Hi-lo Programming Levels Only (epo) Patents (Class 257/E29.302)
  • Patent number: 11937431
    Abstract: A semiconductor device includes a substrate having a first area and a second area and an active area limited by an isolation layer in the first area and the second area, a p-type gate electrode doped with p-type impurities and including a p-type lower gate layer and a p-type upper gate layer on the p-type lower gate layer with a first gate dielectric layer disposed between the active area and the p-type gate electrode in the first area, and an n-type gate electrode doped with n-type impurities and including an n-type lower gate layer and an n-type upper gate layer on the n-type lower gate layer with a second gate dielectric layer disposed between the active area and the n-type gate electrode in the second area.
    Type: Grant
    Filed: April 7, 2021
    Date of Patent: March 19, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventor: Sanghoon Lee
  • Patent number: 11853552
    Abstract: The hybrid memory device may include volatile and non-volatile memory cells on a single substrate, or die. The non-volatile memory cells may have ferroelectric capacitors and the volatile memory cells may have paraelectric or linear dielectric capacitors for their respective logic storage components. In some examples, the volatile memory cells may be used as a cache for the non-volatile memory cells. Or the non-volatile memory cells may be used as a back-up for the volatile memory cells. By placing both types of cells on a single die, rather than separate dies, various performance metrics may be improved, including those related to power consumption and operation speed.
    Type: Grant
    Filed: July 13, 2021
    Date of Patent: December 26, 2023
    Assignee: Micron Technology, Inc.
    Inventors: Kevin J. Ryan, Kirk D. Prall, Durai Vishak Nirmal Ramaswamy, Robert Quinn
  • Patent number: 11791406
    Abstract: A first gate wiring layer is a 2-layered structure in which a polysilicon wiring layer and a metal wiring layer containing aluminum are sequentially stacked. The polysilicon wiring layer and the metal wiring layer surround a periphery of an active region. In a portion of a periphery of the first gate wiring layer, the polysilicon wiring layer and the metal wiring layer contact each other via a contact hole of an interlayer insulating film and in remaining portions thereof, are electrically insulated from each other by the interlayer insulating film. The first gate wiring layer, in portion separate from a gate pad, is configured having relatively more of the metal wiring layer with a resistance value lower than that of the polysilicon wiring layer. The resistance value of the first gate wiring layer is adjusted to be relatively high in a portion near the gate pad, as compared to the portion separate from the gate pad.
    Type: Grant
    Filed: May 28, 2021
    Date of Patent: October 17, 2023
    Assignee: FUJI ELECTRIC CO., LTD.
    Inventor: Kenichi Ishii
  • Patent number: 11774402
    Abstract: According to various embodiments, there is provided a sensor device that includes: a substrate and two semiconductor structures. Each semiconductor structure includes a source region and a drain region at least partially disposed within the substrate, a channel region between the source region and the drain region, and a gate region. A first semiconductor structure of the two semiconductor structures further includes a sensing element electrically connected to the first gate structure. The sensing element is configured to receive a solution. The drain regions of the two semiconductor structures are electrically coupled. The source regions of the two semiconductor structures are also electrically coupled. A mobility of charge carriers of the channel region of a second semiconductor structure of the two semiconductor structures is lower than a mobility of charge carriers of the channel region of the first semiconductor structure.
    Type: Grant
    Filed: March 21, 2022
    Date of Patent: October 3, 2023
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Lanxiang Wang, Bin Liu, Eng Huat Toh, Shyue Seng Tan, Kiok Boone Elgin Quek
  • Patent number: 11769550
    Abstract: Methods, devices, arrays and systems for reducing standby power for a floating body memory array. One method includes counting bits of data before data enters the array, wherein the counting includes counting at least one of: a total number of bits at state 1 and a total number of all bits; a total number of bits at state 0 and the total number of all bits; or the total number of bits at state 1 and the total number of bits at state 0. This method further includes detecting whether the total number of bits at state 1 is greater than the total number of bits at state 0; setting an inversion bit when the total number of bits at state 1 is greater than the total number of bits at state 0; and inverting contents of all the bits of data before writing the bits of data to the memory array when the inversion bit has been set.
    Type: Grant
    Filed: May 4, 2022
    Date of Patent: September 26, 2023
    Assignee: Zeno Semiconductor, Inc.
    Inventors: Benjamin S. Louie, Yuniarto Widjaja
  • Patent number: 11735281
    Abstract: An analog content addressable memory (aCAM) that enables parallel searching of analog ranges of values and generates analog outputs that quantify matches between input data and stored data is disclosed. The input data can be compared with the stored data, and the input data can be determined to match the stored data based on a value associated with the input data being within a range associated with the stored data. The aCAM can generate an analog output that represents a number of matches and a number of mismatches between the input data and the stored data. Based on the analog output, whether the input data matches the stored data and a degree to which the input data matches the stored data can be determined.
    Type: Grant
    Filed: April 30, 2021
    Date of Patent: August 22, 2023
    Assignee: Hewlett Packard Enterprise Development LP
    Inventors: Catherine Graves, Can Li, John Paul Strachan
  • Patent number: 11676865
    Abstract: Semiconductor structures and fabrication methods thereof are provided. The method includes providing a substrate; forming a stacked material structure on the substrate; and forming trenches in the stacked material structure. Bottoms of the trenches are in the first material layer, the trenches are arranged along a first direction and form an initial stacked structure sequentially including an initial first layer, an initial second layer and an initial third layer. The method also includes etching the initial third layer to form transitional third layers arranged along a second direction perpendicular to the first direction; removing a portion of the initial first layer and a portion of the initial second layer of the initial stacked structure at two sides along the second direction to form a stacked structure including a first layer, a second layer and the transitional third layers; and forming a gate structure.
    Type: Grant
    Filed: April 29, 2021
    Date of Patent: June 13, 2023
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
    Inventors: Haiyang Zhang, Zhenyang Zhao, Enning Zhang
  • Patent number: 11581441
    Abstract: A semiconductor device includes a substrate, a tunneling oxide layer, a floating gate, an isolation layer and a control gate. The tunneling oxide layer is over the substrate. The floating gate is over the tunneling oxide layer. The isolation layer covers a top of the floating gate and peripherally encloses the tunneling oxide layer and the floating gate. The control gate is over a top of the isolation layer.
    Type: Grant
    Filed: October 23, 2020
    Date of Patent: February 14, 2023
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Shih-Lu Hsu, Ping-Pang Hsieh, Szu-Hsien Lu, Yu-Chu Lin
  • Patent number: 11551596
    Abstract: To suppress degradation of a transistor. A method for driving a liquid crystal display device has a first period and a second period. In the first period, a first transistor and a second transistor are alternately turned on and off repeatedly, and a third transistor and a fourth transistor are turned off. In the second period, the first transistor and the second transistor are turned off, and the third transistor and the fourth transistor are alternately turned on and off repeatedly. Accordingly, the time during which the transistor is on can be reduced, so that degradation of characteristics of the transistor can be suppressed.
    Type: Grant
    Filed: January 11, 2021
    Date of Patent: January 10, 2023
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Hajime Kimura, Atsushi Umezaki
  • Patent number: 11398493
    Abstract: Arrays of memory cells including pairs of memory cells having respective control gates connected to respective access lines, and having respective charge storage nodes between the respective access lines.
    Type: Grant
    Filed: January 7, 2020
    Date of Patent: July 26, 2022
    Assignee: Micron Technology, Inc.
    Inventor: Theodore T. Pekny
  • Patent number: 11380766
    Abstract: A transistor includes a quasi-intrinsic region of a first conductivity type that is covered with an insulated gate. The quasi-intrinsic region extends between two first doped regions of a second conductivity type. A main electrode is provided on each of the two first doped regions. A second doped region of a second conductivity type is position in contact with the quasi-intrinsic region, but is electrically and physically separated by a distance from the two first doped regions. A control electrode is provided on the second doped region.
    Type: Grant
    Filed: June 7, 2019
    Date of Patent: July 5, 2022
    Assignee: STMicroelectronics SA
    Inventors: Sotirios Athanasiou, Philippe Galy
  • Patent number: 11361827
    Abstract: Memory devices, memory cell strings and methods of operating memory devices are shown. Configurations described include directly coupling an elongated body region to a source line. Configurations and methods shown should provide a reliable bias to a body region for memory operations such as erasing.
    Type: Grant
    Filed: October 29, 2020
    Date of Patent: June 14, 2022
    Assignee: Micron Technology, Inc.
    Inventor: Akira Goda
  • Patent number: 10566173
    Abstract: A semiconductor device includes a tube-like structure comprising a plurality of dielectric layers and conductor layers that are disposed on top of one another; a conductor tip integrally formed with a cap conductor layer that is disposed on a top surface of the tube-like structure, wherein the conductor tip extends to a central hole of the tube-like structure; and at least one photodetector formed within a bottom portion of the tube-like structure.
    Type: Grant
    Filed: February 21, 2018
    Date of Patent: February 18, 2020
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Hsien-Yu Chang
  • Patent number: 10032514
    Abstract: Semiconductor memory is provided wherein a memory cell includes a capacitorless transistor having a floating body configured to store data as charge therein when power is applied to the cell. The cell further includes a nonvolatile memory comprising a resistance change element configured to store data stored in the floating body under any one of a plurality of predetermined conditions. A method of operating semiconductor memory to function as volatile memory, while having the ability to retain stored data when power is discontinued to the semiconductor memory is described.
    Type: Grant
    Filed: October 4, 2017
    Date of Patent: July 24, 2018
    Assignee: Zeno Semiconductor, Inc.
    Inventor: Yuniarto Widjaja
  • Patent number: 9812203
    Abstract: Semiconductor memory is provided wherein a memory cell includes a capacitorless transistor having a floating body configured to store data as charge therein when power is applied to the cell. The cell further includes a nonvolatile memory comprising a resistance change element configured to store data stored in the floating body under any one of a plurality of predetermined conditions. A method of operating semiconductor memory to function as volatile memory, while having the ability to retain stored data when power is discontinued to the semiconductor memory is described.
    Type: Grant
    Filed: October 12, 2016
    Date of Patent: November 7, 2017
    Assignee: Zeno Semiconductor, Inc.
    Inventor: Yuniarto Widjaja
  • Patent number: 9553209
    Abstract: The process is based upon the steps of: forming a trench in a body including a substrate and at least one insulating layer; and depositing a metal layer above the body for closing the open end or mouth of the trench. The trench is formed by selectively etching the body, wherein the reaction by-products deposit on the walls of the trench and form a passivation layer along the walls of the trench and a restriction element in proximity of the mouth of the trench.
    Type: Grant
    Filed: September 16, 2015
    Date of Patent: January 24, 2017
    Assignee: STMICROELECTRONICS S.R.L.
    Inventor: Antonino Fiumara
  • Patent number: 9514818
    Abstract: A two-terminal, single-poly floating gate memristor includes parallel-connected, asymmetrical readout and injection transistors having a shared floating gate structure, and a diode connected to drain terminals of the asymmetrical transistors. The injection transistor is configured with relatively high source/drain-to-gate capacitances to facilitate EEPROM-type (floating gate) program/erase operations (e.g., hot carrier injection and band-to-band tunneling of holes), and the readout transistor is configured (e.g., using a threshold voltage implant) to facilitate low-voltage readout operations. The diode is configured to function both as a limiting resistor that prevents over-erase during high-voltage erase operations, and also to prevent sneak (leakage) currents during low-voltage readout operations. The diode is implemented using either p-n junction or Schottky diode configurations formed on bulk silicon, or a lateral diode configurations disclosed for SOI substrates.
    Type: Grant
    Filed: May 4, 2016
    Date of Patent: December 6, 2016
    Assignee: Tower Semiconductor Ltd.
    Inventors: Yakov Roizin, Evgeny Pikhay
  • Patent number: 9000490
    Abstract: A semiconductor package includes an interposer and a plurality of integrated circuit (IC) dice disposed on and intercoupled via the interposer. A first IC die has a clock speed rating that is greater than a clock speed rating of another of the IC dice. A plurality of programmable voltage tuners are coupled to the plurality of IC dice, respectively. A first voltage tuner is coupled to the first IC die, and the first voltage tuner is programmed to reduce a voltage level of voltage input to the first voltage tuner and output the reduced voltage to the first IC die.
    Type: Grant
    Filed: April 19, 2013
    Date of Patent: April 7, 2015
    Assignee: Xilinx, Inc.
    Inventors: Thao H. T. Vo, Andy H. Gan, Xiao-Yu Li, Matthew H. Klein
  • Patent number: 8927353
    Abstract: A fin field effect transistor and method of forming the same. The fin field effect transistor includes a semiconductor substrate having a fin structure and between two trenches with top portions and bottom portions. The fin field effect transistor further includes shallow trench isolations formed in the bottom portions of the trenches and a gate electrode over the fin structure and the shallow trench isolation, wherein the gate electrode is substantially perpendicular to the fin structure. The fin field effect transistor further includes a gate dielectric layer along sidewalls of the fin structure and source/drain electrode formed in the fin structure.
    Type: Grant
    Filed: May 7, 2007
    Date of Patent: January 6, 2015
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Ju-Wang Hsu, Chih-Yuan Ting, Tang-Xuan Zhong, Yi-Nien Su, Jang-Shiang Tsai
  • Patent number: 8587036
    Abstract: A non-volatile memory is formed on a substrate. The non-volatile memory includes an isolation structure, a floating gate, and a gate dielectric layer. The isolation structure is disposed in the substrate to define an active area. The floating gate is disposed on the substrate and crosses over the active area. The gate dielectric layer is disposed between the floating gate and the substrate. The floating gate includes a first region and a second region. An energy band of the second region is lower than an energy band of the first region, so that charges stored in the floating gate are away from an overlap region of the floating gate and the gate dielectric layer.
    Type: Grant
    Filed: December 12, 2008
    Date of Patent: November 19, 2013
    Assignee: eMemory Technology Inc.
    Inventors: Shih-Chen Wang, Wen-Hao Ching
  • Patent number: 8476691
    Abstract: A high voltage power semiconductor device includes high reliability-high voltage junction termination with a charge dissipation layer. An active device area is surrounded by a junction termination structure including one or more regions of a polarity opposite the substrate polarity. A tunneling oxide layer overlays the junction termination area surrounding the active device area in contact with the silicon substrate upper surface. A layer of undoped polysilicon overlays the tunneling oxide layer and spans the junction termination area, with connections to an outer edge of the junction termination structure and to a grounded electrode inside of the active area. The tunneling oxide layer has a thickness that permits hot carriers formed at substrate upper surface to pass through the tunneling oxide layer into the undoped polysilicon layer to be dissipated but sufficient to mitigate stacking faults at the silicon surface.
    Type: Grant
    Filed: February 18, 2011
    Date of Patent: July 2, 2013
    Assignee: Microsemi Corporation
    Inventors: Dumitru Sdrulla, Duane Edward Levine, James M. Katana, Martin David Birch
  • Patent number: 8390035
    Abstract: An embodiment of this invention uses a massive parallel interconnect fabric (MPIF) at the flipped interface of a core die substrate (having the core logic blocks) and a context die (used for in circuit programming/context/customization of the core die substrate), to produce ASIC-like density and FPGA-like flexibility/programmability, while reducing the time and cost for development and going from prototyping to production, reducing cost per die, reducing or eliminating NRE, and increasing performance. Other embodiments of this invention enable debugging complex SoC through large contact points provided through the MPIF, provide for multi-platform functionality, and enable incorporating FGPA core in ASIC platform through the MPIF.
    Type: Grant
    Filed: May 6, 2009
    Date of Patent: March 5, 2013
    Inventors: Majid Bemanian, Farhang Yazdani
  • Patent number: 8252643
    Abstract: A semiconductor device which is formed in a self-aligned manner without causing a problem of misalignment in forming a control gate electrode and in which a leak between the control gate electrode and a floating gate electrode is not generated, and a manufacturing method of the semiconductor device are provided. A semiconductor device includes a semiconductor film, a first gate insulating film over the semiconductor film, a floating gate electrode over the first gate insulating film, a second gate insulating film which covers the floating gate electrode, and a control gate electrode over the second gate insulating film. The control gate electrode is formed so as to cover the floating gate electrode with the second gate insulating film interposed therebetween, the control gate electrode is provided with a sidewall, and the sidewall is formed on a stepped portion of the control gate electrode, generated due to the floating gate electrode.
    Type: Grant
    Filed: June 20, 2011
    Date of Patent: August 28, 2012
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Yoshinobu Asami
  • Patent number: 8183568
    Abstract: A substrate for a semiconductor device includes: a base substrate; a semiconductor layer that has a source region, a drain region, a plurality of channel regions, and at least one intermediate region; a source electrode being in contact with the source region; a drain electrode being in contact with the drain region; a gate electrode that overlaps the plurality of channel regions, the intermediate region, and each of a part of the source electrode and a part of the drain electrode; and a floating electrode being in contact with the intermediate region. The size of an area where the floating electrode and the gate electrode overlap each other is smaller than the sum of the size of an area where the source electrode and the gate electrode overlap each other and the size of an area where the drain electrode and the gate electrode overlap each other.
    Type: Grant
    Filed: October 13, 2010
    Date of Patent: May 22, 2012
    Assignee: Seiko Epson Corporation
    Inventor: Yasushi Yamazaki
  • Publication number: 20120068761
    Abstract: A soft clamp semiconductor device for preventing inadvertent programming of an unselected anti-fuse (AF) element comprises a MOSFET which includes a first well region disposed in a substrate. Source and drain regions are disposed in the first well region, the drain region being electrically coupled to the first capacitive plate of the AF element and the source region being electrically coupled to a second capacitive plate of the AF element. An insulated gate is disposed over a channel area of the first well region that separates the drain and source regions. A gate capacitance of the MOSFET is substantially less than a capacitance of the unselected AF element such that when a programming voltage is applied to the first capacitive plate, a current flows through the MOSFET that charges the second capacitive plate, thereby reducing a voltage build-up across the unselected AF element.
    Type: Application
    Filed: September 17, 2010
    Publication date: March 22, 2012
    Applicant: Power Integrations, Inc.
    Inventor: Sujit Banerjee
  • Patent number: 7989362
    Abstract: Electronic apparatus and methods of forming the electronic apparatus include a hafnium lanthanide oxynitride film on a substrate for use in a variety of electronic systems. The hafnium lanthanide oxynitride film may be structured as one or more monolayers. Metal electrodes may be disposed on a dielectric containing a hafnium lanthanide oxynitride film.
    Type: Grant
    Filed: July 20, 2009
    Date of Patent: August 2, 2011
    Assignee: Micron Technology, Inc.
    Inventors: Leonard Forbes, Kie Y. Ahn, Arup Bhattacharyya
  • Patent number: 7829927
    Abstract: The invention relates to a DRAM memory device with a capacity associated with a field effect transistor, in which all or some of the molecules capable of storing the loads comprising a polyoxometallate are incorporated into the capacity, or a flash-type memory using at least one field effect transistor, in which the molecules capable of storing the loads comprising a polyoxometallate are incorporated into the floating grid of the transistor. The invention also relates to a method for producing on such device and to an electronic appliance comprising one such memory device.
    Type: Grant
    Filed: August 2, 2006
    Date of Patent: November 9, 2010
    Assignee: Commissariat a l'Energie Atomique
    Inventors: Gérard Bidan, Eric Jalaguier
  • Patent number: 7781824
    Abstract: A memory cell of a nonvolatile semiconductor memory includes a first insulating film whose principal constituent elements are Si, O and N, a charge storage layer whose principal constituent elements are Hf, O and N, formed on the first insulating film, a second insulating film having dielectric constant higher than that of the first insulating film and formed on the charge storage layer, and a control gate electrode formed on the second insulating film. Relation between a composition of the first insulating film and a composition of the charge storage layer is determined under the conditions that (A) a valence band offset of the first insulating film is larger than a valence band offset of the charge storage layer, and (B) a trap energy level of electrons due to oxygen vacancies in the charge storage layer exists within a band gap of the charge storage layer.
    Type: Grant
    Filed: March 7, 2008
    Date of Patent: August 24, 2010
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Naoki Yasuda
  • Patent number: 7772643
    Abstract: A method of fabricating a semiconductor device having a metal gate pattern is provided in which capping layers are used to control the relative oxidation rates of portions of the metal gate pattern during a oxidation process. The capping layer may be a multilayer structure and may be etched to form insulating spacers on the sidewalls of the metal gate pattern. The capping layer(s) allow the use of a selective oxidation process, which may be a wet oxidation process utilizing partial pressures of both H2O and H2 in an H2-rich atmosphere, to oxidize portions of the substrate and metal gate pattern while suppressing the oxidation of metal layers that may be included in the metal gate pattern. This allows etch damage to the silicon substrate and edges of the metal gate pattern to be reduced while substantially maintaining the original thickness of the gate insulating layer and the conductivity of the metal layer(s).
    Type: Grant
    Filed: June 8, 2009
    Date of Patent: August 10, 2010
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ja-Hum Ku, Chang-Won Lee, Seong-Jun Heo, Sun-Pil Youn, Sung-Man Kim
  • Patent number: 7750347
    Abstract: A semiconductor device includes a control circuit for carrying out gamma correction of a supplied signal, and a memory for storing data used in the gamma correction. The control circuit and the memory are constituted by TFTs, and are integrally formed on the same insulating substrate. A semiconductor display device includes a pixel region in which a plurality of TFTs are arranged in matrix; a driver for switching the plurality of TFTs; a picture signal supply source for supplying a picture signal; a control circuit for carrying out gamma correction of the picture signal; and a memory for storing data used in the gamma correction of the picture signal. The plurality of TFTs, the driver, the control circuit, and the memory are integrally formed on the same insulating substrate.
    Type: Grant
    Filed: October 19, 2006
    Date of Patent: July 6, 2010
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventors: Shunpei Yamazaki, Jun Koyama
  • Publication number: 20100155811
    Abstract: A semiconductor device includes a semiconductor substrate, a gate formed over the semiconductor substrate, a source region formed in the semiconductor substrate at one side of the gate, a drain region formed in the semiconductor substrate at another side of the gate, and a channel region formed between the source region and the drain region, the channel region including a first channel region having a first threshold voltage and a second channel region having a second threshold voltage higher than the first threshold voltage. Accordingly, the semiconductor device has two channel regions having different threshold voltages.
    Type: Application
    Filed: December 18, 2009
    Publication date: June 24, 2010
    Inventor: Sung-Joong Joo
  • Patent number: 7728378
    Abstract: A nonvolatile semiconductor memory device capable of improving injection efficiency and simplifying manufacturing process is provided. The device comprises a memory cell having second conductive type of first impurity diffusion area and second impurity diffusion area on a first conductive type of semiconductor substrate, between the first and second impurity diffusion areas, a first laminate section formed by laminating a first insulating film, a charge storage layer, a second insulating film and a first gate electrode in this order from the bottom, and a second laminate section formed by laminating a third insulating film and a second gate electrode in this order from the bottom, wherein an area sandwiched between the first and second laminate sections is the second conductive type of a third impurity diffusion area having impurity density lower than that of the first and second impurity diffusion areas and not higher than 5×1012 ions/cm2.
    Type: Grant
    Filed: November 6, 2007
    Date of Patent: June 1, 2010
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Naoki Ueda, Yoshimitsu Yamauchi
  • Patent number: 7718499
    Abstract: In a method of fabricating a semiconductor device, an additive gas is mixed with an etching gas to reduce a fluorine ratio of the etching gas. The etching gas having a reduced fluorine rate is utilized in the process for etching a nitride layer formed on an oxide layer to prevent the oxide layer formed below the nitride layer from being etched along with the nitride layer. The method comprises primarily etching an exposed charge storage layer using an etching gas; and secondarily etching the charge storage layer using the etching gas under a condition that a ratio of fluorine contained in the etching gas utilized in the secondary etching step is less than a ratio of fluorine contained in the etching gas utilized in the primary etching step. Thus, the tunnel insulating layer formed below the charge storage layer is not damaged when the charge storage layer is patterned.
    Type: Grant
    Filed: June 27, 2008
    Date of Patent: May 18, 2010
    Assignee: Hynix Semiconductor Inc.
    Inventor: Choong Bae Kim
  • Patent number: 7605421
    Abstract: A non-volatile semiconductor memory element includes: a semiconductor region of a first conductivity type formed in a plate-like form on a semiconductor substrate; a first insulating film formed on a first side face of the semiconductor region; a first charge accumulating layer formed on a face of the first insulating film opposite from the semiconductor region; a second insulating film formed on a second side face of the semiconductor region, and has a different equivalent oxide thickness from the first insulating film; a second charge accumulating layer formed on a face of the second insulating film opposite from the semiconductor region; a third insulating film provided so as to cover the first and second charge accumulating layers; a control gate electrode provided so as to cover the third insulating film; a channel region formed in a portion of the semiconductor region covered with the control gate electrode; and source/drain regions of a second conductivity type formed in portions of the semiconductor r
    Type: Grant
    Filed: September 7, 2006
    Date of Patent: October 20, 2009
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Mizuki Ono
  • Publication number: 20090250752
    Abstract: A method of fabricating a semiconductor device having a metal gate pattern is provided in which capping layers are used to control the relative oxidation rates of portions of the metal gate pattern during a oxidation process. The capping layer may be a multilayer structure and may be etched to form insulating spacers on the sidewalls of the metal gate pattern. The capping layer(s) allow the use of a selective oxidation process, which may be a wet oxidation process utilizing partial pressures of both H2O and H2 in an H2-rich atmosphere, to oxidize portions of the substrate and metal gate pattern while suppressing the oxidation of metal layers that may be included in the metal gate pattern. This allows etch damage to the silicon substrate and edges of the metal gate pattern to be reduced while substantially maintaining the original thickness of the gate insulating layer and the conductivity of the metal layer(s).
    Type: Application
    Filed: June 8, 2009
    Publication date: October 8, 2009
    Inventors: Ja-Hum Ku, Chang-Won Lee, Seong-Jun Heo, Sun-Pil Youn, Sung-Man Kim
  • Patent number: 7563730
    Abstract: Electronic apparatus and methods of forming the electronic apparatus include a hafnium lanthanide oxynitride film on a substrate for use in a variety of electronic systems. The hafnium lanthanide oxynitride film may be structured as one or more monolayers. Metal electrodes may be disposed on a dielectric containing a hafnium lanthanide oxynitride film.
    Type: Grant
    Filed: August 31, 2006
    Date of Patent: July 21, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Leonard Forbes, Kie Y. Ahn, Arup Bhattacharyya
  • Patent number: 7544604
    Abstract: Electronic apparatus and methods of forming the electronic apparatus include a tantalum lanthanide oxynitride film on a substrate for use in a variety of electronic systems. The tantalum lanthanide oxynitride film may be structured as one or more monolayers. Metal electrodes may be disposed on a dielectric containing a tantalum lanthanide oxynitride film.
    Type: Grant
    Filed: August 31, 2006
    Date of Patent: June 9, 2009
    Assignee: Micron Technology, Inc.
    Inventors: Leonard Forbes, Kie Y. Ahn, Arup Bhattacharyya
  • Patent number: 7544996
    Abstract: A method of fabricating a semiconductor device having a metal gate pattern is provided in which capping layers are used to control the relative oxidation rates of portions of the metal gate pattern during a oxidation process. The capping layer may be a multilayer structure and may be etched to form insulating spacers on the sidewalls of the metal gate pattern. The capping layer(s) allow the use of a selective oxidation process, which may be a wet oxidation process utilizing partial pressures of both H2O and H2 in an H2-rich atmosphere, to oxidize portions of the substrate and metal gate pattern while suppressing the oxidation of metal layers that may be included in the metal gate pattern. This allows etch damage to the silicon substrate and edges of the metal gate pattern to be reduced while substantially maintaining the original thickness of the gate insulating layer and the conductivity of the metal layer(s).
    Type: Grant
    Filed: August 3, 2006
    Date of Patent: June 9, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Ja-Hum Ku, Chang-Won Lee, Seong-Jun Heo, Sun-Pil Youn, Sung-Man Kim
  • Publication number: 20090096005
    Abstract: A semiconductor memory device includes a device isolation layer formed in a semiconductor substrate to define a plurality of active regions. Floating gates are disposed on the active regions. A control gate line overlaps top surfaces of the floating gates and crosses over the active regions. The control gate line has an extending portion disposed in a gap between adjacent floating gates and overlapping sidewalls of the adjacent floating gates. First spacers are disposed on the sidewalls of the adjacent floating gates. Each of the first spacers extends along a sidewall of the active region and along a sidewall of the device isolation layer. Second spacers are disposed between outer sidewalls of the first spacers and the extending portion and are disposed above the device isolation layer. An electronic device including a semiconductor memory device and a method of fabricating a semiconductor memory device are also disclosed.
    Type: Application
    Filed: June 5, 2008
    Publication date: April 16, 2009
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Joon-Sung LIM, Jong-Ho PARK, Hyun-Chul BACK, Sung-Hun LEE
  • Publication number: 20090001446
    Abstract: A method of fabricating a flash memory device includes forming a stack electrode on a semiconductor substrate; forming a side spacer on a side wall of the stack electrode; forming a photo-resist film pattern with a predetermined thickness on the side wall of the side spacer; and forming a source/drain junction on the semiconductor substrate through ion implant using the photo-resist film as a mask for ion implant.
    Type: Application
    Filed: June 26, 2008
    Publication date: January 1, 2009
    Applicant: DONGBU HITEK CO., LTD.
    Inventor: Sung Jin Kim
  • Publication number: 20080315286
    Abstract: A decease in reliability of a memory element having a floating gate is suppressed. The invention relates to a semiconductor device having an island-like semiconductor film, which is formed over an insulating surface and includes a channel formation region and a high-concentration impurity region, a tunneling insulating film formed over the island-like semiconductor film, a floating gate formed over the tunneling insulating film, a gate insulating film formed over the floating gate, a control gate formed over the gate insulating film, and a first insulating film formed between the tunneling insulating film and the floating gate. The first insulating film is formed of an oxide film of the material of the floating gate, so that the material of the floating gate is prevented from diffusing into the tunneling insulating film.
    Type: Application
    Filed: June 20, 2008
    Publication date: December 25, 2008
    Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
    Inventor: Yoshinori IEDA
  • Patent number: 7462904
    Abstract: A non-volatile memory device includes an upwardly protruding fin disposed on a substrate and a control gate electrode crossing the fin. A floating gate is interposed between the control gate electrode and the fin and includes a first storage gate and a second storage gate. The first storage gate is disposed on a sidewall of the fin, and the second storage gate is disposed on a top surface of the fin and is connected to the first storage gate. A first insulation layer is interposed between the first storage gate and the sidewall of the fin, and a second insulation layer is interposed between the second storage gate and the top surface of the fin. The second insulation layer is thinner than the first insulation layer. A blocking insulation pattern is interposed between the control gate electrode and the floating gate.
    Type: Grant
    Filed: October 7, 2005
    Date of Patent: December 9, 2008
    Assignee: Samsung Electronics, Co., Ltd.
    Inventors: Seong-Gyun Kim, Ji-Hoon Park, Sang-Woo Kang, Sung-Woo Park
  • Publication number: 20080237688
    Abstract: A memory cell of a nonvolatile semiconductor memory includes a first insulating film whose principal constituent elements are Si, O and N, a charge storage layer whose principal constituent elements are Hf, O and N, formed on the first insulating film, a second insulating film having dielectric constant higher than that of the first insulating film and formed on the charge storage layer, and a control gate electrode formed on the second insulating film. Relation between a composition of the first insulating film and a composition of the charge storage layer is determined under the conditions that (A) a valence band offset of the first insulating film is larger than a valence band offset of the charge storage layer, and (B) a trap energy level of electrons due to oxygen vacancies in the charge storage layer exists within a band gap of the charge storage layer.
    Type: Application
    Filed: March 7, 2008
    Publication date: October 2, 2008
    Inventor: Naoki Yasuda
  • Publication number: 20080224201
    Abstract: Flash memory devices and methods of fabricating the same are disclosed. A disclosed method comprises doping at least one active region of a substrate, and forming an etching mask layer on the active region. The etching mask layer defines an opening exposing a portion of the active region. The disclosed method further comprises forming an etching groove in the active region. The etching groove separates a source region and a drain region. The disclosed method also comprises growing an epitaxial layer within the etching groove; forming a gate insulating layer on the epitaxial layer; depositing a first polysilicon layer on inner sidewalls of the opening and on the gate insulating layer; forming a dielectric layer on the first polysilicon layer; and depositing a second polysilicon layer on the dielectric layer.
    Type: Application
    Filed: March 21, 2008
    Publication date: September 18, 2008
    Inventor: KWAN JU KOH
  • Publication number: 20080211007
    Abstract: Self-aligned trench filling to isolate active regions in high-density integrated circuits is provided. A deep, narrow trench is etched into a substrate between active regions. The trench is filled by growing a suitable dielectric such as silicon dioxide. The oxide grows from the substrate to fill the trench and into the substrate to provide an oxide of greater width and depth than the trench. Storage elements for a NAND type flash memory system, for example, can be fabricated by etching the substrate to form the trench after or as part of etching to form NAND string active areas. This can ensure alignment of the NAND string active areas between isolation trenches. Because the dielectric growth process is self-limiting, an open area resulting from the etching process can be maintained between the active areas. A subsequently formed inter-gate dielectric layer and control gate layer can fill the open area to provide sidewall coupling between control gates and floating gates.
    Type: Application
    Filed: May 13, 2008
    Publication date: September 4, 2008
    Inventor: Jack H. Yuan
  • Publication number: 20080203463
    Abstract: The present invention provides a non-volatile memory device and a method for manufacturing such a device. The device comprises a floating gate (16), a control gate (19) and a separate erase gate (10). The erase gate (10) is provided in or on isolation zones (2) provided in the substrate (1). Because of that, the erase gates (10) do not add to the cell size. The capacitance between the erase gate (10) and the floating gate (16) is small compared with the capacitance between the control gate (19) and the floating gate (16), and the charged floating gate (16) is erased by Fowler-Nordheim tunneling through the oxide layer between the erase gate (10) and the floating gate (16).
    Type: Application
    Filed: June 3, 2005
    Publication date: August 28, 2008
    Applicant: Koninklijke Philips Electronics N.V.
    Inventors: Robertus Theodorus Fransiscus Van Schaijk, Michiel Jos Van Duuren
  • Publication number: 20080203462
    Abstract: A non-volatile memory device on a substrate layer (2) comprises source and drain regions (3) and a channel region (4). The source and drain regions (3) and the channel region (4) are arranged in a semiconductor layer (20) on the substrate layer (2). The channel region (4) is fin-shaped and extends longitudinally (X) between the source region and the drain region (3). The channel region (4) comprises two fin portions (4a, 4b) and an intra-fin space (10), the fin portions (4a, 4b) extending in the longitudinal direction (X) and being spaced apart, and the intra-fin space (10) being located in between the fin portions (4a, 4b), and a charge storage area (11, 12; 15, 12) is located in the intra-fin space (10) between the fin portions (4a, 4b).
    Type: Application
    Filed: September 26, 2006
    Publication date: August 28, 2008
    Applicant: NXP B.V.
    Inventor: Pierre Goarin
  • Patent number: 7368341
    Abstract: An explanation is given of, inter alia, a circuit arrangement containing a trench which penetrates through a charge-storing layer (18) and a doped semiconductor layer (14). The trench simultaneously fulfils a multiplicity of functions, namely an insulating function between adjacent components, the patterning of the charge-storing layer and also the subdivision of doping layers of the semiconductor layer (14).
    Type: Grant
    Filed: June 1, 2006
    Date of Patent: May 6, 2008
    Assignee: Infineon Technologies AG
    Inventors: Achim Gratz, Klaus Knobloch, Franz Schuler
  • Patent number: 7244986
    Abstract: A 2-bit cell is made up of first and second diffusion regions provided on a substrate surface, first and second storage nodes adjacent to the first and second diffusion region, first and second gate electrodes provided on first and second storage nodes, a third storage node provided on the substrate and a third gate electrode provided on the third storage node. The first and second gate electrodes are connected common to form word line electrodes. A control gate electrode at right angles to the word line electrodes and a third diffusion region in the substrate surface disposed at a longitudinal end of the control gate electrode are provided. A storage node, Node 1, of interest, with the control gate channel as a drain, is read without the intermediary of the second node, which is not of interest, such that reading of Node 1 unaffected by the second node.
    Type: Grant
    Filed: September 1, 2004
    Date of Patent: July 17, 2007
    Assignee: NEC Electronics Corporation
    Inventor: Teiichiro Nishizaka
  • Patent number: 6800885
    Abstract: An asymmetric double gate metal-oxide semiconductor field-effect transistor (MOSFET) includes a first fin formed on a substrate; a second fin formed on the substrate; a first gate formed adjacent first sides of the first and second fins, the first gate being doped with a first type of impurity; and a second gate formed between second sides of the first and second fins, the second gate being doped with a second type of impurity. An asymmetric all-around gate MOSFET includes multiple fins; a first gate structure doped with a first type of impurity and formed adjacent a first side of one of the fins; a second gate structure doped with the first type of impurity and formed adjacent a first side of another one of the fins; a third gate structure doped with a second type of impurity and formed between two of the fins; and a fourth gate structure formed at least partially beneath one or more of the fins.
    Type: Grant
    Filed: March 12, 2003
    Date of Patent: October 5, 2004
    Assignee: Advance Micro Devices, Inc.
    Inventors: Judy Xilin An, Bin Yu