Abstract: A universal substrate holder of the invention for treating wafer substrates in liquids is provided with a shaft and a rod slidingly inserted into the central opening of the shaft. The end of the shaft that protrudes into the bowl supports a base platform for the substrate, while the end of the rod that protrudes into the bowl has radial arms that rigidly support an annular plate with pins that can pass through the opening of the base platform so that they can support the substrate above the surface of the platform. The annular plate supports clamping jaws made in the form of two-arm levers with shorter arms and longer arms. The longer arms are heavier and therefore in the stationary state of the holder keep the jaws turned into an open position. When the shaft begins to rotate, the jaws are turned under the effect of centrifugal forces into positions of clamping the substrate with the shorter arms.

Abstract: Anti-deflection tooling is provided for a pull back chuck. Equally spaced gussets are disposed between the riser body and the face plate of the chuck, to minimize or eliminate deflection of the face plate when a workpiece is clamped into the chuck. Adjustment devices are also provided so that existing chucks can be retrofitted with the anti-deflection tooling and an operator can true up the face plate prior to running a part.

Abstract: A drawn down chuck for gripping the inner or outer diameter of a workpiece. The chuck includes rotatable jaws disposed in a chuck body. The rotatable jaws helically and then linearly retract into the chuck body to secure workpieces having a shaft and an enlarged offset such as a hub or flange proximate to the end of the shaft. Cam assemblies interact with the jaw rods to provide the helical and linear movement. The cam assemblies include a cam groove and a cam follower, wherein the cam groove has a linear and a helical segment. The cam follower is operatively engaged on the cam groove as the jaw rod moves between the extended and retracted position so that when the jaw rod is retracted it first moves helically and then axially.

Abstract: A device for rotation of disc-shaped elements of different diameter, such as matrices for manufacturing audio and video discs. The device comprises a rotatable chuck (10) in which three arms (20) distributed evenly in the peripheral direction are pivotably mounted, the arms having a radially outer stop element (22) for contact with an outer peripheral edge of a disc element inserted in the chuck. The chuck has a rotatably mounted central gearwheel (18) which is preloaded by the tension spring elements (28) towards a rotational position in which the central gearwheel (18) tends to hold the arms (20) and their stop elements (22) in a pivoted-in position in the chuck. The arms (20) are synchronously pivotable towards a pivoted-out position counter to the action of the tension spring elements (28). The device comprises a retaining mechanism (30-40) which is configured to lock the rotation of the central gearwheel (18) relative to the base plate (16) when a predetermined speed of the chuck (10) is reached.

Abstract: A device is disclosed for supporting semiconductor wafers or other polished, opaque plates for processing or metrology in a vertical orientation, where the wafer loading and unloading occurs in a horizontal orientation. The device consists of a pallet designed with an opening such that both sides of the wafer are exposed. The wafer is loaded into the pallet to rest on three fixed rest members extending a short distance into the opening. Moving clamp members on the frame are located for movement toward or away from the corresponding rest members. Two cylindrical rest pins are located on axes parallel to the central axis of the opening to permit the wafer to rest under the force of gravity on the rest pins when the frame is rotated to its vertical position. Special provisions are made to minimize the effects of mechanical vibration of the wafer while insuring a robust physical restraint of the wafer within the apparatus without inducing mechanical stresses which could influence the shape of the wafer.

Abstract: A chuck has a chuck body rotatable about a main axis and a plate displaceable axially on the body between an outer position and an inner position. Springs urge the plate into the outer position. A locking element on the body can move between a blocking position preventing displacement of the plate from the outer position into the inner position and a freeing position permitting such displacement. A plurality of jaw holders angularly spaced about the axis are fixed axially on the plate and each have radially displaceable outer and inner ends. A piston axially displaceable in the body has cam formations engaging the jaw-holder inner ends for radially displacing the jaw-holder outer ends on axial displacement of the piston.

Abstract: A design for chuck rollers and a design for chuck pins for a wafer cleaning and drying system is disclosed. Each of the chuck rollers includes a roller head which ensures proper engagement of a wafer with the chuck rollers for rotation of the wafer during a wafer scrubbing process. Each of the chuck pins is provided with an extending flange or salient to prevent upward movement of and disengagement of the wafer from the chuck pins as the wafer is rotated during a wafer scrubbing and drying process. Each chuck pin may also present a wafer support surface of enhanced surface area for supporting the wafer on the chuck pin.

Abstract: A wafer holding device, comprising a rotating baseplate, a wafer seat which is provided on the rotating baseplate coaxially with the rotating baseplate and which receives a peripheral edge of a wafer by a circumference, a predetermined number of chuck levers rotatably mounted on the wafer seat so that the chuck levers can be rotated around an axis extending in a tangential direction on a circumference of the rotating baseplate, and springs for resiliently pushing an end of the chuck lever toward the wafer seat, wherein the peripheral edge of the wafer received on the wafer seat is pinched by the wafer seat and the chuck lever.

Abstract: An edge handling chuck which operates to maintain a semiconductor wafer at a desirable orientation while rotating the wafer at high speeds is disclosed. The edge handling chuck consists of a cylindrical plate which holds a silicon wafer using multiple spring loaded edge wafer clamps. Gas passes through a center hole in the cylindrical plate and is dispersed to the atmosphere using multiple pressure relief openings in the cylindrical plate. The purpose of this gas arrangement is to stabilize the wafer due to spinning vortex effects. The cylindrical plate has mounted therein an ertalyte ring which provides an area of angled contact for the wafer. The gas arrangement operates to pass gas to the slight space between the semiconductor wafer and the cylindrical plate, thereby contacting a lower surface of the wafer, and subsequently out of the arrangement using the pressure relief holes.

Abstract: The present invention relates to an arrangement (1) for gripping and holding or releasing a material (M), such as material held in a lathe chuck. The arrangement includes a piston-cylinder assembly (2) and a plurality of material gripping and holding or releasing elements, so-called gripping element arrangements (3). The gripping elements are movable between two positions, an open position and a closed position, in response to movements of the piston-cylinder assembly (2). The cylinder-part (22) of the piston-cylinder assembly (2) includes a circular groove (22a) for co-action with rolling support surfaces (12c) associated with said gripping element arrangement (3). The arrangement also includes a separate gripping member (50) which can be readily fitted to the free end-part (3a) of the gripping element (3′) and readily removed therefrom.

Abstract: A chuck has a chuck body adapted to be rotated about a chuck axis and formed with a plurality of axially forwardly open passages each having a pair of angularly confronting side faces, respective guides pivotal in the passages about respective guide axes extending secantally of the chuck axis, and respective elongated jaw arms axially slidable in the guides. Each jaw arm has a pair of oppositely angularly directed side faces angularly confronting and spaced from the respective passage side faces. Two guide plate in each of the passages each have an outer face engaging one of the respective passage side faces and an inner face engaging the respective arm side face. These plates are releasably fixed in the chuck body.

Abstract: Each of master jaws (17) has a middle spherical part guided for sliding movement by a spherical guide surface (16) formed in a chuck body (2), a round back end part (19) extended slidably through a spherical bearing member (12) supported on a support member (10) attached to a middle part of a driving member (5). Each master jaw (17) is provided with a through hole (26) extending between the front and the back end thereof and a sliding member (30) is inserted in the through hole of the master jaw (17) through the front end of the same so as to come into sliding contact with a stopper (36) attached to a chuck body (2). Therefore, the state of sliding contact between the sliding member (30) and the stopper (36) can be adjusted on the side of the front part of the chuck and work for adjusting the state of sliding contact can be easily achieved.

Abstract: A wafer holding device, comprising a rotating baseplate, a wafer seat which is provided on the rotating baseplate coaxially with the rotating baseplate and which receives a peripheral edge of a wafer by a circumference, a predetermined number of chuck levers rotatably mounted on the wafer seat so that the chuck levers can be rotated around an axis extending in a tangential direction on a circumference of the rotating baseplate, and springs for resiliently pushing an end of the chuck lever toward the wafer seat, wherein the peripheral edge of the wafer received on the wafer seat is pinched by the wafer seat and the chuck lever.

Abstract: A power chuck assembly for securing a workpiece as the chuck assembly moves or rotates the workpiece is disclosed. The assembly includes a body portion, at least two gripping members and at least two counterweights wherein said counterweights operate to assist in securing a workpiece upon the chuck assembly.

Abstract: A retractable chuck has a housing adapted to be fastened to a spindle of a lathe, a plurality of shafts mounted in the housing and having proximate ends near the lathe adapted to be coupled to a drawbar of the lathe, and jaws each fastened to one of the shafts. The shafts are formed with a guide groove and guide pins fixed to the housing are received in one of the guide grooves. Each of the grooves has a first portion extending parallel to the central axis of the respective shaft, and a second portion extending obliquely with respect to the central axis of the shaft from one end of the first portion near the lathe toward the proximate end of the chuck. This makes it possible to clamp a stepped workpiece.

Abstract: A gripping apparatus is disclosed that includes a housing that has at least two pivot trays. Each pivot tray includes a jaw cavity and a pivot pin notch. The gripping apparatus further includes at least two jaws that have a pivot pin. Each jaw is positioned in a respective jaw cavity and each said pivot pin is positioned in a respective pivot pin notch. At least one retaining cap secured to said housing for securing said pivot pins in said pivot pin notch and thereby allowing said jaws to pivot within said respective jaw cavities.

Abstract: The clamping chuck comprises six jaw carrier arms (4) that are operated two by two by one and the same compensator (5). Each compensator hinges with a pulling member (3) centered on the axis of the chuck and sliding axially in its main body (1) through the action of a traction rod (11). The pulling member is provided with pairs of wings (14a, 14b) extending on either side of the central portion of the compensator (5). Application to clamping chucks for high speed machining.

Abstract: The invention provides a chuck including a plurality of jaws (8), each of which is fixed to the forward end of a jaw carrier arm (5), said arm (5) being borne by a pivot joint (6) mounted on the body (1) of the chuck and the rotation of which imparts to the jaw (8) an essentially radial movement, said rotation being controlled by radially displacing a sliding member (4) pushing a truncated sphere (10) housed between said sliding member (4) and a recess provided in the arm (5) to the rear of said pivot joint (6). Furthermore, said truncated sphere (10) is capable of sliding over the plane surface of contact with the sliding member (4), said jaw carrier arm (5) then sliding in the pivot joint (6) in an essentially axial direction, while being drawn rearwards by a return spring (7). Application to the clamping of a piece while pressing it axially against its stops.

Abstract: A clamping device for objects such as workpieces to be treated and the like has a base body having at least one abutment surface for at least one object to be clamped, at least one clamping finger located on a movable carrier and having at least one clamping surface for at least one object to be clamped, so that a clamping force for clamping the at least one object is applied between the abutment surface and the clamping surface, an actuating element in operative connection with the at least one carrier for applying a clamping force in a clamping direction and opposite to it so that the carrier with the clamping finger being movable in a direction substantiallytransverse to the clamping direction relative to the actuating element, and a bearing block in which the carrier with the clamping finger is held movably relative to the bearing block, the bearing block being displaceble in the base body substantially transversely to the clamping direction.

Abstract: A chuck has a chuck body adapted to be rotated about a chuck axis and formed with a plurality of axially forwardly open passages each having a pair of angularly confronting side faces, respective guides pivotal in the passages about respective guide axes extending secantally of the chuck axis, and respective elongated jaw arms axially slidable in the guides. Each jaw arm has a pair of oppositely angularly directed side faces angularly confronting and spaced from the respective passage side faces. Two guide plate in each of the passages each have an outer face engaging one of the respective passage side faces and an inner face engaging the respective arm side face. These plates are releasably fixed in the chuck body.

Abstract: An edge handling chuck which operates to maintain a semiconductor wafer at a desirable orientation while rotating the wafer at high speeds is disclosed. The edge handling chuck consists of a cylindrical plate which holds a silicon wafer using multiple spring loaded edge wafer clamps. Gas passes through a center hole in the cylindrical plate and is dispersed to the atmosphere using multiple pressure relief openings in the cylindrical plate. The purpose of this gas arrangement is to stabilize the wafer due to spinning vortex effects. The cylindrical plate has mounted therein an ertalyte ring which provides an area of angled contact for the wafer. The gas arrangement operates to pass gas to the slight space between the semiconductor wafer and the cylindrical plate, thereby contacting a lower surface of the wafer, and subsequently out of the arrangement using the pressure relief holes.

Abstract: In the broader aspects of the invention, there is provided a new and improved tool driver having a shaft with a longitudinal axis and opposite ends and tools therefor. A boss is secured at one of said shaft ends by which the tool driver is connected to a rotary tool. A tool collate is secured at the other of the shaft ends by which the tool driver may be driven by a surgical hand piece having a chuck in which the collate may be positioned. The boss has a surface which engages the tool and positions the tool exactly coaxially of the tool driver. A latch mechanism is provided to hold the rotary tool on the boss, whereby the rotary tool is held exactly coaxially of the driver during use. The rotary tool which is used with the driver has a bottom tool driver opening which has the same dimensions as the boss of the tool driver of the invention. The boss thus fills the opening and the opening is complementary to the boss.

Abstract: An edge handling chuck which operates to maintain a semiconductor wafer at a desirable orientation while rotating the wafer at high speeds is disclosed. The edge handling chuck consists of a cylindrical plate which holds a silicon wafer using multiple spring loaded edge wafer clamps. Gas passes through a center hole in the cylindrical plate and is dispersed to the atmosphere using multiple pressure relief openings in the cylindrical plate. The purpose of this gas arrangement is to stabilize the wafer due to spinning vortex effects. The cylindrical plate has mounted therein an ertalyte ring which provides an area of angled contact for the wafer. The gas arrangement operates to pass gas to the slight space between the semiconductor wafer and the cylindrical plate, thereby contacting a lower surface of the wafer, and subsequently out of the arrangement using the pressure relief holes.

Abstract: A hard carbon film is formed over an inner surface of a guide bush by fixing an auxiliary electrode support member for supporting an auxiliary electrode of a jig for forming a film in a center bore of the guide bush by an auxiliary electrode insulation member, disposing an auxiliary electrode in alignment with the axis of the center bore so as to face the inner surface, disposing legs, and a first electrode plate, a second electrode plate, and the insulation member which are fixed to the legs are placed on the bottom of a vacuum vessel placing the guide bush on the first electrode plate contacted electrically with a power source, while the projection of the auxiliary electrode support member projecting out of the auxiliary electrode insulation member is contacted electrically with the second electrode plate.

Abstract: A wheel component has an annular extension formed upon an end. The extension is clamped to a wheel lathe and allows turning a tire bead seat upon the wheel component adjacent to the extension.

Abstract: A chuck has a chuck body, an actuating element limitedly axially displaceable in the body, a first set of guide pistons axially fixed in the actuating element, angularly spaced about the axis, and each forming a guide passage extending at a small acute angle to the chuck axis, and a second set of guide pistons limitedly axially movable in the actuating element, angularly spaced about the axis, interleaved with the axially fixed guide pistons, and each forming a guide passage extending at a small acute angle to the chuck axis. Respective jaw bolts slidable in the passages each have an outer end projecting forward from the chuck body and a rear end axially coupled to the chuck body. The outer ends of the jaw bolts of the axially fixed pistons define a fixed-jaw circle centered on the chuck axis and the outer ends of the jaw bolts of the axially movable pistons define a movable-jaw circle centered on the axis.

Abstract: A diffusion bonding apparatus for pipes that are supplied downward from above comprising a lower block for holding a lower pipe and an upper block for holding and pressing an upper pipe against the lower pipe. In the apparatus, three or more hydrraulic cylinders are provided in a lifting member of the upper block about a joint where the upper pipe is held in such manner that the cylinders are located in a circumference of a circle.

Abstract: A coupling for parallelepiped-shaped or block-shaped mounting components for chucking workpieces in defined and reproducible positions, wherein the mounting components are provided with fitting bores and transverse bores having the same cross-sections and being arranged in regular coordinate intervals. The coupling includes a coupling member having a projection which can be inserted with precise fit into a hollow space provided at the end face of a mounting component to be connected. A plurality of hook elements are arranged in the projection, wherein the hook elements can be pivoted so as to produce a positively locking engagement with the wall surface of an adjacent fitting bore or transverse bore.

Abstract: Clamping is ensured by at least two pivoting arms one end of which co-operates with a half draw member (10a, 10b) via a link having a truncated sphere (19) and an inclined plane (10). The draw member is mounted coaxially outside a locking ring (9) displaceable through the action of a traction rod (5). The system of transmission between the ring and the draw member is provided with compensating and locking means constituted by a guide (11), a compensating disk (13) and an adjusting member (14) co-operating with an oblique face of the compensating disk.

Abstract: A fixture for holding a brake drum or other similarly shaped workpiece for machining. The fixture includes a body having a body cavity and a clamping assembly disposed therein. The clamping assembly includes a positioning plate having a plurality of positioning posts secured thereto. The positioning posts are received within fastener apertures formed in the brake drum mounting face for locating the drum within the fixture so that the drum axis is coaxially aligned with the fixture axis for proper machining. The clamping assembly further includes a clamping plate and clamping flange for clamping the mounting face of the brake drum during machining to simulate the compressive forces applied to the drum as it is mounted to a vehicle during operation. The fixture further includes first and second pluralities of chucking assemblies for gripping the body of the brake drum along respective first and second spaced apart planes thereby reducing distortions caused by the cutting tool during machining.

Abstract: An apparatus for cutting slots in corrugated and twin-wall pipes that have annular elevations alternating with annular impressions, comprises a machine frame with a pipe duct and a lifting carriage for moving a pipe through the pipe duct. Two groups of holding and centering levers are provided which are engageable with a pipe for straightening and retaining the latter axially and radially. Further, saws are provided which are disposed between two groups of holding and centering levers on the machine frame and which are movable to reciprocate lineally and radially in relation to the axis of the pipe duct.

Abstract: A device for removing objects adhered to a plate for bonding a semiconductor wafer, which can efficiently and completely remove the objects adhered on the chamfered portion of the bonding plate. The rotating shaft 12 of the head for removing adhered objects from the peripheral surface is inclinatorily mounted with respect to the top surface 52 of the bonding plate 5. The peripheral chamfered portion 51 is not aligned with the extended line of the central line 12c of the rotating shaft 12. The upper peripheral surface 21a of the outer tip 21 of the chuck 2 is inclinatorily mounted.

Abstract: A lathe chuck assembly is configured for high-speed turning operations. The assembly includes a riser adapter and a yolk plate movably connected with respect to the riser adapter. First, second and third cam arms are connected to the yolk plate for grasping a workpiece for turning operations. Each cam arm includes a cam slot formed therein. A face plate is mounted to the riser adapter. The face plate includes first, second and third cam arm openings formed therein for receiving cam pins for cooperation within the respective cam slots. The face plate includes a locally thickened cross-sectional area surrounding each cam arm opening for added structural integrity and a plurality of locally thinned cross-sectional areas spaced across the face plate for weight reduction. A web structure of substantially uninterrupted cross-sectional thickness is provided for structural integrity at high rotational speeds.

Abstract: A device that automates the opening and closing of a rocker bearing of the type containing at its end a shaft mobile in a rotating manner and a flywheel capable of moving to cover a seat in which is placed the end of a winding rod. The device contains a jack fixed on the top of a body of the bearing in a manner able to pivot around an axis perpendicular to the axis of rotation of the bearing. The rod contains at its end a ball and socket joint on which is mounted a roller which lodges itself in a peripheral groove in the rockable flywheel of the bearing.

Abstract: Even though the shape and size of an aluminum wheel to be chucked for machining is changed, it is possible to easily deal with this situation and to simply chuck the same. In a finger chuck which finger levers 5 are swingably mounted in the radius direction via fulcrum point parts 8 installed at adequately spaced positions in the circumferential direction of the outer circumference of a chuck body, the front end face part of the chuck body front part, which constitutes the front portion of said fulcrum point parts, is eliminated, a plurality of front end face parts 12 which are intended to be selectively replaced and mounted at said eliminated portion are formed integral with each other, and at this time said plurality of front end face parts are provided with a clamp seat 14 and a centering member 23 so that each of said front end face parts can be applied to specified kinds of different workpieces w.

Abstract: A chuck apparatus is operative to center and lock an aluminum wheel in a lathe having a machining centerline. The chuck includes a face plate adapted for rotation about the centerline, and first, second and third radial slide blocks slidably movable perpendicularly with respect to the centerline and adapted to receive locators. First, second and third clamps are equally spaced about the periphery of the face plate and are adapted for applying a clamping force to the aluminum wheel in a direction parallel to the centerline. The slide blocks are actuated independently of the clamps to facilitate centering of the wheel prior to clamping. The slide blocks are selectively movable in a first direction radially outward from the centerline for causing the locators to engage the wheel and a second direction radially inward to cause the locators to engage the wheel.

Abstract: A shaft bearing for mounting the shaft ends of a rotating workpiece to be machined, especially an intaglio printing cylinder, has a rotatably mounted clamping chuck clamping the shaft end and having a hollow clamping head. The clamping head has gripping parts mounted so as to be radially adjustable relative to the longitudinal axis of the clamping head. Each gripping part is mounted rotatably about a pivot axis extending parallel to the longitudinal axis, and is guided, in a region distant from the pivot axis, along an arcuate guide track extending around the longitudinal axis. Each gripping part is configured so as to extend at a decreasing distance from the longitudinal axis and being movable relative to the guide track for the purpose of clamping the shaft end.

Abstract: A double extractor and an electrode supply station are provided for automatically replacing electrodes in opposing jaws of a resistance welding machine. With coated sheet steels now used for car body structures, it is found that electrodes must be replaced more often. The automatic replacement system is programmed to replace electrodes when the welding machine is idle such as between the movement of car bodies or other structures moving on a conveyor. A double extractor has a first position for extracting top electrodes and a second position for extracting bottom electrodes. Both positions have a plurality of gripping fingers operated by a cam, which simultaneously twist and pull-off the electrodes from the jaw. After the jaw has been removed, the gripping fingers release the old electrode.

Abstract: A collet assembly for a bending apparatus has a support ring the support ring being connected coaxially to a tubular support member, five jaws being pivotally connected to the free end of the support ring by means of parallelogram linkages, each of the parallel linkages having a pair of links one disposed radially inwardly of the other to permit movement of the jaws transverse to the axis of the support rings, the jaws being spaced angularly around the circumference of the support ring; an actuating assembly has an outer ring connected to a control sleeve slidably mounted on the tubular support member and an inner ring disposed on the internal diameter of the support ring, the inner ring defines a cam formation for engagement with corresponding formations on the inner link of each parallelogram linkage, the inner ring of the actuating assembly being connected to the outer ring through elongate slots in the support ring, so that the actuating assembly may be moved axially with respect to the support ring betwe

Abstract: A dry composition dispenser for dispensing powdered or granular materials comprising a frame, a support surface rotatably secured to the frame, a rotator for selectively rotating the support surface, a plurality of bins secured to the support surface in which each bin may contain a different powdered or granular material, a metering assembly residing in each bin, and a metering motor which when engaged with a metering assembly in a bin containing material to be dispensed, may be operated to dispense material from the selected bin.

Abstract: This invention relates to a gripping jaw (1) comprising: a body (4); a traction rod (6) sliding axially in the body (4); at least one jaw holder (3) sliding radially in the body (4); and a transmission system (7,8) converting axial translation of the traction rod (6) into the radial translation of each jaw holder (3). Each jaw holder (3) is fitted with a guiding member (10) guided radially along a groove (14) recessed within the chuck (1), the member being uniquely free to swivel axially in relation to the jaw holder.

Abstract: A centrifuge is provided with a mounting arrangement that secures a centrifuge bowl to a turntable in response to centrifugal force generated when the turntable is rotated. The centrifuge includes first and second retainers, one of which is connected to the turntable, while the other is connected to the centrifuge bowl. The second retainer engages the first retainer when the first and second retainers are in an interlocking position to secure the centrifuge bowl to the turntable. A movable arm is provided on the turntable and coupled to the second retainer, the movable arm has a ballast that forces the movable arm and second retainer in a first direction in response to centrifugal force generated by rotating the turntable so that the second retainer is forced into the interlocking position with the first retainer. In one embodiment, a vacuum applied to an opening in the turntable assists in mounting a centrifuge bowl to the turntable.

Abstract: A fixture for mounting a vehicle wheel upon a lathe. The fixture includes a support structure which carries a plurality of movable arms. The arms extend axially within the wheel rim and through the wheel pilot hole. The arms have jaws formed on their ends. The arms are movable to cause the jaws to clamp the wheel hub against the support structure. Because the arms clamp the wheel hub, the entire outside surface of the wheel rim is exposed for machining, allowing machining of both tire bead seats during the same machining operation.

Abstract: A chuck mechanism for holding rotating tools in gear driven or turbine driven medical/dental devices. The chuck includes a bur tube which releasably receives a shaft of a dental tool, a tilt plate which extends through the bur tube and which has a hole through which the tool extends, and a tilt plate pusher which is moveable axially with respect to the bur tube. The tilt plate is moveable between a first, unlocked, position in which the edges of the tilt plate hole are spaced slightly from the dental tool shaft so that the shaft may be freely moved axially relative to the tilt plate, and a second, locked, position in which the tilt plate edges contact the shaft to prevent axial and rotational movement of the shaft relative to the tilt plate. The tilt plate is preferably spring biased to its locked position, and the tilt plate pusher is preferably operated by a push button to move the tilt plate to its open position.

Abstract: A finger chuck for use with a machine tool comprises a chuck main body having a front wall and a rear wall, the front wall and the rear wall defining a space therebetween. A centering device is supported by the front wall for centering the workpiece on the axis of the chuck main body. Jaws are supported by the front wall for holding the workpiece. A rearwardly protruding portion is provided on the front wall toward the rear wall within the space, and a cavity is defined in the protruding portion so as to open in the front surface of the front wall, the cavity accommodating at least part of the centering device. A drawing member extends through the rear wall in the axial direction, and is shifted by a drive source in the axial direction. A guide portion is disposed in the space integrally with the drawing member, so as to be guided on the protruding portion in the axial direction. A seat surface is formed around the guide portion, and a spider is supported on the seat surface for movement therealong.

Abstract: A cleaning apparatus for cleaning a semiconductor wafer comprises a spin chuck having a turn table. A gas supplying passage is formed in a shaft for supporting the turn table to supply a protecting gas to the rear surface of the wafer. A conical movable member, arranged to cover an end off the shaft, is movable upward and downward in accordance with the flow off the protecting gas supplied thereto. Inner ends of three reciprocating arms, supported by the turn table and extending in radial directions, abut against an outer surface of the movable member and biased by springs. Fixed pins are arranged on the turn table at positions which divide the circumference of the turn table into three equal parts, along the edge of the wafer. Three swingable levers are arranged such that one is provided between two adjacent fixed pins. One end of each swingable lever is connected to the outer end of each reciprocating arm and the other end of the lever has a pin brought into contact with the edge of the wafer.

Abstract: A swivel mounting for mounting a rocker arm of a chuck and allowing pivoting movement of the rocker arm includes a cylindrical mounting member disposed in a cavity of the chuck and having an axial bore therethrough defining an interior surface thereof and a cylindrical bearing member disposed within the mounting member having an axial bore therethrough defining an interior surface thereof for supporting a portion of the rocker arm. The bearing member further has an exterior surface which is a mating surface with the interior surface of the mounting member. One of the mating surfaces has an annular channel therein, and the other of the mating surfaces has an annular projection thereon. The projection is positioned and sized to fit inside the channel, and the height of the projection is less than the height of the channel. Also disclosed is a chuck employing such swivel mountings.

Abstract: A tool changer for tools of a machine tool has a gripper on which two movable jaws are arranged for positive gripping of the tools and on which is mounted an actuation element which is axially displaceable in the longitudinal axis and swings the jaws around their respective pivot axis into a spread position for inserting and removing the tools and into a closed position for positive gripping of the tools. Between the actuation element and each of the two jaws there are provided one opening linkage and one closing linkage each. Each of the two opening linkages has an oblique surface provided on the actuation element that interacts with an opposing surface provided on the jaw for opening the respective jaw. Each of the two closing linkages has a guide bevel provided on the actuation element which interacts in each case by means of an associated rolling element with a contact surface provided on the jaw for closing the respective jaw. The two closing linkages positively lock the jaws in the closed position.

Abstract: A chuck jaw is provided for holding an irregularly-shaped object such as a differential housing on a lathe. A chuck jaw body which is pivotally mounted to each chuck mounting block to pivot about an axis substantially tangential to a cylinder defined around the turning radius of the lathe. A first end of the chuck jaw body extends radially further in than a second end of the chuck jaw body, so that the first end can engage a radially smaller part of the irregular object, while the second end engages a radially larger part. Springs and adjustment screws preferably are provided to allow adjustment of the initial angle of the first and second ends.

Abstract: A device for clamping a workpiece has a base body rotatable together with a spindle of a machine tool. The base body has a hollow portion defining a space. A piston is mounted in the space so as to be movable back and forth by fluid supplied through passages communicating with chambers defined on both sides of the piston, respectively. A diaphragm is provided over a front portion of the base body with a predetermined gap left therebetween. A peripheral portion of the diaphragm is secured to the base body, while a central portion of the diaphragm engages the piston. A plurality of clamping jaws are provided on the front surface of the diaphragm.