Abstract: A deployable acoustic wave RFID/biosensor assembly has at least one protective layer, and an acoustic wave RFID/biosensor within the protective layer or layers. The acoustic wave RFID/biosensor includes an acoustic wave device, a biolayer mounted on the acoustic wave device, an electric circuit operable to actuate the acoustic wave device, and a fluidic chamber associated with the biolayer. In use, the fluidic chamber contains fluid which, if a predetermined substance to be sensed is present, operates to modify the biolayer which in turn affects the operation of the acoustic wave device. Protective fluid is provided within the protective layer or layers substantially surrounds the acoustic wave RFID/biosensor to protect the acoustic wave RFID/biosensor from damage when the RFID/biosensor assembly impacts a target and to protect the biolayer from deterioration during storage and use.

Abstract: A piezoelectric actuator 21 has: a piezoelectric actuator part 22 made up of a common electrode 27, a piezoelectric element 29, and an individual electrode 33; an electrical interconnection joint part 43 formed on the individual electrode 33; an electrical interconnection 45 formed on the electrical interconnection joint part 43; a head block 47 fixed to a nozzle plate 39 through the electrical interconnection 45; and a PI tape 49 disposed within the head block 47. A closed space 57 is defined between the head block 47 and the nozzle plate 39. The closed space 57 is divided by the PI tape 49 into two sections. Of these two sections of the closed space 57, the one on the side of the head block 47 constitutes a first closed space 57a. A moisture absorbent 52 is sealed within the first closed space 57a. Relative humidity within the closed space 57 of the ink jet head 1 is not less than 0% nor more than 20%.

Abstract: The specification discloses embodiments of an apparatus comprising a film bulk acoustic resonator (FBAR) filter comprising a piezoelectric membrane having a portion thereof sandwiched between a first electrode and a second electrode, the piezoelectric membrane being suspended from at least two edges thereof, and a heat transfer layer placed on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Also disclosed are embodiments of a process comprising sandwiching a portion of the piezoelectric membrane between a first electrode and a second electrode, suspending a piezoelectric membrane from at least two edges thereof, and placing a heat transfer layer on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Other embodiments are disclosed and claimed.

Abstract: A piezoelectric blade protection structure for a plurality of juxtaposed piezoelectric blades mounting onto a circuit board to provide protection and anchoring effect for the piezoelectric blades. A protection member is mounted onto the vibration nodes of the piezoelectric blades to prevent the piezoelectric blades from broken by improper impact of external forces. The protection member, piezoelectric blades and circuit board are interposed respectively by a upper elastic element and a lower elastic element to provide a desired vibration space and anchoring for the piezoelectric blades.

Abstract: A method of manufacturing a piezoelectric element structure having a supporting substrate and a piezoelectric film supported on the supporting substrate. A first layer, and a second layer having zirconium, each provided with a perovskite structure, are formed in that order on the supporting substrate. The two layers are formed to be in contact with each other or laminated through an intermediate layer. The temperature is set to 500° C. or more at the time of formation of the layers, and cooling is subsequently provided from the formation temperature at least to 450° C. with a cooling speed of 30° C./min or more.

Abstract: A high-frequency quartz crystal unit includes a quartz crystal blank having a hole defined in at least one principal surface thereof, providing a resonating region in a portion of the crystal blank which is made thinner by the hole, excitation electrodes disposed respectively on opposite principal surfaces of the crystal blank in the resonating region, extension electrodes extending respectively from the excitation electrodes to respective first and second positions on an outer peripheral portion of the crystal blank, and a casing. The crystal blank has a fixed end electrically and mechanically connected to the casing by eutectic alloy in the first position. The crystal blank has a free end on which the extension electrodes are electrically connected to the casing by wire bonding in the second position.

Abstract: A thin and highly stable piezoelectric oscillator is provided with a piezoelectric vibrator, a mother printed board which supports a piezoelectric vibrator main body on its one face and connects lead terminals to a wiring pattern, oscillating circuit parts which are mounted on one face of the mother printed board to be disposed in close contact with one face of the piezoelectric vibrator main body, adjusting circuit parts which are mounted on the other face of the mother printed board, an internal printed board which is provided in contact with the other face of the piezoelectric vibrator main body, and heater resistors which are mounted on the internal printed board to be disposed in close contact with the other face of the piezoelectric vibrator main body.

Abstract: A micro-electro-mechanical generator is provided with a housing having a heat source and a heat sink opposite to the heat source in the housing. An upper diaphragm and a lower diaphragm separated from the upper diaphragm by a constant distance are further provided, which are deformable between a first position where the lower diaphragm is thermally connected to the heat source while the upper diaphragm being thermally shut off from the heat sink, and a second position where the upper diaphragm is thermally connected to the heat sink while the lower diaphragm being thermally shut off from the heat source. Further, the upper diaphragm and the lower diaphragm are adapted to generate electric energy whenever being deformed.

Abstract: A film bulk acoustic resonator (FBAR) includes an insulation layer on a substrate to prevent a signal from being transmitted to a substrate. The FBAR includes a portion of a membrane layer corresponding to an activation area to adjust a resonance frequency band and improve a transmission gain of the resonance frequency band, the portion of the membrane layer being partially etched to have a thickness less than the other portion of the membrane layer. A method of forming the FBAR includes forming an sacrificing layer made of polysilicon, forming an air gap using a dry etching process, and forming a via hole. The method prevents structural problems occurred in a conventional air gap forming process and provides locations and the number of the via holes to be controlled.

Abstract: A piezoelectric actuator and a method of assembling and employing a piezoelectric actuator. This method comprises the steps of positioning an expandable piezoelectric material inside a case, and enclosing a vaporizable liquid in the case. The case is positioned in a high temperature environment; and the liquid vaporizes, in that high temperature environment, over a given period of time, to maintain the temperature of the piezoelectric material below a given value for said period of time. Preferably, the vaporizing liquid maintains the temperature of the piezoelectric material substantially constant over that period of time. Also, preferably the case is provided with a pressure responsive valve that opens and closes, in the high temperature environment, to expose the liquid to that environment and control the vaporization of the liquid to maintain the temperature of the piezoelectric material substantially constant over the period of time.

Abstract: The specification discloses embodiments of an apparatus comprising a film bulk acoustic resonator (FBAR) filter comprising a piezoelectric membrane having a portion thereof sandwiched between a first electrode and a second electrode, the piezoelectric membrane being suspended from at least two edges thereof, and a heat transfer layer placed on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Also disclosed are embodiments of a process comprising sandwiching a portion of the piezoelectric membrane between a first electrode and a second electrode, suspending a piezoelectric membrane from at least two edges thereof, and placing a heat transfer layer on the piezoelectric membrane surrounding, but not in contact with, the first electrode. Other embodiments are disclosed and claimed.

Abstract: A micro-electro-mechanical generator has a liquid chamber, a heating block, an elongated elastic piezoelectric plate and a pair of electrodes. The liquid chamber is defined by bottom blocks which include the heating block and side walls, and can maintain a liquid. The heating block generates bubbles within the liquid chamber. The elongated elastic piezoelectric plate has a piezoelectric material layer, and is positioned in the liquid chamber adjacent to an upper portion of the heating block. The elongated elastic piezoelectric plate is deformable by contact with the bubbles, wherein a first end of the elongated elastic piezoelectric plate is a free end and a second end of the elongated elastic piezoelectric plate is a fixed end. The pair of electrodes are electrically connected to the piezoelectric material layer.

Abstract: The present invention is for a thermally controlled package for oscillators, particularly evacuated miniature surface acoustical wave oscillators (EMSO) devices. In a preferred embodiment the surface acoustical wave device is bonded directly to a heated substrate. The package is evacuated to improve temperature characteristics. A temperature heater, sensor, and control controller are utilized to maintain the internal package temperature above ambient. In one embodiment there is an additional substrate layer that house components that are not sensitive to temperature with interconnects electrically connecting the heated substrate and the additional substrates.

Abstract: Apparatuses and methods for controlling the temperature induced deformation of a piezoelectric device. A piezoelectric device receives an activation signal and displaces in a first direction for a first predetermined distance as a function of the activation signal. The piezoelectric device also displaces in a second direction as a function of a change in temperature of the piezoelectric device. A stop is located a second predetermined distance from the piezoelectric device. The stop prevents the displacement of the piezoelectric device in the second direction beyond a third predetermined distance. A charge redistributing device is coupled with the piezoelectric device. The charge redistributing device redistributes charge on the piezoelectric device due to the temperature change to relieve internal electric fields of the piezoelectric device due to temperature induced deformation of the piezoelectric device.

Abstract: The invention relates to a piezoelectric actuator in particular for actuating control valves or injection valves in internal combustion engines in motor vehicles, having a piezoelectric actuator body, in particular in the form of a multilayer laminate of stacked layers of piezoelectric material and intervening metal or electrically conductive layers acting as electrodes, in which one of the face ends of the actuator body is fixed on a highly heat-conducting or metal actuator base, in which the piezoelectric actuator includes at least one highly heat-conductive cooling body joined highly heat-conductingly to the side faces of the actuator body and to the actuator base.

Abstract: The present invention is a piezoelectric device fabricated on a semiconductor that also contains electronic circuitry. A cooling device is used to lower the temperature of the resonator. Electronic circuitry can provide feedback to the resonator to compensate for microphonics that occur at low temperatures. Alternatively, piezoelectric materials that can operate at high temperatures can create a high temperature frequency source.

Abstract: An air cooled ultrasonic apparatus comprises a housing having an air inlet, an air outlet, a first periphery, and a second periphery. A plurality of first and second protrusions radially extend from the first and second peripheries. The housing houses a piezoelectric transducer means and an elongated horn which is operably supported by the first and second protrusions, so that a cooling air is supplied through the air inlet into the housing and discharged through the air outlet, thereby significantly enhancing effectiveness and efficiency for its application to medical, dental and plastic surgery as well as industrial use.

Abstract: A low profile integrated oscillator operable to provide an oscillator signal includes a thermally conductive substrate having a cavity and a ledge. A crystal or other resonator is located in the cavity and mounted to the ledge. The resonator stabilizes the oscillator signal. An electrical circuit is mounted to the substrate and electrically connects to the resonator to condition the oscillator signal. A cover seals the resonator in the cavity. A via electrically connects the resonator to the electrical circuit. A heater is mounted to the substrate, outside the cavity, for elevating the temperature inside the cavity and a temperature sensor is mounted to the substrate to monitor the oscillator temperature. The substrate is surrounded by an insulation and mounted within a housing. The housing has a connector for connecting to an external electrical circuit.

Abstract: A method to improve the high output characteristics of an ultrasonic transducer by urging a cooling gas 13 to flow through the transducer, thereby passing a cooling member 3 at the inner radius of at least one piezoelectric element 6 surrounding a central fluid conduit 21. In a preferred embodiment sulfurhexafluoride (SF.sub.6) is used as cooling gas.

Abstract: An apparatus having a drive device using an electromechanical transducer capable of being used in an environment in vacuum, at high temperatures and shielded from outside, an environment where electromagnetic waves are shielded or the like, where a drive shaft and a slider block frictionally coupled thereto are arranged at the inside of a hermetically-sealed vessel, one end of a drive shaft is made to penetrate a wall face portion of the hermetically-sealed vessel and the drive shaft is coupled with a piezoelectric element arranged at the outside of the vessel, the wall face portion of the hermetically-sealed vessel where the drive shaft penetrates is made elastically deformable, a portion between the wall face portion and the drive shaft is shielded in airtight by an adhesive agent and elongation and contraction displacements having different velocities are caused at the piezoelectric element whereby the slider block frictionally coupled with the drive shaft and members fixed to the slider block at the insid

Abstract: A device for improving thermal transfer inside an ultrasound probe and reducing heat build-up near the transducer face. The cable components are used as heat conductors which conduct heat out of the probe handle. These heat pipes are coupled to an internal heat conductor which is in heat conductive relationship with the transducer pallet. Thus, heat generated by the transducer array can be transferred, via the internal heat conductor plate and the cable heat conductors, away from the probe surface which contacts the patient. A heat conductive structure can be embedded in the overall shield braid of the cable. Suitable heat conductive structures include thread or wire made of material having a high coefficient of thermal conductivity, as well as narrow tubing filled with heat conductive fluid. Alternatively, inlet and return flow paths for cooling fluid are incorporated in the cable.

Abstract: An acoustical resonator comprising top and bottom electrodes that sandwich a PZ layer. The resonance frequency of the acoustical resonator may be adjusted after fabrication by utilizing heating elements included in the acoustical resonator and/or by adjusting the thickness of a tuning layer. In the preferred embodiment of the present invention, the electrodes comprise Mo layers. One embodiment of the present invention is constructed on a Si.sub.3 N.sub.4 membrane. A second embodiment of the present invention is constructed such that it is suspended over a substrate on metallic columns. In the preferred embodiment of the present invention, the electrodes are deposited by a method that minimizes the stress in the electrodes.

Abstract: A vibration type actuator device, and particularly a vibration type actuator device is heated for a predetermined time at the starting of the actuator device, and is operated thereafter.

Abstract: A device for improving heat dissipation inside an ultrasound probe and reducing heat build-up near the transducer face. Heat conductors are placed around the periphery of the transducer package, but within the probe housing, so that heat can be drawn away from the transducer face and toward the rear/interior of the probe. The heat conductors act as conduits for draining away heat which builds up in the thermal potting material during pulsation of the piezoelectric transducer elements. The heat conductors are formed from metal foil having a heat conductivity greater than the heat conductivity of the thermal potting material which fills the spaces inside the probe housing and surrounds the transducer package. The preferred metal foil is aluminum.

Abstract: In a vibration wave driven motor which has a vibration member for forming a travelling vibration wave in a resilient member by an AC voltage being applied to an electro-mechanical conversion element adhesively secured to the resilient member, and a member urged against the vibration member with pressing means interposed therebetween and in which the member and the vibration member are moved relative to each other by the travelling vibration wave formed in the resilient member, there is provided forcibly cooling means for forcing a cooling medium to circulate in the heat generating portion of the motor to thereby cool the same.

Abstract: A sensor for detecting the presence of a particular chemical by determining the absolute frequency shift in the oscillating frequency of an antibody-coated oscillator. Specific antibodies deposited on a high Q crystal oscillator detect the change in frequency as chemical particulates become trapped by the antibodies and change the effective mass of the crystal. In one embodiment, two oscillating crystals are used, one that has been coated with the antibodies, and one that is uncoated. This permits detection of frequency differences between the oscillating frequencies of the two crystals, thus eliminating pressure, temperature, and humidity corrections that conventionally must be made. The sensor maintains a high specificity by using antibodies that are specifically related to the chemical to be detected, while achieving relatively good sensitivity by using high Q oscillators, such as quartz or sapphire, and eliminating drift problems due to temperature, pressure, and humidity.

Abstract: A feed mechanism is constructed with a piezoelectric actuator embedded in the front end of a square sliding shaft, which is supported by hydrostatic guide surfaces formed on a guide base for sliding motion in the axial direction. A cooling jacket having a helical channel on its outside surface is provided at the periphery of the piezoelectric actuator. A part of pressurized fluid fed to the hydrostatic guide surfaces is led to the helical channel of the cooling jacket through a cooling oil feeding channel formed in the sliding shaft, and fluid in the helical channel is drained to a low pressure space through an oil discharging channel formed in the sliding shaft.

Abstract: A piezoelectric detector for determination of the mass or film thickness of gaseous, liquid or solid substances being adsorbed or condensed on the surface of a piezoelectric resonator, having at least one measuring resonator with at least one integrated thin-film sensor, one discrete or integrated on the resonator re-evaporation heating element, and a reference resonator separated from the measuring resonator with a contamination shield, and protected from contamination, but not from heat radiation, with an optical window, which all allow correction by electronic or numerical means of influences of temperature changes on the resonant frequency and of cut-angle deviations and the temperature differences between the resonators.

Abstract: A piezoelectric actuator comprises a housing having an inside cavity in which is mounted a column of piezoelectric elements having interleaved electrodes. The column of piezoelectric elements is mounted within a sealed enclosure which divides the inside cavity of the housing into an inner space receiving the column of piezoelectric elements and an outer space. The inner space is filled with a flowable, electrically insulative, thermally conductive material such as silicone oil held in direct contact with and in a heat transfer relationship with the column of piezoelectric elements. The silicone oil serves to isolate the column of piezoelectric elements and the electrodes from moisture and other foreign materials that would otherwise affect an insulation breakdown voltage. A cooling liquid is adapted to be circulated through the outer space surrounding the enclosure to absorb heat transferred thereto from the column of piezoelectric elements through the flowable thermally conducting material.

Abstract: An apparatus and method for exciting a piezoelectric crystal resonator has an electric oscillator connected to a double ended tuning fork piezoelectric crystal so that it flexurally vibrates in air at its mechanical resonant frequency. A novel electrode pattern connects the oscillator to the crystal such that changes in humidity do not affect the resonant frequency of the crystal. This arrangement is useful in measuring force, such as weight.

Abstract: A temperature sensor is formed by mounting a force-sensitive resonator on a resilient or non-resilient base structure, preferably in an enclosure such that thermally induced expansions or contractions of the base structure apply a stress to the resonator. The resonant frequency of the resonator is measured to provide an indication of the temperature of the base structure and resonator.

Abstract: A surface acoustic wave (SAW) device having a substrate of desired material is vacuum encapsulated in a structure fabricated from the same material as that comprising the substrate.

Abstract: For coupling RF energy into a piezoelectric transducer, a sheet of conductive foil is held in pressure contact with substantially the entire surface of a transducer electrode. A heat sink is thermally coupled to the sheet of conductive foil through a layer of material that is electrically insulative and also effectively thermally conductive so as to draw heat away from the transducer. Moreover, this layer of material that is interposed between the heat sink and the sheet of conductive foil has the property of creating an acoustic impedance mismatch between the transducer and the heat sink, so that acoustic waves that are launched by the transducer will not be transmitted into the heat sink, but will be confined to the intended medium of acoustic propagation upon which the transducer is mounted.