Abstract: A fastener driving apparatus includes a spring anvil assembly and an elastomer. The elastomer is capable of being energized under tension or under compression. A drive mechanism acts on the spring anvil assembly and/or anvil to store potential energy in the spring. The drive mechanism thereafter ceases acting on the spring anvil assembly and/or anvil and the potential energy accumulated in the elastomer is released, causing the spring anvil assembly and/or anvil move and to separate from the drive mechanism for a period of free flight of the spring anvil assembly, the anvil thereafter moving to strike a fastener to drive the fastener into a substrate.

Abstract: Current amplitudes in a motor can be controlled by summing a first signal indicative of an output current of the motor with a current command signal, integrating the current command signal with respect to time, and applying a first controller gain to a second signal indicative of the output current of the motor to obtain a gain-controlled signal indicative of the output current of the motor. The method further includes applying a second controller gain to the current command signal to obtain a gain-controlled current command signal, summing the gain-controlled signal indicative of the output current of the motor with the gain-controlled current command signal to obtain a voltage signal, and inputting the voltage signal to the motor such that current amplitudes in the motor are controlled.

Abstract: A radio frequency-assisted fast superconducting switch is described. A superconductor is closely coupled to a radio frequency (RF) coil. To turn the switch “off,” i.e., to induce a transition to the normal, resistive state in the superconductor, a voltage burst is applied to the RF coil. This voltage burst is sufficient to induce a current in the coupled superconductor. The combination of the induced current with any other direct current flowing through the superconductor is sufficient to exceed the critical current of the superconductor at the operating temperature, inducing a transition to the normal, resistive state. A by-pass MOSFET may be configured in parallel with the superconductor to act as a current shunt, allowing the voltage across the superconductor to drop below a certain value, at which time the superconductor undergoes a transition to the superconducting state and the switch is reset.

Abstract: A rotating electrical machine cooling system includes a cooling structure for a rotating electrical machine that is mounted on a hybrid vehicle, and a controller. The cooling structure includes a coolant discharge channel and a coolant supply channel through which a coolant is circulated between an oil pump unit and the interior of a case body that includes the rotating electrical machine therein. The cooling structure further includes a bypass flow channel that connects the oil pump unit and the interior of the case body with each other, and a relief valve that is provided in the bypass flow channel. The oil pump unit includes a mechanical oil pump and an electric oil pump.

Abstract: An electric compressor controller includes a compressor that compresses refrigerant of an air conditioning system; a motor that drives the compressor; an inverter that selectively control switching elements based on PWM pulse signals to supply drive power to the motor and heats the refrigerant by heat generated due to switching of the switching elements during a heating operation; temperature detectors each detects junction temperature of each of the switching elements; a drive controller that supplies the pulse signals to the inverter to control the inverter; and a slope varying unit that variably controls precipitous degree of rising/falling slope waveforms of the pulse signals based on the junction temperature detected by the temperature detectors. According to the electric compressor controller, efficiency for heating refrigerant is improved, so that its own heating ability is improved.

Abstract: A MEMS resonator comprises a resonator body (34), and an anchor (32) which provides a fixed connection between the resonator body (34) and a support body. A resistive heating element (R1,R2) and a feedback control system are used to maintain the resonator body (34) at a constant temperature. A location for thermally coupling the anchor (32) to the resistive heating element (R1,R2) is selected which has a lowest dependency of its temperature on the ambient temperature during the operation of the feedback control.

Abstract: A linear actuator includes a linear actuator body (2), a casing (3) for housing the linear actuator body (2), and insulating oil (L) that fills the casing (3) with a coil (44) of the linear actuator body (2) submerged therein. In such a configuration, heat generated by the coil (44) is quickly released to the oil (L) and is then conducted to the casing (3). The oil (L) fully spreads into gaps in the coil (44), of course. Therefore, heat is released very efficiently. Thus, by improving the heat-releasing characteristic, a linear actuator having a reduced size and a reduced weight is provided.

Abstract: The invention relates to a lighting armature or light generator, comprising a housing, a light source and drive electronics for driving the light source, wherein the having cooling fins made of a plastic composition having an orientation averaged thermal conductivity of at least 2.0 W/m·K.

Abstract: A linear vibrator are disclosed, wherein the linear vibrator includes a housing having a bracket and a case coupled to the bracket to form a receiving space, a spring coupled to an inner face of the case, a vibration unit having a magnet, the magnet being coupled to the spring, a coil, which has a hollow-can shape, disposed over the bracket for vibrating the vibration unit by using a magnetic field generated from the magnet and a magnet field generated from the coil, and a substrate electrically connected to the coil and the substrate interposed between the coil and the bracket, the substrate having an air venting portion being communicated with an inner space of the coil and outside of the coil.

Abstract: An electromagnetic motor (20) comprises a number of head cubicules (24,24?,24?,24??) comprising electromagnets which produce a magnetic charge at the top (45), and a sleeve (49) receiving pistons (26,26?,26?,26??) at the bottom (47), the pistons actionning a crankshaft (21). At the upper face of each piston a permanent magnet is installed such that its polarity is the same as that of the electromagnetic charge of its corresponding head cubicle. The repulsion created produces a torque moment around the crankshaft which turns the crankshaft thereby the motor.

Abstract: A system for converting marine surface wave energy into electric energy includes a barrier disposed generally vertically and having at least a portion thereof disposed above a surface of a body of water. The portion has a substantially planar surface disposed generally transverse to direction of marine surface waves. Bottom edge of the barrier is pivotally connected to one of a floor bed, a rigid formation and a rigid structure. At least one linear electric generator is coupled to storage of electric energy and is operable by a pivotal movement of the barrier. One type of electric generator is disposed external to the barrier while another type is mounted within a barrier chamber.

Abstract: A motor and method of operating the motor are provided. The motor includes a plurality of cylinders arranged in a ring relative to one another and positioned at a non-zero angle relative to one another. Each cylinder includes a piston configured to move within the cylinder. Each cylinder further includes a high-temperature superconductor material in a superconducting state in the presence of an external magnetic field below a critical field strength, wherein the critical field strength is a function of the temperature of the superconductor material. Each cylinder further includes a permanent magnet mechanically coupled to the piston and configured to move within the cylinder and to have a magnetic field that interacts with the superconductor material.

Abstract: A motor control device is electrically connected with a motor. The motor control device includes a controller and a driving circuit. The controller has a default value of time and generates a first driving signal and a second driving signal. The driving circuit includes a first switching element and a second switching element, the first switching element and the second switching element receive the first driving signal and the second driving signal respectively, and the first switching element and the second switching element are switched on or switched off alternately according to the first driving signal and the second driving signal respectively, so as to drive the motor to operate.

Abstract: The present invention provides a vibration transducer which includes a main housing, a top cover, a supporting member, a magnetic yoke structure member, a coil frame, and a coil displaced around the coil frame. The main housing, the top cover, and the supporting member are firmly connected together, the supporting member has an elastic suspending portion, the magnetic yoke structure member is suspended on the suspending portion of the supporting member, the coil frame is fixedly attached to the main housing, and the coil frame has a junction portion made from heat insulation material, the coil frame is secured to the main housing through the junction portion, and a heat dissipating opening is defined in the main housing or the top cover.

Abstract: An alternating current (AC) generator and method of operating the generator are provided. The generator includes a pair of two opposing cylinders. Each cylinder includes a high-temperature superconductor material at a temperature. The superconductor material is in a superconducting state in the presence of an external magnetic field below a critical field strength, wherein the critical field strength is a function of the temperature of the superconductor material. A sum of a non-zero time-invariant magnetic field strength and a time-varying magnetic field strength cycles between at least a first field strength below the critical field strength for the superconductor material at the temperature and at least a second field strength above the critical field strength for the superconductor material at the temperature, such that the superconductor material cycles between a superconducting state and a non-superconducting state. The generator further includes a piston configured to move within the two cylinders.

Abstract: A motor and method of operation are provided. The motor includes a plurality of cylinders, wherein at least two of the cylinders are positioned at a non-zero angle relative to one another. Each cylinder includes a piston configured to move within the cylinder and a high-temperature superconductor material in a superconducting state in the presence of an external magnetic field below a critical field strength, wherein the critical field strength is a function of the temperature of the superconductor material. Each cylinder further includes a permanent magnet mechanically coupled to the piston and configured to move within the cylinder and to have a magnetic field that interacts with the superconductor material.

Abstract: A motor and a method of operating the motor are provided. The motor includes a plurality of cylinders. Each cylinder includes a piston configured to move within the cylinder. Each cylinder further includes a high-temperature superconductor material at a temperature. The superconductor material is in a superconducting state in the presence of an external magnetic field below a critical field strength, wherein the critical field strength is a function of the temperature of the superconductor material. Each cylinder further includes a permanent magnet mechanically coupled to the piston and configured to move within the cylinder and to have a magnetic field that interacts with the superconductor material.

Abstract: A motor system and method thereof are provided, wherein the system includes an energy storage device, a piston assembly including a magnet, at least two end assemblies in operable communication with the piston assembly, and includes first and second end assemblies, each having an electromagnet. The motor system further includes a controller that controls a supply of electrical power to first and second electromagnets of the first and second end assemblies, such that a first polarity of the first electromagnet is opposite a second polarity of the second electromagnet, and the first and second polarities are intermittingly altered by the supply of electrical power, so the magnet of the piston assembly is attracted and repelled from the first and second end assemblies.

Abstract: A rotary and linear motion device includes a magnetic stator assembly, opposed electromagnetic actuators, and a linear-to-rotary converter (e.g., cam). Each electromagnetic actuator includes a coil that is configured to reciprocate relative to the magnetic stator assembly or to linearly translate in a common direction relative to the magnetic stator assembly. The electromagnetic actuators are coupled to the linear-to-rotary converter and upon reciprocation or linear translation, drive the linear-to-rotary converter in rotary or linear motion. The device may be located inside a wheel, which may be part of a vehicle. If part of a wheel of a vehicle, the device can be used to provide propulsion, steering, braking, and suspension for the vehicle.

Abstract: A movable magnet type linear motor with a mover heat-dissipating assembly includes a mover having a housing receiving therein a coil seat for holding a coil, openings being formed at two opposite ends of the housing, end covers being attached to the openings and having central holes so as to allow an inner stator to pass through the holes, wherein a plurality of heat dissipating channels are provided between the coil seat and the housing while the end covers have plural heat dissipating holes corresponding to the heat dissipating channels so that external cool air is allowed to enter the housing through the heat dissipating holes and the heat dissipating channels, thereby cooling the mover.

Abstract: The invention proposes an electric linear drive unit with an electric linear motor that is arranged in or on a basic housing. A sensor device arranged in or on the basic housing serves for determining at least one position of a driving element that is driven by the linear motor. Electric lines are routed from a coil system of the linear motor and from the sensor device to a common connecting point on the basic housing through at least one duct that extends within the basic housing, wherein said electric lines extend through the connecting point to a connector that is arranged at the connecting point and contains connecting means for producing a connection with external lines or cables. The connecting point is sealed by means of an insulating casting- or injection-molding compound at least in the region in which the lines extend from the connecting point.

Abstract: A system (50) for cooling a target element (56) includes a structure (52) having an opening (62) extending through the layer (52), a pumping device (32) positioned behind the structure (52), and a target element (56) positioned in front of the structure (52). Transducers (58, 60) are positioned at opposing ends (74, 76) of the opening (62) between the structure (52) and the target element (56). The pumping device (32) drives a jet (70) of coolant through the opening (62) toward the target element (56). The transducers (58, 60) produce output signals (84, 86) that perturb the jet (70) to control oscillation of the jet (70) in order to stabilize the jet (70) for impingement with a predetermined location (96) on the target element (56). The jet (70) uniformly spreads from the location (96) to provide cooling over a surface (100) of the target element (56).

Abstract: By reviewing a material of a forcer housing and an assembly structure of a coil member with respect to the forcer housing, a thrust force is increased, an optimum shape can be easily given to the forcer housing depending on a purpose of use, and a linear motor can be manufactured at low cost. The linear motor includes a magnet rod composed of a large number of magnetic poles arranged with predetermined pitches along an axial direction and a forcer having a through-hole into which the magnet rod is loosely inserted and reciprocatable relatively to the magnet rod according to an applied electric signal. The forcer is composed of a forcer housing in which the through-hole is defined and a coil member which is arranged on an inner peripheral surface of the through-hole of the forcer housing and to which the electric signal is applied. The forcer housing is formed by mold forming with an insulating nonmetal inorganic material.

Abstract: A motor apparatus includes a plurality of coils arranged along a first direction in a plane perpendicular to central axes thereof, a plurality of magnets each generating a force in cooperation with the coils, and a support member supporting the plurality of coils. Movement of the coils in the first direction due to thermal deformation of the coils is constrained by the coils contacting with a surface of the support member, and movement of the coils in a second direction, which is in the plane and perpendicular to the first direction, due to thermal deformation of the coils, is allowed by the coils sliding in the second direction along the surface.

Abstract: A radiator for a linear or curved mobile motor for removing the thermal distortion of a mover and a transporting member of a linear or curved mobile motor, and a high-accuracy, high-reliability linear or curved mobile motor using it. The linear or curved mobile motor includes a field pole having a plurality of permanent magnets with different magnetic poles arranged alternately along a field yoke, and an armature arranged opposite to the field pole via a magnetic gap and formed by winding a single or a plurality of coils around a core. The field pole is used as a stator and the armature being used as a mover that is relatively moved along the longitudinal direction of the stator.

Abstract: In a linear motor (1), the detent force is reduced by the height of the iron poles (522) being selected differently in the two outer regions of the coil set, preferably by a gradual reduction of the height of the iron poles (522) towards the ends of the stator (2). In combination with a slight inclination of the magnets, the detent forces are further minimized, with negligible losses of the propulsive force. The exact dimensioning of the iron poles (522) is dependent inter alia on the dimensioning of the coils (51) and other characteristics of the linear motor (1) as a whole, and can be found and optimized by simulations. Here, an optimum is sought between as great a reduction as possible of the detent force amplitude and as high a propulsive force as possible.

Abstract: A mover stabilizing and stator cooling arrangement includes an upper sleeve surrounding the mover of the linear motor, a lower sleeve, a thermoconducting sleeve surrounding the stator and axially connected between the upper sleeve and the lower sleeve, a thermal grease filled in the space defined between the upper sleeve and the mover and the space defined between the thermoconducting sleeve and the stator and the space defined between the lower sleeve and the outer tube for quick dissipation of waste heat, a stabilizer ring set between the upper sleeve and the mover to stabilize axial movement of the mover, and a piston and multiple one-way valve sets mounted in the space between the lower sleeve and the outer tube for allowing adjustment of the volume in the thermoconducting sleeve subject expansion/contraction of the thermal grease during temperature change.

Abstract: In a linear actuator (1), on the inside of a rectangular tubular movable element (3), a linear guide (14) that supports the movable element (3) so as to be linearly movable is positioned at a center of the movable element (3), and a position detecting mechanism (20) and load attaching member (13) that sandwich the linear guide are disposed linearly in a vertical direction. This arrangement enables a center of gravity of the movable element (3) to be matched with a center of the linear guide (14). A magnetic circuit is in a bilaterally symmetrical relationship with regard to the center of the movable element (3). Therefore, a center of a thrust force that acts upon the movable element (3) is matched with the center of the movable element (3). The center of the thrust force that acts upon the movable element (3), the center of gravity of the movable element (3), and the center of the linear guide (14) are positioned at the center of the movable element (3).

Abstract: In a moving magnet type linear actuator (10), a stator (30) having an armature (32) including a magnetic iron core (33) fixed on a stator base (31) and an armature winding (34) wound around the magnetic iron core (33); and a movable body (20) having a field permanent magnet (21) arranged oppositely to the magnetic iron core (33) through a magnetic gap and a magnetic holder (22) supporting the field permanent magnet (21) and movably arranged on the stator base (31), the magnetic holder (22) is made of a non-magnetic substance, and a magnetic back yoke (39) is arranged on the side opposite to the armature with respect to the field permanent magnet (22) to from a gap between the magnetic back yoke (39) and the field permanent magnet (21) and is fixed to supporters provided on the stator base (31).

Abstract: A vibrator includes a voice coil and a vibrating member supported by first and second suspensions so as to be vibratory in the axial direction of the coil. Each of the first and second suspensions has an inner ring portion fixed to the vibrating member and an outer ring portion fixed to a casing of the vibrator. The inner and outer ring portions are connected through arcuate portions. Each arcuate portion has a first end connected to the inner ring portion and a second end connected to the outer ring portion. The arcuate portions of the first and second suspensions extend from the first end to the second end, respectively, in the same circumferential direction as seen from one side of the axial direction.

Abstract: A converter converts mechanical energy of a piston to and from electrical energy during each piston cycle.

Abstract: An electricity-generating backpack that is substantially lighter in weight, has the multiple springs replaced with one large spring whose spring constant can be adjusted in the field in seconds, and replaces a DC generator with a brushless AC generator that permits approximately 70% generator efficiency and the generation of up to 20 W of electrical power by converting mechanical energy to electrical power. A device is provided that always removes some electricity, but not too much, as necessary to extract large levels of the electricity while controlling damping by providing electrical damping circuits including a DC-DC converter designed to emulate a desired load at its input terminals. Additional electricity generating E-MOD devices may be used for generating additional power by hooking an E-Mod device to a generator and to the backpack belt at the wearer's hip and includes a wand that fits against the wearer's femur so as to move through a range of motion as the patient walks.

Abstract: A hub unit for use in electrically assisted bicycles is improved in an effect to cool a motor incorporated in the unit. The hub unit has a motor 9 comprising a stator 3 and a rotor 4, and a hub 7 enclosing the motor 9 therein and rotatingly drivable by the rotation of the rotor 4. The unit has a pump 8 for discharging air from inside the hub 7 with the rotation of the hub 7. The air is discharged from inside the hub 7 by the operation of the pump 8, whereby air is admitted into the hub 7 from outside through an air port 59 formed in the hub 7 and is supplied to the motor 9 to cool the motor 9 and reliably prevent the motor from overheating.

Abstract: Apparatus and associated systems or methods include a linear machine with an elongate, axially-slidable core member (i.e., shaft). In one embodiment, the shaft includes at least one radial aperture to provide fluid (e.g., air) communication from an interior volume of a winding tube that contains one or more stationary windings, to either end of the shaft through a lumen that extends axially through the length of the shaft. The stationary windings are spaced apart to permit fluid to flow through a plurality of radial apertures in the winding tube. In particular, fluid circulation across the windings may provide sufficient cooling to increase the machine's maximum current rating. The fluid circulation may also provide pneumatic processing capabilities (e.g., vacuum hold, blow-off). In one exemplary embodiment, the apparatus may be used to insert tube-and-square paper separators into battery casings at high rates.

Abstract: A drive device has a gear unit having a gear shaft and a motor unit having a motor shaft drivingly connected to the gear shaft. At least one cooling unit is arranged within the drive device for dissipating thermal losses. The cooling unit can be arranged in the gear unit or between the gear unit and the motor unit. For example, the cooling unit has at least one fan that can be arranged in a coupling unit between the gear unit and the motor unit. Instead of or in addition to the fan, a cooling liquid flowing through a flow chamber can be used.

Abstract: The cooling means of the linear motor is formed of an assembly of plate parts adapted to dimensions of linear motor stator element plates on which magnets are disposed, piping, and bonding material for securing the plate parts and the piping to each other. Opposite ends of the plate parts are bent to form piping housing portions. The stator element plates and the plate parts are mounted to the machine while overlaid on each other. The piping is passed through the piping housing portions at the opposite ends of the plate parts. Thus, mounting of the cooling means is completed.

Abstract: A circulation system (330) for a mover (328) includes a fluid source (360) that directs a first fluid (356) into a first inlet (364A) of the mover (328) and a second fluid (358) into a second inlet (366A) of the mover (328). In one embodiment, a temperature of the second fluid (358) at the second inlet (366A) is different than a temperature of the first fluid (356) at the first inlet (364A). For example, in one embodiment, the temperature of the first fluid (356) at the first inlet (364A) is at least approximately 10 degrees greater than the temperature of the second fluid (358) at the second inlet (366A). In alternative embodiments, the temperature of the first fluid (356) is at least approximately 2, 5, or 15 degrees greater than the temperature of the second fluid (358).

Abstract: A plane motor device that includes a stator unit, a movable unit movable along a plane above the stator unit, first and second coil units at one or both of the movable unit and the stator unit, in which coil units a current flows for driving the coil unit, and an enclosure partitioned into a plurality of separate regions. The enclosure encloses the first and second coil units in two respective regions of the plurality of separate regions. Each of the two regions has a cooling channel through which cooling refrigerant flows separately from the cooling channel of the other region.

Abstract: An exposure apparatus which exposes a substrate to a pattern. The apparatus includes a channel which causes pure water to flow as a coolant, a temperature adjustment unit which adjusts a temperature of the coolant flowing in the channel, and a UV sterilization unit which performs UV sterilization processing for the coolant flowing in the channel.

Abstract: A linear motor not requiring a yoke structure is provided. A first unit forming a stator is constructed of two permanent magnet rods. The permanent magnet rods each have a magnetically permeable shaft and a permanent magnet row having a plurality of permanent magnets so arranged that opposite polarities of their magnetic poles alternately appear. The permanent magnet row of the permanent magnet rod is arranged with a positional difference of 180° in an electrical angle from the permanent magnet row of the permanent magnet rod. The second unit that constitutes a moving member includes unit cores and winding sets arranged alternately in an axial direction of the shaft. The winding set includes two excitation windings through each of which the permanent magnet rod loosely extends. One excitation winding of the winding set is excited with a phase difference of 180° in an electrical angle from the other excitation winding.

Abstract: A circulation system (330) for a mover (328) includes a fluid source (360) that directs a first fluid (356) into a first inlet (364A) of the mover (328) and a second fluid (358) into a second inlet (366A) of the mover (328). In one embodiment, a temperature of the second fluid (358) at the second inlet (366A) is different than a temperature of the first fluid (356) at the first inlet (364A). For example, in one embodiment, the temperature of the second fluid (358) at the second inlet (366A) is approximately at the boiling temperature of the second fluid (358). In an alternative embodiment, the mover (428) includes a heat transferer (469) that transfers heat from a second passageway (466).

Abstract: In a linear motor, a can has a two-layer structure including an inner can 2 and an outer can 3, and an inner passage 7 formed between an armature winding 9 and the inner can 2 and an outer passage 8 formed between the inner can 2 and the outer can 3 are constituted by each can. Communicating portions 7A and 8A for causing the inner passage 7 and the outer passage 8 to communicate with each other are provided in the vicinity of a refrigerant supply port 5 in each of the cans 2 and 3 in such a manner that a refrigerant supplied from the refrigerant supply port 5 branches into the inner passage 7 and the outer passage 8 and thus flows. Consequently, it is possible to obtain a linear motor armature and a linear motor having a high cooling capability which can prevent the deformation of the can by using a conventional inactive refrigerant to improve the passage for the refrigerant.

Abstract: Guide bar drive in a knitting machine and method of driving guide bar. The drive includes a linear motor composed of a stator and a rotor, in which the linear motor is greater in height than width. The stator has a length in a longitudinal direction and includes at least one narrow side, and the rotor is structured and arranged in the stator for translational movement in the longitudinal direction. A guide rod is positioned adjacent the at least one narrow side and extending in the longitudinal direction to support the rotor. The instant abstract is neither intended to define the invention disclosed in this specification nor intended to limit the scope of the invention in any way.

Abstract: An apparatus including a coil used for generating a thrust to move a movable portion, and a coil support portion which supports the coil. The coil support portion constrains the coil in a direction of the thrust, and slidably supports the coil in a direction perpendicular to the direction of the thrust.

Abstract: The invention relates to a motor part of a linear motor, i.e. the primary part or secondary part of an asynchronous or synchronous linear motor. According to the invention, it is proposed to configure a cooling coil (K), which has a meandering flat structure, from pipe sections (10) of a material with high heat conductivity, as well as plastic deflections (12, 13). The deflections are preferably configured as pre-fabricated molded plastic parts, and the motor element is preferably cast with the attached cooling coil. According to the invention, cooling coils can be configured from modules in accordance with the required dimensions, and problems caused by bending the metal parts are avoided.

Abstract: A moving element to be propelled across a stator includes a coil unit, including coils, for generating a force to propel the moving unit, and a cooling unit for cooling the coil unit. A thermal conductive member, arranged between the cooling unit and the coil unit, transmits heat away from the coil unit. In addition, a housing unit houses the coil unit, the cooling unit and the thermal conductive member.

Abstract: An electric motor system includes an electric motor, a temperature sensor mounted therein capable of measuring a local temperature and generating a temperature related signal, and a processor configured to calculate an actual temperature of a rotor magnet from the temperature related signal, and an actual output torque from the actual rotor magnet temperature. A method for determining the actual output torque of a motor includes sensing a temperature within the motor, calculating a rotor magnet temperature from the sensed temperature, and calculating the actual output mechanical torciue from the rotor magnet temperature.

Abstract: An exposure apparatus which exposes a substrate to a pattern. The apparatus includes a channel which causes pure water to flow as a coolant, a temperature adjustment unit which adjusts a temperature of the pure water flowing in the channel, and a coolant generation device which generates the pure water flowing in the channel as the coolant with a resistivity of not less than 1 M?·cm.

Abstract: A circulation system (330) for a mover (328) includes a fluid source (360) that directs a first fluid (356) into a first inlet (364A) of the mover (328) and a second fluid (358) into a second inlet (366A) of the mover (328). In one embodiment, a temperature of the second fluid (358) at the second inlet (366A) is different than a temperature of the first fluid (356) at the first inlet (364A). For example, in one embodiment, the temperature of the first fluid (356) at the first inlet (364A) is at least approximately 10 degrees greater than the temperature of the second fluid (358) at the second inlet (366A). In alternative embodiments, the temperature of the first fluid (356) is at least approximately 2, 5, or 15 degrees greater than the temperature of the second fluid (358).

Abstract: A sliding means with built-in moving-magnet linear motor is provided, realizing high-speed operation and much response ability of a table to a stationary bed, and also accurate position control of the table to the bed. With the sliding means of this invention, armature windings carry a three-phase current while a driving circuit is transferred to the external driver to make the bed slim in construction. Thus, the sliding means is reduced in overall height. A field magnet of rare earth permanent magnet is effective in raising flux density, thereby providing high propulsion for the table. An encoder to monitor a position of the table is an optical encoder having an optical linear scale, which contributes to improvement in accurate monitoring. The construction in which the armature windings connected to cords, lines, and so on are placed on the stator side has no fear of causing dust and dirt, thus realizing clean environment.