Abstract: A multilayer ceramic electronic component includes: a ceramic body including a capacitance forming part in which first and second dielectric layers are alternately disposed; and external electrodes disposed on both end surfaces of the ceramic body. The capacitance forming part includes first and second internal electrodes, first floating electrodes, and second floating electrodes. The ceramic body further includes a protective part having third dielectric layers on which first and second dummy electrodes exposed to the end surfaces of the ceramic body are disposed and a third dummy electrode is disposed between the first and second dummy electrodes.

Abstract: A multilayer ceramic structure, which is to be divided into a large number of piezoelectric actuators, includes a rectangular-parallelepiped-shaped multilayer ceramic body. An upper surface opposing electrode is formed on an upper surface, a lower surface opposing electrode is formed on a lower surface and inner opposing electrodes are formed inside the multilayer ceramic body. A silt is provided in the upper surface opposing electrode. Opposing portions are provided where the upper surface opposing electrode, the inner opposing electrodes and the lower surface opposing electrode are superposed with each other when viewed in plan. The slit is provided in the upper surface opposing electrode in a portion of a region between the opposing portion and the first side surface and so as to extend in a first direction linking a first end surface and a second end surface.

Abstract: A multi-layer piezoelectric element includes: a stacked body in which piezoelectric layers and internal electrode layers are laminated; a conductor layer disposed on a side face of the stacked body; a conductive joining material layer disposed on a surface of the conductor layer; and an external electrode joined to the conductor layer via the conductive joining material layer, the conductive joining material layer comprising solder and a conductive adhesive, the solder constituting an end of the conductive joining material layer which end confronts an end of the external electrode to be connected to an external circuit. There is provided a multi-layer piezoelectric element which suppresses separation of an end on an input/output side of the external electrode and is driven stably for a long period of time, an injection device and a fuel injection system which are provided with the multi-layer piezoelectric element.

Abstract: Disclosed herein is a coil component that includes a base, a metal wire that is wound around the base and contains copper, and a terminal electrode that is provided on the base and contains nickel and tin. The terminal electrode includes a wire connection area to which an end portion of the metal wire is connected and which contains a CuNi alloy or a CuNiSn alloy, and a mounting area which is different from the wire connection area. The wire connection area includes a portion that contains a small amount of tin than the mounting area.

Abstract: A semiconductor package includes a substrate, a conductive layer, a first surface mount device (SMD) and a bonding wire. The substrate has a t top surface. The first conductive layer is formed on the top surface and has a first conductive element and a first pad separated from each other. The first SMD is mounted on the first pad, overlapping with but electrically isolated from the first conductive element. The first bonding wire electrically connects the first SMD with the first conductive layer.

Abstract: A monolithic, bulk piezoelectric actuator includes a bulk piezoelectric substrate having a starting top surface and an opposing starting bottom surface and a at least two electrodes operatively disposed on the bulk piezoelectric substrate consisting of at least two discrete electrodes disposed on either/both of the starting top surface and the starting bottom surface and at least one electrode disposed on the respective other starting bottom surface or starting top surface. A stage includes a base, at least two of the monolithic, bulk piezoelectric actuators disposed on the base, a movable platform disposed on the base, and a respective number of deformable connectors each having a first connection to a respective one of the piezoelectric actuators and a second connection to a respective portion of the movable platform. A method for monolithically making a monolithic, bulk piezoelectric actuator involves a direct write micropatterning technique.

Abstract: A diaphragm actuator has a first frame part and a second frame part, between which at least two diaphragm layers are disposed in a stacked manner and formed as electro-active polymer layers. Furthermore, a method for producing a diaphragm actuator is described.

Abstract: A piezo component with a contacting component for electrically contacting a piezo stack. The contacting component has an electrically conductive meandering structure for bringing the contacting component into electric contact with inner electrodes of the piezo stack and an electrically conductive contacting device for electrically contacting the contacting component from outside the piezo stack. The meandering structure and the contacting device are arranged at a distance from each other, and a connection element is provided in order to connect the contacting device and the meandering structure in an electrically conductive manner and simultaneously decouple forces between the contacting device and the meandering structure.

Abstract: A method for producing an electric contact-connection of a multilayer component is disclosed. In an embodiment, the method includes providing a main body of the multilayer component having internal electrode layers, applying an electrically conductive material and applying a photosensitive material on the electrically conductive material. The method further includes structuring the electrically conductive material via the photosensitive material such that the internal electrode layers alternatingly are covered and uncovered by the electrically conductive material and applying an insulating material after structuring the electrically conductive material such that the internal electrode layers are alternatingly covered by the electrically conductive material and by the insulating material.

Abstract: A multilayer electronic component includes outer electrodes each including an outer electrode main body electrically conducted to an internal electrode and entering portions that project from the outer electrode main body as a base end and enter into the electronic component element through an end surface of the electronic component element. The entering portions each include a slope relative to a principal surface in a flat region including a major portion of the internal electrode.

Abstract: A piezoelectric ceramic base body that has a polyhedral shape having shape anisotropy, such as a rectangular parallelepiped shape, and which has opposed faces on which external electrodes are formed. The opposed faces have first sides and second sides. Between the first side and the second side of one of the opposed faces, a width dimension of the surface in a direction orthogonal to the first side and the second side is larger than a length dimension of each of the first and the second sides. The crystal axis is {100} oriented in a direction parallel to the first and the second sides, and a degree of orientation by a Lotgering method is 0.4 or more.

Abstract: A composite piezoelectric ceramic includes a compact of crystal particles including at least one of potassium niobate (KNbO3) and sodium niobate (NaNbO3) and optionally further including lithium niobate (LiNbO3), and a layer containing barium titanate (BaTiO3) that is disposed on the surface of the compact while forming a heterojunction with the compact. A piezoelectric device includes the composite piezoelectric ceramic.

Abstract: A piezoelectric actuator that includes (a) a piezoelectric body made of piezoelectric ceramic, the piezoelectric body having two principal surfaces facing each other and having four side surfaces, (b) external electrodes on the principal surfaces, (c) recessed portions in the four side surfaces, and (d) a coating layer made of resin and provided on the four side surfaces. The coating layer covers the recessed portions in the four side surfaces.

Abstract: An acoustic wave filter includes: series resonators connected in series between input and output terminals; and lines connected in parallel to the series resonators, wherein at least one of the lines includes: a first resonator including a piezoelectric substance, and first lower and upper electrodes sandwiching the piezoelectric substance in a c-axis orientation direction of the piezoelectric substance; a second resonator that is connected in series to the first resonator, and includes another piezoelectric substance, and second lower and upper electrodes sandwiching the another piezoelectric substance so that one of the second lower and upper electrodes in the c-axis orientation direction have an electric potential equal to that of one of the first lower and upper electrodes in the c-axis orientation direction; and a capacitor connected in parallel to one of the first and second resonators and not connected in parallel to another one of the first and second resonators.

Abstract: One-axis and two-axis vibratory gyroscopes include a unitary resonator structure conceptually having four beams interconnected in a cross-hatch configuration. While each beam can be considered a unitary piece of material, each beam's attachment to two cross beams conceptually divides the resonant beam into a central section between the attachment points and two tail sections aft of the attachment points. The attachment points are preferably nodal points of the beam with respect to both a drive mode shape and a sense mode shape of the beam for the resonant mode in which the resonator is configured to operate. Thus, the location where two beams intersect is preferably a nodal point for both beams. The tail sections of each beam allow the resonant mode of the resonator to be carefully configured.

Abstract: Certain implementations of the disclosed technology may include systems and methods for high-frequency resonant gyroscopes. In an example implementation, a resonator gyroscope assembly is provided. The resonator gyroscope assembly can include a square resonator body suspended adjacent to a substrate, a ground electrode attached to a side of the resonator body, a piezoelectric layer attached to a side of the ground electrode, a drive electrode in electrical communication with the piezoelectric layer, and configured to stimulate one or more vibration modes of the square resonator body; and a sense electrode in electrical communication with the piezoelectric layer, and configured to receive an output from the square or disk resonator responsive to stimulation of the one or more vibration modes.

Abstract: A piezo-stack includes a plurality of lateral surfaces and a first passivation layer applied to a first lateral surface. The first passivation layer terminates flush with opposing lateral surfaces that adjoin the first lateral surface.

Abstract: The present invention discloses a folding vibration microgenerator and a method of manufacturing the same. The microgenerator comprises a foldable sandwiched substrate, wherein the foldable substrate comprising two flexible insulating substrates and an induction electrode located between the two flexible insulating substrates, in which the induction electrode is constructed by two complementary comb-shaped electrodes. The foldable substrate has upper and lower surfaces, on which the first friction structure units and the second friction structure units are respectively periodically distributed, and the first friction structure units corresponds to the odd-numbered comb teeth of the induction electrode and the second friction structure units corresponds to the even-numbered comb teeth of the induction electrode. The foldable substrate is folding at gaps between two adjacent comb teeth of the induction electrode as a serrate shape, thereby forming a folding vibration microgenerator.

Abstract: There is provided a liquid discharging apparatus including: a substrate formed with a first pressure chamber and two second pressure chambers; a vibration film; a first piezoelectric element; two second piezoelectric elements; a first wire connected to the first piezoelectric element; two second wires connected to the two second piezoelectric elements, respectively; and three contact sections to which the first wire and the two second wires are connected, respectively. The first wire passes between the two second piezoelectric elements and extends toward one of the three contact sections corresponding thereto; and length in the first direction of second active portions in second piezoelectric portions of the two second piezoelectric elements, is shorter than that of a first active portion in a first piezoelectric portion of the first piezoelectric element; and length in the second direction of the second active portion is longer than that of the first active portion.

Abstract: A resonator element includes a resonator blank having a base portion, a vibrating arm, a linking portion, and a connecting portion connects the base portion and the linking portion to each other, in which, when a thickness of the resonator blank is set to T, a width of the base portion is set to W1, and a width of the connecting portion is set to W2, a relationship of 50 ?m?T?210 ?m is satisfied, and a relationship of 0.067?W2/W1?0.335 is satisfied, and in which, when a width of the arm section of the vibrating arm is set to W3, and a width of the hammer head is set to W4, a relationship of W4?2.8×W3 is satisfied.

Abstract: A transit time flow sensor is configured as an insertable probe carrying a pair of transducers spaced apart along an acoustic path. The transducers are attached to respective tabs extending outwardly from the ends of a tubular member and skewed with respect to an axis of the tube so that acoustic signals from one of the transducers are reflected from an interior portion of the tube and subsequently detected by the other transducer.

Abstract: A sound generator includes a housing (20), a piezoelectric vibrator (60) including a piezoelectric element (61), at least a portion of the piezoelectric vibrator (60) protruding from the housing (20), and an anchor (10) applying a load to the piezoelectric vibrator (60). A portion or all of the piezoelectric vibrator (60) withdraws into the housing (20) under a force of a predetermined load or greater. While the load from the anchor (10) is being applied to the piezoelectric vibrator (60), the piezoelectric vibrator (60) deforms in response to a sound signal, and deformation of the piezoelectric vibrator (60) vibrates a contact surface contacted by the piezoelectric vibrator (60), causing sound to be emitted from the contact surface.

Abstract: A nested multi-stage polyphase filter can comprise: a first filter stage and a second filter stage. The first filter stage can be connected to the second filter stage via first through fourth intermediate connections. The first filter stage and the second filter stage can be laid out in a nested-ring layout. The first through fourth intermediate connections can be laid out so as to not cross over each other.

Abstract: An electroactive elastomer converter is described comprising at least one electroactive elastomer layer (3) with a top side and underside and an electrically conductive electrode body (1?) that is two-dimensionally connected to the top side at least in regions. An electrically conductive electrode body (1?) is dimensionally connected in at least two regions to the underside. At least one electrode body (1?) in each case has an electrode surface facing the elastomer layer (3). At least one opening (2) is present to which an a two-dimensional region in which there is no two-dimensional bond between the elastomer layer (3) and the electrode body (1?). A compressible medium is provided in the area of the opening.

Abstract: An ultrasonic flowmeter for measuring the flow of a flowing medium (1) having a measuring tube (2) and an ultrasonic transducer (3), wherein the measuring tube (2) has a transducer pocket (4) in which the ultrasonic transducer (3) is provided in contact with the flowing medium (1) in the transducer pocket (4). The ultrasonic transducer (3) has a transducer housing (5) and a transducer element (6) and wherein the transducer housing (5) has an ultrasound window (8). The ultrasonic flowmeter solves problems resulting from vortices generated by the transducer pocket via the provision of a cylindrical shielding on the transducer housing (5).

Abstract: Piezoelectric devices are provided. A device can include a top electrode, a first piezoelectric layer having an upper surface disposed on a lower surface of the top electrode, a first center electrode having an upper surface disposed on a lower surface of the first piezoelectric layer, an insulating layer having an upper surface disposed on a lower surface of the first center electrode, a second center electrode having an upper surface disposed on a lower surface of the insulating layer, a second piezoelectric layer having an upper surface disposed on a lower surface of the second center electrode, and a bottom electrode having an upper surface disposed on a lower surface of the second piezoelectric layer. The insulating layer can be positioned substantially at a vertical center of the piezoelectric device. The first center electrode can be electrically connected to the second center electrode.

Abstract: In one aspect of the invention, an acoustic device has a first coupled resonator filter (CRF) and a second CRF electrically coupled to one another in series. Each CRF has an input port, an output port, a bottom film bulk acoustic resonator (FBAR), an acoustic decoupler formed on the bottom FBAR, and a top FBAR formed on the acoustic decoupler. Each FBAR has a bottom electrode, a piezoelectric layer formed on the bottom electrode, and a top electrode formed on the piezoelectric layer. The decoupling layer capacitance arising between the two electrodes enclosing the acoustic decoupler in a CRF is configured to achieve targeted filter response. A compensating capacitance is introduced to improve the amplitude and phase imbalance performance of an unbalanced to balanced CRF by eliminating the existence of asymmetric port-to-ground or feedback capacitance at the balanced output port produced by the decoupling layer capacitance.

Abstract: A piezoelectric/electrostrictive element includes a substrate, an adhesive layer, a first conductive layer, an anchor portion and a second conductive layer. The substrate contains a ceramic as a main component. The substrate has a main surface. The adhesive layer is formed on the main surface of the substrate. The adhesive layer contains a metal oxide as a main component. The first conductive layer is formed on the adhesive layer. The anchor portion is formed on the adhesive layer. The anchor portion is embedded in the conductive layer. The anchor portion contains glass as a main component. The second conductive layer is disposed opposite to the first conductive layer with the substrate located in-between.

Abstract: A thin film piezoelectric element of the present invention includes a substrate and a piezoelectric thin film stack formed on the substrate. The piezoelectric thin film stack includes a top electrode layer, a bottom electrode layer and a piezoelectric layer sandwiched between the top electrode layer and the bottom electrode layer, wherein the piezoelectric layer includes a first piezoelectric layer and a second piezoelectric layer whose compositions have different phase structures. The present invention can obtain high piezoelectric constants, enhanced coercive field strength and good thermal stability, thereby enabling larger applied field strength without depolarization and achieving a large stroke for its applied device.

Abstract: A band pass filter circuit includes an input terminal, an output terminal, a signal line, and a plurality of main LC parallel resonators. First ends of the plurality of main LC parallel resonators are connected to the signal line, and second ends of the plurality of main LC parallel resonators are connected to one another. At least one attenuation-pole-defining sub LC parallel resonator including an inductor and a capacitor is inserted between a ground and the connected second ends of the plurality of main LC parallel resonators.

Abstract: There is provided a polymeric actuator including: a pair of facing portions located so as to face each other; and a folded portion through which one end portions of the pair of facing portions are coupled to each other, wherein the pair of facing portions and the folded portion are composed of an inner electrode layer, an electrolyte layer, and an outer electrode layer which are laminated in order from an inside. Therefore, the displacements are generated in the pair of facing portions, respectively, to be added to each other, and the displacement is generated in the folded portion as well due to the bending. As a result, the large displacement is generated as a whole. Thus, it is possible to increase the displacement amount after the simplification of the structure is realized.

Abstract: A vibrational wave driving apparatus in the present invention includes an elastic member attached to an electromechanical energy transducing member, a pair of electrodes provided on the electromechanical energy transducing member, a wiring unit connecting the pair of electrodes and a voltage applying unit, and a driven body configured to be pressure contacted with the elastic member. The driven body is relatively driven by mechanical vibration of the elastic member generated when an alternating voltage is applied to the pair of electrodes. The wiring unit includes a pair of wiring portions connected to the pair of electrodes, respectively. The pair of wiring portions includes a pair of film-like bases and a pair of conductors formed on surfaces of the pair of film-like bases. The pair of wiring portions is arranged such that the pair of conductors overlaps each other through insulating layers.

Abstract: There are provided a multi-layer piezoelectric element which suppresses damage or separation of an external electrode and improves durability, as well as an injection device and a fuel injection system using the multi-layer piezoelectric element. A multi-layer piezoelectric element includes a stacked body including stacked piezoelectric bodies and internal electrodes, a conductor layer disposed coveringly on a side surface of the stacked body so as to be elongated in a stacking direction of the stacked body to electrically connect with ends of the internal electrodes, which are extended to the side surface of the stacked body, and an external electrode disposed on the conductor layer, one end in the stacking direction of the external electrode being a feeding end, a bonded region of the external electrode which is bonded to the conductor layer in an area near the feeding end being covered with a resin.

Abstract: Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include a bulk acoustic wave resonance unit and an anti-resonant frequency modifying unit to modify an anti-resonant frequency generated from the bulk acoustic wave resonance unit.

Abstract: A ZnSnO3/ZnO nanowire, a method of forming a ZnSnO3/ZnO nanowire, a nanogenerator including a ZnSnO3/ZnO nanowire, a method of forming a ZnSnO3 nanowire, and a nanogenerator including a ZnSnO3 nanowire are provided. The ZnSnO3/ZnO nanowire includes a core and a shell that surrounds the core, wherein the core includes ZnSnO3 and the shell includes ZnO.

Abstract: Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include a bulk acoustic wave resonance unit and an anti-resonant frequency modifying unit to modify an anti-resonant frequency generated from the bulk acoustic wave resonance unit.

Abstract: An encapsulation structure for an optoelectronic component, may include: a thin-film encapsulation for protecting the optoelectronic component against chemical impurities; an adhesive layer formed on the thin-film encapsulation; and a cover layer formed on the adhesive layer and serving for protecting the thin-film encapsulation and/or the optoelectronic component against mechanical damage, wherein the adhesive layer is formed such that particle impurities situated at the surface of the thin-film encapsulation are at least partly enclosed by the adhesive layer.

Abstract: Hardware and software co-synthesis performance estimation includes, for a design specified in a high level programming language and having a processor executable partition and a partition selected for hardware acceleration, estimating hardware latency for a hardware accelerator implementation of the selected partition, scheduling the selected partition using the hardware latency generating hardware partition latency information, and compiling an instrumented version of the design using a processor. The instrumented and compiled version of the design is executed generating software latency information. A design performance for the design is determined through combining the hardware partition latency information with the software latency information.

Abstract: A bulk acoustic wave (BAW) resonator structure includes a first electrode disposed over a substrate, a piezoelectric layer disposed over the first electrode and a second electrode disposed over the first piezoelectric layer. The piezoelectric layer is formed of a piezoelectric material doped with multiple rare earth elements for improving piezoelectric properties of the piezoelectric layer.

Abstract: An actuator body, including a plurality of piezoceramic layers, separated from each other by a positive or negative internal electrode in alternation, positive and negative collecting electrodes, which are arranged on two outer faces of the actuator body and are conductively connected to the associated positive or negative internal electrodes, wherein the actuator body of the multilayer actuator has at least one positive and one negative contacting electrode, by which the multilayer actuator is electrically contacted and is conductively connected to the associated positive or negative collecting electrode, and the contacting electrodes are arranged in areas of the actuator body that are provided with a base metallization. The areas of the actuator body with a base metallization are spaced apart from each other and distances from the internal electrodes, wherein the distances are not less than the thickness of the piezoceramic layers in the active area of the multilayer actuator.

Abstract: A curved high intensity focused ultrasound (HIFU) transducer comprising a curved piezoelectric array having opposite concave front and convex back surfaces, and a plurality of acoustic transmission areas, a plurality of electrodes located on the convex back surface of the curved piezoelectric array for applying electrical transmit signals to the acoustic transmission areas, and a printed circuit board spaced apart from and in opposition to the back surface of the curved piezoelectric array which couples electrical signals to the acoustic transmission areas, the printed circuit board comprising a plurality of metal contacts which are compliant in the presence of thermal expansion and contraction and which span the space between the printed circuit board and the curved piezoelectric array and are electrically coupled to electrodes of the acoustic transmission areas of the curved piezoelectric array.

Abstract: The piezoelectric element includes first and second sheets 30 and 40 that are stacked and burned. In this stacked state, a second electrode 60 is located on a first long side 30a having a first non-electrode region 51. Thus, before a conductive film 100A is formed, the end face of a first electrode 50 and the end face of the second electrode 60 are exposed on lateral surfaces 20b and 20d on the same side and can be observed thereon. Slits 91 are formed at certain intervals in a lengthwise direction X. The conductive film 100A is formed so as to apply a voltage between the second electrode 60 exposed on a front surface 20a and ends 20ab and 20ad, thereby driving the piezoelectric element only with connection from the front surface 20a.

Abstract: A piezoelectric actuator of a multilayer design includes outer electrodes that are fastened by means of a bonding layer applied by thermal spraying. For example, the outer electrodes are formed as a woven wire fabric. Furthermore, a method for fastening an outer electrode in a piezoelectric actuator is specified.

Abstract: An electronic device includes: a first substrate, a first function part in its first surface, an adhesive layer on the first surface so as to surround the first function part, a second substrate bonded to the first substrate by the adhesive layer to form a gap between the first and second substrates, a first via interconnection piercing the first substrate to connect the first surface and an opposite second surface, a second via interconnection piercing the second substrate to connect a third surface of the second substrate opposite to the first substrate and a fourth surface opposite to the third surface, a first terminal provided on the second surface and connected to the first via interconnection, a second terminal provided on the fourth surface and connected to the second via interconnection. The first function part is connected to at least one of the first and second via interconnections.

Abstract: The vibrating reed includes a detection unit that vibrates along the thickness direction of a piezoelectric body when detecting. The detection unit includes a first main surface and a second main surface that face each other in the thickness direction, outside surfaces, a groove that has a groove bottom at a position between the first main surface and the second main surface in a depth direction from an opening provided in the first main surface, an outside surface electrode that is formed on the outside surfaces, and an inside surface electrode that is formed on an inside surface which is opposite the outside surfaces. At least one of the outside surfaces has a non-electrode-formed area where the outside surface electrode is not provided in an area from the end surface which positioned on the second main surface side in the thickness direction to the second main surface.

Abstract: A resonator includes a piezoelectric core, a set of electrodes, and at least one ground terminal. The electrodes are arranged on the piezoelectric core and also includes at least one input electrode having a first width and at least one output electrode having a second width that differs from the first width. The ground terminal is also on the piezoelectric core.

Abstract: This disclosure provides systems, apparatus, and devices and methods of fabrication for electromechanical devices. In one implementation, an apparatus includes a metal proof mass and a piezoelectric component as part of a MEMS device. Such apparatus can be particularly useful for MEMS gyroscope devices. For instance, the metal proof mass, which may have a density several times larger than that of silicon, is capable of reducing the quadrature and bias error in a MEMS gyroscope device, and capable of increasing the sensitivity of the MEMS gyroscope device.

Abstract: A method for manufacturing piezoelectric resonator devices according to the present invention includes the following steps: a wafer forming step of preparing a thick-walled wafer 30 integrally formed with multiple lower lid members 3; a bonding step of bonding crystal resonator plates 2 to one main surface 31 of the wafer 30 via a bonding material 5 and bonding upper lid members 4 on the crystal resonator plates via a bonding material 5; a thinning step of thinning the wafer 30 from the other main surface 37 of the wafer; an external terminal forming step of forming external terminals on the other main surface of the thinned wafer; and a dividing step of cutting the wafer between each adjacent pair of crystal resonators so that multiple crystal resonators are obtained.

Abstract: A resonating element includes a resonator element that includes a vibrating portion and an excitation electrode provided on both main surfaces of the vibrating portion, an intermediate substrate in which the resonator element is mounted so as to be spaced from the excitation electrode, and a spiral electrode pattern that is provided on at least one main surface of the intermediate substrate, in which the electrode pattern is electrically connected to the excitation electrode.

Abstract: An inertial sensor includes an oscillator, a drive unit for oscillating the oscillator, a sensor for sensing the amount of inertia applied to the oscillator, and a failure diagnosis unit disposed between the oscillator and the drive unit. The drive unit includes a reference potential supply unit for supplying a reference potential to the oscillator, and a drive signal supply unit for supplying a drive signal to the oscillator based on a monitor signal received from the oscillator. The failure diagnosis unit includes a diagnosis unit for diagnosing a failure based on the value of a current supplied by the reference potential supply unit to the oscillator. The inertial sensor having this structure can detect a failure in the drive unit or the oscillator.