Antiparallel Diode (epo) Patents (Class 257/E29.22)
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Patent number: 11961787Abstract: A semiconductor device with a sidewall interconnection structure and a method for manufacturing the same, and an electronic apparatus including the semiconductor device are provided. According to embodiments, the semiconductor device includes: a vertical stack including a plurality of element layers, wherein each element layer of the plurality of element layers includes a plurality of semiconductor elements and a metallization layer for the plurality of semiconductor elements; and an interconnection structure laterally adjoined the vertical stack. The interconnection structure includes: an electrical isolation layer; and a conductive structure in the electrical isolation layer, wherein at least a part of a conductive structure in the metallization layer of the each element layer is in contact with and electrically connected to the conductive structure at a corresponding height in the interconnection structure in a lateral direction.Type: GrantFiled: December 8, 2021Date of Patent: April 16, 2024Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventor: Huilong Zhu
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Patent number: 11810902Abstract: A semiconductor device, a method of manufacturing the semiconductor device, and an electronic apparatus including the semiconductor device are provided. The semiconductor device may include: a plurality of element stacks, wherein each element stack includes a plurality of stacked layers of semiconductor elements, each semiconductor element includes a gate electrode and source/drain regions on opposite sides of the gate electrode; and an interconnection structure between the plurality of element stacks. The interconnection structure includes an electrical isolation layer, and a conductive structure in the electrical isolation layer. At least one of the gate electrode and the source/drain regions of each of at least a part of the semiconductor elements is in contact with and therefore electrically connected to the conductive structure of the interconnection structure at a corresponding height in a lateral direction.Type: GrantFiled: December 10, 2021Date of Patent: November 7, 2023Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventor: Huilong Zhu
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Patent number: 11749650Abstract: A method of manufacturing a semiconductor device includes: providing an element stack on a carrier substrate; forming an interconnection structure connecting the element stack laterally in an area on the carrier substrate adjacent to the element stack, wherein the interconnection structure includes an electrical isolation layer and a conductive structure in the electrical isolation layer; and controlling a height of the conductive structure in the interconnection structure, so that at least a part of components to be electrically connected in the element stack are in contact and therefore electrically connected to the conductive structure at the corresponding height. Forming the conductive structure includes: forming a conductive material layer in the area; forming a mask layer covering the conductive material layer; patterning the mask layer into a pattern corresponding to the conductive structure; and using the mask layer as an etching mask to selectively etch the conductive material layer.Type: GrantFiled: December 10, 2021Date of Patent: September 5, 2023Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCESInventor: Huilong Zhu
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Patent number: 8969930Abstract: A gate stack structure comprises an isolation dielectric layer formed on and embedded into a gate. A sidewall spacer covers opposite side faces of the isolation dielectric layer, and the isolation dielectric layer located on an active region is thicker than the isolation dielectric layer located on a connection region. A method for manufacturing the gate stack structure comprises removing part of the gate in thickness, the thickness of the removed part of the gate on the active region is greater than the thickness of the removed part of the gate on the connection region so as to expose opposite inner walls of the sidewall spacer; forming an isolation dielectric layer on the gate to cover the exposed inner walls. There is also provided a semiconductor device and a method for manufacturing the same. The methods can reduce the possibility of short-circuit occurring between the gate and the second contact hole and can be compatible with the dual-contact-hole process.Type: GrantFiled: April 6, 2011Date of Patent: March 3, 2015Assignee: Institute of Microelectronics, Chinese Academy of SciencesInventors: Haizhoou Yin, Zhijiong Luo, Huilong Zhu
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Patent number: 8564097Abstract: An insulated gate bipolar transistor (IGBT) is provided comprising a semiconductor substrate having the following regions in sequence: (i) a first region of a first conductive type having opposing surfaces, a column region of a second conductive type within the first region extending from a first of said opposing surfaces; (ii) a drift region of the second conductive type; (iii) a second region of the first conductive type, and (iv) a third region of the second conductive type. There is provided a gate electrode disposed to form a channel between the third region and the drift region, a first electrode operatively connected to the second region and the third region, a second electrode operatively connected to the first region and the column region.Type: GrantFiled: April 15, 2010Date of Patent: October 22, 2013Assignee: Sinopower Semiconductor, Inc.Inventors: Florin Udrea, Chih-Wei Hsu, Wei-Chieh Lin
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Patent number: 8334179Abstract: A semiconductor system is described, which is made up of a highly n-doped silicon substrate and a first n-silicon epitaxial layer, which is directly contiguous to the highly n-doped silicon substrate, and having a p-doped SiGe layer, which is contiguous to a second n-doped silicon epitaxial layer and forms a heterojunction diode, which is situated above the first n-doped silicon epitaxial layer and in which the pn-junction is situated within the p-doped SiGe layer. The first n-silicon epitaxial layer has a higher doping concentration than the second n-silicon epitaxial layer. Situated between the two n-doped epitaxial layers is at least one p-doped emitter trough, which forms a buried emitter, a pn-junction both to the first n-doped silicon epitaxial layer and also to the second n-doped silicon epitaxial layer being formed, and the at least one emitter trough being completely enclosed by the two epitaxial layers.Type: GrantFiled: September 17, 2008Date of Patent: December 18, 2012Assignee: Robert Bosch GmbHInventors: Ning Qu, Alfred Goerlach
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Patent number: 7342282Abstract: A semiconductor device and method for electrostatic discharge protection. The semiconductor device includes a first semiconductor controlled rectifier and a second semiconductor controlled rectifier. The first semiconductor controlled rectifier includes a first semiconductor region and a second semiconductor region, and the second semiconductor controlled rectifier includes the first semiconductor region and the second semiconductor region. The first semiconductor region is associated with a first doping type, and the second semiconductor region is associated with a second doping type different from the first doping type. The second semiconductor region is located directly on an insulating layer.Type: GrantFiled: September 10, 2004Date of Patent: March 11, 2008Assignee: Altera CorporationInventors: Hugh Sungki O, Chih-Ching Shih, Cheng-Hsiung Huang, Yow-Juang Liu