Abstract: A triboelectric sensor comprises a substrate; at least one grid structure disposed in or on the substrate; and at least one electrode for collecting triboelectric charges that are generated by sliding of an object over a surface of the substrate; wherein the at least one grid structure is configured such that motion of the object is detectable from a signal generated by crossing of the object over at least part of the grid structure.

Abstract: An artificial muscle assembly includes initiating actuators and an artificial muscle. The artificial muscle includes a housing including an electrode region and an expandable fluid region, and an electrode pair positioned in the electrode region. The electrode pair includes a first electrode and a second electrode fixed to respective first and second surfaces of the housing. At least one of the first electrode and the second electrode includes a central opening defining the expandable fluid region. The electrode pair is actuatable between a non-actuated state and an actuated state such that actuation from the non-actuated state to the actuated state directs a dielectric fluid into the expandable fluid region. Each initiating actuator is actuatable between a non-actuated state and an actuated state such that actuation from the non-actuated state to the actuated state applies a force against the electrode region of the artificial muscle.

Abstract: A fog-based self-powered system for collecting atmospheric water and generating electricity is presented. The system includes a mesh-based fog harvester for accumulating water droplets from atmospheric moisture. A droplet distributor receives accumulated water droplets from the mesh-based fog harvester. A droplet electrical generator harvests energy from the water droplets accumulated in the droplet distributor. The droplet electrical generator includes an electret surface for receiving the water droplets from the droplet distributor and at least two electrodes. A water reservoir receives water droplets from the droplet electrical generator.

Abstract: Provided is a microelectrode having a layered structure, including a layer containing a polymer compound having an aromatic ring (polymer compound layer) and a layer containing a conductive material (conductive layer), wherein a thickness of the polymer compound layer is 10 to 900 nm, a thickness of the conductive layer is 0.3 to 10 nm, and the microelectrode has a three-dimensional curved shape.

Abstract: Described herein are bio-inspired acoustic bandpass sensors with a user-defined range of frequencies mimicking the geometric structure of a human's basilar membrane to capture infrasonic, sonic or ultrasonic waves per design with a target frequency range for a specific application and methods of making same.

Abstract: An ergometric treadmill for sport training comprising a screen, a control system and a system configured for collecting, processing, analyzing and visualizing the biomechanical response of a sportsperson while running on the ergometric treadmill; wherein the ergometric treadmill comprises (a) a plurality of MEMS sensors attached by means of supports to the ergometric treadmill connected to a data capture unit; and (b) a data processing unit configured to generate a plurality of parameters related to the physical exercise performed on the ergometric treadmill by a user and synthesize and show, in graphic form, the parameters generated for the user's biofeedback from the treadmill.

Abstract: A dielectric elastomer transducer according to the present invention includes a dielectric elastomer layer, and a pair of electrode layers sandwiching the dielectric elastomer layer. The electrode layers contain a binder and carbon black. The carbon black has a particle size distribution as measured by dynamic light scattering in which not less than 95% falls in a range of 0.15 to 8.0 ?m. The carbon black has a particle size as measured by laser scattering ranging from 0.4 to 50 ?m. The particle size distribution of the carbon black as measured by dynamic light scattering has a first peak that falls in a first range of 0.15 to 1.0 ?m and a second peak that falls in a second range of 1.0 ?m to 8.0 ?m. This structure achieves both stretchability and electrical conductivity of the electrode layers.

Abstract: A sensor unit to be incorporated in a skin-like layer of machines such as robots employs a set of sensor electrodes supported in a first deformable sheet and a base electrode supported in a second deformable sheet, each of the sensor electrodes partially overlapping the base electrode so that application of a shear force causes the overlap of the electrodes to differentially change modifying the capacitance of the electrodes and permitting the detection of the shear force.

Abstract: The present invention relates to a positively-charged body for a triboelectric generator and a triboelectric generator including the same. More particularly, the present invention relates to a positively-charged body based on a two-dimensional material including silicon oxide, and to a triboelectric generator including such a positively-charged body. Thus, a conventional manner in which the positively-charged body is mainly composed of a metal thin film or polymer is not used, but the positively-charged body is made of the silicon oxide and the two-dimensional material. Thus, charge generation efficiency of the generator via contact between the positively-charged body and a negatively-charged body may be dramatically enhanced.

Abstract: Disclosed is a vortex-induced vibration-based piezoelectricity and friction nanometer power generation combined energy collector. The energy collector includes a support frame, a piezoelectric plate, a cylinder and a solid-liquid type friction nanometer power generation assembly, wherein the support frame includes a fixed plate, a cantilever plate and a connecting plate which are sequentially connected from top to bottom, the piezoelectric plate is fixed on one side of the cantilever plate, the solid-liquid type friction nanometer power generation assembly has an outer shell, an insulating friction inner shell and a sealing part, the outer shell having two symmetrically arranged induction electrodes, insulating layers are arranged between the butt joint faces of the two induction electrodes, the included angles between the butt joint faces of the two induction electrodes and the plane, provided with the piezoelectric plate, of the cantilever plate are not 90°.

Abstract: An electrostatic motor includes a cylindrical rotor and a stator. Electrodes are disposed on an inside cylindrical surface of the stator. Electrets and/or electrically conductive electrodes are disposed on the cylindrical rotor and a dielectric fluid fills space between the rotor and the stator to prevent discharge of the electrets. A mask is used to charge portions of an electret cylinder or other curved surface.

Abstract: This MEMS beam structure that elastically supports a movable section displaced in a first direction includes: a first beam section and a second beam section extending in a second direction orthogonal to the first direction; and a linking section that connects the tip of the first beam section and the tip of the second beam section that is connected to the movable section, wherein the first beam section and the second beam section each have a shape as a beam of uniform strength, and the beam section root of the second beam section is displaced relatively in the first direction with respect to the beam section root of the first beam section according to the displacement of the movable section in the first direction.

Abstract: An actuator has a flexible electrode that has flexibility and a base electrode of which an opposing surface facing the flexible electrode is covered with an insulation layer, and is configured such that, when a voltage is applied between flexible electrode and the base electrode, the flexible electrode deforms so as to approach the opposing surface. The actuator includes a restraining member that restrains the flexible electrode on the base electrode. The flexible electrode has a deforming portion that deforms when a voltage is applied between the electrodes. The deforming portion deforms in a direction of approaching the opposing surface, with the restraining member serving as a support point.

Abstract: An ultrasound transducer device includes an electrode, a membrane, and vias. The membrane is separated from the electrode by a cavity between the membrane and the electrode. The vias electrically connect the electrode to a substrate disposed on an opposite side of the electrode from a side facing the membrane. The vias are disposed in the ultrasound transducer device such that greater than 50% of the vias overlap with the cavity in a plan view.

Abstract: The disclosure provides a packaging structure and method of an acoustic device, relating the technical field of semiconductors, including: a substrate and a piezoelectric stack structure located on the substrate, a first organic material layer is disposed on the piezoelectric stack structure, a second organic material layer is disposed on the first organic material layer, the first organic material layer includes a first supporting part and a second supporting part, the second supporting part forms a first acoustic reflection structure, when being transmitted to the first acoustic reflection structure, acoustic waves can be reflected back to the effective area, so that the loss of the acoustic waves is reduced, and the performance of the acoustic device is improved.

Abstract: An optical scanner includes a mirror configured to reflect an incident light and a vertically-shifting electrostatic actuator configured to oscillate the mirror. The electrostatic actuator includes a frame having an installation space in a central portion and a drive electrode, a stationary electrode, a shifter, and a force application part installed in the installation space. Drive electrode fingers in the drive electrode and stationary electrode fingers in the stationary electrode are alternately disposed. The shifter may be connected either between the frame and the drive electrode or between the frame and the stationary electrode and vertically shifts either the drive electrode or the stationary electrode connected to the shifter when a vertical force is applied through the force application part.

Abstract: According to certain embodiments, a micro-electromechanical system (MEMS) apparatus has a MEMS mirror structure with a rotatable mirror. Rotation of the mirror produces a change in a measured capacitance corresponding to an angle of rotation. The MEMS structure sits on an oxide layer deposited on a substrate. There is a parasitic capacitance between the MEMS mirror structure and the substrate. An added capacitance is provided between the substrate and a DC voltage source. The added capacitance is much larger than the parasitic capacitance, and shunts the parasitic capacitance to ground to minimize its effect on the measured capacitance.

Abstract: Columnar multi-axis microelectromechanical systems (MEMS) devices (such as gyroscopes) balanced against undesired linear and angular vibration are described herein. In some embodiments, the columnar MEMS device may comprise at least two multiple-mass columns, each having at least three proof masses and being configured to sense rotation about a respective axis. The motion and mass of the proof masses may be controlled to achieve linear and rotational balancing of the MEMS device. The columnar MEMS device may further comprise one or more modular drive structures disposed alongside each multiple-mass column to facilitate displacement of the proof masses of a respective column. The MEMS devices described herein may be used to sense roll, yaw, and pitch angular rates.

Abstract: A resonance device that includes a MEMS substrate including a resonator, an upper cover, and a bonding portion that bonds the MEMS substrate to the upper cover to seal a vibration space of the resonator. The bonding portion includes a eutectic layer composed of a eutectic alloy of germanium and a metal mainly containing aluminum, a first titanium (Ti) layer, a first aluminum oxide film, and a first conductive layer consecutively arranged from the MEMS substrate to the upper cover.

Abstract: A stacked electrostatic actuator exhibits a sufficient contraction force even when pulled by a large external force and the contraction rate thereof does not decrease even under a light load. A stacked electrostatic actuator includes a plurality of electrode films each including a three-layer structure including a first insulating layer, a conductor layer, and a second insulating layer.

Abstract: A micromechanical component for a yaw rate sensor. The component includes a substrate having a substrate surface, a first rotor mass developed in one piece, which is able to be set into a first torsional vibration about a first axis of rotation aligned perpendicular to the substrate surface, and at least one first component of the micromechanical component. The first rotor mass is connected to the at least one first component via at least one first spring element. The at least one first spring element extends through a lateral concavity on the first rotor mass in each case and is connected to a recessed edge region of the first rotor mass. A yaw rate sensor and a production method for a micromechanical component for a yaw rate sensor, are also described.

Abstract: A laminated plate has a metallic conductive layer layered on one surface or each surface of an insulating substrate, the insulating substrate contains a fluorine resin and a polymer of an alkoxysilane, and the fluorine resin is dispersed in the polymer of the alkoxysilane.

Abstract: A resonant transformer connected between a ground terminal and elevated terminal draws current from the earth's electric field through a primary winding of the transformer. An impulse generator applies a high voltage impulse to the primary winding of the resonant transformer to cause current to flow from the ground terminal through the primary winding. The flow of current through the primary winding of the resonant transformer induces a current in the secondary winding, which may be converted and filtered to a usable form, e.g. 60 Hz AC or DC.

Abstract: The present disclosure provides a capacitive micro-machined ultrasonic transducer, a method for preparing the same, a panel, and a device, and belongs to the technical field of ultrasonic imaging. A capacitive micro-machined ultrasonic transducer includes a first electrode, a vibrating diaphragm layer and a second electrode that are arranged in order from bottom to top, a cavity existing between the first electrode and the vibrating diaphragm layer, in which the capacitive micro-machined ultrasonic transducer further includes a third electrode located on a surface of the vibrating diaphragm layer proximate to the cavity, an orthogonal projection of the third electrode on the first electrode covers a part of an orthogonal projection of the cavity on the first electrode. The technical solution of the present disclosure can realize the conversion of the frequency of the ultrasonic waves emitted by the capacitive micro-machined ultrasonic transducer.

Abstract: A contact charging member for a triboelectric generator, comprising a contact layer with a contact side and a back side, made of a dielectric material that has a triboelectric series rating indicating a propensity to exchange electrons due to a contacting event; and an electrode layer disposed along the back side of the contact layer, wherein the contact side of the contact layer is patterned so as to show a series of circular or hexagonal cavities with a flat bottom. The invention is also directed to triboelectric generator comprising the contact charging member and a process for manufacturing the member.

Abstract: A piezoelectric MEMS resonator is provided. The resonator comprises a single crystal silicon microstructure suspended over a buried cavity created in a silicon substrate and a piezoelectric resonance structure located on the microstructure. The resonator is designed and fabricated based on porous silicon related technologies including selective formation and etching of porous silicon in silicon substrate, porous silicon as scarified material for surface micromachining and porous silicon as substrate for single crystal silicon epitaxial growth. All these porous silicon related technologies are compatible with CMOS technologies and can be conducted in a standard CMOS technologies platform.

Abstract: The present disclosure provides an ultrathin, flexible, and tattoo-like triboelectric nanogenerator (TENG) with a well-designed aesthetic pattern. The tattoo-like TENG as an energy harvester can provide not only an aesthetic pattern, but also various practical applications. With the rising acceptance of people towards the tattoo, the tattoo-like TENG offers an alternative tattoo-like epidermal electronics covering traditional tattoo's advantages and further carries out other potential applications.

Abstract: An additive manufacturing machine (900) includes a build unit (904) that is supported by an overhead gantry (918). The build unit (904) includes a powder dispenser (906) including a vibration mechanism (922) and a scan unit (908) including a powder fusing device (910) for fusing or binding portions of a layer of additive powder. A vibration isolation device (932), such as a passive rubber damper (940) or an active vibration canceling mechanism (960), is positioned between the powder dispenser (906) and the scan unit (908) to prevent vibrations in the powder dispenser (906) from causing operational issues with the scan unit (908) and inaccuracies in the additive manufacturing process.

Abstract: A resonator device includes a base substrate that is formed of a single crystal semiconductor and includes a first surface, a resonator element attached to the first surface of the base substrate, and a cover that is bonded to the first surface of the base substrate, accommodates the resonator element between the cover and the base substrate, and is formed of a single crystal semiconductor. The base substrate and the cover are bonded through an amorphous layer.

Abstract: A triboelectric energy generator (1) comprises a first generating element (8) and a second generating element (10). The first generating element comprises a first triboelectric material (9) and the second generating element comprises a second triboelectric material (13). Movement of the second generation element relative to the first generation element results in an output voltage, as a consequence of the triboelectric effect. A stopper (7) is configured to restrict rotation of the second generating element, so that the second generating element may only rotate through a desired angle.

Abstract: Provided are an electromechanical transducer including a light movable member that is easy to move and charged portions whose amount of electrostatic charge does not substantially change over time and a method for manufacturing such an electromechanical transducer.

Abstract: Embodiments of the disclosure provide a micromachined mirror assembly for controlling optical directions in an optical sensing system. The micromachined mirror assembly may include a micro mirror configured to direct an optical signal into a plurality of directions. The micromachined mirror assembly may also include at least one actuator coupled to the micro mirror and configured to drive the micro mirror to tilt around an axis. The micromachined mirror assembly may further include one or more objects attached to the micro mirror. The one or more objects may be asymmetrically disposed with respect to the axis to create an imbalanced state of the micro mirror when the micro mirror is not driven by the at least one actuator.

Abstract: Disclosed are a triboelectric power generating device and a manufacturing method thereof, which does not require a physical space to generate friction motions unlike conventional pressured induced electric power generating devices, maximizes a surface area by the junction friction portion of a friction material composite that is inexpensive and easy to mass-produce, thereby improving the durability of a generating device, and effectively producing electricity. The triboelectric power generating device includes a triboelectric generation layer (300) including a friction portion having a junction structure which is located at a central portion and made of two or more different polymers, a first electrode (100) which is located to face one surface of the triboelectric generation layer (300), and a second electrode (200) which is located to face the other surface of the triboelectric generation layer (300).

Abstract: Devices, methods, and systems for electrostatic machines which can act as both an electric motor, converting electrical energy to mechanical energy, and an electric generator, converting mechanical energy to electrical energy, are described. In some embodiments, a spring positioned between two oppositely charged plates may be used as an electric motor and/or electric generator.

Abstract: The present invention provides a general MEMS device having a pair of quadrilateral insert and trench. An air channel/space includes a first internal wall and a second internal wall for air to flow between. A quadrilateral trench is recessed from the first internal wall, and a quadrilateral insert is extended from the second internal wall and inserted into the trench. In capacitive MEMS microphone, the spatial relationship between the insert and the trench can vary or oscillate. The quadrilateral insert & trench serve as an air flow restrictor or a leakage prevention structure which keeps the sound frequency response plot of the microphone flatter in the range of 20 Hz to 1000 Hz. The level of the air resistance may be controlled e.g. by the depth of quadrilateral trench/slot etched on the substrate.

Abstract: A flexure based guidance system for precision motion control includes a base that is fixed in position, a carriage that can move relative to the base, an actuator provides the force to move the carriage relative to the base, and one or more flexures arrays that each comprise two or more leaf flexure elements. The actuator causes the carriage to move relative to the base, which causes the flexure elements in the flexure array to flex. The leaf flexure elements are thin, compliant and deform, bend, or deflect in a deterministic manner when mechanically stressed. In some embodiments, stiffeners can be added to the flexures. The guidance system can be integrated into a varifocal head mounted display (HMD) to adjust a location of one or moveable elements in an optical system of the HMD to control a location of an image plane.

Abstract: A yaw-rate sensor with a substrate having a main extension plane. The yaw-rate sensor includes a rotation-element assembly, the rotation-element assembly being designed for detecting yaw rates prevailing in a first main extension axis of the substrate and yaw rates prevailing in a second main extension axis of the substrate perpendicular to the first main extension axis. The yaw-rate sensor has a sensor assembly, the sensor assembly being designed for detecting a yaw rate prevailing perpendicular to the main extension plane of the substrate, both the sensor assembly and the rotation-element assembly being drivable with the aid of a drive assembly, the drive assembly being designed for driving movement along the first main extension axis.

Abstract: Disclosed are actuators containing an active layer comprising at least one metal hydroxide, the active layer having a first volume under no stimulation and a second volume either greater than or smaller than the first volume under stimulation; and a passive layer comprising a porous polymer membrane, the passive layer having an elastic modulus at least half of an elastic modulus of the active layer.

Abstract: A cantilever beam waveguide for a silicon photonics device may be formed in a device layer (e.g., a silicon device layer) of a silicon photonics device (e.g., a chip) and may be configured to bend to align the cantilever beam waveguide or a portion thereof with one or more additional components of the silicon photonics device or another device, including output couplers, optical sources, and waveguides.

Abstract: An electrostatic energy harvester broadly comprises an electrical energy storage component, an electrical energy transfer stage, first and second variable capacitors, and a switching control module. The electrical energy transfer stage includes diode-connected transistors and dictates electrical energy transfer between the electrical energy storage component and the variable capacitors. The switching control module timely switches between the first and second variable capacitors according to a state machine. Subsequent electrical energy investments from the electrical energy storage component are less than an initial electrical energy investment due to remnant electrical energy remaining at the previously active one of the first and second variable capacitors from previous electrical energy harvesting.

Abstract: Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. A two-fold symmetric switch may be formed by a primary, secondary, and optionally tertiary set of voids formed in the movable plate. These voids may define the spring beams which provide a stable and reliable restoring force to the switch.

Abstract: A MEMS device includes a body pivoting around a pivot axis, a support, and a suspension structure mechanically coupling the body to the support. The suspension structure includes a torsion element defining the pivot axis, and first and second spring elements extending with an angle relative to the pivot axis on opposing sides of the torsion element so that a distance between at least portions of the first and second spring elements is changing in the direction of the pivot axis. The extension of the first and second spring elements in the direction of the pivot axis is larger than the extension of the torsion element in the direction of the pivot axis.

Abstract: A microelectromechanical system with at least one partly mobile mass element which is suspended from a fixed support by one or more suspension units. Each suspension unit comprises first springs which extend from the fixed support to the partly mobile mass element, and second springs which also extend from the fixed support to the partly mobile mass element. Each second spring is substantially parallel and adjacent to one first spring. The first springs are electrically isolated from the second springs, and the microelectromechanical system comprises a voltage source configured to apply a frequency tuning voltage between the one or more first springs and the one or more second springs.

Abstract: The invention provides an energy generation system comprising a generator having charged mutually rotating plate elements, and comprising an integrated drive mechanism for precisely controlling a separation distance between the plates. The drive mechanism provides a separation which varies as a function of the speed of rotation, hence assimilating separation control within the natural operation of the device. Embodiments provide plates comprising self-generating bearings, both hydrodynamic gas and fluid bearings and centrifugal regulator solid bearings, the bearings providing a supporting force between the plates of a magnitude which increases as the rotational speed of the plates increases. Methods of energy generation are also provided.

Abstract: A variable stiffening device that include a first electrode structure and a second electrode structure. The first electrode structure includes an electrode extension that extends into a cavity defined between an electrode of the first electrode structure and an opposing electrode of the second electrode structure. The first and second electrode structures may be arranged in a load-bearing state by applying a voltage thereto to electrostatically attract the electrode to the opposing electrode to press the electrode extension within the cavity. Friction between the electrode extension and engaging surfaces defining the cavity prevent the electrode extension from slipping within the cavity, thereby maintaining a structural relationship among the components of the first and second electrode structures in response to an application of a load to the variable stiffening device.

Abstract: A vibration presentation device includes: an electrostatic or piezoelectric actuator; a first elastic body laminated on the actuator; a second elastic body laminated on the actuator on the opposite side to the first elastic body; an electrostatic or piezoelectric sensor disposed around the actuator; a cover that holds the first elastic body and the second elastic body such that the first elastic body and the second elastic body are compressed more than the actuator, the cover transmitting, when a pressing force in the laminate direction is applied to the cover from the outside, the pressing force to a sensor, and vibrating by vibration generated by the actuator; and a control device that drives the actuator when the sensor detects the pressing force.

Abstract: Provided is a combined actuator and sensor device having an electroactive polymer (EAP) structure (22) and a controller for generating drive signals applied to the EAP structure. The controller is adapted to superpose a small high-frequency AC sensing signal (34) on top of a larger actuation drive signal (32), the sensing signal having a frequency which resonates with the mechanical resonance frequency or anti-resonance frequency of the EAP structure. Application of mechanical loads to the device may be identified in changes in the impedance of the EAP structure, caused by damping of the mechanical resonance. In this way the device facilitates simultaneous sensing and actuation. A corresponding method of simultaneous sensing and actuation is also provided.

Abstract: A slide actuator according to the present invention includes: a fixed member; a movable member movable in a predetermined direction with respect to the fixed member; a wall portion of the fixed member disposed in a moving direction of the movable member; a plurality of balls interposed between the fixed member and the movable member and configured to movably support the movable member; a retainer configured to maintain a constant distance between the respective balls; a retainer spring connected between the wall portion and the retainer; and a movable portion spring connected between the movable member and the wall portion, in which the retainer spring is disposed so as to suppress a displacement of the retainer in the moving direction, and the movable portion spring is disposed so as to suppress a displacement of the movable member in the moving direction.

Abstract: A compound sensor device includes a semiconductor substrate having an active electronic circuit formed in or on the semiconductor substrate. A sensor including a sensor substrate including a sensor circuit having an environmental sensor or actuator formed in or on the sensor substrate is micro-transfer printed onto the semiconductor substrate. One or more electrical conductors electrically connect the active electronic circuit to the sensor circuit. The semiconductor substrate includes a first material and the sensor substrate includes a second material different from the first material.

Abstract: A mechanical system is provided for maintaining a desired gap between a stator electrode array and a rotor electrode array by employing repelling magnets on the inner surface of the rotor and on movable carts that support azimuthally segmented stator arrays.