Abstract: The actuator includes a vibration plate including a fixing portion for fixing the vibration plate to a holding member, and a connection portion for connecting a center portion and the fixing portion, and is provided between a surface and a friction-sliding surface in a direction in which the vibration plate is pressed against the rotor by a pressurizing force produced by a pressure member. When finishing a surface on which a piezoelectric device is to be fixed to the vibration plate to a uniform surface by polishing, a decrease in the performance of the ultrasonic motor due to deformation of the vibration plate that is caused by warping of support portions that extend from both ends thereof or by burrs or the like can be prevented, and the time required to polish the vibration plate can be reduced.

Abstract: A sensor element is formed by, when an ? axis, a ? axis orthogonal to the ? axis, and a ? axis orthogonal to the ? axis and the ? axis are set, laminating piezoelectric substrates and electrodes in the ? axis direction. The sensor element includes connecting sections arranged such that a part of external sections of the electrodes aligns with a part of external sections of the piezoelectric substrates. The connecting sections are arranged not to align with one another in a direction of the ? axis. Conductors that electrically connect the connecting sections and external connecting sections are formed along outer peripheral sections of the piezoelectric substrates.

Abstract: Disclosed is a tire mountable apparatus and methodology for mounting devices within a tire. In certain embodiments a signal generator may be mounted to the tire to generate signals based on changes in the radius of curvature of a tire. A piezoelectric sandwich and/or a substrate is/are provided having a length and width based at least in part on tire dimensions and positioned in the tire such that the longer length dimension is positioned laterally with respect to the width of the tire. The sandwich and/or substrate is/are sized such that the width dimension provides substantially no response to changes in the circumferential radius of curvature of the tire so that the length dimension defines the primary bending direction while the width dimension provides a strain free mount for associated devices.

Abstract: A piezoelectric device is disclosed which has a built-in soft stop which serves for protection against excessive force.

Abstract: An acoustic resonator structure comprises a substrate having a trench, a conductive pattern formed in the trench, a pillar formed within the trench, and an acoustic resonator supported at a central location by the pillar and suspended over the trench.

Abstract: The present invention provides a piezoelectric sensor that can reduce spurious vibration of a transducer. The piezoelectric sensor includes a transducer which has a piezoelectric body and a vibration plate and which transmits/receives ultrasound, and a mount supporting the transducer near nodes of mechanical vibration generated to the transducer. The mount includes ribs that contact the transducer near the nodes of vibration in a point by point, line by line or partially plane by plane contact manner to support the transducer, and retract portions which are provided side by side to respective ribs near the nodes of vibration and which are distant from the transducer so as not to support the transducer.

Abstract: A flexural vibration element according to a first aspect of the invention includes: a vibration element body composed of a plurality of vibrating arms provided in parallel, a connecting part connecting the vibrating arms, and one central supporting arms extending between the vibrating arms from the connecting pert in parallel with the vibrating arms at equal distance from the arms and a frame body disposed outside the vibration element body.

Abstract: A flexural vibration element according to a first aspect of the invention includes: a vibration element body composed of a plurality of vibrating arms provided in parallel, a connecting part connecting the vibrating arms, and one central supporting arm extending between the vibrating arms from the connecting part in parallel with the vibrating arms at equal distance from the arms; and a frame body disposed outside the vibration element body.

Abstract: This disclosure provides systems, apparatus and techniques by which electromechanical resonators are implemented. In one aspect, by mechanically loading the resonator body in specific ways, multiple resonance modes are created within the resonator body resulting in wider bandwidths.

Abstract: In an exemplary method for manufacturing a piezoelectric device, a lid wafer, a piezoelectric wafer, and a base wafer are prepared. Each wafer defines multiple lids, multiple piezoelectric vibrating pieces, and multiple bases, respectively. The piezoelectric vibrating pieces comprise respective first and second electrodes, and the base wafer is made of glass. The bases comprise respective first and second metal wires extending therethrough, each wire having a respective end and a respective side surface at the end that protrudes at least partially from the first surface. A wafer sandwich is formed with the three wafers co-aligned with each other, with the protruding ends of the wires contacting respective first and second electrodes. The layers are anodic bonded together, which also bonds the protruding ends of the first and second wires to the respective first and second electrodes. The bonded wafer sandwich is cut into separate individual piezoelectric devices thus formed in the sandwich from each other.

Abstract: A holding device for a piezoelectric vibrator including a support member (11) for separately accommodating a piezoelectric vibrator (1), a first plate spring member (13) which extends from a proximal end fixedly bonded to one side of the support member (11) so as to sandwich opposing sides of the piezoelectric vibrator (1) and is folded back to be fixedly bonded to the piezoelectric vibrator, and a second plate spring member (18) which extends from a proximal end fixedly bonded to another side of the support member (11) so as to sandwich the opposing sides of the piezoelectric vibrator (1) and is folded back to be fixedly bonded to the piezoelectric vibrator. The first plate spring member (13) and the second plate spring member (18) are integrated at portions fixedly bonded to the piezoelectric vibrator (1).

Abstract: A spherical surface acoustic wave apparatus includes a surface acoustic wave propagation substrate which has a surface acoustic wave circulation path on an outer surface thereof. The path is configured to be annular and continuous using at least a part of a spherical shape, and is able to be excited to generate surface acoustic wave and allows the excited surface acoustic wave to propagate and circulate therein in its annular and continuous direction. The apparatus further includes a substrate support which supports a region of the outer surface of the substrate, the region excluding the circulation path, and a support for a surface acoustic wave excitation/detection unit, which supports an elastic member supporting the excitation/detection unit, which makes the excitation/detection unit being in contact with the circulation path of the outer surface of the substrate through the elastic member, and which elastically deforms the elastic member.

Abstract: A flexural vibration element according to a first aspect of the invention includes: a vibration element body composed of a plurality of vibrating arms provided in parallel, a connecting part connecting the vibrating arms, and one central supporting arm extending between the vibrating arras from the connecting part in parallel with the vibrating arms at equal distance from the arms; and a frame body disposed outside the vibration element body.

Abstract: An object of the invention is to provide a surface mount type crystal oscillator in which a probe can be easily brought into contact with a crystal inspection terminal. The surface mount type crystal oscillator is such that a crystal piece and an IC chip are housed within a container main body having a bottom wall and frame wall formed with laminated ceramics, and a communication terminal is provided on an outer side surface of the container main body. The communication terminal is provided so as to span from the outer side surface of the bottom wall to the outer bottom surface of the outer wall, the communication terminal is made the crystal inspection terminal, and the crystal piece and the IC chip are arranged in parallel on the inner bottom surface within the container main body.

Abstract: The disclosed is package structure for a piezoelectric transformer, which comprises: a shell for supporting the piezoelectric transformer at its node plane; a plurality of electrical connection frames which are fixed on the shell for connecting with electrodes of the piezoelectric transformer and conducting heat from piezoelectric transformer by connection points arranging along the electrical connection frame; and a plurality of connection pins deposited on the electrical connection frames for connecting to the outside circuit. Further, the shell has a wedge structure part which fixes the piezoelectric transformer at its node plane. Correspondingly, a package method for a piezoelectric transformer is also disclosed. Thus, the structure and package method allow a piezoelectric transformer to vibrate freely and have good heat management.

Abstract: An electromechanical force transducer having an intended operative frequency range comprises a resonant element (10) having a periphery and having a frequency distribution of modes in the operative frequency range, characterized by support means (16) coupled to the periphery of the resonant element, the support means (16) having a substantially restraining nature in relation to bending wave vibration of the resonant element (10). The transducers may be mounted to an acoustic radiator (12) in a loudspeaker via coupling means (14) to excite the acoustic radiator to produce an acoustic output.

Abstract: A micro-electro-mechanical transducer (such as a cMUT) is disclosed. The transducer has a base having a lower portion and an upper portion; a top plate disposed above the upper portion of the base forming a gap therebetween; and a spring-like structure disposed between the top plate and the lower portion of the base. The spring-like structure has a spring layer connected to the lower portion of the base and a spring-plate connector connecting the spring layer and a top plate. In an alternate embodiment, the spring-like has a vertical bendable connector connecting the top plate and the lower portion of the base. The spring-like structure transports the top plate vertically in a piston like manner to perform the function of the transducer. Fabrication methods to make the same are also disclosed.

Abstract: An electrical component includes a ceramic substrate and a piezoelectric transformer, which is connected electrically and mechanically to the ceramic substrate.

Abstract: A micro displacement mechanism minutely displaces an object to be driven. The micro displacement mechanism includes a stationary part and an actuator fixed to the stationary part so as to rotatably support the object to be driven. The actuator includes a pair of piezoelectric actuators attached to opposite side surfaces of said object to be driven, respectively. The pair of piezoelectric actuators are arranged at point symmetric positions with respect to a center of gravity of the object to be driven.

Abstract: An object of the present invention is to provide a novel system for supporting a vibrator having a terminal for electrical connection so that the vibrator may be miniaturized and the deviation of vibration property among vibrators mounted on the supporting systems may be prevented. The supporting system has a substrate 11 and bonding wires 9, 10 supported on the substrate 11 and to be joined with a vibrator 1. The vibrator 1 is supported with the bonding wires 9, 10 so that the vibrator 1 does not directly contact the substrate 11 and bonding wires 9, 10 are electrically connected with a terminal 6 of the vibrator 1.

Abstract: In an electronic component having a piezo-electric resonator 10 formed on an element substrate 11 and obtaining a signal having a predetermined resonant frequency by a bulk wave propagating within a piezo-electric film 15, a mounting substrate 19 on which the piezo-electric resonator 10 is mounted by face-down bonding through N bumps 18, when a maximum diameter of said N bumps 18 is defined as D ?m, die shear strength of said N bumps 18 is not smaller than ND/6 (g), preferably, not smaller than ND/3.6 (g).

Abstract: A vibrating gyroscope includes a vibrator having a longitudinal direction and being capable of vibrating in a bending mode in a bending direction perpendicular to the longitudinal direction. The vibrator has first and second nodes which elongate in a direction perpendicular to both the bending direction and the longitudinal direction and first, second, third and fourth supporting members connected to the vibrator such that the first node is interposed between the first and second supporting members and the second node is interposed between the third and fourth supporting members. The first node is located at the vicinity of either the first supporting member or the second supporting member, and the second node is located at the vicinity of either the third supporting member or the fourth supporting member.

Abstract: An electronic component includes a case substrate. Substrate electrodes having a substantially spherical outer surface are disposed on at least a first principal surface of the case substrate. A piezoelectric resonator is mounted on the case substrate such that the piezoelectric resonator is bonded to the outer surfaces of the substrate electrodes by a conductive bonding material and is supported by the substrate electrodes in a point-contact manner. Also, the formula, Lk−2We<Lp<Lk−We, is satisfied where Lp is the length of the piezoelectric resonator, Lk is the length of the case substrate, and We is the length of the substrate electrode.

Abstract: A method for fabricating a pressure-waveform sensor with a leveling support element. One embodiment provides a pressure-waveform sensor having a housing, a support element, and a piezoelectric element having a first end secured between the support element and the housing, and a second end in a cantilevered orientation. The support element and the piezoelectric element together form a plurality of support regions to level the piezoelectric element and relative to the housing. In some embodiments, the support element includes a ring having three slots spaced apart on one face of the ring, or one or more support regions formed with a shim having a thickness equal to a thickness of the piezoelectric device, or support regions that are integral to the support element. Another aspect provides a method for fabricating a pressure-waveform sensor.

Abstract: In order to achieve reproducible vibration excitation of a quartz crystal even under the technical conditions which prevail when it is used for monitoring electroplating baths, a mounting for the quartz crystal 7 is proposed. The mounting for the quartz crystal 7 has two holding elements 3, 6, 14 detachably connected to one another as a form-fit, and at least two contact elements 5, 9 on the holding elements 3, 6, 14 brought into electrical contact with the contacting surfaces 32 of the quartz crystal 7. The quartz crystal 7 is fitted with the holding elements 3, 6, 14 and/or the contact elements 5, 9 at least one of the contact elements 9 being configured as a resilient body. The at least one resilient contact element 9 has an end face 34, 134 for electrically contacting the quartz crystal 7, the size of which face corresponds roughly to the size of the quartz crystal 7.

Abstract: There is provided a crystal oscillator in which a crystal blank and an integrated circuit (IC) chip are accommodated in a vessel and the IC chip is fixed through a bump to the bottom surface of the vessel by means of ultrasonic thermocompression bonding. The IC chip contains an oscillation circuit utilizing the crystal blank and has a plurality of terminal electrodes on a major surface thereof. A plurality of connection terminal portions are formed on the bottom surface of the concave portion of the vessel so that each of the connection terminal portions corresponds to one of the terminal electrodes. Each of the connection terminal portions is formed into a rectangular shape and the width of each connection terminal portion is identical. The terminal electrodes and the connection terminal portions are bonded to each other through a bump by means of ultrasonic thermocompression bonding. Thus, the IC chip is fixed to the bottom surface of the concave portion of the vessel.

Abstract: A method for flexible mounting piezoelectric devices at a spaced distance from a PC board by conductive adhesive so as to provide support to the device sufficient to withstand 50 g on three axes for 11 ms with minimal adverse effect on the operation and performance of the assembled structure. Also disclosed is a piezoelectric device flexibly mounted at a spaced distance from a PC board by conductive adhesive so as to provide support to the device sufficient to withstand 50 g on three axes for 11 ms with minimal adverse effect on the operation and performance of the device.

Abstract: A vibrating gyroscope includes a vibrator having a node and a support member having a thin flexible portion and an expanded portion which is connected to the thin flexibly portion and has a larger area than the thin flexible portion. The expanded portion of the support member is fixed to the vibrator at the node.

Abstract: While suppressing that a vibration of a piezo-electric element propagates to a substrate by devising the composition of an electro-conductive support body, the piezoelectric resonant component which secures electroconductivity and can maintain a fall-proof shock property is provided. The piezoelectric resonant component has a substrate 20 on the top surface of which pattern electrodes 21 and 22 are formed, and on the lower surface of which it has electrodes 8 and 9. It has a piezoelectric element 1 using the length vibration on the substrate 20. Electro-conductive support bodies 10 and 11 are fixed to the length direction center section of the lower surface electrodes of the piezoelectric element 1. The connection fixation of these support bodies 10 and 11 to the pattern electrodes 21 and 22 of the substrate 20 is performed by electro-conductive adhesives 12 and 13.

Abstract: A vibrating gyroscope includes a vibrator having a node and a support member having a thin flexible portion and an expanded portion which is connected to the thin flexibly portion and has a larger area than the thin flexible portion. The expanded portion of the support member is fixed to the vibrator at the node.

Abstract: A contact device for securely and reliably attaching electrical leads to a laminated multi-layer piezoelectric transformer and comprising a pair of conductive lead attachment plates, disposed on opposite sides of the laminated multi-layer piezoelectric transformer, each having first and second surfaces, the first surface having at least one leg extending therefrom to contact the laminated multi-layer piezoelectric transformer at a node and the second surface being sufficient to permit secure and durable attachment of electrical leads thereto. A variety of geometric configurations of the contact device of the present invention suitable or adaptable to a variety of laminated multi-layer piezoelectric transformer geometries are also described. Such a device, useful for the attachment of a laminated multi-layer piezoelectric transformer to a circuit board, is also described.

Abstract: An acceleration sensor includes: a piezoelectric vibrator including a piezoelectric element having a first principal surface and a second principal surface opposed each other, a first and a second electrode formed on the first and the second principal surface, and conductive protrusions made of a metal material or a ceramic material and formed by a thermal spraying process; and a holding body for holding the piezoelectric vibrator via the conductive protrusions.

Abstract: A piezoelectric resonator (12) is embedded within an electrically insulating substrate assembly (36), such as a multilayer printed circuit board. Electrical conductors (22,24) extend from electrodes of the resonator (12) through holes (32) in upper and lower layers (26,29) of the substrate assembly (36) and connect to electrical traces (34). The lower layer (29) has a pocket which forms a cavity (38) within the substrate assembly (36) adapted to contain the piezoelectric resonator (12). The conductors (22,24) support the resonator (12) such that the resonator (12) does not contact the assembly (36). As the resonator is substantially larger than associated electrical components, embedding it within a substrate eliminates the size penalty that is normally required to mount a large piezoelectric resonator.

Abstract: A piezoelectric transformer includes a molded package having first and second inner walls facing each other, a plurality of pairs of projections provided on the first and second inner walls, and a piezoelectric transformer element mechanically supported by the projections so that the piezoelectric transformer element is accommodated in an internal space defined by inner walls of the molded package but separated from the inner walls of the molded package. As a result, the thickness of the package can be reduced.

Abstract: A highly reliable ladder filter has a simple structure and is adapted to be readily assembled automatically for less cost. The ladder filter includes a case including storage sections which are adjacent to each other. A first series piezoelectric resonator, a second series piezoelectric resonator and a second parallel piezoelectric resonator are stored in one storage section such that the second series piezoelectric resonator is located between the first series resonator and the parallel resonator. A first parallel piezoelectric resonator, a third parallel piezoelectric resonator and a third series piezoelectric resonator are stored in the other storage section such that the third parallel piezoelectric resonator is located between the first parallel resonator and the third series resonator. The first series piezoelectric resonator is disposed adjacent to the first parallel piezoelectric resonator such that the partition wall is located therebetween.

Abstract: A multielement-type piezoelectric filter capable of facilitating assembly and having a reduced size. The base substrate carries a conduction circuit. An input terminal portion, an output terminal portion and a ground terminal portion are formed on a bottom surface of the base substrate and connected to corresponding connection end portions of the conduction circuit. Furthermore, series resonators and parallel resonators are arranged side by side on the base substrate. The lower electrodes of the resonators are connected to the corresponding connection end portions of the conduction circuit via through-holes. In one embodiment, conductive sheets are attached onto exposed upper electrodes of some of the resonators so as to establish a required connection between the upper electrodes. In another embodiment, a common path layer is formed on the upper surface of the base substrate. The upper electrodes of some of the resonators are connected to the common path layer via bonding wires.

Abstract: In a vibration gyroscope 1, a vibrator 2 is mounted to a mounting substrate 7 through support pins 6a and 6b. The mounting substrate 7 and a support substrate 10 are disposed opposite by inserting protrusions 11a and 11b of the support substrate 10 into second insertion holes 9a and 9b of the mounting substrate 7 and by supporting the mounting substrate 7 with convex molded sections 14a and 14b. The space between the substrates 7 and 10 are filled with elastic paste made up of synthetic resin such as urethan and silicone, or the like. The paste is dried to form a vibration absorbing member 13. Alternatively, the vibration absorbing member 13 is formed on the surface of a mounting substrate 22.

Abstract: An electronic component has a substantially reduced size and is adapted to be produced at low costs without variation in superior quality of the component because of the ease of achieving electrical connection between a piezoelectric element and a electrode pattern on a substrate supporting the piezoelectric element. The piezoelectric element has a lower electrode formed on the lower surface thereof and an upper electrode formed on the upper surface thereof. The piezoelectric element is fixed to the substrate such that the lower electrode is bonded to an electrode provided on the substrate by a conductive adhesive. A conductive wire is fixed to the upper electrode of the piezoelectric element. A metallic cap is bonded to the substrate so as to cover and seal the piezoelectric element on the substrate. The cap is contacted at its inner surface by the wire, whereby an electrical connection is achieved between the cap and the upper electrode of the piezoelectric element.

Abstract: A piezoelectric transformer element 1 is supported by a plurality of contact pins 5b provided on a printed wiring board 6. The contact pins are directly contacted to lower electrodes of the piezoelectric transformer element at its nodal points. An insulating case 4 accommodating the piezoelectric transformer element 1 is provided with a plurality of leads 3 which contact upper electrodes of the piezoelectric transformer element 1 at its nodal points. The insulating case 4 and the printed wiring board are combined together to provide electrical connection between the leads and wirings of the printed wiring board.

Abstract: In a piezoelectric transformer unit which transforms an input voltage into an output voltage and which includes a piezoelectric transformer element driven by high electric power, a package is provided to accommodate the piezoelectric transformer element therein. Electrodes are attached to nodes of the piezoelectric transformer element and supported by each pair of input and output conductive leads which are operable as leaf springs and which are extended through the package. Contact portions of the conductive leads may provide point contacts, area contacts, and/or line contacts.

Abstract: An electronic device which has piezoelectric resonators and terminals piled in a box-like case. The electronic device has a couple of terminals, each of which has a contact portion and a junction portion extending from the contact portion. In the case, the couple of terminals are integrated by electrically connecting the junction portions.

Abstract: A vibrating gyroscope 10 includes a piezoelectric vibrator 12. The piezoelectric vibrator 12 includes a vibrating body 14 having a regular triangular prism shape. Grooves 16 are formed on one side face of the vibrating body 14 along its width direction. The grooves 16 are formed at portions corresponding to nodal points of the vibrating body 14. Piezoelectric elements 18a, 18b and 18c are formed on three side faces of the vibrating body 14. An M-shaped supporting members 26 are attached to the vibrating body 14 at portions in grooves 16.

Abstract: The vibrator includes for example, a triangular prism shaped vibrating body. On each of three side faces of the vibrating body, piezoelectric elements are formed respectively. The vibrating body makes bending vibration by giving a driving signal to one or two piezoelectric elements. The vibrator is used in a vibratory gyroscope. In this case, for example, one piezoelectric element is used for vibrating the vibrator. When a rotating force is applied to the vibratory gyroscope, a Coriolis force is exerted to produce output voltages on the remaining two piezoelectric elements corresponding to the rotational angular velocity.

Abstract: Protrusions made of an electrically conductive material such as a metal or ceramic are formed around a node point or a node line of vibrations of a piezoelectric plate on two principal planes thereof by a spraying process. The piezoelectric plate is held at the protrusions with leaf springs on the two principal planes. Thus, protrusions of a small surface area are formed without deteriorating the piezoelectric plate. The piezoelectric plate can be held stably without deteriorating the vibration characteristics. An alternating voltage is applied to electrodes of the piezoelectric plate through the electrically conductive protrusions. Because a spraying process is used, the protrusions can be thickly and precisely formed in a small area and held surely and reliably, with a good mechanical strength of the protrusions.

Abstract: An angular rate sensor system [10] comprising a vibratory sensing element [12] and signal processing circuit [14]. The element [12] is preferably a polymorphic rectangular bar fabricated from two layers of piezoceramic material [26, 28] divided by a thin center electrode [E.sub.c ], and a plurality of electrodes [E.sub.1 -E.sub.4 ] scored onto the planar conductive surfaces [30, 32]. The element [12] is suspended at its acoustic nodes [N, N'] to vibrate in one direction [V] normal to the physical plane of the electrodes [E.sub.c, E.sub.1 -E.sub.4 ] using any suitable mounting structure such as parallel crossed filaments [34] or inwardly angled support arms [64] that provide predetermined degrees of lateral [S'] and longitudinal [S] stiffness. The circuit [14] may optionally constitute totally shared [FIG. 7], partially shared [FIG. 8], or totally isolated [FIG. 9] driving and sensing functions, the corresponding element [12] being configured with dual-pair, single-pair, or single-triple outer electrodes [E.

Abstract: A vibrator support structure for a vibrator having a vibrating body comprises a support stand, a first damper material disposed on top of the support stand, and a first substrate disposed on top of the first damper material. In addition, the vibrator support structure includes a second damper material disposed on top of only a portion of the first substrate and a second substrate disposed on top of the second damper material. Two support filaments are also provided for supporting the vibrating body, one of which is mounted on the exposed portion of the first substrate, while the other of which is mounted on the second substrate.

Abstract: A vibrator is disclosed having a vibrating body with a polygonal lateral cross-section. Two piezoelectric elements are disposed on nonparallel side surfaces of the vibrating body. A support structure is provided which supports the vibrating body at two support points of the vibrating body. The support points are located in a split plane which passes through the line of intersection of the two planes in which the two side surfaces lie and bisects the inner angle formed by these two planes. Furthermore, the support points are located on opposite sides of the vibrating body and each support point is located at or near a nodal point of the vibrator.

Abstract: An ultra thin piezoelectric quartz crystal package can be realized by using adhesive dollops to compliantly mount a piezoelectric device within a thin package. The adhesive dollops maintain spacing between the upper and lower surfaces of the piezoelectric device (18) and the surfaces (13 and 15) of the housing that is comprised of upper and lower substrates (12 and 14).

Abstract: A piezo-resonator comprises a supporting frame having a recess for attaching a piezoelectric resonator element. This recess consists of three portions, that is, a central portion, a pair of connecting portions which are outside of the central portion and a pair of end portions which are outside of the pair of connecting portions. The width W.sub.2 of the connecting portion, the width W.sub.1 of the central portion and the width W.sub.3 of the end portion have the relationship W.sub.2 >W.sub.1 >W.sub.3. Two terminals intersect respective connecting portions to be embedded in the supporting frame.

Abstract: An angular rate sensor system [10] comprising a vibratory sensing element [12] and signal processing circuit [14]. The element [12] is preferably a polymorphic rectangular bar fabricated from two layers of piezoceramic material [26, 28] divided by a thin center electrode [Ec], and a plurality of electrodes [E1-E4] scored onto the planar conductive surfaces [30, 32]. The element [12] is suspended at its acoustic nodes [N, N?] to vibrate in one direction [V] normal to the physical plane of the electrodes [Ec, E1-E4] using any suitable mounting structure such as parallel crossed filaments [34] or inwardly angled support arms [64] that provide predetermined degrees of lateral [S?] and longitudinal [S] stiffness. The circuit [14] may optionally constitute totally shared [FIG. 7], partially shared [FIG. 8], or totally isolated [FIG. 9] driving and sensing functions, the corresponding element [12] being configured with dual-pair, single-pair, or single-triple outer electrodes [E1-E4], respectively.