface. A slot with a bottom portion is formed on the top surface of the light-transmissive block.Type: GrantFiled: May 5, 2010Date of Patent: June 19, 2012Assignee: Everlight Electronics Co., Ltd.Inventor: Kuan-Yu Chen
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Patent number: 8178914Abstract: A method for fabricating a back-illuminated semiconductor imaging device on a semiconductor-on-insulator substrate is disclosed. The substrate includes an insulator layer and an epitaxial layer overlying the insulator layer. A bond pad region is formed extending into the epitaxial layer to a surface of the insulator layer. A bond pad is fabricated partially overlying the bond pad region. At least one imaging component is fabricated partially overlying and extending into the epitaxial layer. A passivation layer is fabricated overlying the epitaxial layer, the bond pad, and the at least one imaging component. A handle wafer is bonded to the passivation layer. A portion of the insulator layer and a portion of the bond pad region is etched to expose a portion of the bond pad.Type: GrantFiled: October 15, 2009Date of Patent: May 15, 2012Assignee: SRI InternationalInventors: Peter Alan Levine, Pradyumna Kumar Swain, Mahalingam Bhaskaran
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Patent number: 8148739Abstract: An LED package structure includes a heatsink slug, a positive-electrode frame, a negative-electrode frame, and an LED module electrically connected with the positive-electrode frame and the negative-electrode frame. The LED module includes a plurality of LED chips. The heatsink slug is provided, at its surface, with a plurality of cup-like recesses. The plural LED chips are each bonded, correspondingly, on a plane in the cup-like recess. Each of the LED chips is covered with a fluorescent colloidal layer having a curved and convex contour. As a result, a specific proportion for the color lights emitted from all the LED chips and from the fluorescent material in every direction of a space can be maintained, and that a better spatial color uniformity can be achieved.Type: GrantFiled: May 5, 2010Date of Patent: April 3, 2012Assignee: Forward Electronics Co., Ltd.Inventors: Pei-Hsuan Lan, Yu-Bing Lan
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Patent number: 8114696Abstract: Provided is a CMOS image sensor with an asymmetric well structure of a source follower. The CMOS image sensor includes: a well disposed in an active region of a substrate; a drive transistor having one terminal connected to a power voltage and a first gate electrode disposed to cross the well; and a select transistor having a drain-source junction between another terminal of the drive transistor and an output node, and a second gate electrode disposed in parallel to the drive transistor. A drain region of the drive transistor and a source region of the select transistor are asymmetrically arranged.Type: GrantFiled: December 16, 2010Date of Patent: February 14, 2012Assignee: Intellectual Ventures II LLCInventor: Hee-Jeong Hong
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Patent number: 8021908Abstract: A method and apparatus for operating an imager pixel that includes the act of applying a relatively small first polarity voltage and a plurality of pulses of a second polarity voltage on the gate of a transfer transistor during a charge integration period.Type: GrantFiled: November 10, 2010Date of Patent: September 20, 2011Assignee: Micron Technology, Inc.Inventor: John Ladd
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Patent number: 7972885Abstract: This invention relates to imaging device and its related transferring technologies to independent substrate able to attain significant broadband capability covering the wavelengths from ultra-violet (UV) to long-Infrared. More particularly, this invention is related to the broadband image sensor (along with its manufacturing technologies), which can detect the light wavelengths ranges from as low as UV to the wavelengths as high as 20 ?m covering the most of the wavelengths using of the single monolithic image sensor on the single wafer. This invention is also related to the integrated circuit and the bonding technologies of the image sensor to standard integrated circuit for multicolor imaging, sensing, and advanced communication. Our innovative approach utilizes surface structure having more than micro-nano-scaled 3-dimensional (3-D) blocks which can provide broad spectral response.Type: GrantFiled: September 24, 2009Date of Patent: July 5, 2011Assignee: Banpil Photonics, Inc.Inventors: Achyut Kumar Dutta, Robert Allen Olah
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Patent number: 7956393Abstract: A composition for a photoresist stripper and a method of fabricating a thin film transistor array substrate are provided according to one or more embodiments. In one or more embodiments, the composition includes about 5-30 weight % of a chain amine compound, about 0.5-10 weight % of a cyclic amine compound, about 10-80 weight % of a glycol ether compound, about 5-30 weight % of distilled water, and about 0.1-5 weight % of a corrosion inhibitor.Type: GrantFiled: September 21, 2009Date of Patent: June 7, 2011Assignee: Samsung Electronics Co., Ltd.Inventors: Jong-Hyun Choung, Bong-Kyun Kim, Hong-Sick Park, Sun-Young Hong, Young-Joo Choi, Byeong-Jin Lee, Nam-Seok Suh, Byung-Uk Kim, Suk-Il Yoon, Jong-Hyun Jeong, Sung-Gun Shin, Soon-Beom Huh, Se-Hwan Jung, Doo-Young Jang, Sun-Joo Park, Oh-Hwan Kweon
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Patent number: 7951725Abstract: A translucent solar cell and a manufacturing method thereof are provided. The translucent solar cell at least includes a substrate, a front electrode layer, a photoconductive layer, and a back electrode layer stacked in order. Therein, a plurality of apertures are formed on the front electrode layer. In addition, a plurality of light-transmissive regions are formed on the back electrode layer and further extended in a depth direction so as to reach the plurality of apertures on the front electrode layer. Thus, the projected area of each light-transmissive region is within and smaller than that of the corresponding aperture.Type: GrantFiled: September 14, 2009Date of Patent: May 31, 2011Assignee: Nexpower Technology Corp.Inventors: Chun-Hsiung Lu, Chien-Chung Bi
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Patent number: 7935559Abstract: This method for producing a non-planar microelectronic component, especially a concave component, involves superposing a layer that contains an active flexible circuit above a cavity shaped according to the desired profile of said component, said cavity being formed in substrate; and applying a pressure difference either side of said layer thereby causing slumping of the flexible circuit into the cavity therefore causing the circuit to assume the shape of the cavity. Superposition of the flexible circuit and the cavity is realized by filling the cavity with a material capable of being selectively removed relative to the substrate and the flexible circuit; then fitting or forming the flexible circuit on the cavity thus filled; then forming at least one feedthrough to access the filled cavity; and by selectively etching the material that fills the cavity via at least one feedthrough in order to remove said material.Type: GrantFiled: October 27, 2010Date of Patent: May 3, 2011Assignee: Commissariat a l'Energie Atomique et aux Energies AlternativesInventors: Benoît Giffard, Yvon Cazaux, Norbert Moussy
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Patent number: 7851798Abstract: A method and apparatus for operating an imager pixel that includes the act of applying a relatively small first polarity voltage and a plurality of pulses of a second polarity voltage on the gate of a transfer transistor during a charge integration period.Type: GrantFiled: May 4, 2005Date of Patent: December 14, 2010Assignee: Micron Technology, Inc.Inventor: John Ladd
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Patent number: 7838402Abstract: A method of manufacturing an electronic apparatus having a resist pattern provided over a substrate provided with a thin film transistor, the method includes the steps of forming by application a resist film over the substrate in the state of covering the thin film transistor, forming a resist pattern by subjecting the resist film to exposure to light and a developing treatment, and irradiating the resist pattern with at least one of ultraviolet light and visible light in a dry atmosphere in the condition where a channel part of the thin film transistor is prevented from being irradiated with light having a wavelength of shorter than 260 nm, wherein a step of heat curing the resist pattern is conducted after the irradiation with at least one of ultraviolet light and visible light.Type: GrantFiled: November 21, 2008Date of Patent: November 23, 2010Assignee: Sony CorporationInventors: Koichi Nagasawa, Takashi Yamaguchi, Nobutaka Ozaki, Yasuhiro Kanaya, Hirohisa Takeda, Yasuo Mikami, Yoshifumi Mutoh
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Patent number: 7833845Abstract: An object is to provide a manufacturing method of a microcrystalline semiconductor film with favorable quality over a large-area substrate. After forming a gate insulating film over a gate electrode, in order to improve quality of a microcrystalline semiconductor film formed in an initial stage, glow discharge plasma is generated by supplying high-frequency powers with different frequencies, and a lower part of the film near an interface with the gate insulating film is formed under a first film formation condition, which is low in film formation rate but results in a good quality film. Thereafter, an upper part of the film is deposited under a second film formation condition with higher film formation rate, and further, a buffer layer is stacked on the microcrystalline semiconductor film.Type: GrantFiled: August 12, 2008Date of Patent: November 16, 2010Assignee: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Sachiaki Teduka, Satoshi Toriumi, Makoto Furuno, Yasuhiro Jinbo, Koji Dairiki, Hideaki Kuwabara
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Patent number: 7754557Abstract: A method for manufacturing a vertical CMOS image sensor related to a semiconductor device is disclosed. A high-temperature double annealing process and/or an additional passivation nitride film are selectively applied in order to improve dark leakage characteristics and also to prevent or reduce an incidence of circular defects, thereby enhancing the quality and reliability of the vertical CMOS image sensor.Type: GrantFiled: June 25, 2008Date of Patent: July 13, 2010Assignee: Dongbu HiTek Co., Ltd.Inventor: Jeong Su Park
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Patent number: 7749831Abstract: Methods for fabricating CMOS image sensor devices are provided, wherein active pixel sensors are constructed with non-planar transistors having vertical gate electrodes and channels, which minimize the effects of image lag and dark current.Type: GrantFiled: March 6, 2008Date of Patent: July 6, 2010Assignee: Samsung Electronics Co., Ltd.Inventor: Jeong Ho Lyu
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Patent number: 7696020Abstract: A process of fabricating a thin film semiconductor device is proposed, which is suitable for mass production and enables to lower the production cost. A first substrate is subject to anodization to form a porous layer thereon. Then, a thin film semiconductor layer is formed on the porous layer. Using the thin film semiconductor layer, a semiconductor device is formed, and wiring is formed between the semiconductor devices. After that, the semiconductor devices on the first substrate is bonded to a second substrate. The semiconductor devices are separated from the first substrate. Further, the semiconductor devices are electrically insulated by removing a part of the thin film semiconductor layer from the separated surface of the second substrate.Type: GrantFiled: August 22, 2006Date of Patent: April 13, 2010Assignee: Sony CorporationInventor: Hiroshi Tayanaka
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Patent number: 7683409Abstract: An image sensor including a second line formed at an upper part of a photodiode region as a transparent electrode for passing light. The second line is composed of a polymeric material having transparency and conductivity.Type: GrantFiled: April 20, 2008Date of Patent: March 23, 2010Assignee: Dongbu HiTek Co., Ltd.Inventor: Ji-Ho Hong
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Patent number: 7671367Abstract: A liquid crystal display device and a fabricating method thereof for simplifying a process and improving an aperture ratio are disclosed, including forming a first mask pattern group including a gate line, a gate electrode and a common line; forming a second mask pattern group including a semiconductor pattern and a source/drain pattern having a data line, a source electrode and a drain electrode overlapped thereon on the gate insulating film using a second mask; and forming a third mask pattern group including and a pixel electrode making an interface with the protective film in the pixel hole to be connected to the drain electrode, thereby forming a horizontal electric field with the common electrode, using a third mask.Type: GrantFiled: February 5, 2008Date of Patent: March 2, 2010Assignee: LG Display Co., Ltd.Inventor: Byung Chul Ahn
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Patent number: 7622342Abstract: A method for fabricating a back-illuminated semiconductor imaging device on a semiconductor-on-insulator substrate, and resulting imaging device is disclosed. A substrate which includes an insulator layer and an epitaxial layer substantially overlying the insulator layer is provided. At least one bond pad region is formed extending into the epitaxial layer to a surface of the insulator layer. At least one bond pad is fabricated at least partially overlying the at least one bond pad region. At least one imaging component is fabricated at least partially overlying and extending into the epitaxial layer. A passivation layer is fabricated substantially overlying the epitaxial layer, the at least one bond pad, and the at least one imaging component. A handle wafer is bonded to the passivation layer. The at least a portion of the insulator layer and at least a portion of the bond pad region is etched to expose at least a portion of the at least one bond pad.Type: GrantFiled: January 28, 2008Date of Patent: November 24, 2009Assignee: Sarnoff CorporationInventors: Pradyumna Kumar Swain, Mahalingam Bhaskaran, Peter Levine
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Patent number: 7557390Abstract: A solid image capturing element comprising a plurality of vertical shift registers arranged to each correspond to a column of a plurality of light receiving pixels in a matrix arrangement, a horizontal shift register provided on an output side of the plurality of vertical shift registers, and an output section provided on an output side of the horizontal shift register. In this solid image capturing element, a reverse conductive semiconductor region is formed over one major surface of one conductive semiconductor substrate, the plurality of light receiving pixels, the plurality of vertical shift registers, the horizontal shift register, and the output section are formed in the semiconductor region, and a portion of the semiconductor region where the output section is formed has a higher dopant concentration than the portion of the semiconductor region where the horizontal shift register is formed.Type: GrantFiled: October 17, 2003Date of Patent: July 7, 2009Assignee: Sanyo Electric co., Ltd.Inventors: Yoshihiro Okada, Yuzo Otsuru
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Patent number: 7553710Abstract: The present invention provides a photoresist stripper including about 5 wt % to about 20 wt % alcohol amine, about 40 wt % to about 70 wt % glycol ether, about 20 wt % to about 40 wt % N-methyl pyrrolidone, and about 0.2 wt % to about 6 wt % chelating agent.Type: GrantFiled: October 17, 2007Date of Patent: June 30, 2009Assignee: Samsung Electronics Co., Ltd.Inventors: Hong-Sick Park, Jong-Hyun Jeong, Suk-Il Yoon, Seong-Bae Kim, Wy-Yong Kim, Soon-Beom Huh, Byung-Uk Kim
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Patent number: 7488629Abstract: A method for fabricating an active-matrix organic electroluminescent (OEL) display panel is described. A transparent conductive layer is formed on a substrate as a common anode for all organic light emitting diodes (OLED), and a passivation layer is formed on the transparent conductive layer. Thin film transistors are formed on the passivation layer to serve as an active matrix, and openings are formed in the passivation layer to expose portions of the transparent conductive layer and define pixel regions. An organic function layer is formed in each opening, and a metal electrode layer is formed on each organic function layer, wherein the metal electrode layer is electrically connected with the drain of the corresponding thin film transistor.Type: GrantFiled: October 20, 2006Date of Patent: February 10, 2009Assignee: Au Optronics CorporationInventor: Chiao-Ju Lin
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Patent number: 7485906Abstract: Disclosed is an ordered microelectronic fabrication sequence in which color filters are formed by conformal deposition directly onto a photodetector array of a CCD, CID, or CMOS imaging device to create a concave-up pixel surface, and, overlayed with a high transmittance planarizing film of specified index of refraction and physical properties which optimize light collection to the photodiode without additional conventional microlenses. The optically flat top surface serves to encapsulate and protect the imager from chemical and thermal cleaning treatment damage, minimizes topographical underlayer variations which would aberrate or cause reflection losses of images formed on non-planar surfaces, and, obviates residual particle inclusions induced during dicing and packaging. A CCD imager is formed by photolithographically patterning a planar-array of photodiodes on a semiconductor substrate. The photodiode array is provided with metal photoshields, passivated, and, color filters are formed thereon.Type: GrantFiled: December 20, 2006Date of Patent: February 3, 2009Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yang-Tung Fan, Chiou-Shian Peng, Cheng-Yu Chu, Shih-Jane Lin, Yen-Ming Chen, Fu-Jier Fan, Kuo-Wei Lin
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Patent number: 7416908Abstract: A method for fabricating a micro structure includes depositing a first layer of a first material over a substrate; patterning a first hard mask over the first layer; depositing a second layer of a second material over the first layer and the first hard mask; patterning a second hard mask over the second layer; and selectively removing the first material and the second material not covered by any of the first mask and the second mask to produce over the substrate the micro structure having a first structure portion having a first height and a second structure portion having a second height.Type: GrantFiled: May 10, 2006Date of Patent: August 26, 2008Assignee: Spatial Photonics, Inc.Inventors: Chii Guang Lee, Shaoher X. Pan, Hung Kwei Hu
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Patent number: 7364960Abstract: Methods for fabricating CMOS image sensor devices are provided, wherein active pixel sensors are constructed with non-planar transistors having vertical gate electrodes and channels, which minimize the effects of image lag and dark current.Type: GrantFiled: August 25, 2005Date of Patent: April 29, 2008Assignee: Samsung Electronics Co., Ltd.Inventor: Jeong Ho Lyu
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Patent number: 7253092Abstract: Disclosed herein is a method of making integrated circuits. In one embodiment the method includes forming tungsten plugs in the integrated circuit and forming electrically conductive interconnect lines in the integrated circuit after formation of the tungsten plugs. At least one tungsten plug is electrically connected to at least one electrically conductive interconnect line. Thereafter at least one electrically conductive interconnect line is contacted with water for a period of time less than 120 minutes.Type: GrantFiled: June 24, 2003Date of Patent: August 7, 2007Assignee: NEC Electronics America, Inc.Inventors: Elizabeth A. Dauch, John W. Jacobs
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Patent number: 7233038Abstract: A method of implanting, for example, a phosphorous plug over a charge collection region and a method of forming a contact over the phosphorous plug implant and charge collection region. The method allows implantation of phosphorous or other materials without contamination of other contact regions. The method further allows implantation of a material with only one step and without an extra masking step.Type: GrantFiled: March 4, 2005Date of Patent: June 19, 2007Assignee: Micron Technology, Inc.Inventor: Brent A. McClure
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Patent number: 7125740Abstract: A method of fabricating a solid-state image pickup device comprising forming mask patterns corresponding to patterns of first and third transfer electrodes, which are to be alternately arranged in each vertical transfer register formation region and which are to extend in parallel to each other between light receiving portions adjacent to each other in the vertical direction, on a first electrode material layer. The method also includes forming side walls on each of the mask patterns. The method further includes patterning the first electrode material layer via the mask patterns having the side walls, to form first and third transfer electrodes formed by the first layer.Type: GrantFiled: July 12, 2004Date of Patent: October 24, 2006Assignee: Sony CorporationInventors: Junji Yamane, Kunihiko Hikichi