Abstract: A reticle transport system having a magnetically levitated transportation stage is disclosed. Such a system may be suitable for use in vacuum environments, for example, ultra-clean vacuum environments. A magnetic levitated linear motor functions to propel the transportation stage in a linear direction along a defined axis of travel and to magnetically levitate the transportation stage.

Abstract: Provided is a multifunctional lithography device, including: a vacuum substrate-carrying stage configured to place a substrate and adsorb the substrate on the vacuum substrate-carrying stage by controlling an airflow, so as to control a gap between the substrate and the mask plate; a mask frame arranged above the vacuum substrate-carrying stage and configured to fix the mask plate; a substrate-carrying stage motion system arranged below the vacuum substrate-carrying stage and configured to adjust a position of the vacuum substrate-carrying stage, so that a distance between the substrate and the mask plate satisfies a preset condition; an ultraviolet light source system arranged above the mask plate and configured to generate an ultraviolet light for lithography; and a three-axis alignment optical path system configured to align the ultraviolet light with the mask plate.

Abstract: A piezoelectric motorization system has a mechanically flexible body that has one or more surfaces for placing piezoelectric actuators. The system has groups of piezoelectric actuators each positioned on one of the surfaces of the mechanically flexible body that is connected to the electronic circuitry. The electronic circuitry controls the driving of the mechanical loads by the mechanically flexible body by injecting sets of control signals into different groups of actuators positioned on the mechanically flexible body. Each control signal operates groups of driving frequencies with an adjustable amplitude ratio and an adjustable phase difference among driving frequencies. And, under a set of boundary conditions exhibited by a set of structural dimensions of the mechanically flexible body, each control signal induces multi-mode resonance of the mechanically flexible body for driving the mechanical loads multi-dimensionally.

Abstract: A displacement device includes a stator having non-parallel stator-x and stator-y elongated traces. The device also includes a moveable stage having a first magnet array with first magnetization segments linearly elongated in a stage-x direction and having magnetization directions generally orthogonal to the stage-x direction. The first magnet array includes a first pair of adjacent first magnetization segments made up of two first magnetization segments adjacent to one another in a stage-y direction non-parallel to the stage-x direction. Each first magnetization segment in the first pair has a corresponding magnetization direction oriented at a corresponding angle ?n about a corresponding stage-x axis as measured from a positive stage-z direction that is generally orthogonal to both the stator-x and stator-y directions. The corresponding angle ?n is one of 45°+n90° where n is any integer. Each first magnetization segment in the first pair has a different magnetization direction.

Abstract: A substrate stage device that moves a substrate has: a noncontact holder that supports the substrate in a noncontact manner; a first drive section that moves the noncontact holder; scale plates that serve as a reference of movement of the noncontact holder; a first measurement section that has scale plates and Y heads, one of the scale plates and the Y heads being provided at the noncontact holder and the other of the scale plates and the Y heads being provided between the scale plates and the noncontact holder, and that measures position information of the Y heads; a second measurement section that measures position information of the other of the scale plates and the Y heads; and a position measurement system that obtains position information of the noncontact holder on the basis of the position information measured by the first and the second measurement sections.

Abstract: A linear induction motor (LIM) including a primary core extending longitudinally and having a front portion and a rear portion. Coils are mounted on the primary core. The coils include a first set of coils mounted on the front portion and spaced apart from each other by a first pitch. The coils further having a second set of coils, between the first set of coils and the rear portion, which are spaced apart from each other by an industry-standard distance. Each one of the first pitch is greater than the industry-standard distance for reducing an end effect onto the LIM when the LIM travels forward. The first set of coils may have different spaces between its coils and may also include equally spaced coils.

Abstract: A displacement device includes a stator having non-parallel stator-x and stator-y elongated traces. The device includes a moveable stage having a first magnet array with first magnetization segments linearly elongated in a stage-x direction and having magnetization directions generally orthogonal to the stage-x direction. The first magnet array incorporates a first pair of adjacent first magnetization segments having two first magnetization segments adjacent to one another in a stage-y direction non-parallel to the stage-x direction. Each first magnetization segment in the first pair has a corresponding magnetization direction oriented at a corresponding angle ?n about a corresponding stage-x axis as measured from a positive stage-z direction that is generally orthogonal to both the stator-x and stator-y directions. The corresponding angle ?n is one of 45°+n90° where n is any integer. Each first magnetization segment in the first pair has a different magnetization direction.

Abstract: A sensor and a method are disclosed for analyzing fluid and/or rock samples from a subsurface formation. Embodiments of the sensor and method utilize an array of magnets arranged in a specific way. The array and its arrangement may allow for NMR analysis of multiple samples or analysis of fluid samples which were not possible with existing technology. Further details and advantages of various embodiments of the method are described in more detail herein.

Abstract: A Lorentz actuator includes: a magnet arrangement; a coil arrangement; and a current controller for supplying a current to the coil arrangement; wherein the magnet and coil arrangement are moveable relative to each other in a main direction, wherein the coil arrangement has a first and second coil portion that are separately operable by the current controller, such that when the same current is supplied to the first coil portion as is supplied to the second coil portion, Lorentz forces generated in the main direction by the first and second coil portions are also the same, and wherein the current controller is configured to supply a current to the first and second coil portions with a phase difference in order to compensate for parasitic reluctance and/or Lorentz forces in an auxiliary direction perpendicular to the main direction.

Abstract: While a wafer stage linearly moves in a Y-axis direction, a multipoint AF system detects surface position information of the wafer surface at a plurality of detection points that are set at a predetermined distance in an X-axis direction and also a plurality of alignment systems that are arrayed in a line along the X-axis direction detect each of marks at positions different from one another on the wafer. That is, detection of surface position information of the wafer surface at a plurality of detection points and detection of the marks at positions different from one another on the wafer are finished, only by the wafer stage (wafer) linearly passing through the array of the plurality of detection points of the multipoint AF system and the plurality of alignment systems, and therefore, the throughput can be improved.

Abstract: A displacement device comprises a stator comprising non-parallel stator-x and stator-y elongated traces. The device comprises a moveable stage comprising a first magnet array comprising first magnetization segments linearly elongated in a stage-x direction and having magnetization directions generally orthogonal to the stage-x direction. The first magnet array comprises a first pair of adjacent first magnetization segments comprising two first magnetization segments adjacent to one another in a stage-y direction non-parallel to the stage-x direction. Each first magnetization segment in the first pair has a corresponding magnetization direction oriented at a corresponding angle ?n about a corresponding stage-x axis as measured from a positive stage-z direction that is generally orthogonal to both the stator-x and stator-y directions. The corresponding angle ?n is one of 45°+n90° where n is any integer. Each first magnetization segment in the first pair has a different magnetization direction.

Abstract: A first stage system having a first stage and a first drive system that moves the first stage is configured to hold a mask illuminated with illumination light. A second stage system having a second stage and a second drive system that moves the second stage is configured to hold a substrate. A measurement system having a first encoder system and a second encoder system measures positional information of the first and second stages, respectively. The second encoder system measures the positional information of the second stage with a plurality of heads that face a grating section. The first and second drive systems are controlled while compensating for a measurement error that occurs due to at least one of a gradient and a telecentricity of the head, based on correction information.

Abstract: A stage mover for moving a stage relative to a stage base includes a conductor assembly and a magnet assembly. The conductor assembly is coupled to the stage base and a plurality of coil units with each coil unit having one or more coils. Each of the coils has a coil width. The magnet assembly interacts with the conductor assembly and includes a plurality of spaced apart magnet arrays. Each of the magnet arrays is spaced apart from each adjacent magnet array by an array gap that is at least equal to the coil width so that independent and symmetric magnetic flux distribution can be achieved for each of the magnet arrays.

Abstract: A first stage system having a first stage and a first drive system that moves the first stage is configured to hold a mask illuminated with illumination light. A second stage system having a second stage and a second drive system that moves the second stage is configured to hold a substrate. A measurement system having a first encoder system and a second encoder system measures positional information of the first and second stages, respectively. The second encoder system measures the positional information of the second stage with a plurality of heads that face a grating section. The first and second drive systems are controlled based on correction information for compensating for a measurement error of the second encoder system that occurs due to the heads and measurement information of the first and the second encoder systems.

Abstract: There is provided an encoder device to measure a relative moving amount between a first and second members. The encoder device includes: a reflective-type diffraction grating on the first member; a light source unit to radiate a measuring light; a first optical member on the second member; a first and second reflecting units on the second member that cause first and third diffracted lights generated via diffraction of the measuring light and having orders different from each other to come into the diffraction grating respectively, and cause second and fourth diffracted lights generated via diffraction of the first and third diffracted lights respectively to come into the first optical member; photo-detectors configured to detect interference lights between two diffracted lights and other light beam respectively; and a measuring unit to obtain the relative moving amount by using detection signals from the photo-detectors.

Abstract: A position-detection system for a drive having a rotor, which can move along a path, comprises an encoder unit, a signal-detection unit and a signal-processing device. The encoder unit or the signal-detection unit is arranged on the rotor, and the respective other unit is arranged along the path. Furthermore, the signal-processing device is designed to generate a first position signal and a second position signal on the basis of a relative position of the encoder unit and signal-detection unit. The signal-processing device is designed to determine a longitudinal position of the rotor along the path on the basis of phase values of the first and second position signals. Furthermore, the signal-processing device is designed to determine a distance, directed transversely with respect to the path, between the encoder unit and the signal-detection unit, on the basis of amplitude values of the first and second position signals, and to detect an operating state of the drive on the basis of the distance.

Abstract: An exposure apparatus performs scanning exposure of a substrate with an illumination light via a projection optical. A mask is supported on a first base member, with a slider provided inside a movable member. The first base member is arranged above the projection optical system and has a first opening through which the illumination light passes. The mask is supported in a second opening of the slider, through which the illumination light passes. The slider moves inside the movable member by a first drive system. A stage having a holder that holds the substrate is moved on a second base member by a second drive system. The first and the second drive systems move the mask and the substrate relative to the illumination light during scanning exposure. The movable member is moved by a reaction force generated by a movement of the slider by the first drive system.

Abstract: A system including a first circuit substrate having conductive traces in layers of the first substrate, the first substrate having a first diamagnetic layer, a second circuit substrate having conductive traces in layers of the second substrate, the second substrate having a second diamagnetic layer, at least one manipulator residing adjacent one of the first and second diamagnetic layers, the manipulator being moveable across the first and second diamagnetic layers through magnetic fields generated by selected application of current to the conductive traces, and a controller coupled to the traces arranged to produce signals which result in the current being applied to the conductive traces.

Abstract: Provided is a linear actuator wherein a moving element can be moved in a direction normal to the direction of arrangement of coils. The moving element 1 has first to third magnets 6a-6c arranged in the X-direction. Each of the first to third magnets 6a-6c has N poles and S poles arranged in the ?-direction. The N poles and S poles of the second magnet 6b are shifted in the ?-direction relative to the N poles and S poles of the first magnet 6a. The N poles and S poles of the third magnet 6c are shifted in the ?-direction relative to the N poles and S poles of the second magnet 6b. A stator 2 has at least two salient poles 8a arranged in the ?-direction, and at least two coils 4a, 4b wound around the salient poles 8a.

Abstract: A first stage system having a first stage and a first drive system that moves the first stage is configured to hold a mask illuminated with illumination light. A second stage system having a second stage and a second drive system that moves the second stage is configured to hold a substrate. A measurement system having a first encoder system and a second encoder system measures positional information of the first and second stages, respectively. The second encoder system measures the positional information of the second stage with a plurality of heads that face a grating section. The first and second drive systems are controlled based on correction information for compensating for a measurement error of the second encoder system that occurs due to the heads and measurement information of the first and the second encoder systems.

Abstract: The present invention provides a heat-transfer mechanism of a motor primary, wherein a heat-transfer member having a metallic body is sandwiched between a motor moving member and a bearing member, such that the heat-transfer member separates the bearing member from the motor moving member to prevent direct contact there-between while the heat-transfer member is used as a heat-conducting medium, and therefore, heat energy on the bearing member and the motor moving member can be gathered in the heat-transfer member, and the effect of effectively dissipating, by means of conduction, the heat energy from the motor moving member and from the bearing member driven by the motor can be achieved.

Abstract: A drive for an XY-table includes a stationary, ferromagnetic and U-shaped yoke including a first limb and a second limb which are located together in one plane, and having a movable ferromagnetic bar, the yoke and the bar carrying a magnetic circuit with a flux that takes a path across air gaps between the limbs and the bar, and causes vertical reluctance forces there which counteract the gravitational force of the bar. Bar is parallel to and below the plane defined by the limbs.

Abstract: A system and method is provided for providing a thermal distribution on a workpiece during a lithographic process. The system provides a source of lithographic energy to workpiece, such as a workpiece having a lithographic film formed thereover. A workpiece support having a plurality of thermal devices embedded therein is configured to support the workpiece concurrent to an exposure of the workpiece to the lithographic energy. A controller individually controls a temperature of each of the plurality of thermal devices, therein controlling a specified temperature distribution across the workpiece associated with the exposure of the workpiece to the lithographic energy. Controlling the temperature of the thermal devices can be based on a model, a measured temperature of the workpiece, and/or a prediction of a temperature at one or more locations on the workpiece.

Abstract: An assembly includes at least a first motor (10) and a second motor (20) on which first targets (13) and second targets (23) being respectively mounted, the first targets (13) and the second targets (23) are respectively distributed angularly over the first motor (10) and over the second motor (20), each first target (13) having a first angular aperture, each second target (23) having a second angular aperture, the assembly furthermore having an angular position sensor (5) positioned between the motors (10, 20) and adapted to measure the angular position of the targets (13, 23).

Abstract: A substrate is exposed with an illumination light via a projection optical system. A stage that holds the substrate moves below the projection optical system. A measurement system measures positional information of the stage with a plurality of heads that face a grating section. Movement of the stage is controlled based on the positional information measured with the measurement system, while compensating for a measurement error of the measurement system that occurs due to the heads.

Abstract: A stage assembly (10) that includes (i) a stage (14) that retains a device (26); (ii) a reaction assembly (18) that is spaced apart from the stage (14); (iii) a stage mover (16) that moves the stage (14), the stage mover (16) including a magnet array (38) that is coupled to the stage (14) and a conductor array (36) that is coupled to the reaction assembly (18); (iv) a temperature adjuster (20); and (v) a control system (22) that selectively controls the temperature adjuster (20). The conductor array (36) includes a set of first zone conductor units (250), and a set of second zone conductor units (252). The temperature adjuster (20) independently adjusts the temperature of the set of first zone conductor units (250), and the set of second zone conductor units (252).

Abstract: A substrate is exposed with an illumination light via a projection optical system. A stage that holds the substrate moves below the projection optical system. A measurement system measures positional information of the stage with a plurality of heads that face a grating section. Movement of the stage is controlled based on the positional information measured with the measurement system, while compensating for a measurement error of the measurement system that occurs due to the heads.

Abstract: A magnetic bearing body supports a rotating shaft using a combined electromagnetic force of a pair of control electromagnets without contact. A controller detects a control index value based on a first coil current passed through a coil of a first control electromagnet of the pair of control electromagnets which generates an electromagnetic force in the same direction as that of a load exerted on the rotating shaft, the control index value being an index of the degree of margin for error in control depending on a value of the first coil current. And the controller controls a middle value of a pair of coil currents passed through the respective corresponding coils of the pair of control electromagnets so that the control index value approaches a predetermined target index value.

Abstract: A substrate is exposed with an illumination light via a projection optical system. A stage that holds the substrate is moved over a base disposed below the projection optical system. An encoder system measures positional information of the stage with a plurality of heads that face a grating section. Movement of the stage is controlled based on the positional information measured with the encoder system, while compensating for a measurement error of the encoder system that occurs due to a head of the plurality of heads. During movement of the stage, one head of the plurality of heads is switched to another head different from the plurality of heads. Correction information for controlling movement of the stage using the another head after the switching is acquired based on the positional information measured with the plurality of heads used before the switching.

Abstract: A controller measures positional information of a stage within an XY plane using three encoders which at least include one each of an X encoder and a Y encoder of an encoder system, and the stage is driven in the XY plane, based on measurement results of the positional information and positional information (p1, q1), (p2, q2), and (p3, q3) in a surface parallel to the XY plane of a head (an encoder) used for measurement of the positional information. Accordingly, it becomes possible to control the movement of the stage with good precision, while switching the head (the encoder) used for control during the movement of the stage using the encoder system which includes a plurality of heads.

Abstract: A controller measures positional information of a stage within an XY plane using three encoders which at least include one each of an X encoder and a Y encoder of an encoder system, and the stage is driven in the XY plane, based on measurement results of the positional information and positional information (p1, q1), (p2, q2), and (p3, q3) in a surface parallel to the XY plane of a head (an encoder) used for measurement of the positional information. Accordingly, it becomes possible to control the movement of the stage with good precision, while switching the head (the encoder) used for control during the movement of the stage using the encoder system which includes a plurality of heads.

Abstract: A motor includes a stator including a plurality of stator poles arranged in a repetitive arrangement with a first pitch, the stator poles facing a first side of a plane of movement, and a mover including a plurality of mover poles arranged in a repetitive arrangement with a second pitch, the mover poles facing a second, opposite side of the plane of movement. The poles of the stator and/or the mover are provided with a winding to alter a magnetic field in the respective ones of the stator poles and the mover poles in response to an electric current through the respective winding. At least one of the stator and the mover includes a permanent magnet for generating a magnetic field extending from the permanent magnet via at least one respective pole of the stator and the mover to the other one of the stator and the mover and back.

Abstract: A method includes obtaining, from a detector of an interferometry system, an interference signal based on a combination of a first beam and a reference beam, subsequent to the first beam being diffracted by an encoder scale, obtaining, through an electronic processor, an error compensation signal based on a non-harmonic cyclic error that modifies the interference signal, and outputting information about a change in a position of the encoder scale relative to an optical assembly of the interferometry system based on the interference signal and the error compensation signal.

Abstract: A linear motor includes a magnet unit and a coil unit. The magnet unit includes two magnet arrays oppositely parallel and symmetrically located on a magnetic yoke: a first and a second magnet array. The coil unit is disposed in a magnetic gap between the two magnet arrays. In a spatial rectangular coordinate system defined by X, Y and Z axes, the coil unit includes a first and a second coil array arranged in a stacked manner in the Z-axis direction and staggered from each other by a distance of ?P in the Y-axis direction.

Abstract: A target positioning device, in particular for a lithography system, comprising a carrier for carrying a target, and a stage for carrying and moving the carrier along a first direction (X). The stage comprising two X-stage bases, both arranged on top of a common base plate, each X-stage base carries an X-stage carriage, and a Y-beam comprising a Y-stage for carrying said carrier and moving the carrier said carrier in a second direction (Y). The Y-beam bridges the space between the X-stage carriages and is connected to the X-stage carriages via a flexible coupling. The device further comprises two motors each for driving a corresponding X-stage carriage along its corresponding X-stage base. The two motors are arranged at least substantially below the stage. Each motor of said two motors is coupled to an eccentric cam or crank which is connected to the corresponding X-stage carriage via a crank shaft.

Abstract: According to one aspect of the present invention, a stage apparatus includes a first stage, a first magnet arrangement, and a stator arrangement that includes a first coil having a first width. The first magnet arrangement is associated with the first stage, and includes a first quadrant and a second quadrant or, more generally, a first sub-array and a second sub-array. The first quadrant has at least one first magnet arranged parallel to a first axis, and the second quadrant has at least one second magnet arranged parallel to a second axis. The first quadrant is adjacent to the second quadrant relative to the first axis, and is spaced apart from the second quadrant by a distance relative to the second axis. The stator arrangement is configured to cooperate with the first magnet arrangement to drive the first stage.

Abstract: A lithographic apparatus is described that comprises a support structure to hold an object. The object may be a patterning device or a substrate to be exposed. The support structure comprises a chuck, on which the object is supported, and an array of shear-compliant elongated elements normal to the chuck and the stage, such that first ends of the elongated elements contact a surface of the chuck and second ends of the elongated elements contact a stage. Through using the array of elongated elements, a transfer of stress between the stage and the chuck is substantially uniform, resulting in minimization of slippage of the object relative to the surface of the chuck during a deformation of the chuck due to the stress.

Abstract: A method of building structures using diamagnetically levitated manipulators includes depositing, with a first end effector attached to a first manipulator, a first adhesive at a first location on a first surface, picking up, with a second end effector, an article, moving the article to the surface, and placing the article on the adhesive on the surface.

Abstract: A position measurement system includes a first part and a second part for determining a position of a first member relative to a second member by providing a position signal representing a position of the first part relative to the second part, and a computational unit comprising an input terminal for receiving the position signal. The computational unit is configured to, in use, apply a conversion to the position signal to obtain a signal representing a position of the first member relative to the second member; and apply an adjustment to the conversion to at least partly compensate for a drift of the first part or the second part or both. The adjustment is based on a predetermined drift characteristic of the first part or the second part or both respectively. The predetermined drift characteristic includes one or more base shapes of the first part and/or the second part.

Abstract: A stage device includes a base and a stage movable portion that is movable along a surface of the base. An interferometer measures a position of the stage movable portion using measurement light. At least one of a piping element and a wiring element are connected to the stage movable portion. An auxiliary member, including a plurality of members connected with each other along an axial direction of the piping element, guides a bend of the at least one of the piping element and the wiring element. A plurality of heat insulating sheets are supported by the plurality of members of the auxiliary member. The plurality of heat insulating sheets are provided between a space through which the measurement light of the interferometer passes, and the at least one of the piping element and the wiring element.

Abstract: When a wafer stage WST accelerates and decelerates on a base, a torque that acts on a wafer drive system including the base and the like is cancelled out by a torque that acts on the wafer drive system by driving a counter of a coutermass device along a linear guide in the Z-axis direction at a predetermined acceleration. Thereby, the torque that acts upon the wafer drive system is cancelled and the exposure apparatus can expose the wafer with good accuracy.

Abstract: A magnetic suspension planar motor comprises a structure of superconductor excitation. A primary base plate is in a shape of board. Armature windings are fixed on an air gap side of the primary base plate. A secondary base plate in a secondary structure is evenly divided into 2 h*2 h magnet cells. 2 h2 superconducting magnets are respectively fixed in the magnet cells on the secondary base plate, which resembles a checkerboard pattern. The superconducting magnets are adjacent to each other, neither in a horizontal direction nor in a vertical direction. The superconducting magnets are magnetized parallelly, and magnetization directions of the superconducting magnets are perpendicular to a surface on an air gap side of the secondary base plate. The superconducting magnets in a same row or column have same magnetization directions, and the superconducting magnets in adjacent rows columns have contrary magnetization directions. A cooling container shields all of the superconducting magnets.

Abstract: A lithographic device includes a cooling device for removing heat from a motor. The cooling device has a cooling element provided in thermal contact with at least part of the motor. The cooling device further has a cooling duct assembly with a supply duct to supply a cooling fluid to the cooling element, and a discharge duct to discharge the cooling fluid from the cooling element. A pump causes the cooling fluid to flow through at least part of the cooling duct assembly. A flow control device controls a flow rate of the cooling fluid through at least part of the cooling duct assembly, to maintain a predetermined average temperature of the cooling fluid in the cooling element.

Abstract: A machine tool having a monolithic base is disclosed. The monolithic base includes at least two flat surfaces that are mutually orthogonal and that are convex with respect to each other. The machine tool includes at least two moveable stages, each mounted to one of the flat surfaces, and each stage also being mutually orthogonal.

Abstract: A system including a first circuit substrate having conductive traces in layers of the first substrate, the first substrate having a first diamagnetic layer, a second circuit substrate having conductive traces in layers of the second substrate, the second substrate having a second diamagnetic layer, at least one manipulator residing adjacent one of the first and second diamagnetic layers, the manipulator being moveable across the first and second diamagnetic layers through magnetic fields generated by selected application of current to the conductive traces, and a controller coupled to the traces arranged to produce signals which result in the current being applied to the conductive traces.

Abstract: A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The controller controls a current applied to the actuator in order to support the weight of the moving member. The bending rigidity of the moving member in the first direction is greater than the bending rigidity of the moving member in a second direction perpendicular to the first direction.

Abstract: A reticle positioning apparatus for actinic EUV reticle inspection including a sealed inspection chamber containing a reticle stage for holding a reticle. The reticle stage has a magnetically suspended upper stage with a long travel in a “y” direction and a magnetically suspended lower stage with a long travel in an “x” direction; and a cable stage chamber isolated from the inspection chamber by a cable chamber wall. The cable stage chamber has a cable stage movable in the “y” direction; and a tube connected at one end to the reticle stage and to the cable stage at the other end. The tube passes from the cable stage through the inspection chamber through a seal in the chamber wall and opening into the cable entry chamber for entry of cables and hoses within the cable stage chamber, which cables and hoses pass through the tube to the reticle stage.

Abstract: A system has a first operation substrate, the operation substrate having at least one sliding surface and at least one conductive trace in a layer in the substrate, at least one flex circuit magnetically coupled to the operation substrate, the flex circuit having at least one sliding surface and at least one conductive trace in the substrate, and at least one manipulator moveable across the sliding surfaces of the operation substrate and the flex circuit by magnetic fields generated by application of current to the conductive traces.

Abstract: A method of propelling a magnetic manipulator above a circuit substrate includes arranging a magnetic manipulator on a diamagnetic layer on a surface of the circuit substrate, generating drive signals using a controller, and applying the drive signals to at least two conductive traces arranged in the circuit substrate below the diamagnetic layer. A circuit substrate to control movement of a magnetic manipulator has a diamagnetic layer on a surface of the substrate, and conductive traces arranged under the diamagnetic layer, the conductive traces arranged in a parallel line pattern in at least two separate layers.

Abstract: This stage apparatus includes a movable table to hold a sample, a levitation unit to operate the movable table at least in a vertical direction, and a linear motor to operate the movable table in a first horizontal direction in a horizontal plane, including a linear motor movable element arranged inside the movable table and a linear motor stator arranged inside the movable table.