Abstract: A MEMS sensor comprises a substrate and at least one proof mass having a first plurality of combs. The proof mass is coupled to the substrate via one or more suspension beams such that the proof mass and the first plurality of combs are movable. The MEMS sensor also comprises at least one anchor having a second plurality of combs. The anchor is coupled to the substrate such that the anchor and second plurality of combs are fixed in position relative to the substrate. The first plurality of combs are interleaved with the second plurality of combs. Each of the combs comprises a plurality of conductive layers electrically isolated from each other by one or more non-conductive layers. Each conductive layer is individually coupled to a respective electric potential such that capacitance between the combs varies approximately linearly with displacement of the movable combs in an out-of-plane direction.

Abstract: A MEMS device is a MEMS device having a MEMS vibrator which includes a plurality of MEMS constituent elements laminated and formed above a first foundation portion which is laminated above a main surface of a wafer substrate, and the MEMS constituent elements are laminated above a first oxide film and a nitride film so as to cover an opening which is formed in the nitride film and exposes a second foundation portion above which the nitride film is laminated.

Abstract: One embodiment of the present disclosure is a unique machine. Another embodiment is a unique system for supplying electrical power to a machine, such as a vehicle, having an electrical load during operation. Other embodiments include apparatuses, systems, devices, hardware, methods, and combinations for fluid driven actuation systems.

Abstract: A generator includes a disc shaped first unit, a disc shaped second unit and an axle. The first unit includes a substrate layer, a double complementary electrode layer and an electrification material layer. The electrode layer includes a first electrode member and a second electrode member. The first electrode member includes evenly spaced apart first electrode legs extending inwardly. The second electrode member is complementary in shape to the first electrode member. The legs of the first electrode member and the second electrode member are interleaved with each other and define a continuous gap therebetween. The electrification material includes a first material that is in a first position on the triboelectric series. The second unit defines elongated openings and corresponding elongated leg portions, and includes a second material that is at a second position on a triboelectric series, different than the first position.

Abstract: The micro-electro-mechanical system is provided with at least two separate anchoring elements (F1, F2) designed to be bound to a support. A anchoring element (F1, F2) is solidly linked to at least one beam (P1, P2) that can be deformed in bending, and two beams (P1, P2) respectively linked to two distinct anchoring elements (F1, F2) have different directions. A beam has a length L, a thickness e, and a height h, such that the stiffnesses KL in the directions of the length and of the height Kh are large and the stiffness in the direction of the thickness Ke is small.

Abstract: Wide bandwidth piezoelectric micromachined ultrasonic transducers (pMUTs), pMUT arrays and systems having wide bandwidth pMUT arrays are described herein. For example, a piezoelectric micromachined ultrasonic transducer (pMUT) includes a piezoelectric membrane disposed on a substrate. A reference electrode is coupled to the membrane. First and second drive/sense electrodes are coupled to the membrane to drive or sense a first and second mode of vibration in the membrane.

Abstract: A capacitance type physical quantity sensor includes: a first substrate; and a second substrate bonded to the first substrate through an insulating film. The second substrate includes first and second groove portions at a place of the second substrate facing an end portion of the first and second support units formed on the first substrate on a side opposite to the movable unit. A part of the end portion of the first support unit protrudes over the first groove portion. A part of the end portion of the second support unit protrudes over the second groove portion.

Abstract: An electrostatic induction conversion device includes: an input-side electrostatic actuator that includes a first fixed electrode and a first movable electrode facing the first fixed electrode; and an output-side electrostatic actuator that includes a second movable electrode linked to the first movable electrode via a link mechanism member, which increases or decreases a displacement quantity representing an extent of displacement occurring at the first movable electrode, and a second fixed electrode facing the second movable electrode, wherein: a permanently charged layer is deposited on an electrode surface either on a movable electrode side or on a fixed electrode side, at the input-side electrostatic actuator and the output-side electrostatic actuator.

Abstract: Provided is a power generation device having a dielectric body and an electret, where power is generated by varying the distance between the dielectric body and the electret. A first electrode is connected to the electret on a side not facing the dielectric body. The first electrode is connected to a grounding terminal via a load. A second electrode may be connected to the dielectric body on a side not facing the electret. The second electrode may be directly connected to the grounding terminal.

Abstract: In the present invention, a nanomechanical resonator array (1), which is suitable being used in an oscillator and production method of said nanomechanical resonator array are developed. Said resonator array (1) comprises at least two resonators (2), which are in the size of nanometers, which are vertically arrayed and which are preferably in the form of nano-wire or nano-tube; at least one coupling membrane (3), which mechanically couples said resonators (2) from their one ends, and at least one clamping element (4), which supports mechanical coupling by clamping said coupling membrane (3). Said resonator array (1) can be actuated and its displacements can be sensed. The present invention develops a predictive model of the frequency response of an oscillator comprising the said resonator array (1) for electrostatic actuation and capacitive readout. An oscillator comprised of multiple resonator arrays (1) with different frequency responses connected to a frequency manipulation circuitry can be used as well.

Abstract: MEMS structures and methods utilizing a locker film are provided. In an embodiment a locker film is utilized to hold and support a moveable mass region during the release of the moveable mass region from a surrounding substrate. By providing additional support during the release of the moveable mass, the locker film can reduce the amount of undesired movement that can occur during the release of the moveable mass, and preventing undesired etching of the sidewalls of the moveable mass.

Abstract: A micro-electrical-mechanical system (MEMS) vibrating structure includes a carrier substrate, a first anchor, a second anchor, a single crystal piezoelectric body, and a conducting layer. The first anchor and the second anchor are provided on the surface of the carrier substrate. The single-crystal piezoelectric body is suspended between the first anchor and the second anchor, and includes a uniform crystalline orientation defined by a set of Euler angles. The single-crystal piezoelectric body includes a first surface parallel to and facing the surface of the carrier substrate on which the first anchor and the second anchor are formed and a second surface opposite the first surface. The conducting layer is inter-digitally dispersed, and is formed on the second surface of the single-crystal piezoelectric body. The first surface of the single-crystal piezoelectric body is left exposed.

Abstract: A micro-electrical-mechanical system (MEMS) vibrating structure includes a carrier substrate, a first anchor, a second anchor, a single crystal piezoelectric body, a first conducting layer, and a second conducting layer. The first anchor and the second anchor are provided on the surface of the carrier substrate. The single-crystal piezoelectric body is suspended between the first anchor and the second anchor, and includes a uniform crystalline orientation defined by a set of Euler angles. The single-crystal piezoelectric body includes a first surface parallel to and facing the surface of the carrier substrate on which the first anchor and the second anchor are formed and a second surface opposite the first surface. The first conducting layer is inter-digitally dispersed on the second surface of the single-crystal piezoelectric body. The second conducting layer is inter-digitally dispersed on the first surface of the single-crystal piezoelectric body.

Abstract: A system for energizing, operating and manipulating apparatuses in high voltage systems. The system uses a dielectric gas such as SF6 as a driving power supply for a pneumatic motor which ultimately charges a battery or other energy storage device. The stored energy can then be used for instrumentation equipment, or to power any electrical equipment, in the high voltage deck. The accompanying method provides for the use of the SF6 system for operating an electrical device in a high-voltage environment.

Abstract: An electrostatic induction power generator includes a first base body and a second base body, which are configured to be able to reciprocate relative to each other and between which an annular clearance is formed. The electrostatic induction power generator further includes an electret provided on the first base body, and a first electrode and a second electrode provided on the second base body. The electret is formed by coating a charged dielectric material on a surface of a linear conducting wire and both of the first electrode and the second electrode are formed of a linear conducting wire.

Abstract: Ultrasound devices and methods are described, including a repeatable ultrasound transducer probe having ultrasonic transducers and corresponding circuitry. The repeatable ultrasound transducer probe may be used individually or coupled with other instances of the repeatable ultrasound transducer probe to create a desired ultrasound device. The ultrasound devices may optionally be connected to various types of external devices to provide additional processing and image rendering functionality.

Abstract: A device may comprise a substrate formed of a first semiconductor material and a trench formed in the substrate. A second semiconductor material may be formed in the trench. The second semiconductor material may have first and second portions that are isolated with respect to one another and that are isolated with respect to the first semiconductor material.

Abstract: A cascaded electrostatic actuator can be formed from a substantially planar substrate. The cascaded electrostatic actuator can be formed in a plane of the substrate. Various embodiments are described.

Abstract: A low-power level-shift circuit for data-dependent signals includes a buffer circuit, a coupling capacitor, and a biasing circuit. The buffer circuit is biased by a low-voltage domain voltage supply and configured to receive a data-dependent signal. The coupling capacitor is coupled, at a first node, to an output node of the buffer circuit. The biasing circuit is coupled to a second node of the coupling capacitor and a switch. The level-shift circuit can translate a voltage level of the received data-dependent signal to a high-voltage domain that is suitable for proper operation of the switch.

Abstract: An apparatus for detecting a number of revolutions of a rotatable shaft, is proposed, which apparatus encompasses a magnet disposed on the shaft, and a micromechanical device. A detection element of the micromechanical device, which element interacts with the magnet, is advanced stepwise upon each movement of the magnet past the micromechanical device in accordance with the movement direction of the magnet.

Abstract: A power generation apparatus includes a dielectric, a movable member being opposed to the dielectric with a predetermined distance, and an electret and an opposing electrode that are formed on the surface of the movable member facing the dielectric so as to generate a fringe electric field penetrating the dielectric between the two electrodes. When the volume occupancy of the dielectric between the electret and the opposing electrode varies in accordance with a displacement of the movable member, the power generation apparatus outputs the electric charge induced in the opposing electrode as electric current.

Abstract: Substrates (wafers) with uniform backside roughness and methods of manufacture are disclosed. The method includes forming a material on a backside of a wafer. The method further includes patterning the material to expose portions of the backside of the wafer. The method further includes roughening the backside of the wafer through the patterned material to form a uniform roughness.

Abstract: A method for controlling the operation of an electromechanical transducer is provided. The method includes (a) determining during a first period of time a first strength of the harmonic operational behavior of the transducer, (b) determining during a second period of time a second strength of the harmonic operational behavior of the transducer, wherein the second period of time is different from the first period of time, (c) calculating a harmonic control signal in response to both the determined first strength of the harmonic operational behavior and the determined second strength of the harmonic operational behavior, (d) generating a modified drive signal based on the calculated harmonic control signal, and (f) supplying the generated modified drive signal to electromagnetic coils of a stator of the transducer. Further, a corresponding control system for controlling the operation of an electromechanical transducer is provided.

Abstract: A MEMS device includes a supporting body, a first deformable element and a second deformable element, and a mobile element set between the first and second deformable elements and rotatable with respect to the fixed supporting body. A generator causes a current to flow through at least one of the first and second deformable elements, which function as resistors, so as to generate an electrical position signal proportional to deformation of the first and second deformable elements and indicative of angular position of the mobile element. The electrical signal is processed to determine mobile element angular position. A drive signal is generated in response to the electrical signal for the purpose of driving oscillation of the mobile element.

Abstract: A technique decouples a MEMS device from sources of strain by forming a MEMS structure with suspended electrodes that are mechanically anchored in a manner that reduces or eliminates transfer of strain from the substrate into the structure, or transfers strain to electrodes and body so that a transducer is strain-tolerant. The technique includes using an electrically insulating material embedded in a conductive structural material for mechanical coupling and electrical isolation. An apparatus includes a MEMS device including a first electrode and a second electrode, and a body suspended from a substrate of the MEMS device. The body and the first electrode form a first electrostatic transducer. The body and the second electrode form a second electrostatic transducer. The apparatus includes a suspended passive element mechanically coupled to the body and electrically isolated from the body.

Abstract: Complementary metal oxide semiconductor (CMOS) ultrasonic transducers (CUTs) and methods for forming CUTs are described. The CUTs may include monolithically integrated ultrasonic transducers and integrated circuits for operating in connection with the transducers. The CUTs may be used in ultrasound devices such as ultrasound imaging devices and/or high intensity focused ultrasound (HIFU) devices.

Abstract: According to one embodiment, a MEMS element comprises a first electrode fixed on a substrate, a second electrode formed above the first electrode to face it, and vertically movable, a first anchor portion formed on the substrate and configured to support the second electrode, and a first spring portion configured to connect the second electrode and the first anchor portion. The first spring portion includes a liner layer includes a brittle material in contact with the second electrode and the first anchor portion, and a base layer formed on the liner layer, includes a brittle material having a composition different from that of the liner layer, and having a film thickness larger than that of the liner layer.

Abstract: A four-wire electrostatic actuator including: a stator having a substrate with two surfaces and at least four main-movement linear electrodes separately provided on one surface of the substrate and arranged in parallel at regular intervals; and a movable element disposed on the stator. The first and third main-movement linear electrodes of the four main-movement linear electrodes are supplied with rectangular wave signals or sine wave signals with reversed phases. The second and fourth main-movement linear electrodes are supplied with rectangular wave signals or sine wave signals with reversed phases. The two signals inputted to the adjacent two electrodes are shifted from each other by a quarter of a period with identical strength. The stator further includes a plurality of one-side auxiliary-movement linear electrodes on one side of the four main-movement linear electrodes, the auxiliary-movement linear electrodes being extended perpendicularly to the four main-movement linear electrodes.

Abstract: A gel actuator includes: a gel having a projected part made of an inductive high-polymer material; a positive electrode disposed so as to be in contact with a top of the projected part; and a negative electrode disposed in a position sandwiching the projected part in a height direction in cooperation with the positive electrode. When voltage is applied between the positive and negative electrodes, creep deformation occurs so that the projected parts adhere to the positive electrode side, and the gel contracts in the thickness direction.

Abstract: An optical system of a microlithographic projection exposure apparatus includes a multi facet mirror having a support plate and a plurality of mirror facets. Each mirror facet includes a mirror substrate and a reflective coating applied thereon, and is attached to the support plate. Actuators are provided that induce a deformation of the support plate. The deformation changes the orientation and/or position, but not the shape, of at least two mirror facets. In this way aberrations can be corrected.

Abstract: One embodiment of the present disclosure is a unique aircraft. Another embodiment is a unique system for supplying electrical power to an aircraft electrical load during flight operations. Other embodiments include apparatuses, systems, devices, hardware, methods, and combinations for fluid driven actuation systems.

Abstract: A photoacoustic medical imaging device may include a substrate, an array of ultrasonic transducers on the substrate, at least one groove etched on the substrate, at least one optical fiber, and at least one facet. Each optical fiber is disposed in one of the grooves. Each facet is etched in one of the grooves and coated with a layer of metal having high infrared reflectivity. Each optical fiber is configured to guide infrared light from a light source through the fiber and toward the respective facet. The facet is configured to reflect the infrared light toward a target.

Abstract: A cascaded micromechanical actuator structure for rotating a micromechanical component about a rotation axis is described. The structure includes a torsion spring device which, on the one hand, is attached to a mount and to which, on the other hand, the micromechanical component is attachable. The torsion spring device has a plurality of torsion springs which run along or parallel to the rotation axis. The structure includes a rotary drive device having a plurality of rotary drives which are connected to the torsion spring device in such a way that each rotary drive contributes a fraction to an overall rotation angle of a micromechanical component about the rotation axis.

Abstract: Disclosed is a highly reliable inductive vibration power generator wherein mechanical damping caused by the phenomenon of electrostatic pulling-in (stiction) and the like is suppressed even if the potential of an electret is increased and/or the gap between an electrode and the electret is reduced in order to increase the amount of power generation. The two surfaces of a movable substrate are respectively provided with first electrets and second electrets. By means of providing first electrodes and second electrodes to a lower substrate and an upper substrate and facing the respective electrets with a predetermined gap therebetween, electrostatic force is caused to arise on both sides of the movable substrate, and the pulling of the movable substrate in only one direction is prevented.

Abstract: A spinal correction system comprises a first member defining a longitudinal axis and including an inner surface that defines a first cavity and a second cavity. A second member defines a longitudinal axis and includes an inner surface that defines a first cavity and a second cavity. The members are connected along a first axis disposed in substantially parallel relation to the longitudinal axes. At least one first implant support is configured for disposal within the first cavities. At least one second implant support is configured for disposal within the second cavities. The members are rotatable about the first axis to space apart the members such that the inner surfaces forcibly engage the supports in releasable fixation. Methods of use are disclosed.

Abstract: A double parallelogram linear flexural system and method includes a first stage extending in a direction of movement, and a pair of parallelogram flexures extending from the first stage to distal ends configured for being grounded. A second stage extends parallel to the first stage, with another pair of parallelogram flexures extending between the stages, wherein the stages and parallelogram flexures form a double parallelogram. A linkage is disposed between, and resiliently coupled to, the stages. Linkage guiding flexures extend divergently from the linkage, to distal end portions configured for being grounded. The linkage guiding flexures define a notional triangle having a base extending between the distal end portions, and sides extending through proximal end portions to a notional apex defining a center of rotation for the linkage. The linkage is entirely within the double parallelogram, while constraining the stages to oscillate at the same frequency and phase.

Abstract: Disclosed is a method of fabricating a multiple degree of freedom actuator with inter-digitated electrodes including molding an electroactive polymer membrane so that a plurality of projections are formed around a cross section of an outer surface of the polymer membrane; depositing a metal electrode layer onto the outer surface of the molded membrane; and removing the plurality of projections on the outer surface on the molded membrane, thereby forming a multiple degree of freedom actuator with a plurality of inter-digitated electrodes. Also provided are actuators as well as devices (such as catheters) including such actuators formed by the disclosed methods of fabricating an actuator with multiple DOF.

Abstract: A Micro Electro Mechanical Systems (MEMS) device includes a rotor having first rotor teeth and second rotor teeth formed in at least two layers of silicon-on-insulator (SOI) substrate. Each rotor tooth belonging to the first rotor teeth is formed in a first layer and each rotor tooth belonging of the second rotor teeth is formed in a second layer. A stator includes first stator teeth and second stator teeth formed in at least two layers of SOI substrate. Each stator tooth belonging to the first stator teeth is formed in a first layer and each stator tooth belonging to the second stator teeth is formed in a second layer.

Abstract: A vibration sensor has a first substrate, a second substrate relatively movable by an external vibration while opposed to the first substrate, an electret group having a plurality of electrets that are arrayed in a relative movement direction on a side of one of surfaces of the first substrate, and an electrode group having a plurality of electrodes that are arrayed in the relative movement direction on a side of a surface of the second substrate. The surface of the second substrate is opposed to the electret group. A positional relationship between the electret group and the electrode group changes with a relative change in position of the first and second substrates by the external vibration to output an external vibration detection signal.

Abstract: An optical scanner includes: a light reflecting section having light reflectivity; a movable plate which includes the light reflecting section and can be displaced; four link sections connected to the movable plate; and a supporting section supporting the four link sections. The four link sections are provided on an outer circumference of the movable plate at 90-degree intervals along a circumferential direction of the movable plate in a plan view. Each link section includes a turnable drive section, and a shaft section which connects the movable plate and the drive section. The shaft section is bent and deformed in a thickness direction of the movable plate by turning the drive section.

Abstract: Integrated Microelectromechanical System (“MEMS”) devices and methods for making the same. The MEMS devices comprise a substrate (200) and a MEMS filter device (100) mechanically suspended above a major surface of the substrate. A first gas gap (202) exists between the major surface of the substrate and the MEMS filter device. An isolation platform (600) is provided to absorb vibrations from an external environment prior to reaching the MEMS filter device. In this regard, the isolation platform comprises: a frame structure (610) framing a periphery of the MEMS filter device; and at least one resilient component (612-618) coupled between the frame structure and the MEMS filter device. The frame structure is mechanically connected to the substrate. Electronic circuitry is connected to the MEMS filter device via a resilient interconnection (204, 206) that is movable in at least one direction of the vibrations.

Abstract: A technique capable of making an object move and transporting it without generation of a current, and extracting mechanical work. As a result of diligent effort, the present inventors have found that by arranging two electrodes for generating an electric field for a dielectric body of a micrometer-size or the like in an insulating fluid such as oil, such that the central axes of the two electrodes are not aligned, and applying an electric field (for example, constant electric field), the dielectric body can be transported three-dimensionally at will, and as a result, mechanical work can be extracted.

Abstract: A method of retrieving sequence-verified deoxyribonucleic acid (DNA) includes positioning a sequence-verified DNA molecule on a microelectromechanical systems (MEMS) substrate. The MEMS substrate includes an electrostatic actuator and the sequence-verified DNA molecule is positioned adjacent to a moving element. The method also includes applying a voltage between the moving element and a stator to cause a motion of the moving element, thereby ejecting the sequence-verified DNA molecule from the MEMS substrate.

Abstract: A switch includes a shuttle having an elongated length resiliently supported at opposing ends thereof and configured to move along a motion axis in response to an applied voltage. A shuttle switch portion includes a plurality of shuttle contact fingers extending transversely from opposing sides of the shuttle. A common contact at a common terminal side of the shuttle includes a plurality of contact fingers respectively interdigitated with the shuttle contact fingers. First and second terminal contacts are adjacent a switched terminal side of the shuttle, and include first terminal contact fingers and second terminal contact fingers respectively interdigitated with shuttle contact fingers. The shuttle switch portion is configured to selectively connect the common contact to the first terminal contact or the second terminal contact.

Abstract: A recording head for use in magnetic storage devices is disclosed. The recording head includes a transducer that is bi-directionally movable with respect to a surface of the magnetic storage medium, thereby enabling improved positioning of the transducer during recording head read and write operations. Various structures are disclosed to bi-directionally actuate the recording head transducer. In one embodiment, an interleaver assembly having a plurality of flexure assemblies employs a motor including magnetic portions for selective, bi-directional actuation. In another embodiment, electrostatic charges are employed in the flexure assemblies for selective actuation. In yet another embodiment, piezoelectric elements are included to provide for selective actuation.

Abstract: Complementary metal oxide semiconductor (CMOS) ultrasonic transducers (CUTs) and methods for forming CUTs are described. The CUTs may include monolithically integrated ultrasonic transducers and integrated circuits for operating in connection with the transducers. The CUTs may be used in ultrasound devices such as ultrasound imaging devices and/or high intensity focused ultrasound (HIFU) devices.

Abstract: A resonator includes a base substrate with anchor pads, and a quartz resonator device including a resonant microbridge with an electrode, a first flexure beam connected to an end of the microbridge, a second flexure beam connected to a second end of the microbridge, a first and second spring connected between the first flexure beam and first and second anchor mounts, respectively, a third and fourth spring connected between the second flexure beam and third and fourth anchor mounts, respectively, the anchor mounts connected to anchor pads on the base substrate. A single crystal quartz includes the microbridge, the flexure beams, the springs, and the anchor mounts. The flexure beams and the springs prevent buildup of stress in the microbridge.

Abstract: A micro-electro-mechanical-system (MEMS) device comprising two proof masses disposed in the first frame, such that the MEMS device with oscillating assemblies senses the angular velocity in the two axes, respectively. The MEMS device with oscillating assemblies further comprises a lever structure and two oscillating assemblies connecting at two opposite ends of the lever structure, such that the oscillating assemblies move in opposite directions synchronously. The MEMS device with oscillating assemblies further comprises a spring assembly connected between the proof mass and a movable electrode, restricting the proof mass to drive the movable electrode to only move in a specific direction.

Abstract: A microelectromechanical systems (MEMS) device may be provided with one or more sintered electrical contacts. The MEMS device may be a MEMS actuator or a MEMS sensor. The sintered electrical contacts may be silver-paste metalized electrical contacts. The sintered electrical contacts may be formed by depositing a sintering material such as a metal paste, a metal preform, a metal ink, or a metal powder on a wafer of released MEMS devices and heating the wafer so that the deposited sintering material diffuses into a substrate of the device, thereby making electrical contact with the device. The deposited sintering material may break through an insulating layer on the substrate during the sintering process. The MEMS device may be a multiple degree of freedom actuator having first and second MEMS actuators that facilitate autofocus, zoom, and optical image stabilization for a camera.

Abstract: Power generated by a vibration power generator using an electret is efficiently supplied to a power supply load. A vibration power generator includes a first substrate and a second substrate configured to be moved relative to each other by external vibration while remaining opposite each other, a group of a plurality of electrets arranged in the relative movement direction on one surface side of the first substrate, and a group of a plurality of electrodes arranged in the relative movement direction on a surface side of the second substrate opposite to the group of electrets, the group of electrodes including first current collecting electrodes and second current collecting electrodes electrically connected to respective power supply loads to which power generated by the external vibration is supplied, and ground electrodes each provided between the first current collecting electrode and the second current collecting electrode and grounded.