Abstract: A high-voltage MOS transistor has a semiconductor substrate formed with a first well of a first conductivity type in which a drain region and a drift region are formed and a second well of a second, opposite conductivity type in which a source region and a channel region are formed, a gate electrode extends over the substrate from the second well to the first well via a gate insulation film, wherein there is formed a buried insulation film in the drift region underneath the gate insulation film at a drain edge of the gate electrode, there being formed an offset region in the semiconductor substrate between the channel region and the buried insulation film, wherein the resistance of the offset region is reduced in a surface part thereof by being introduced with an impurity element of the first conductivity type with a concentration exceeding the first well.

Abstract: A semiconductor device and a method for manufacturing the same are disclosed. The semiconductor device includes a substrate having a first conductor-type, a buried layer of a second conductor-type on the substrate, a drain, and a first guard-ring on one side of the drain, a second guard-ring on one side of the first guard-ring, and a third guard-ring on one side of the second guard-ring.

Abstract: A semiconductor device is disclosed. The semiconductor device includes a semiconductor substrate including a first source drain region, a second source drain region, and an intrinsic region therebetween; an asymmetric lightly doped drain (LDD) region within the substrate, wherein the asymmetric LDD region extends from the first source drain region into the intrinsic region between the first source drain region and the second source drain region; and a gate positioned atop the semiconductor substrate, wherein an outer edge of the gate overlaps the second source drain region. A related method and design structure are also disclosed.

Abstract: MOSFET devices for RF applications that use a trench-gate in place of the lateral gate conventionally used in lateral MOSFET devices. A trench-gate provides devices with a single, short channel for high frequency gain. Embodiments of the present invention provide devices with an asymmetric oxide in the trench gate, as well as LDD regions that lower the gate-drain capacitance for improved RF performance. Refinements to these TG-LDMOS devices include placing a source-shield conductor below the gate and placing two gates in a trench-gate region. These improve device high-frequency performance by decreasing gate-to-drain capacitance. Further refinements include adding a charge balance region to the LDD region and adding source-to-substrate or drain-to-substrate vias.

Abstract: A method forms a structure has a substrate having at least one semiconductor channel region, a gate dielectric on the upper surface of the substrate over the semiconductor channel region, and a gate conductor on the gate dielectric. Asymmetric sidewall spacers are located on the sidewalls of the gate conductor and asymmetric source and drain regions are located within the substrate adjacent the semiconductor channel region. One source/drain region is positioned closer to the midpoint of the gate conductor than is the other source/drain region. The source and drain regions comprise a material that induces physical stress upon the semiconductor channel region.

Abstract: A semiconductor device includes diffusion layers formed in a SOI layer under a side-wall, a channel formed between the diffusion layers, silicide layers sandwiching the diffusion layers wherein interface junctions between the diffusion layers and the silicide layers are (111) silicon planes.

Abstract: A semiconductor device and a method of manufacturing the same are disclosed. The method includes forming ion impurity regions of a first conductivity type by forming a trench in a semiconductor substrate and implanting impurity ions into a lower portion of the trench at different depths; forming an oxide region in the substrate adjacent to one end of the trench; forming a device isolation film filling the trench; forming a high voltage well in the substrate and a second conductivity type body in the high voltage well; forming a gate on the semiconductor substrate partially overlapping the device isolation film; forming second well in the semiconductor substrate at one side of the device isolation film overlapping the ion diffusion regions and the oxide region; and forming source regions in the body and a drain region in the second well.

Abstract: Semiconductor devices are provided including a gate across an active region of a substrate; a source region and a drain region in the active region on either side of the gate and spaced apart from each other; a main channel impurity region in the active region between the source and drain regions and having a first channel impurity concentration; and a lightly doped channel impurity region in the active region adjacent to the drain region. The lightly doped channel impurity region has the same conductivity type as the main channel impurity region and a second channel impurity concentration, lower than the first channel impurity concentration. The lightly doped channel impurity region and the main channel impurity region contain a first element. The lightly doped channel impurity region also contains a second element, which is a different Group element from the first element.

Abstract: Semiconductor transistor devices and related fabrication methods are provided. An exemplary transistor device includes a layer of semiconductor material having a channel region defined therein and a gate structure overlying the channel region. Recesses are formed in the layer of semiconductor material adjacent to the channel region, such that the recesses extend asymmetrically toward the channel region. The transistor device also includes stress-inducing semiconductor material formed in the recesses. The asymmetric profile of the stress-inducing semiconductor material enhances carrier mobility in a manner that does not exacerbate the short channel effect.

Abstract: A high-voltage metal-oxide-semiconductor (HVMOS) device having increased breakdown voltage and methods for forming the same are provided. The HVMOS device includes a semiconductor substrate; a gate dielectric on a surface of the semiconductor substrate; a gate electrode on the gate dielectric; a source/drain region adjacent and horizontally spaced apart from the gate electrode; and a recess in the semiconductor substrate and filled with a dielectric material. The recess is between the gate electrode and the source/drain region, and is horizontally spaced apart from the gate electrode.

Abstract: A method for forming a fin field effect transistor (finFET) device includes, forming a fin structure in a substrate, forming a gate stack structure perpendicular to the fin structure, and implanting ions in the substrate at an angle (?) to form a source region and a drain region in the substrate, wherein the angle (?) is oblique relative to the source region.

Abstract: Disclosed herein are improved fin-type field effect transistor (FinFET) structures and the associated methods of manufacturing the structures. In one embodiment FinFET drive current is optimized by configuring the FinFET asymmetrically to decrease fin resistance between the gate and the source region and to decrease capacitance between the gate and the drain region. In another embodiment device destruction at high voltages is prevented by ballasting the FinFET. Specifically, resistance is optimized in the fin between the gate and both the source and drain regions (e.g., by increasing fin length, by blocking source/drain implant from the fin, and by blocking silicide formation on the top surface of the fin) so that the FinFET is operable at a predetermined maximum voltage.

Abstract: A sinker layer is in contact with a first conductivity-type well, and is separated from a first conductivity-type collector layer and a second conductivity-type drift layer. A second conductivity-type diffusion layer (second second-conductivity-type high-concentration diffusion layer) is formed in the surface layer of the sinker layer. The second conductivity-type diffusion layer has a higher impurity concentration than that of the sinker layer. The second conductivity-type diffusion layer and the first conductivity-type collector layer are isolated from each other with an element isolation insulating film interposed therebetween.

Abstract: A Semiconductor device and method for fabricating the same are disclosed. The method includes implanting first conduction type impurities into a semiconductor substrate to form a first well, implanting second conduction type impurities into the first well to form a second well, implanting second conduction type impurities into the second well to form an impurity region, forming a gate on the semiconductor substrate, and implanting second conduction type impurities to form a drain region in the impurity region on one side of the gate.

Abstract: Embodiments of the invention provide an asymmetrical transistor device comprising a semiconductor substrate, a source region, a drain region and a channel region. The channel region is provided between the source and drain regions, the source, drain and channel regions being provided in the substrate. The device has a layer of a buried insulating medium provided below the source region and not below the drain region thereby forming an asymmetrical structure. The layer of buried insulating medium is provided in abutment with a lower surface of the source region.

Abstract: In one form a lateral MOSFET includes an active gate positioned laterally between a source region and a drain region, the drain region extending from an upper surface of a monocrystalline semiconductor body to a bottom surface of the monocrystalline semiconductor body, and a non-active gate positioned above the drain region. In another form the lateral MOSFET includes a gate positioned laterally between a source region and a drain region, the drain region extending from an upper surface of a monocrystalline semiconductor body to a bottom surface of the monocrystalline semiconductor body, the source region and the drain region being of a first conductivity type, a heavy body region of a second conductivity type in contact with and below the source region, and the drain region comprising a lightly doped drain (LDD) region proximate an edge of the gate and a sinker extending from the upper surface of the monocrystalline body to the bottom surface of the monocrystalline semiconductor body.

Abstract: The present invention discloses a SOI MOS device having BTS structure and manufacturing method thereof. The source region of the SOI MOS device comprises: two heavily doped N-type regions, a heavily doped P-type region formed between the two heavily doped N-type regions, a silicide formed above the heavily doped N-type regions and the heavily doped P-type region, and a shallow N-type region which is contact to the silicide; an ohmic contact is formed between the heavily doped P-type region and the silicide thereon to release the holes accumulated in body region of the SOI MOS device and eliminate floating body effects thereof without increasing the chip area and also overcome the disadvantages such as decreased effective channel width of the devices in the BTS structure of the prior art.

Abstract: In an embodiment, a semiconductor device is provided. The semiconductor device may include a first diffusion region, a second diffusion region an active region disposed between the first diffusion region and the second diffusion region, a control region disposed above the active region, a first trench isolation disposed laterally adjacent to the first diffusion region opposite to the active region, and a second trench isolation disposed between the second diffusion region and the active region. The second trench isolation may have a smaller depth than the first trench isolation.

Abstract: A semiconductor device and its method of manufacture are provided. Embodiments include forming a first doped region and a second doped region. The first and second doped regions may form a double diffused drain structure as in an HVMOS transistor. A gate-side boundary of the first doped region underlies part of the gate electrode. The second doped region is formed within the first doped region adjacent the gate electrode. A gate-side boundary of the second doped region is separated from a closest edge of a gate electrode spacer by a first distance. An isolation region-side boundary of the second doped region is separated from a closest edge of a nearest isolation region by a second distance.

Abstract: A method patterns pairs of semiconducting fins on an insulator layer and then patterns a linear gate conductor structure over and perpendicular to the fins. Next, the method patterns a mask on the insulator layer adjacent the fins such that sidewalls of the mask are parallel to the fins and are spaced from the fins a predetermined distance. The method performs an angled impurity implant into regions of the fins not protected by the gate conductor structure and the mask. This process forms impurity concentrations within the fins that are asymmetric and that mirror one another in adjacent pairs of fins.

Abstract: A semiconductor device including a low-concentration impurity region formed on the drain side of an n-type MIS transistor, in a non-self-aligned manner with respect to an end portion of the gate electrode. A high-concentration impurity region is placed with a specific offset from the gate electrode and a sidewall insulating film. The semiconductor device enables the drain breakdown voltage to be sufficient and the on-resistance to decrease. A silicide layer is also formed on the surface of the gate electrode, thereby achieving gate resistance reduction and high frequency characteristics improvement.

Abstract: The present invention relates to a heterojunction tunneling effect transistor (TFET), which comprises spaced apart source and drain regions with a channel region located therebetween and a gate stack located over the channel region. The drain region comprises a first semiconductor material and is doped with a first dopant species of a first conductivity type. The source region comprises a second, different semiconductor material and is doped with a second dopant species of a second, different conductivity type. The gate stack comprises at least a gate dielectric and a gate conductor. When the heterojunction TFET is an n-channel TFET, the drain region comprises n-doped silicon, while the source region comprises p-doped silicon germanium.

Abstract: A method of fabricating asymmetrical spacers, structures fabricated using asymmetrical spacers and an apparatus for fabricating asymmetrical spacers. The method includes: forming on a substrate, a structure having a top surface and opposite first and second sidewalls and having a longitudinal axis parallel to the sidewalls; forming a conformal layer on the top surface of the substrate, the top surface of the structure and the sidewalls of the structure; tilting the substrate about a longitudinal axis relative to a flux of reactive ions, the flux of reactive ions striking the conformal layer at acute angle; and exposing the conformal layer to the flux of reactive ions until the conformal layer is removed from the top surface of the structure and the top surface of the substrate leaving a first spacer on the first sidewall and a second spacer on the second sidewall, the first spacer thinner than the second spacer.

Abstract: A semiconductor structure includes a semiconductor substrate; a first high-voltage well (HVW) region of a first conductivity type overlying the semiconductor substrate; a second HVW region of a second conductivity type opposite the first conductivity type overlying the substrate and laterally adjoining the first HVW region; a gate dielectric extending from over the first HVW region to over the second HVW region; a gate electrode on the gate dielectric; a drain region in the second HVW region; a source region at an opposite side of the gate dielectric than the drain region; and a deep well region of the first conductivity type underlying the second HVW region. Substantially no deep well region is formed directly underlying the drain region.

Abstract: A LDMOS device for an ESD protection circuit is provided. The LDMOS device includes a substrate of a first conductivity type, a deep well region of a second conductivity type, a body region of the first conductivity type, first and second doped regions of the second conductivity type, and a gate electrode. The deep well region is disposed in the substrate. The body region and the first doped region are respectively disposed in the deep well region. The second doped region is disposed in the body region. The gate electrode is disposed on the deep well region between the first and second doped regions. It is noted that the body region does not include a doped region of the first conductivity type having a different doped concentration from the body region.

Abstract: A method forms a structure has a substrate having at least one semiconductor channel region, a gate dielectric on the upper surface of the substrate over the semiconductor channel region, and a gate conductor on the gate dielectric. Asymmetric sidewall spacers are located on the sidewalls of the gate conductor and asymmetric source and drain regions are located within the substrate adjacent the semiconductor channel region. One source/drain region is positioned closer to the midpoint of the gate conductor than is the other source/drain region. The source and drain regions comprise a material that induces physical stress upon the semiconductor channel region.

Abstract: A method of fabricating a semiconductor device includes forming in the substrate a well region comprising a first type of dopant; forming in the well region a base region comprising a second type of dopant different from the first type of dopant; and forming in the substrate source and drain regions comprising the first type of dopant. The method further includes forming on the substrate a gate electrode interposed laterally between the source and drain regions; and forming on the substrate a gate spacer disposed laterally between the source region and the gate electrode adjacent a side of the gate electrode and having a conductive feature embedded therein. The well region surrounds the drain region and the base region, and the base region is disposed partially underlying the gate electrode surrounding the source region defining a channel under the gate electrode of having a length substantially less than half the length of the gate electrode.

Abstract: A semiconductor device including a well region formed in a silicon substrate; a trench exposing a predetermined portion of the uppermost surface of the semiconductor substrate; a body layer formed in the semiconductor substrate at the trench; a device isolation layer formed in the well region; a gate insulating layer formed in the trench over the body layer; a gate electrode formed in the trench over the gate insulating layer and against the device isolation layer; a lightly doped drain region formed in the body layer; an insulating layer formed in the trench over the lightly doped drain region; a source region formed in the body layer; a drain region formed in the well region against the device isolation layer; and a body region formed in the body layer against the source region. The on-resistance can be reduced by forming the gate and source beneath the device isolating layer.

Abstract: A short channel Lateral MOSFET (LMOS) and method are disclosed with interpenetrating drain-body protrusions (IDBP) for reducing channel-on resistance while maintaining high punch-through voltage. The LMOS includes lower device bulk layer; upper source and upper drain region both located atop lower device bulk layer; both upper source and upper drain region are in contact with an intervening upper body region atop lower device bulk layer; both upper drain and upper body region are shaped to form a drain-body interface; the drain-body interface has an IDBP structure with a surface drain protrusion lying atop a buried body protrusion while revealing a top body surface area of the upper body region; gate oxide-gate electrode bi-layer disposed atop the upper body region forming an LMOS with a short channel length defined by the horizontal length of the top body surface area delineated between the upper source region and the upper drain region.

Abstract: A semiconductor device having an EDMOS transistor and a method for forming the same are provided. The semiconductor device includes source and drain regions formed separately in a semiconductor substrate, a first gate insulating layer filling a trench formed in the substrate between the source and drain regions, the first gate insulating layer being adjacent to the drain region and separated from the source region, a second gate insulating layer formed over the substrate between the first gate insulating layer and the source region, the second gate insulating layer being thinner than the first gate insulating layer, a gate electrode formed over the first and second gate insulating layers, and a doped drift region formed in the substrate under the first gate insulating layer, the doped drift region being in contact with the drain region. This reduces the planar area of the EDMOS transistor, thereby achieving highly integrated semiconductor devices.

Abstract: A drain-extended field effect transistor includes a drain contact region and a drain extension region. The drain-extended field effect transistor further includes an electrostatic discharge protection region that is electrically connected between the drain contact region and the drain extension region to protect the drain-extended field effect transistor against electrostatic discharge. The electrostatic discharge protection region has a dopant concentration level such that in case of an electrostatic discharge event, a base push-out is prevented from reaching the drain contact region.

Abstract: According to one embodiment of the present invention, a method of forming a semiconductor device is provided, the method including: forming a substrate; forming a first gate on the substrate; forming a mask layer on the substrate, the mask layer including a first window covering an area within which the first gate is formed so that the first gate divides the substrate exposed by the first window into a first region and a second region; and doping the exposed substrate using rays inclined with respect to the substrate top surface, where the position of the first gate with respect to a border of the first window is chosen such that the inclined doping rays impinge more on the first region than on the second region.

Abstract: A method for forming a field effect transistor (FET) device includes forming a gate conductor over a semiconductor substrate; forming a source region, the source region having a source extension that overlaps and extends under the gate conductor; and forming a drain region, the drain region having a drain extension that overlaps and extends under the gate conductor at selected locations along the width of the gate; and the drain region further comprising a plurality of recessed areas corresponding to areas where the drain extension does not overlap and extend under the gate conductor, wherein the plurality of recessed areas is formed only in the drain region.

Abstract: Semiconductor devices and methods for fabricating the same are disclosed. The semiconductor device includes gate electrodes having sidewall spacers on a semiconductor substrate, double diffusion drain regions in the semiconductor substrate adjacent to the sidewall spacers, double diffusion junction regions aligned with the gate electrodes, and source/drain regions in the double diffusion junction regions.

Abstract: A method of manufacturing a nonvolatile memory (NVM) device having a memory gate and a selection gate. A method of manufacturing a NVM device may include a spacer poly formed on and/or over a surface of a substrate including a memory gate. A method of manufacturing a NVM device may include a sacrificing film formed on and/or over a surface of a spacer poly. A method of manufacturing a NVM device may include an etch-back process performed to form a selection gate. The thickness of a memory gate may be minimized. A bridge between a selection gate and a source/drain may be minimized.

Abstract: The present invention discloses a semiconductor device with an asymmetric channel extension structure capable of storing charges, improving gate oxide reliability, reducing parasitic capacitance and adjusting its channel extension current or turn-on resistance. A gate dielectric is formed on the semiconductor substrate. A gate is formed on the gate dielectric. A first isolation layer is formed over the sidewall of the gate. Dielectric spacers are formed on the sidewall of the first isolation layer. And at least one of the p-n junctions of source and drain regions is formed under the dielectric spacers. A fringing field induced extension region formed adjacent to asymmetric channel under gate dielectric and close to at least one of said doped regions. A threshold voltage adjustment implantation region formed under gate dielectric An anti-punch-through implantation region formed under threshold voltage adjustment implantation region.

Abstract: Disclosed herein is a semiconductor device, including: a gate electrode formed on a semiconductor substrate through a gate insulating film; an extension region formed in the semiconductor substrate on a source side of the gate electrode; a source region formed in the semiconductor substrate on the source side of the gate electrode through the extension region; an LDD region formed in the semiconductor substrate on a drain side of the gate electrode; and a drain region formed in the semiconductor substrate on the drain side of the gate electrode through the LDD region; wherein the extension region is formed at a higher concentration than that of the LDD region so as to be shallower than the LDD region.

Abstract: A field effect transistor (FET) device includes a gate conductor formed over a semiconductor substrate, a source region having a source extension that overlaps and extends under the gate conductor, and a drain region having a drain extension that overlaps and extends under the gate conductor only at selected locations along the width of the gate conductor.

Abstract: Methods and systems for monolithically fabricating a lateral double-diffused MOSFET (LDMOS) transistor having a source, drain, and a gate on a substrate, with a process flow that is compatible with a CMOS process flow are described.

Abstract: Sidewall spacers on the gate of a MOS device are formed from stressed material so as to provide strain in the channel region of the MOS device that enhances carrier mobility. In a particular embodiment, the MOS device is in a CMOS cell that includes a second MOS device. The first MOS device has sidewall spacers having a first (e.g., tensile) type of residual mechanical stress, and the second MOS device has sidewall spacers having a second (e.g., compressive) type of residual mechanical stress. Thus, carrier mobility is enhanced in both the PMOS portion and in the NMOS portion of the CMOS cell.

Abstract: In an extended drain MOS device used in high voltage applications, switching characteristics are improved by providing for at least one base contact in the active region in the extended drain space.

Abstract: A MOS type semiconductor device, in which both improvement in radiation resistance and increase in withstand voltage is achieved, includes a nitride film formed on a LOCOS film and a PBSG film formed on the nitride film. The refractive index of the nitride film is set in a range of from 2.0 to 2.1 and the thickness of the nitride film is set in a range of from 0.1 Am to 0.5 ?m to thereby provide the nitride film as a semi-insulative thin film. Of electron-hole pairs produced in the LOCOS film by ?-ray irradiation, holes low in mobility are let away to a source electrode via the nitride film to thereby suppress the amount of plus fixed electric charges stored in the LOCOS film. The provision of such a three-layer structure permits improvement in radiation resistance and increase in withstand voltage.

Abstract: A transistor has a source that includes a first impurity region with a first volume and a first surface area on a surface of the transistor. The transistor also has a drain that includes a second impurity region with a second volume and a second surface area on a surface of the transistor, a third impurity region with a third volume that overlaps and extends deeper than the second volume of the second impurity region, and a fourth impurity region with a fourth volume and a third surface area. The third surface area is located in the second surface area of the second impurity region. Additionally, the second and third impurity regions have a lower concentration of impurities than the fourth impurity region. The transistor also has a gate to control a depletion region between the source and the drain.

Abstract: A semiconductor structure having a surface layer disposed over a substrate, the surface layer including strained silicon. A contact layer is disposed over a portion of the surface layer, the contact layer including a metal-semiconductor alloy. A bottommost boundary of the contact layer is disposed above a bottommost boundary of the surface layer.

Abstract: A disposable structure displaced from an edge of a gate electrode and a drain region aligned to the disposable structure is formed. Thus, the drain region is self-aligned to the edge of the gate electrode. The disposable structure may be a disposable spacer, or alternately, the disposable structure may be formed simultaneously with, and comprise the same material as, a gate electrode. After formation of the drain regions, the disposable structure is removed. The self-alignment of the drain region to the edge of the gate electrode provides a substantially constant drift distance that is independent of any overlay variation of lithographic processes.

Abstract: A family of semiconductor devices is formed in a substrate that contains no epitaxial layer. In one embodiment the family includes a 5V CMOS pair, a 12V CMOS pair, a 5V NPN, a 5V PNP, several forms of a lateral trench MOSFET, and a 30V lateral N-channel DMOS. Each of the devices is extremely compact, both laterally and vertically, and can be fully isolated from all other devices in the substrate.

Abstract: A family of semiconductor devices is formed in a substrate that contains no epitaxial layer. In one embodiment the family includes a 5V CMOS pair, a 12V CMOS pair, a 5V NPN, a 5V PNP, several forms of a lateral trench MOSFET, and a 30V lateral N-channel DMOS. Each of the devices is extremely compact, both laterally and vertically, and can be fully isolated from all other devices in the substrate.

Abstract: A family of semiconductor devices is formed in a substrate that contains no epitaxial layer. In one embodiment the family includes a 5V CMOS pair, a 12V CMOS pair, a 5V NPN, a 5V PNP, several forms of a lateral trench MOSFET, and a 30V lateral N-channel DMOS. Each of the devices is extremely compact, both laterally and vertically, and can be fully isolated from all other devices in the substrate.

Abstract: A family of semiconductor devices is formed in a substrate that contains no epitaxial layer. In one embodiment the family includes a 5V CMOS pair, a 12V CMOS pair, a 5V NPN, a 5V PNP, several forms of a lateral trench MOSFET, and a 30V lateral N-channel DMOS. Each of the devices is extremely compact, both laterally and vertically, and can be fully isolated from all other devices in the substrate.

Abstract: An active region and an opposite conductivity active region are formed in a semiconductor substrate. The opposite conductivity active region is covered with a resist pattern. Impurities are implanted into a surface layer of the active region. An angle ?0 is defined as a tilt angle obtained by tilting a virtual plane perpendicular to the substrate and including an edge of the active region, toward the resist pattern by using as a fulcrum a point on the substrate nearest to the resist pattern, until the virtual plane contacts the resist pattern. The ion implantation is performed in a direction having a tilt angle larger than ?0 and allowing ions passed through the uppermost edge of the resist pattern to be incident upon an area between the resist pattern and the active region, and is not performed along a direction allowing the ions to be incident upon the active region.